JPS63137306A - Fine positioning device - Google Patents

Fine positioning device

Info

Publication number
JPS63137306A
JPS63137306A JP61283061A JP28306186A JPS63137306A JP S63137306 A JPS63137306 A JP S63137306A JP 61283061 A JP61283061 A JP 61283061A JP 28306186 A JP28306186 A JP 28306186A JP S63137306 A JPS63137306 A JP S63137306A
Authority
JP
Japan
Prior art keywords
displacement
block
rigid body
parallel
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61283061A
Other languages
Japanese (ja)
Other versions
JPH071448B2 (en
Inventor
Kiyoshi Nagasawa
潔 長澤
Kozo Ono
耕三 小野
Kojiro Ogata
緒方　浩二郎
Takeshi Murayama
健 村山
Yoshihiro Hoshino
星野　▲吉▼弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP61283061A priority Critical patent/JPH071448B2/en
Priority to DE3788773T priority patent/DE3788773T2/en
Priority to EP87201701A priority patent/EP0264147B1/en
Publication of JPS63137306A publication Critical patent/JPS63137306A/en
Priority to US07/244,101 priority patent/US4991309A/en
Priority to US07/244,169 priority patent/US4920660A/en
Priority to US07/244,168 priority patent/US4888878A/en
Priority to US07/244,102 priority patent/US5005298A/en
Publication of JPH071448B2 publication Critical patent/JPH071448B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • B23Q15/24—Control or regulation of position of tool or workpiece of linear position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41133—Compensation non linear transfer function
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To obtain accurate rotational displacement with a simple and small constitution by forming parallel flexible beam displacing mechanisms to be respectively displaced in parallel with x, y and z axes and forming radial flexible beam displacing mechanisms to be rotationally displaced around these three axes. CONSTITUTION:The titled device is constituted of a block B1 consisting of a central rigid part 15, projecting parts 16a-17b, fixing parts 18a, 18b, coupling parts 19a, 19b, and the parallel flexible beam displacing mechanisms 16F, a block B2 consisting of a central rigid part 21, projecting parts 22a, 22b, coupling parts 23a, 23b, and the parallel flexible beam displacing mechanisms 22F, a block B3 consisting of a central rigid part 28, the radial flexible beam displacing mechanisms 25M, the parallel flexible beam displacing mechanisms 29M, etc., and a fine movement table 30. The block B1 executes parallel displacement in the x and y axis directions, the block B2 executes parallel displacement in the z axis direction and the block B3 executes rotational displacement around the x, y and z axes. Consequently, required displacement in all axial direction can be generated to attain positioning.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体製造装置、電子顕微鏡等のサブμｍオ
ーダの調節を必要とする装置に使用される微細位置決め
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine positioning device used in devices that require adjustment on the sub-μm order, such as semiconductor manufacturing equipment and electron microscopes.

〔従来の技術〕[Conventional technology]

近年、各種技術分野においては、サブμｍのオーダーの
微細な変位調節が可能である装置が要望されている。そ
の典型的な例がＬＳＩ（大規模集積回路）、超ＬＳＩの
製造工程において使用されるマスクアライナ、電子線描
画装置等の半導体製造装置である。これらの装置におい
ては、サブμｍオーダーの微細な位置決めが必要であり
、位置決めの精度が向上するにしたがってその集積度も
増大し、高性能の製品を製造することができる。In recent years, in various technical fields, there has been a demand for devices capable of fine displacement adjustment on the order of sub-μm. Typical examples are semiconductor manufacturing equipment such as mask aligners and electron beam lithography equipment used in the manufacturing process of LSIs (Large Scale Integrated Circuits) and VLSIs. These devices require fine positioning on the order of sub-μm, and as the positioning accuracy improves, the degree of integration also increases, making it possible to manufacture high-performance products.

このような微細な位置決めは上記半導体装置に限らず、
電子顕微鏡をはじめとする各種の高倍率光学装置等にお
いても必要であり、その精度向上により、バイオテクノ
ロジ、宇宙開発等の先端技術においてもそれらの発展に
大きく寄与するものである。Such fine positioning is not limited to the above semiconductor devices,
It is also necessary for various high-magnification optical devices such as electron microscopes, and its improved accuracy will greatly contribute to the development of advanced technologies such as biotechnology and space exploration.

従来、このような微細位置決め装置は、例えば「機械設
計１誌、第２７巻第１号（１９８３年１月号）の第３２
頁乃至第３６頁に示されるような種々の型のものが提案
されている。これらのうち、特に面倒な変位縮小機構が
不要であり、かつ、構成が筒車である点で、平行ばねと
微動アクチュエータを用いた型の微細位置決め装置が優
れているとイえられるので、以下、これを第４図に基づ
い説明する。Conventionally, such fine positioning devices have been described, for example, in "Mechanical Design 1 Magazine, Vol. 27, No. 1 (January 1983 issue), No. 32.
Various types have been proposed as shown on pages 36 to 36. Among these, a type of fine positioning device using a parallel spring and a fine movement actuator is superior in that it does not require a particularly troublesome displacement reduction mechanism and has an hour wheel configuration. , this will be explained based on FIG.

第４図は従来の微細位置決め装置の側面図である。図で
、１は支持台、２ａ、２ｂは支持台１上に互いに平行に
固定された板状の平行ばね、３は平行ばね２ａ、２ｂ上
に固定された剛性の高い微動テーブルである。４は支持
台１と微動テーブル３との間に装架された微動アクチュ
エータである。FIG. 4 is a side view of a conventional fine positioning device. In the figure, 1 is a support base, 2a and 2b are plate-shaped parallel springs fixed parallel to each other on the support base 1, and 3 is a highly rigid fine movement table fixed on the parallel springs 2a and 2b. Reference numeral 4 denotes a fine movement actuator mounted between the support base 1 and the fine movement table 3.

この微動アクチュエータ４には、圧電素子、電磁ソレノ
イド等が用いられ、これを励起することにより、微動テ
ーブル３に図中に示す座標軸のＸ軸方向の力が加えられ
る。This fine movement actuator 4 uses a piezoelectric element, an electromagnetic solenoid, etc., and by exciting it, a force is applied to the fine movement table 3 in the X-axis direction of the coordinate axis shown in the figure.

ここで、平行ばね２ａ、２ｂはその構造上、Ｘ軸方向の
剛性は低く、これに対してｚ軸方向、ｙ軸方向（紙面に
垂直な方向）の剛性が高いので、微動アクチュエータが
励起されると、微動テーブル３はほぼＸ軸方向にのみ変
位し、他方向の変位はほとんど発生しない。Here, due to their structure, the parallel springs 2a and 2b have low rigidity in the X-axis direction, but have high rigidity in the z-axis and y-axis directions (directions perpendicular to the paper), so the fine movement actuator is excited. Then, the fine movement table 3 is displaced almost only in the X-axis direction, and almost no displacement occurs in other directions.

第５図は前述の参考文献に開示された例から容易に考え
られる従来の他の微細位置決め装置の斜視図である。図
で、６は支持台、７ａ、７ｂは支持台６上に互いに固定
された板状の平行ばね、８は平行ばね７ａ、７ｂに固定
された剛性の高い中間テーブル、９ａ、９ｂは平行ばね
７ａ、７ｂと直交する方向において互いに平行に中間テ
ーブル８に固定された板状の平行ばね、１０は平行ばね
９ａ、９ｂ上に固定された剛性の高い微動テーブルであ
る。座標軸を図中に示すように定めると、平行ばね７ａ
、７ｂはＸ軸方向に沿って配置され、平行ばね９ａ、９
ｂはｙ軸方向に沿って配置されている。この構造は、基
本的には第４図に示す１軸（Ｘ軸方向の変位を生じる）
の場合の構造を２段に積層した構造である。矢印Ｆ、は
微動テーブルｌＯに加えられるＸ軸方向の力、矢印Ｆ、
は中間テーブル８に加えられるｙ軸方向の力を示し、力
Ｆ、、Ｆ、を加えることができる図示されていない微動
アクチュエータが支持台６と微動テーブル１０、支持台
６と中間テーブル８との間にそれぞれ設けられる。FIG. 5 is a perspective view of another conventional fine positioning device that can be easily considered from the example disclosed in the above-mentioned reference document. In the figure, 6 is a support base, 7a and 7b are plate-shaped parallel springs fixed to each other on the support base 6, 8 is a highly rigid intermediate table fixed to the parallel springs 7a and 7b, and 9a and 9b are parallel springs. A plate-shaped parallel spring is fixed to the intermediate table 8 in parallel with each other in a direction perpendicular to 7a and 7b, and 10 is a highly rigid fine movement table fixed on the parallel springs 9a and 9b. If the coordinate axes are set as shown in the figure, the parallel spring 7a
, 7b are arranged along the X-axis direction, and parallel springs 9a, 9
b is arranged along the y-axis direction. This structure basically consists of one axis (displacement in the X-axis direction) as shown in Figure 4.
This is a structure in which the structure in the case of 2 is stacked in two layers. Arrow F, is the force applied to the fine movement table lO in the X-axis direction, arrow F,
indicates the force in the y-axis direction applied to the intermediate table 8, and a fine movement actuator (not shown) capable of applying forces F, , F, acts between the support base 6 and the fine movement table 10, and between the support base 6 and the intermediate table 8. are provided in between.

