JPS63136636U - - Google Patents
Info
- Publication number
- JPS63136636U JPS63136636U JP2971387U JP2971387U JPS63136636U JP S63136636 U JPS63136636 U JP S63136636U JP 2971387 U JP2971387 U JP 2971387U JP 2971387 U JP2971387 U JP 2971387U JP S63136636 U JPS63136636 U JP S63136636U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- substrate
- arm
- suction plate
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案に係る吸引チヤツクの第１の実
施例を示す縦断面図、第２図はその吸引チヤツク
の使用例を示す斜視図、第３図〜第５図はそれぞ
れ吸引チヤツクの第２、第３及び第４の実施例を
示す縦断面図、第６図は従来例の縦断面図である
。
２……基板搬送用アーム、３……吸気通路、４
……ベローズ（支持部材）、５……吸着板、６…
…吸着孔、７……連通室、１０……基板、Ｒ……
吸着板用姿勢規定面、Ｓ……吸着面、Ｔ……当接
面。
Fig. 1 is a longitudinal sectional view showing a first embodiment of the suction chuck according to the present invention, Fig. 2 is a perspective view showing an example of the use of the suction chuck, and Figs. 2, 3, and 4, and FIG. 6 is a longitudinal sectional view of the conventional example. 2...Arm for board transfer, 3...Intake passage, 4
...Bellows (supporting member), 5...Adsorption plate, 6...
...Suction hole, 7...Communication chamber, 10...Substrate, R...
Attitude regulating surface for suction plate, S... suction surface, T... contact surface.
Claims (1)
ームの先端部に支持部材を介して首振り可能に支
持された吸着板とを備え、吸着板にはその吸着面
に吸着孔を凹設し、この吸着孔とアーム内の吸気
通路とを支持部材内に形成した連通室を介して連
通し、アームの先端部には基板を吸着した吸着板
の姿勢を所要の姿勢に維持する吸着板用姿勢規定
面を付設形成し、基板の吸着に際し吸着板がその
吸着姿勢を基板に倣つて変更するように構成した
基板の吸引チヤツクにおいて、 支持部材をベローズで構成し、吸着板を遊動自
在に支持したことを特徴とする基板の吸引チヤツ
ク。 ２ アーム先端部の吸着板用姿勢規定面を吸着板
の吸着面とアームとが平行をなすように形成した
実用新案登録請求の範囲第１項に記載した基板の
吸引チヤツク。 ３ アーム先端部の吸着板用姿勢規定面を支持部
材内の連通室に臨ませて設けた実用新案登録請求
の範囲第１項に記載した基板の吸引チヤツク。[Claims for Utility Model Registration] 1. An arm for carrying a substrate that includes an intake passage, and a suction plate that is swingably supported at the tip of the arm via a support member, and the suction plate has a suction surface. A suction hole is recessed in the arm, and the suction hole and the intake passage in the arm communicate with each other through a communication chamber formed in the support member. A suction chuck for a substrate is provided with a posture defining surface for the suction plate that maintains the substrate in its posture, and the suction plate changes its suction posture to follow the substrate when suctioning the substrate, the support member being constituted by a bellows, A suction chuck for a substrate, characterized in that a suction plate is freely supported. 2. The substrate suction chuck as set forth in claim 1 of the Utility Model Registration Claim, wherein the suction plate posture defining surface at the tip of the arm is formed so that the suction plate's suction surface and the arm are parallel. 3. The substrate suction chuck as set forth in claim 1 of the utility model registration claim, in which the suction plate posture defining surface at the tip of the arm faces the communication chamber in the support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971387U JPS63136636U (en) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971387U JPS63136636U (en) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63136636U true JPS63136636U (en) | 1988-09-08 |
Family
ID=30833847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2971387U Pending JPS63136636U (en) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63136636U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (en) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | Bellows type wafer vacuum chuck |
| JPWO2004100254A1 (en) * | 2003-05-06 | 2006-07-13 | オリンパス株式会社 | Substrate adsorption device |
| KR100730241B1 (en) | 2003-01-07 | 2007-06-19 | 에스펙 가부시키가이샤 | Adsorption pad |
| JP2011173732A (en) * | 2011-04-25 | 2011-09-08 | Ihi Corp | Substrate mounting method and substrate take-out method |
| JP2012040657A (en) * | 2010-08-20 | 2012-03-01 | Ihi Corp | Vacuum suction device |
| JP2014177299A (en) * | 2013-03-15 | 2014-09-25 | Lintec Corp | Sheet sticking device and method |
| JP2019042826A (en) * | 2017-08-30 | 2019-03-22 | 平田機工株式会社 | Holding nozzle, holding head, and transferring apparatus |
-
1987
- 1987-02-27 JP JP2971387U patent/JPS63136636U/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (en) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | Bellows type wafer vacuum chuck |
| KR100730241B1 (en) | 2003-01-07 | 2007-06-19 | 에스펙 가부시키가이샤 | Adsorption pad |
| JPWO2004100254A1 (en) * | 2003-05-06 | 2006-07-13 | オリンパス株式会社 | Substrate adsorption device |
| JP4553841B2 (en) * | 2003-05-06 | 2010-09-29 | オリンパス株式会社 | Substrate adsorption device |
| KR101055911B1 (en) * | 2003-05-06 | 2011-08-10 | 올림푸스 가부시키가이샤 | Substrate adsorption device |
| JP2012040657A (en) * | 2010-08-20 | 2012-03-01 | Ihi Corp | Vacuum suction device |
| JP2011173732A (en) * | 2011-04-25 | 2011-09-08 | Ihi Corp | Substrate mounting method and substrate take-out method |
| JP2014177299A (en) * | 2013-03-15 | 2014-09-25 | Lintec Corp | Sheet sticking device and method |
| JP2019042826A (en) * | 2017-08-30 | 2019-03-22 | 平田機工株式会社 | Holding nozzle, holding head, and transferring apparatus |
| US10562194B2 (en) | 2017-08-30 | 2020-02-18 | Hirata Corporation | Holding nozzle, holding head and transportation apparatus |