微動テーブルｌＯに力Ｆ８が加えられると、平行ばね９
ａ、９ｂが変形し、一方、平行ばね７ａ。When force F8 is applied to fine movement table lO, parallel spring 9
a, 9b are deformed, while parallel spring 7a.

７ｂはＸ軸方向の力Ｆ、に対しては高い剛性を有するの
で、微動テーブル１０はほぼＸ軸方向にのみ変位する。7b has high rigidity against the force F in the X-axis direction, so the fine movement table 10 is displaced almost only in the X-axis direction.

また、中間テーブル８に力Ｆ、が加えられると、平行ば
ね７ａ、７ｂが変形し、微動テーブル１０は平行ばね９
ａ、９ｂを介してほぼｙ軸方向にのみ変位する。さらに
、両方の力Ｆ、、。Further, when a force F is applied to the intermediate table 8, the parallel springs 7a and 7b are deformed, and the fine movement table 10 is moved by the parallel spring 9.
a, 9b, and is displaced approximately only in the y-axis direction. Furthermore, both forces F, .

ＦＶが同時に加えられると、各平行ばね７　ａ　＋７ｂ
、９ａ、９ｂは同時に変形し、微動テーブル１０はこれ
ら応じて２次元的に変位する。When FV is applied simultaneously, each parallel spring 7a +7b
, 9a, 9b are deformed at the same time, and the fine movement table 10 is two-dimensionally displaced accordingly.

このように、第５図に示す装置は、第４図に示す装置が
１軸方向のみの位置決め装置であるのに対して２軸方向
の位置決めを行うことができる。In this manner, the device shown in FIG. 5 can perform positioning in two axial directions, whereas the device shown in FIG. 4 is a positioning device in only one axial direction.

以上述べた第４図および第５図に示す装置は、微動テー
ブル１０を定められた軸方向に直線的に変位させる装置
である。これに対して、微動テーブルをある軸のまわり
に微小回転変位させる微細位置決め装置が日本特許出願
公告公報、昭５７−５０４３３号に示されている。この
微細位置決め装置を第６図により説明する。The device shown in FIGS. 4 and 5 described above is a device that linearly displaces the fine movement table 10 in a predetermined axial direction. On the other hand, a fine positioning device for slightly rotationally displacing a fine movement table around a certain axis is disclosed in Japanese Patent Application Publication No. 57-50433. This fine positioning device will be explained with reference to FIG.

第６図は微小回転変位を行う従来の微細位置決め装置の
一部破断斜視図である。図で、１１は円柱状の中央固定
部、ｌｌａ、ｌｌｂ、ｌｌｃは中央固定部１１の周面に
その長手方向に等間隔に形成された縦溝である。１２は
中央固定部１１を中心として可回動に設けられたリング
状のステージ、１２ａ＋　Ｎ１２ａｉ、１２ｂｔ　〜１
２ｔ）ｓ、１２ｃ＋　〜１２ｃ３はそれぞれ縦溝１１ａ
、１１ｂ。FIG. 6 is a partially cutaway perspective view of a conventional fine positioning device that performs minute rotational displacement. In the figure, reference numeral 11 denotes a cylindrical central fixing part, and lla, llb, and llc are longitudinal grooves formed on the circumferential surface of the central fixing part 11 at equal intervals in its longitudinal direction. 12 is a ring-shaped stage rotatably provided around the central fixed part 11, 12a+N12ai, 12bt to 1
2t) s, 12c+ to 12c3 are each vertical groove 11a
, 11b.

１１ｃに対向してステージ１２に固定されたＵ字状金具
である。１３は各縦溝１１ａ、１１ｂ。It is a U-shaped metal fitting fixed to the stage 12 opposite to the stage 11c. 13 is each vertical groove 11a, 11b.

１１ｃと各Ｕ字状金具１２　ａｔ　〜１２　Ｃ３との間
に装架されたバイモルフ形圧電素子、１３Ａはバイモル
フ形圧電素子１３のＵ字状金具と係合する　　′部分に
固定された突起である。中央固定部１１、ステージ１２
）各Ｕ字状金具１２　ａｔ　〜ｌ　２　Ｃａはいずれも
剛体である。ここで、上記バイモルフ形圧電素子１３を
第７図面の簡単な説明する。A bimorph piezoelectric element is mounted between 11c and each of the U-shaped metal fittings 12 at to 12 C3, and 13A is a protrusion fixed to the ' portion of the bimorph piezoelectric element 13 that engages with the U-shaped metal fitting. . Central fixed part 11, stage 12
) Each of the U-shaped fittings 12 at to l 2 Ca is a rigid body. Here, the bimorph type piezoelectric element 13 will be briefly explained in the seventh drawing.

第７図はバイモルフ形圧電素子の斜視図である。FIG. 7 is a perspective view of a bimorph piezoelectric element.

図で、１３ａ、１３ｂは圧電素子、１３ｃは圧電素子１
３ａ、１３ｂの中間に設けられた共通電極である。圧電
素子１３ａ、１３ｂは共通電極１３Ｃを挟着した状態で
互いに密着されている。１３ｄ、１３ｅはそれぞれ圧電
素子１３ａ、１３ｂに固着された表面電極である。この
状態において、表面電極１３ｄと共通電極１３ｃとの間
に圧電素子１３ａを縮ませる極性の電圧を印加し、同時
に、表面電極１３ｅと共通電極１３ｃとの間に圧電素子
１３ｄを伸ばす極性の電圧を印加すると、各圧電素子１
３ａ、１３ｂが矢印の方向に伸縮することにより、バイ
モルフ形圧電素子１３全体は図のように変形する。この
ようなバイモルフ形圧電素子１３により、圧電素子単体
に比べて大きな変位量を得ることができる。In the figure, 13a and 13b are piezoelectric elements, and 13c is piezoelectric element 1.
This is a common electrode provided between 3a and 13b. The piezoelectric elements 13a and 13b are closely attached to each other with a common electrode 13C sandwiched therebetween. 13d and 13e are surface electrodes fixed to piezoelectric elements 13a and 13b, respectively. In this state, a voltage with a polarity that shrinks the piezoelectric element 13a is applied between the surface electrode 13d and the common electrode 13c, and at the same time, a voltage with a polarity that stretches the piezoelectric element 13d is applied between the surface electrode 13e and the common electrode 13c. When applied, each piezoelectric element 1
By expanding and contracting 3a and 13b in the direction of the arrow, the entire bimorph piezoelectric element 13 is deformed as shown in the figure. With such a bimorph type piezoelectric element 13, a larger amount of displacement can be obtained than with a single piezoelectric element.

このようなバイモルフ形圧電素子１３は、第６図に示す
装置において、一端が縦溝１１ａ、１１ｂ、ｌｌｃに固
定され、他端は自由端となって各対応するＵ字状金具に
突起１３Ａを介して接触している。今、各バイモルフ形
圧電素子１３に適宜の電圧を印加し、第７図に示す変形
を生じさせると、ステージ１２はその変形に応じて中央
固定部１１を中心として回動変位する。そこで、ステー
ジ１２上に微動テーブルを載置固定しておけば、微動テ
ーブルの微小回転変位を得ることができる。In the device shown in FIG. 6, such a bimorph piezoelectric element 13 has one end fixed to the vertical grooves 11a, 11b, and llc, and the other end is a free end and has a projection 13A on each corresponding U-shaped metal fitting. I am in contact with you through. Now, when an appropriate voltage is applied to each bimorph type piezoelectric element 13 to cause the deformation shown in FIG. 7, the stage 12 will be rotated about the central fixed part 11 in accordance with the deformation. Therefore, by placing and fixing the fine movement table on the stage 12, it is possible to obtain minute rotational displacement of the fine movement table.

上記従来の装置は、Ｕ字状金具とバイモルフ形圧電素子
１３とにより両者を保合状態に保持し、これにより、バ
イモルフ形圧電素子１３の自然変形のままでの装架を許
し、かつ、バイモルフ形圧電素子１３をステージ１２に
固定した場合に生じる変位の拘束（干渉）を防止してい
る。The conventional device described above uses the U-shaped metal fitting and the bimorph type piezoelectric element 13 to hold the two in a fixed state, thereby allowing the bimorph type piezoelectric element 13 to be mounted while being naturally deformed, and This prevents displacement restriction (interference) that would occur when the shaped piezoelectric element 13 is fixed to the stage 12.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところで、第４図および第５図に示す微細位置決め装置
は、１次元および２次元の位置決めができるのみであり
、ｙ軸方向の変位や、Ｘ軸、ｙ軸。By the way, the fine positioning devices shown in FIGS. 4 and 5 are only capable of one-dimensional and two-dimensional positioning, and are capable of displacement in the y-axis direction, X-axis, and y-axis.

２軸まわりの回転変位を与えることはできず、又、第６
図に示す微細位置決め装置については、Ｘ軸。It is not possible to give rotational displacement around two axes, and the sixth
For the fine positioning device shown in the figure, the X axis.

ｙ軸、Ｚ軸方向の変位と他の２軸まわりの回転変位を与
えることはできない。そして、これら従来の微細位置決
め装置からは、第５図および第６図に示す装置を組合わ
せてＸ軸、ｙ軸方向の変位と２軸まわりの回転変位を与
える３軸の微細位置決め装置を想定し得るのみであり、
これらから４軸以上の微細位置決め装置を構成するのは
極めて困難である。Displacement in the y-axis and Z-axis directions and rotational displacement around the other two axes cannot be given. From these conventional fine positioning devices, we assume a three-axis fine positioning device that combines the devices shown in Figures 5 and 6 to provide displacement in the X-axis and y-axis directions and rotational displacement around two axes. It is only possible,
It is extremely difficult to construct a fine positioning device with four or more axes from these.

本発明は、このような事情に鑑みてなされたものであり
、その目的は、上記従来技術の問題点を解決し、簡単な
構造でＸ軸、ｙ軸、ｚ軸方向の変位、およびＸ軸、ｙ軸
、２軸まわりの回転変位を与えることができる微細位置
決め装置を提供するにある。The present invention has been made in view of the above circumstances, and its purpose is to solve the problems of the prior art described above, and to provide displacement in the X-axis, y-axis, and z-axis directions, and displacement in the The object of the present invention is to provide a fine positioning device that can provide rotational displacement around two axes, the y-axis, and the y-axis.

〔問題点を解決するための手段〕[Means for solving problems]

上記の目的を達成するため、本発明は、第１のブロック
に中心剛体部から、直交する３つの軸のうちの第１の軸
方向に沿って張出した１対の第１の張出し部と、第２の
軸方向に沿って張出した他の１対の第２の張出し部とを
備え、第１の張出し部の一方側の張り出し部および他方
側の張出し部のそれぞれに平行たわみ梁変位機構を設け
、両側の平行たわみ梁変位機構が互いに中心剛体部を中
心に対称に配置されており、かつ、平行たわみ梁変位機
構は第２の軸方向の並進変位を発生させ、又、第２の張
出し部の一方側の張出し部および他方例の張出し部のそ
れぞれに平行たわみ梁変位機構を中心剛体部を中心に互
いに対称となるように配置し、これらの平行たわみ梁変
位機構は第１の軸方向の並進変位を発生させるようにし
、さらに、第２のロックに、中心剛体部から第２の軸方
向に沿って張出した一対の張出し部を備え、各張出し部
に、中心剛体部を中心として対称に第３の軸方向の並進
変位を発生させる平行たわみ梁変位機構を配置し、さら
に、第３のブロックにリングを備え、このリングに第１
の軸まわりの回転変位を発生する放射たわみ梁変位機構
の組および第２の軸まわりの回転変位を発生する放射た
わみ梁変位機構の組を設けるとともに、中心剛体部から
張出した一対の張出し部を備え、各張出し部に、中心剛
体部を中心として対称に第３の軸の軸まわりの回転変位
を発生する放射たわみ梁変位機構を備え、第１のブロッ
クにおける第２の張出し部と第２のブロックにおける張
出し部とを連結し、さらに、第２のブロックの中心剛体
部と第３のブロックの中心剛体部とを連結したことを特
徴とする。In order to achieve the above object, the present invention includes a pair of first overhanging portions overhanging a first block from a central rigid body portion along a first axis direction of three orthogonal axes; and another pair of second overhangs extending along the second axial direction, and a parallel flexible beam displacement mechanism is provided on each of the overhangs on one side and the overhang on the other side of the first overhang. and the parallel flexible beam displacement mechanisms on both sides are arranged symmetrically with respect to the central rigid body part, and the parallel flexible beam displacement mechanisms generate a translational displacement in the second axial direction, and the parallel flexible beam displacement mechanisms generate a translational displacement in the second axial direction; Parallel flexible beam displacement mechanisms are arranged in each of the overhanging part on one side of the section and the overhanging part on the other side so as to be symmetrical with respect to the central rigid body part, and these parallel flexible beam displacement mechanisms are arranged in the first axial direction. The second lock is further provided with a pair of overhanging parts extending from the central rigid body part along the second axial direction, and each of the overhanging parts is provided with a pair of overhanging parts symmetrical about the central rigid body part. a parallel flexible beam displacement mechanism for generating a translational displacement in the third axial direction is disposed in the third block;
A set of radial flexure beam displacement mechanisms that generate a rotational displacement around an axis and a set of radial flexure beam displacement mechanisms that generate a rotational displacement around a second axis are provided, and a pair of overhanging parts overhanging from the central rigid body part are provided. The second overhang in the first block and the second It is characterized in that the projecting portions of the blocks are connected, and further, the central rigid body portion of the second block and the central rigid body portion of the third block are connected.

〔作用〕[Effect]

３つの平行たわみ梁変位機構によりＸ軸、ｙ軸。 X-axis and y-axis by three parallel deflection beam displacement mechanisms.

ｚ軸方向の並進変位を生じさせ、又、３つの放射たわみ
梁変位機構によりＸ軸、ｙ軸方向の軸まわりおよび２軸
まわりの回転変位を生じさせる。Translational displacement in the z-axis direction is caused, and rotational displacement around the x-axis, y-axis direction, and two axes is caused by the three radial deflection beam displacement mechanisms.

〔実施例〕〔Example〕

以下、本発明を図示の実施例に基づいて説明する・。 Hereinafter, the present invention will be explained based on illustrated embodiments.

第１図は本発明の実施例に係る微細位置決め装置の分解
斜視図である。図で、ｘ、ｙ、ｚは互いに直交する座標
軸を示す。１５は剛性の高い部材より成る中心剛体部、
１６ａは中心剛体部１５からｙ軸方向に張出した張出し
部、１６ｂは中心剛体部１５から張出し部１６ａと反対
向きに張出した張出し部、１７ａは中心剛体部１５から
Ｘ軸方向に張出した張出し部、１７ｂは中心剛体部１５
から張出し部１７ａと反対向きに張出した張出し部であ
る。１８ａ、１８ｂはそれぞれ張出し部１６ａ、１６ｂ
の端部下端に設けられた固定部、１９ａ、１９ｂはそれ
ぞれ張出し部１７ａ、１７ｂの端部上端に設けられた連
結部である。張出し部１６ａ、１６ｂ、１７ａ、１７ｂ
、固定部１８ａ、１８ｂおよび連結部１９ａ、１９ｂは
それぞれ中心剛体部１５と同じ部材で構成され、中心剛
体部１５とともに一体に加工成形される。FIG. 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention. In the figure, x, y, and z indicate coordinate axes that are orthogonal to each other. 15 is a central rigid body portion made of a highly rigid member;
Reference numeral 16a denotes an overhanging portion extending from the central rigid body portion 15 in the y-axis direction, 16b denotes an overhanging portion extending from the central rigid body portion 15 in the opposite direction to the overhanging portion 16a, and 17a denotes an overhanging portion extending from the central rigid body portion 15 in the X-axis direction. , 17b is the central rigid body part 15
This is an overhanging portion that overhangs in the opposite direction to the overhanging portion 17a. 18a and 18b are projecting portions 16a and 16b, respectively.
The fixed parts 19a and 19b provided at the lower ends of the projecting parts 17a and 17b are connecting parts provided at the upper ends of the overhang parts 17a and 17b, respectively. Overhanging parts 16a, 16b, 17a, 17b
, the fixing parts 18a, 18b and the connecting parts 19a, 19b are each made of the same material as the central rigid body part 15, and are integrally processed and formed together with the central rigid body part 15.

１６　ＦＸ−、１６Ｆｘｂはそれぞれ張出し部１６ａ。16FX- and 16Fxb are respective overhang portions 16a.

１６ｂに構成された平行たわみ梁変位機構であり、互い
に中心剛体部１５に対して対称的に構成されている。平
行たわみ梁変位機構１６　Ｆ、、、　１６　Ｆｘｂは共
働してＸ軸方向の並進変位を発生する。Ｓは平行たわみ
梁変位機構１６ＦＸ、、１６ＦＸｂに設けられたストレ
ンゲージを示す（以下の各変位機構においてストレンゲ
ージを符号Ｓで示す）。１７Ｆ、、、　　１７　Ｆ、、
はそれぞれ張出し部１７ａ、１７ｂに構成された平行た
わみ梁変位機構であり、互いに中心剛体部１５に対して
対称的に構成されている。平行たわみ梁変位機構１７Ｆ
□、１７Ｆｙｂは共働してｙ軸方向の並進変位を発生す
る。平行たわみ梁変位機構１６ＦＸ−，１６ＦＸｂ、ｌ
　７Ｆｙ□１７　Ｆｙ＆＋　は各張出し部１６ａ、１６
ｂ、１７ａ。16b, and are configured symmetrically with respect to the central rigid body portion 15. The parallel deflection beam displacement mechanisms 16F, . . . 16Fxb work together to generate translational displacement in the X-axis direction. S indicates a strain gauge provided in the parallel deflection beam displacement mechanisms 16FX, 16FXb (in each of the following displacement mechanisms, the strain gauge is indicated by the symbol S). 17F,,, 17F,,
are parallel deflection beam displacement mechanisms constructed on the overhanging portions 17a and 17b, respectively, and are constructed symmetrically with respect to the central rigid body portion 15. Parallel deflection beam displacement mechanism 17F
□ and 17Fyb work together to generate translational displacement in the y-axis direction. Parallel deflection beam displacement mechanism 16FX-, 16FXb, l
7Fy□17 Fy&+ is each overhang portion 16a, 16
b, 17a.

１７ｂの所定個所に所定の貫通孔を形成することにより
構成される。なお、平行たわみ梁変位機構の゛構造につ
いては後述する。以上の各部および各平行たわみ梁変位
機構によりブロックＢ１が構成される。It is constructed by forming a predetermined through hole at a predetermined location of 17b. The structure of the parallel deflection beam displacement mechanism will be described later. Block B1 is constituted by each of the above parts and each parallel deflection beam displacement mechanism.

次に、ブロックＢ２の構成を説明する。２１は剛性の高
い部材より成る中心剛体部、２２ａは中心剛体部２１か
らＸ軸方向に張出した張出し部、２２ｂは中心剛体部２
１から張出し部２２ａと反対向きに張出した張出し部で
ある。２３ａ、２３ｂはそれぞれ張出し部２２ａ、２２
ｂの端部下方から突出した連結部であり、ブロックＢ１
の連結部１９ａ、１９ｂと結合される。この結合が二点
鎖線で示されている。中心剛体部２１、各張出し部２２
ａ、２２ｂ、および連結部２３ａ、２３ｂはそれぞれ１
つの部材から一体に加工成形される。Next, the configuration of block B2 will be explained. 21 is a central rigid body part made of a highly rigid member, 22a is an overhanging part extending from the central rigid body part 21 in the X-axis direction, and 22b is a central rigid body part 2
This is an overhanging portion that overhangs from 1 in the opposite direction to the overhanging portion 22a. 23a and 23b are projecting portions 22a and 22, respectively.
It is a connecting part protruding from below the end of block B1.
The connecting portions 19a and 19b are connected to each other. This bond is indicated by a dash-dotted line. Center rigid body part 21, each overhang part 22
a, 22b, and connecting portions 23a, 23b are each 1
It is integrally processed and molded from two parts.

２２　Ｆ　ｚ−１２２Ｆ−ｂはそれぞれ張出し部２２ａ
。22F z-122F-b each has an overhanging portion 22a.
.

２２ｂに構成された平行たわみ梁変位機構であり、互い
に中心剛体部２１に対して対称的に配置されている。こ
れら平行たわみ梁変位機構２２　ＦＺ、。22b, which are arranged symmetrically with respect to the central rigid body part 21. These parallel deflection beam displacement mechanisms 22 FZ,.

２２Ｆ−ｂは共働してｚ軸方向の並進変位を発生する。22F-b work together to generate translational displacement in the z-axis direction.

平行たわみ梁変位機構２２　Ｆ２−、　２２　Ｆ−ｂは
各張出し部２２ａ、２２ｂの所定個所に所定の貫通孔を
形成することにより構成される。The parallel deflection beam displacement mechanisms 22F2- and 22F-b are constructed by forming predetermined through holes at predetermined locations of each of the overhanging portions 22a and 22b.

次に、ブロックＢ、の構成を説明する。ブロックＢ、が
Ｘ軸方向及びｙ軸方向の並進変位、ブロックＢ２が２軸
方向の並進変位を行う構成となっているのに対して、ブ
ロックＢ、はＸ軸、ｙ軸及び２軸まわりの回転変位を行
う構成となっている。Next, the configuration of block B will be explained. Block B is configured to perform translational displacement in the X- and y-axis directions, and block B2 is configured to perform translational displacement in two-axis directions, whereas block B is configured to perform translational displacement in the X-axis, y-axis, and two axes. It is configured to perform rotational displacement.

即ち、・２４は剛体部材で作られた方形のリングである
。２５　Ｍ、−、２５Ｍｙｂはリング２４上に対称的に
配置された放射たわみ梁変位機構である。各放射たわみ
梁変位機構２５Ｍ□、２５Ｍ、ｔ、はｙ軸方向に延びる
共通の１つの軸のまわりに回転変位を発生せしめる。２
５　Ｍ、、、　　２５　ＭＸｂはリング２４上に対称的
に配置された放射たわみ梁変位機構であり、それぞれＸ
軸方向に延びる共通の１つの軸のまわりに回転変位を発
生せしめる。各放射たわみ梁変位機構２５　Ｍｙ−、２
５Ｍ、ｂ、　　２５　ＭＸ−。That is, .24 is a square ring made of a rigid member. 25 M,-, 25 Myb is a radial deflection beam displacement mechanism arranged symmetrically on the ring 24. Each radial deflection beam displacement mechanism 25M□, 25M, t generates rotational displacement around one common axis extending in the y-axis direction. 2
5 M, , 25 MXb are radial deflection beam displacement mechanisms arranged symmetrically on the ring 24, and each X
A rotational displacement is generated around a common axis extending in the axial direction. Each radial deflection beam displacement mechanism 25 My-, 2
5M, b, 25 MX-.

２５Ｍ、ｌｂの構造については後述する。The structure of 25M, lb will be described later.

２６ａ、２６ｂはそれぞれ放射たわみ梁変位機構２５Ｍ
□、２５Ｍ□を構成する一方の剛体部（他方の剛体部は
リング２４）　、２７ａ、２７ｂはそれぞれ放射たわみ
梁変位機構２５Ｍ□、２５ＭＫｂを構成する一方の剛体
部（同じく他方の剛体部はリング２４）である。２７ａ
’、２７ｂ”　はそれぞれ剛体部２７ａ、２７ｂに設け
られた連結部である。26a and 26b are respectively radial deflection beam displacement mechanisms 25M
□, 25M□ (the other rigid body is the ring 24), 27a, 27b are one of the rigid body parts (the other rigid body is the ring 24) that constitute the radial deflection beam displacement mechanisms 25M□, 25MKb, respectively. 24). 27a
', 27b'' are connecting parts provided on the rigid body parts 27a, 27b, respectively.

２８は中心剛体部、２９ａは中心剛体部２８からｙ軸方
向に張出した張出し部、２９ｂは中心剛体部２８から張
出し部２９ａと反対向きに張出した張出し部である。張
出し部２９ａと放射たわみ梁変位機構２５Ｍ、、の剛体
部２６ａ、および張出し部２９ｂと放射たわみ梁変位機
構２５ｙｘ、ｂの剛体部２６ｂとはそれぞれ連結されて
いる。28 is a central rigid body part, 29a is an overhanging part that overhangs from the central rigid body part 28 in the y-axis direction, and 29b is an overhanging part that overhangs from the central rigid body part 28 in the opposite direction to the overhanging part 29a. The overhanging portion 29a and the rigid body portion 26a of the radial flexure beam displacement mechanism 25M, , and the overhang portion 29b and the rigid body portion 26b of the radial flexure beam displacement mechanism 25yx, 25b are connected, respectively.

２９　Ｍ、、、　　２９　Ｍ２ｂはそれぞれ張出し部２
９ａ。29 M, , 29 M2b are respectively overhang parts 2
9a.

２９ｂに構成された放射たわみ梁変位機構であり、互い
に中心剛体部２８に対して対称的に配置されている。こ
れら平行たわみ梁変位機構２９Ｍ□。29b, which are arranged symmetrically with respect to the central rigid body part 28. These parallel deflection beam displacement mechanisms 29M□.

２９Ｍ−ｂは共働して２軸まわりの回転変位を発生する
。これら放射たわみ梁変位機構２９　Ｍ−ａ。29M-b work together to generate rotational displacement around two axes. These radial deflection beam displacement mechanisms 29 M-a.

２９Ｍ、いおよび前記放射たわみ梁変位機構２５Ｍ、１
．．２５Ｍ、ｂ、２５Ｍ１．．２５Ｍ、ｂはそれぞれ所
定個所に所定の貫通孔を形成することにより構成される
。なお、放射たわみ梁変位機構の構造については後述す
る。29M, 1 and the radial deflection beam displacement mechanism 25M, 1
．． ．． 25M, b, 25M1. ．． 25M and 25b are constructed by forming predetermined through holes at predetermined locations, respectively. The structure of the radial deflection beam displacement mechanism will be described later.

リング２４、剛体部２６ａ、２６ｂ、２７ａ。Ring 24, rigid body parts 26a, 26b, 27a.

２７ｂ、それらの間に構成される各放射たわみ梁変位機
構、中心剛体部２８、張出し部２９ａ。27b, each radial deflection beam displacement mechanism constructed between them, the central rigid body part 28, and the overhang part 29a.

２９ｂは高い剛性を有する部材により一体に加工成形さ
れる。29b is integrally formed by a member having high rigidity.

このようなブロックＢ３は、その中心剛体部２８により
ブロックＢ２に結合される。即ち、ブロックＢ、の中心
剛体部２８をブロックＢ２の中心剛体部２１上に重ね、
適宜の手段で連結する（この連結の１つが図中２点鎖線
で示されている）。Such block B3 is connected to block B2 by its central rigid portion 28. That is, the central rigid body part 28 of block B is overlapped on the central rigid body part 21 of block B2,
They are connected by appropriate means (one of these connections is indicated by a chain double-dashed line in the figure).

この状態で、ブロックＢ２の相当部分がブロックＢ３の
空間内に入ることになる。そして、放射たわみ梁変位機
構２５Ｍ、、、２５Ｍ、ｂ、２５Ｍ、□２５Ｍ０はリン
グ２４とともに張出し部２９ａ。In this state, a considerable portion of block B2 will enter the space of block B3. The radial deflection beam displacement mechanisms 25M, , 25M, b, 25M, □25M0 are provided with the ring 24 and the projecting portion 29a.

２９ｂに吊下げられた状態となる。It will be in a state where it is suspended from 29b.

３０は微動テーブルであり、ブロックＢ、において張出
し部２９ａ、２９ｂが連結されていない側の剛体部、即
ち、剛体部２７ａ、２７ｂの連結部２７ａ’　、２７ｂ
’　に連結される（この連結の１つが図中２点鎖線で示
されている）。なお、微動テーブル３０の形状は図示の
ような長方形に限ることはなく、例えばｙ軸方向の寸法
をさらに大きくしたほぼ正方形等、対象物体を載置固定
し易い形状とされる。30 is a fine movement table, which is a rigid body part on the side where the overhanging parts 29a and 29b are not connected in block B, that is, the connecting parts 27a' and 27b of the rigid body parts 27a and 27b.
' (one of these connections is indicated by a chain double-dashed line in the figure). Note that the shape of the fine movement table 30 is not limited to the rectangular shape shown in the figure, but may be a shape that facilitates mounting and fixing of the target object, such as a substantially square shape with a larger dimension in the y-axis direction.

この状態において、各放射たわみ梁変位機構２５Ｍ、、
、２５Ｍ□、　　２５Ｍ、、、　　２５Ｍ、、、　　２
９Ｍ、、、２９Ｍ、、の各たわみ梁（後述）の放射角度
を選定することにより、それらの各回転軸は微動テーブ
ル２６の表面上の一点で直交せしめられる。In this state, each radial deflection beam displacement mechanism 25M,
, 25M□, 25M, , 25M, , 2
By selecting the radiation angle of each of the flexible beams 9M, , 29M, .

ここで、上記構造における平行たわみ梁変位機構および
放射たわみ梁変位機構の構造を図により説明する。第２
図（ａ）、　　（ｂ）は対称形の平行たわみ梁変位機構
の側面図である。Here, the structures of the parallel flexure beam displacement mechanism and the radial flexure beam displacement mechanism in the above structure will be explained with reference to the drawings. Second
Figures (a) and (b) are side views of a symmetrical parallel deflection beam displacement mechanism.

図で、３１ａ、３１ｂ、３１ｃは剛体部、３４ａ＋、３
４ａｚは剛体部３１ｃ、３１ａ間に互いに平行に連結さ
れた平行たわみ梁上ある。平行たわみ梁３４ａ＋、３ｔ
ａｚは剛体部にあけた貫通孔３２ａにより形成される。In the figure, 31a, 31b, 31c are rigid parts, 34a+, 3
4az is on a parallel flexible beam connected parallel to each other between the rigid body parts 31c and 31a. Parallel deflection beam 34a+, 3t
az is formed by a through hole 32a drilled in the rigid body part.

３４ｂ＋、３４ｂｚは剛体部３１Ｃ，３１ｂ間に互いに
平行に連結された　゛平行たわみ梁であり、剛体部にあ
けられた貫通孔３２ｂにより形成される。３６ａ、３６
ｂは圧電アクチュエータであり、それぞれ貫通孔３２ａ
。Parallel flexible beams 34b+ and 34bz are connected parallel to each other between the rigid body parts 31C and 31b, and are formed by a through hole 32b formed in the rigid body parts. 36a, 36
b is a piezoelectric actuator, and each through hole 32a
.

３２ｂ内に突出した剛体部からの突出部間に装着されて
いる。剛体部３１ｃの中心から左方の構成により平行た
わみ梁変位機構３９ａが、又、右方の構成により平行た
わみ梁変位機構３９ｂが構成される。Ｓは平行たわみ梁
の適所に貼着されたストレンゲージであり、平行たわみ
梁の変形量を検出するために設けられている。It is mounted between the protrusions from the rigid body part protruding into 32b. The configuration to the left of the center of the rigid body portion 31c constitutes a parallel flexible beam displacement mechanism 39a, and the configuration to the right constitutes a parallel flexible beam displacement mechanism 39b. S is a strain gauge affixed to the appropriate position of the parallel flexible beam, and is provided to detect the amount of deformation of the parallel flexible beam.

ここで、座標軸を図示のように定める（ｙ軸は紙面に垂
直な方向）。今、圧電アクチュエータ３６ａ、３６ｂに
同時に電圧を印加して同一大きさの２軸方向の力ｆを発
生させる。このとき、一方の平行たわみ梁変位機構、例
えば平行たわみ梁変位機構３９ａに生じる変位について
考える。圧電アクチュエータ３６ａに電圧が印加される
ことにより、剛体部３１ｃは力ｆによりｚ軸方向に押圧
されることになる。このため、平行たわみ梁３４ａｘ３
４ａｔは第４図に示す平行ばね２ａ。Here, coordinate axes are determined as shown in the figure (y-axis is perpendicular to the plane of the paper). Now, a voltage is simultaneously applied to the piezoelectric actuators 36a and 36b to generate forces f in two axial directions of the same magnitude. At this time, consider the displacement that occurs in one parallel flexible beam displacement mechanism, for example, the parallel flexible beam displacement mechanism 39a. By applying a voltage to the piezoelectric actuator 36a, the rigid body portion 31c is pressed in the z-axis direction by a force f. For this reason, the parallel flexible beam 34ax3
4at is a parallel spring 2a shown in FIG.

２ｂと同じように曲げ変形を生じ、剛体部３１ｃは第２
図（ｂ）に示すように２軸方向に変位する。Similar to 2b, bending deformation occurs, and the rigid body part 31c
As shown in Figure (b), it is displaced in two axial directions.

このとき、仮に他方の平行たわみ梁変位機構３９ｂが存
在しないとすると剛体部３１ｃには極めて微小ではある
が横変位（Ｘ軸方向の変位）をも同時に生じるはずであ
る。At this time, if the other parallel deflection beam displacement mechanism 39b were not present, a very small lateral displacement (displacement in the X-axis direction) would also occur in the rigid body portion 31c at the same time.

又、平行たわみ梁変位機構３９３が存在しない場合、他
方の平行たわみ梁変位機構３９ｂに生じる変位について
考えると、平行たわみ梁変位機構３９ｂは剛体部３１Ｃ
の中心を通るｙ軸方向に沿う面（基準面）に対して平行
たわみ梁変位機構３９ａと面対称に構成されていること
から、基準面に関して面対称な力ｆを受けると上記と同
様に、剛体部３１ｃにはｚ軸方向の変位と同時に上記横
変位が生じ、その大きさや方向は、平行たわみ梁変位機
構３９ａのそれと基準面に関して面対称となる。すなわ
ち、上記横変位についてみると、平行たわみ梁変位機構
３９ｂに生じる横変位は、Ｘ軸方向の変位については図
で左向き、ｙ軸まわりの回転変位については図で反時計
方向に生じ、一方、平行たわみ梁変位機構３９８に生じ
る横変位は、Ｘ軸方向変位については図で右向き、ｙ軸
まわりの回転変位については図で時計方向に生じる。Moreover, when considering the displacement that occurs in the other parallel flexible beam displacement mechanism 39b when the parallel flexible beam displacement mechanism 393 does not exist, the parallel flexible beam displacement mechanism 39b is the rigid body part 31C.
Since it is constructed in plane symmetry with the parallel deflection beam displacement mechanism 39a with respect to the plane (reference plane) along the y-axis direction passing through the center of The above-mentioned lateral displacement occurs in the rigid portion 31c at the same time as the displacement in the z-axis direction, and its magnitude and direction are symmetrical with respect to the reference plane with respect to the parallel deflection beam displacement mechanism 39a. That is, regarding the above-mentioned lateral displacement, the lateral displacement that occurs in the parallel deflection beam displacement mechanism 39b is to the left in the figure for displacement in the X-axis direction, and counterclockwise in the figure for rotational displacement around the y-axis. The lateral displacement that occurs in the parallel deflection beam displacement mechanism 398 is to the right in the figure for displacement in the X-axis direction, and clockwise in the figure for rotational displacement about the y-axis.

そして、それら各Ｘ軸方向変位の大きさおよびｙ軸まわ
りの回転変位の大きさは等しい。したがって、両者に生
じる横変位は互いにキャンセルされる。この結果、力ｆ
が加わったことにより、各平行たわみ梁３４ａ１．３４
ａ２，３４ｂｌ、３４ｂ２にその長手方向の伸びによる
僅かな内部応力の増大が生じるだけで、剛体部３１ｃは
ｚ軸方向のみの変位（主変位）εを生じる。The magnitude of each displacement in the X-axis direction and the magnitude of rotational displacement around the y-axis are equal. Therefore, the lateral displacements occurring in both cancel each other out. As a result, the force f
Due to the addition of , each parallel flexible beam 34a1.34
If a2, 34bl, and 34b2 are only slightly increased in internal stress due to their longitudinal extension, the rigid body portion 31c produces a displacement (principal displacement) ε only in the z-axis direction.

圧電アクチュエータ３６ａ、３６ｂに印加されている電
圧が除かれると、各平行たわみ梁３４ａ、、３４ａｚ、
３４ｂｔ、３４ｂｚは変形前の状態に復帰し、平行たわ
み梁変位機構３９ａ、３９ｂは第２図（ａ）に示す状態
に戻り、変位εはＯとなる。以上の動作において、スト
レンゲージＳで検出された実際の変位量を用いてフィー
ドバック制御を行うと、正確な微細位置決めを実行する
ことができる。When the voltage applied to the piezoelectric actuators 36a, 36b is removed, each parallel flexible beam 34a, 34az,
34bt and 34bz return to the state before deformation, the parallel deflection beam displacement mechanisms 39a and 39b return to the state shown in FIG. 2(a), and the displacement ε becomes O. In the above operation, if feedback control is performed using the actual displacement detected by the strain gauge S, accurate fine positioning can be performed.

第３図（ａ）、（ｂ）は放射たわみ梁変位機構の側面図
である。図で、４１ａ、４１ｂ、４１ｃは′剛体部、４
４ａ＋　、４４ａｚ　、４４ｂ＋、４４ｂｚ。FIGS. 3(a) and 3(b) are side views of the radial deflection beam displacement mechanism. In the figure, 41a, 41b, 41c are 'rigid body parts;
4a+, 44az, 44b+, 44bz.

は放射たわみ梁である。各放射たわみ梁４４　ａ　＋＋
４４ａｚ、４４ｂ＋、４４ｂｚは剛体部４１ｃの中心を
通る紙面に垂直な軸０に対して一点鎖線１．．．Ｌ。is a radial deflection beam. Each radial deflection beam 44 a ++
44az, 44b+, and 44bz are connected to the dashed-dotted line 1. with respect to the axis 0 that passes through the center of the rigid body portion 41c and is perpendicular to the paper surface. ．． ．． L.

に沿って放射状に延びており、それぞれ隣接する剛体部
間を連結している。放射たわみ梁４４　ａ　ｌ＋４４ａ
ｚ゛は貫通孔４２ａをあけることにより形成され、又、
放射たわみ梁４４ｂ＋、４４ｂｚは貫通孔４２ｂをあけ
ることにより形成される。４６ａ。The rigid body parts extend radially along the rigid body parts and connect adjacent rigid body parts. Radiation deflection beam 44a l+44a
z゛ is formed by drilling a through hole 42a, and
The radial deflection beams 44b+, 44bz are formed by drilling the through holes 42b. 46a.

４６ｂは圧電アクチュエータであり、それぞれ貫通孔４
２ａ、４２ｂに剛体部から突出した突出部間に装着され
ている。軸Ｏの左側の構成により放射たわみ梁変位機構
４９８が、又、右側の構成により放射たわみ梁変位機構
４９ｂが構成される。46b is a piezoelectric actuator, and each through hole 4
2a and 42b between the protruding parts protruding from the rigid body part. The configuration on the left side of the axis O constitutes the radial flexure beam displacement mechanism 498, and the configuration on the right side constitutes the radial flexure beam displacement mechanism 49b.

Ｓは放射たわみ梁の適所に貼着されたストレンゲージで
あり、放射たわみ梁の変形量を検出するために設けられ
ている。S is a strain gauge affixed to a suitable position on the radial flexure beam, and is provided to detect the amount of deformation of the radial flexure beam.

今、圧電アクチュエータ４６ａ、４６ｂに同時に所定の
電圧を印加して同一の大きさの、中心軸０を中心とする
円に対する接線方向の力ｆを発生させる。そうすると、
剛体部４１Ｃの左方の突出部は圧電アクチュエータ４６
ａに発生した力により上記接線に沿って上向きに押され
、剛体部４１Ｃの右方の突出部は圧電アクチュエータ４
６ｂに発生した力により上記接線に沿って下向きに押さ
れる。剛体部４１ｃは両開体部４１２．４１ｂに放射た
わみ梁４４ａ＋、４４ａｚ、４４ｔ）＋４４ａｚ゛ けた結果、第３図（ｂ）に示すように放射たわみ梁４４
ａ＋、４４ａｚ、４４ｂｌ、４４ｂｚの剛体部４１２．
４１ｂに連結されている部分は点０から放射状に延びる
直線り、、ＬＺ上にあるが、剛体部４１Ｃに連結されて
いる部分は、上記直線Ｌｌ、ＬＸから僅かにずれた直線
（この直線も点０から放射状に延びる直線である。）Ｌ
＋　　′、Ｌｚ　　”上にずれる微小変位を生じる。こ
のため、剛体部４１Ｃは図で時計方向に微小角度δだけ
回動する。この回転変位δの大きさは、放射たわみ梁４
４　ａ　、。Now, a predetermined voltage is simultaneously applied to the piezoelectric actuators 46a and 46b to generate a force f of the same magnitude in a tangential direction to a circle centered on the central axis 0. Then,
The left protrusion of the rigid body portion 41C is a piezoelectric actuator 46.
a is pushed upward along the tangent line, and the right protrusion of the rigid body part 41C is pushed upward by the piezoelectric actuator 4.
The force generated at 6b pushes it downward along the tangent line. The rigid body part 41c extends from both open body parts 412.41b by radial flexure beams 44a+, 44az, 44t)+44az, resulting in radial flexure beam 44 as shown in FIG. 3(b).
a+, 44az, 44bl, 44bz rigid body portions 412.
The part connected to 41b is on the straight line LZ extending radially from point 0, but the part connected to the rigid body part 41C is on a straight line slightly deviated from the straight lines Ll and LX (this straight line is also It is a straight line extending radially from point 0.)L
+', Lz'' is generated. Therefore, the rigid body portion 41C rotates clockwise in the figure by a minute angle δ. The magnitude of this rotational displacement δ is
4 a.

４４ａｚ、４４ｂ＋、４４ｂｚの曲げに対する剛性によ
り定まるので、力ｒを正確に制御すれば、回転変位δも
それと同じ精度で制御できることになる。Since it is determined by the bending rigidity of 44az, 44b+, and 44bz, if the force r is accurately controlled, the rotational displacement δ can also be controlled with the same accuracy.

圧電アクチュエータ４６ａ、４６ｂに印加されている電
圧が除かれると、放射たわみ梁４４ａ、。When the voltage applied to the piezoelectric actuators 46a, 46b is removed, the radiating deflection beam 44a,.

４４ａｚ、４４ｂ＋、４４ｂｚは変形前の状態に復帰し
、回転変位機構は第３図（ａ）に示す状態に戻り、変位
δはＯとなる。以上の動作において、ストレンゲージＳ
が正確な微細位置決めを行うために用いられるのは平行
たわみ梁変位機構の場合と同じである。44az, 44b+, and 44bz return to the state before deformation, the rotational displacement mechanism returns to the state shown in FIG. 3(a), and the displacement δ becomes O. In the above operation, the strain gauge S
is used to perform accurate fine positioning in the same way as in the parallel flexure beam displacement mechanism.

なお、第１図に示す放射たわみ梁変位機構２５Ｍ、、、
２５Ｍ、ｌｂ、２５Ｍ、、、２５Ｍ、ｂが第３図（ａ）
に示す一方の放射たわみ梁変位機構４９３（４９ｂ）に
相当するのは明らかであり、その動作も上記の動作に準
じる。In addition, the radial deflection beam displacement mechanism 25M shown in FIG.
25M, lb, 25M, , 25M, b is shown in Figure 3 (a)
It is obvious that this corresponds to one of the radial deflection beam displacement mechanisms 493 (49b) shown in FIG. 4, and its operation is similar to that described above.

次に、第１図に示す本実施例の動作を説明する。Next, the operation of this embodiment shown in FIG. 1 will be explained.

今、平行たわみ梁変位機構１６　Ｆ、、、　　１６　Ｆ
、ｂの各圧電アクチュエータに電圧を印加すると、その
平行たわみ梁３４ａ＋、３４ａｚ、３４ｂ＋、３４ｂｚ
が印加電圧に応じて第１図のＸ軸方向に第２図（ｂ）に
示ように変形し、並進変位する。この並進変位は、中心
剛体部１５、平行たわみ梁変位機構１７Ｆｙ□１７　Ｆ
ｙｂ、２２　Ｆ＊ｍ、２２　Ｆ−ｂ１中中心体部２１．
２８、放射たわみ梁変位機構２９Ｍ３．。Now, the parallel deflection beam displacement mechanism 16 F... 16 F
, b, the parallel deflection beams 34a+, 34az, 34b+, 34bz
is deformed and translated in the X-axis direction of FIG. 1 as shown in FIG. 2(b) according to the applied voltage. This translational displacement is caused by the central rigid body portion 15, the parallel deflection beam displacement mechanism 17Fy□17F
yb, 22 F*m, 22 F-b1 central body part 21.
28. Radial deflection beam displacement mechanism 29M3. .

２９Ｍ−い剛体部２６ａ、２６ｂ、放射たわみ梁変位機
構２５Ｍ、、、２５Ｍ、いリング２４、放射たわみ梁変
位機構２５　Ｍ、、、　　２５　Ｍ、ｂを経て剛体部２
７ａ、２７ｂに固定された微動テーブル３０に伝達され
、微動テーブル３０は同量だけＸ軸方向に並進変位する
。29M - Rigid body parts 26a, 26b, radial flexure beam displacement mechanism 25M, 25M, ring 24, radial flexure beam displacement mechanism 25M, 25M, b to rigid body part 2
7a and 27b, and the fine movement table 30 is translated by the same amount in the X-axis direction.

同様に、平行たわみ梁変位機構１７Ｆ、、、１７Ｆｙ、
、の各圧電アクチュエータに電圧を印加した場合、微動
テーブル３０はｙ軸方向に並進変位し、また、平行たわ
み梁変位機構２２　Ｆ、、、　　２２　Ｆ、ｂの各圧電
アクチュエータに電圧を印加すると微動テーブル３０は
Ｚ軸方向に並進変位する。Similarly, parallel deflection beam displacement mechanisms 17F, , 17Fy,
When a voltage is applied to each piezoelectric actuator of , the fine movement table 30 is translated in the y-axis direction, and when a voltage is applied to each piezoelectric actuator of the parallel deflection beam displacement mechanism 22F, 22F, b, fine movement occurs. The table 30 is translated in the Z-axis direction.

一方、放射たわみ梁変位機構２５　Ｍｙ、、　２５　Ｍ
、ｂの各圧電アクチュエータに電圧を印加すると、この
電圧に応じてそれらの放射たわみ梁が第３図（ｂ）に示
すように変形する。この場合、剛体部２６ａ、２６ｂは
中心剛体部２８、放射たわみ梁変位機構２９Ｍ、、、２
９Ｍ、ｂを介して固定状態にあるので、放射たわみ梁変
位機構２５Ｍ、、、２５Ｍｙｂはｙ軸方向の軸まわりに
回転変位を発生し、これにより微動テーブル３０はリン
グ２４、放射たわみ梁変位機構２５　Ｍ、、、　　２５
　ＭＸｂを介して当該軸まわりに回転変位する。On the other hand, the radial deflection beam displacement mechanism 25 My,, 25 M
, b, when a voltage is applied to each piezoelectric actuator, their radial deflection beams are deformed as shown in FIG. 3(b) in response to this voltage. In this case, the rigid body parts 26a and 26b include the central rigid body part 28, the radial deflection beam displacement mechanisms 29M, 2
Since the radial flexure beam displacement mechanisms 25M, . 25 M,,, 25
It is rotationally displaced around the relevant axis via MXb.

又、放射たわみ梁変位機構２５　Ｍ、、、　　２５　Ｍ
、ｂの各圧電アクチュエータに電圧を印加すると、この
電圧に応じてその放射たわみ梁が変形しＸ軸方向の軸ま
わりに回転変位を発生する。この回転変位は剛体部２７
ａ、２７ｂを介して微動テーブル３０に伝達され、微動
テーブル３０は当該軸まわりに回転変位する。In addition, radial deflection beam displacement mechanism 25 M,... 25 M
, b, when a voltage is applied to each piezoelectric actuator, the radial deflection beam is deformed in accordance with this voltage and generates a rotational displacement around an axis in the X-axis direction. This rotational displacement is caused by the rigid body part 27
a, 27b to the fine movement table 30, and the fine movement table 30 is rotationally displaced around the axis.

さらに、放射たわみ梁変位機構２９　Ｍ２−、　２９′
Ｍ２．の各圧電アクチュエータに電圧を印加すると、そ
の放射たわみ梁４４ａ＋、４４ａｚ、４４ｂ＋、４４ｂ
２は印加電圧に応じて第１図の２軸方向の軸まわりに第
３図（ｂ）に示ように変形して回転変位する。この回転
変位は、剛体部２６ａ、２６ｂ、平行たわみ梁変位機構
２５　Ｍ、、、　２５　Ｆ、ｂ、リング２４、放射たわ
み梁変位機構２５ＭＸ、、２５ＭＸｂ、剛体部２７ａ、
２７ｂを経て微動テーブル３０に伝えられ、微動テーブ
ル３０を当該軸まわりに回転変位する。Furthermore, the radial deflection beam displacement mechanism 29 M2-, 29'
M2. When a voltage is applied to each piezoelectric actuator, the radial deflection beams 44a+, 44az, 44b+, 44b
2 is deformed and rotationally displaced as shown in FIG. 3(b) around the two axes in FIG. 1 in accordance with the applied voltage. This rotational displacement is caused by the rigid body parts 26a, 26b, the parallel flexure beam displacement mechanisms 25M, 25F, b, the ring 24, the radial flexure beam displacement mechanisms 25MX, 25MXb, the rigid body parts 27a,
27b to the fine movement table 30, and rotationally displaces the fine movement table 30 around the axis.

以上の説明は１つの軸についての並進変位および回転変
位の説明であるが、上記各平行たわみ梁変位機構および
各放射たわみ梁変位機構のうちの任意の複数を選択して
任意の電圧を印加することにより、微動テーブル２６を
任意に変位させることができる。又、ストレンゲージＳ
を用いて変位量の正確な制御を行うことができる。The above explanation is about translational displacement and rotational displacement about one axis, but any plurality of the above-mentioned parallel flexure beam displacement mechanisms and radial flexure beam displacement mechanisms can be selected and an arbitrary voltage applied. By doing so, the fine movement table 26 can be arbitrarily displaced. Also, strain gauge S
The amount of displacement can be accurately controlled using

このように、本実施例では、第１のブロックにＸ軸方向
およびｙ軸方向に並進変位する平行たわみ梁変位機構を
構成し、第１のブロックに連結された第２のブロックに
２軸方向に並進変位する平行たわみ梁変位機構を構成し
、第２のブロックに連結された第３のブロックに、Ｘ軸
、ｙ軸、２軸まわりにそれぞれ回転変位する放射たわみ
梁変位機構を構成し、第３のブロックに微動テーブルを
固定したので、極めて簡単かつ小形の構成で３軸の並進
変位および３軸の回転変位を得ることができる。又、各
回転軸が微動テーブルの表面上の一点で直交するので、
回転変位の回転中心は微動テーブル上に存在することに
なり、正確な回転変位を行うことができる。As described above, in this embodiment, a parallel deflection beam displacement mechanism is configured in which the first block is translated in the X-axis direction and the y-axis direction, and a parallel deflection beam displacement mechanism is configured in which the second block connected to the first block is translated in the X-axis direction and the y-axis direction. A parallel flexure beam displacement mechanism is configured for translational displacement, and a radial flexure beam displacement mechanism is configured for rotational displacement around the X axis, y axis, and two axes in a third block connected to the second block. Since the fine movement table is fixed to the third block, three-axis translational displacement and three-axis rotational displacement can be obtained with an extremely simple and compact configuration. In addition, since each rotation axis intersects at one point on the surface of the fine movement table,
The center of rotation for rotational displacement is located on the fine movement table, and accurate rotational displacement can be performed.

なお、上記実施例の説明では、ブロックＢＩにおいてｙ
軸方向の張出し部の端部を固定し、Ｘ軸方向の張出し部
の端部に連結部を設けた例について説明したが、これと
は逆に、Ｘ軸方向の張出し部の端部を固定し、ｙ軸方向
の張出し部の端部にブロックＢ２を連結してもよいのは
明らかである。In addition, in the description of the above embodiment, in block BI, y
We have explained an example in which the end of the overhang in the axial direction is fixed and a connecting part is provided at the end of the overhang in the X-axis direction.Conversely, it is possible to fix the end of the overhang in the X-axis direction. However, it is clear that the block B2 may be connected to the end of the overhang in the y-axis direction.

又、各回転軸は必ずしも微動テーブルの表面に存在する
必要はなく、任意に選択することができる。Further, each rotation axis does not necessarily have to be present on the surface of the fine movement table, and can be arbitrarily selected.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明では、第１のブロックにＸ軸
方向およびｙ軸方向に並進変位する平行たわみ梁変位機
構を構成し、第１のブロックに連結された第２のブロッ
クに２軸方向に並進変位する平行たわみ梁変位機構を構
成し、第２のブロックに連結された第３のブロックに、
Ｘ軸、ｙ軸。As described above, in the present invention, the first block is configured with a parallel flexible beam displacement mechanism that performs translational displacement in the X-axis direction and the y-axis direction, and the second block connected to the first block is configured with a two-axis A third block that constitutes a parallel flexible beam displacement mechanism that performs translational displacement in the direction, and is connected to the second block,
X axis, y axis.

２軸まわりにそれぞれ回転変位する放射たわみ梁変位機
構を構成し、第３のブロックに微動テーブルを連結した
ので、極めて簡単かつ小形の構成で３軸の並進変位およ
び３軸の回転変位を得ることができる。By constructing a radial deflection beam displacement mechanism that performs rotational displacement around two axes, and connecting a fine movement table to the third block, it is possible to obtain three-axis translational displacement and three-axis rotational displacement with an extremely simple and compact configuration. I can do it.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の実施例に係る微細位置決め装置の分解
斜視図、第２図（ａ）　、（ｂ）は第１図に示す放射た
わみ梁変位機構の側面図、第３図（ａ）。 （ｂ）は第１図に示す放射たわみ梁変位機構の側面図、
第４図、第５図および第６図は従来の微細位置決め装置
の側面図および斜視図、第７図は第６図に示す装置に用
いられるバイモルフ形圧電素子の斜視図である。 １５，２１．２８−−・・・−中心剛体部、１６ａ、１
６ｂ。 １７ａ、１７ｂ、２２ａ、２２ｂ、２９ａ、２９ｂ・・
・−・・張出し部、１６Ｆ、、、１６Ｆ、ｂ、１６Ｆ、
□、１６Ｆｙｂ＋　２２　Ｆ、、、　２２　Ｆｚｂ・・
・・・・平行たわみ梁変位機構、２４・・・・・・・・
・リング、２５Ｍ、、、２５Ｍ口。 ２５Ｍ□、　２５　Ｍｙｂ、　２９　Ｍｔ−、２９Ｍｚ
ｂ・・・・・・放射たわみ梁変位機構、３０・・・・・
・微動テーブル、Ｂ、。 Ｂｚ、Ｂｓ・・・・・・・・・ブロック。 代理人　弁理士　　武　顕次部（外１名）第２図 （ａ） （ｂ）Figure 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention, Figures 2 (a) and (b) are side views of the radial deflection beam displacement mechanism shown in Figure 1, and Figure 3 (a). . (b) is a side view of the radial deflection beam displacement mechanism shown in Fig. 1;
4, 5, and 6 are a side view and a perspective view of a conventional fine positioning device, and FIG. 7 is a perspective view of a bimorph type piezoelectric element used in the device shown in FIG. 6. 15, 21.28-- Central rigid body part, 16a, 1
6b. 17a, 17b, 22a, 22b, 29a, 29b...
... Overhang, 16F, , 16F, b, 16F,
□, 16Fyb+ 22 F,,, 22 Fzb...
...Parallel deflection beam displacement mechanism, 24...
・Ring, 25M, 25M mouth. 25M□, 25 Myb, 29 Mt-, 29Mz
b...Radial deflection beam displacement mechanism, 30...
・Fine movement table, B. Bz, Bs...Block. Agent: Kenji Takeshi, patent attorney (1 other person) Figure 2 (a) (b)

Claims (6)

【特許請求の範囲】[Claims] （１）中心剛体部から第１の軸方向に対称的に突出し各
突出部分に前記第１の軸方向と直交する第２の軸方向に
並進変位を発生させる平行たわみ梁変位機構を備えた第
１の組の張出し部、および前記中心剛体部から第２の軸
方向に対称的に突出し各突出部分に前記第１の軸方向に
並進方向を発生させる平行たわみ梁変位機構を備えた第
２の組の張出し部を有する第１のブロックと、中心剛体
部から前記第２の軸方向に対称的に突出し各突出部分に
前記第１の軸方向および前記第２の軸方向と直交する第
３の軸方向に並進変位を発生させる平行たわみ梁変位機
構を備え前記第２の組の張出し部に連結される第２のブ
ロックと、剛体のリング上に設けられ前記第１の軸まわ
りに回転変位を発生させる第１の放射たわみ梁変位機構
の組および前記第２の軸まわりに回転変位を発生させる
第２の放射たわみ梁変位機構の組、ならびに前記第２の
ブロックの中心剛体部と連結される中心剛体部から対称
的に突出し各突出部分に前記第３の軸まわりに回転変位
を発生させる第３の放射たわみ梁変位機構を備えた第３
のブロックとで構成されていることを特徴とする微細位
置決め装置。(1) A parallel flexible beam displacement mechanism that protrudes symmetrically from the central rigid body portion in the first axial direction and generates a translational displacement in each protruding portion in a second axial direction orthogonal to the first axial direction. a second set of overhangs, and a parallel flexible beam displacement mechanism that protrudes symmetrically from the central rigid body in a second axial direction and generates a translation direction in the first axial direction on each of the overhangs; a first block having a pair of overhangs, and a third block that protrudes symmetrically from the central rigid body part in the second axial direction and is perpendicular to the first axial direction and the second axial direction on each protruding part. a second block having a parallel flexible beam displacement mechanism that generates a translational displacement in the axial direction and connected to the second set of overhangs; and a second block that is provided on a rigid ring and that generates a rotational displacement about the first axis. a first set of radial flexure beam displacement mechanisms for generating a rotational displacement, a second set of radial flexure beam displacement mechanisms for generating a rotational displacement about the second axis, and a central rigid body portion of the second block. A third radial deflection beam displacement mechanism that protrudes symmetrically from the central rigid body portion and generates a rotational displacement about the third axis in each protruding portion.
A fine positioning device characterized by comprising a block. （２）特許請求の範囲第（１）項において、前記各平行
たわみ梁変位機構は、それぞれの変位発生方向の力によ
り曲げ変形を生じる互いに平行な複数のたわみ梁と、こ
れらたわみ梁に前記力を作用させるアクチュエータとに
より構成されていることを特徴とする微細位置決め装置
。(2) In claim (1), each of the parallel flexible beam displacement mechanisms includes a plurality of mutually parallel flexible beams that undergo bending deformation due to forces in respective displacement generating directions, and A fine positioning device characterized by comprising: an actuator that acts. （３）特許請求の範囲第（１）項において、前記各放射
たわみ梁変位機構は、それぞれの回転変位発生軸まわり
のモーメントにより曲げ変形を生じ、前記軸上の定めら
れた点に関して互いに放射状に延びる複数のたわみ梁と
、これらたわみ梁に前記モーメントを作用させるアクチ
ュエータとにより構成されていることを特徴とする微細
位置決め装置。(3) In claim (1), each of the radial deflection beam displacement mechanisms causes bending deformation due to a moment around the respective rotational displacement generating axis, and radially displaces each other with respect to a predetermined point on the axis. A fine positioning device comprising a plurality of extending flexible beams and an actuator that applies the moment to the flexible beams. （４）特許請求の範囲第（２）項または第（３）項にお
いて、前記アクチュエータは圧電アクチュエータである
ことを特徴とする微細位置決め装置。(4) A fine positioning device according to claim (2) or (3), wherein the actuator is a piezoelectric actuator. （５）特許請求の範囲第（１）項において、前記第１の
組の張出し部は、その両端部が固定されていることを特
徴とする微細位置決め装置。(5) The fine positioning device according to claim (1), wherein both ends of the first set of overhanging portions are fixed. （６）特許請求の範囲第（１）項において、前記第３の
ブロックの前記各放射たわみ梁変位機構の前記リングと
対向する各剛体部分は、それらの一方が前記第３の放射
たわみ梁変位機構を備えた突出部分に連結され、他方が
微動テーブルに連結されていることを特徴とする微細位
置決め装置。(6) In claim (1), each rigid body portion of the third block facing the ring of each of the radial flexure beam displacement mechanisms has one of them A fine positioning device, characterized in that the protruding part is connected to a mechanism, and the other part is connected to a fine movement table.
JP61283061A 1986-09-09 1986-11-29 Fine positioning device Expired - Lifetime JPH071448B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP61283061A JPH071448B2 (en) 1986-11-29 1986-11-29 Fine positioning device
DE3788773T DE3788773T2 (en) 1986-09-09 1987-09-08 Device for fine adjustment and device for controlling these adjustments.
EP87201701A EP0264147B1 (en) 1986-09-09 1987-09-08 Fine positioning device and displacement controller therefor
US07/244,101 US4991309A (en) 1986-09-09 1988-09-14 Fine positioning device and displacement controller therefor
US07/244,169 US4920660A (en) 1986-09-09 1988-09-14 Fine positioning device and displacement controller therefor
US07/244,168 US4888878A (en) 1986-09-09 1988-09-14 Fine positioning device
US07/244,102 US5005298A (en) 1986-09-09 1988-09-14 Displacement controller for fine positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61283061A JPH071448B2 (en) 1986-11-29 1986-11-29 Fine positioning device

Publications (2)

Publication Number Publication Date
JPS63137306A true JPS63137306A (en) 1988-06-09
JPH071448B2 JPH071448B2 (en) 1995-01-11

Family

ID=17660696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61283061A Expired - Lifetime JPH071448B2 (en) 1986-09-09 1986-11-29 Fine positioning device

Country Status (1)

Country Link
JP (1) JPH071448B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7832947B2 (en) 2007-03-28 2010-11-16 Kabushiki Kaisha Toshiba Driving mechanism

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786332A (en) * 1969-03-19 1974-01-15 Thomson Houston Comp Francaise Micro positioning apparatus
JPS5994103A (en) * 1982-11-19 1984-05-30 Nec Corp Controller of electromechanical transducer
JPS5996880A (en) * 1982-11-19 1984-06-04 Nec Corp Electromechanical transducer
JPS6025284A (en) * 1983-07-22 1985-02-08 Hitachi Ltd Positioning device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786332A (en) * 1969-03-19 1974-01-15 Thomson Houston Comp Francaise Micro positioning apparatus
JPS5994103A (en) * 1982-11-19 1984-05-30 Nec Corp Controller of electromechanical transducer
JPS5996880A (en) * 1982-11-19 1984-06-04 Nec Corp Electromechanical transducer
JPS6025284A (en) * 1983-07-22 1985-02-08 Hitachi Ltd Positioning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7832947B2 (en) 2007-03-28 2010-11-16 Kabushiki Kaisha Toshiba Driving mechanism

Also Published As

Publication number Publication date
JPH071448B2 (en) 1995-01-11

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