JPS63133953U - - Google Patents
Info
- Publication number
- JPS63133953U JPS63133953U JP2505187U JP2505187U JPS63133953U JP S63133953 U JPS63133953 U JP S63133953U JP 2505187 U JP2505187 U JP 2505187U JP 2505187 U JP2505187 U JP 2505187U JP S63133953 U JPS63133953 U JP S63133953U
- Authority
- JP
- Japan
- Prior art keywords
- ball nut
- cooling device
- ball
- cooler
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 4
- 230000005679 Peltier effect Effects 0.000 claims 1
- 239000000110 cooling liquid Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002826 coolant Substances 0.000 description 2
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505187U JPS63133953U (ko) | 1987-02-23 | 1987-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505187U JPS63133953U (ko) | 1987-02-23 | 1987-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63133953U true JPS63133953U (ko) | 1988-09-01 |
Family
ID=30824841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2505187U Pending JPS63133953U (ko) | 1987-02-23 | 1987-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133953U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028220A1 (fr) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Dispositif et procede de transfert de substrats |
| JP2013072475A (ja) * | 2011-09-27 | 2013-04-22 | Hiwin Technologies Corp | 冷却装置付き伝動モジュール |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922735A (ja) * | 1982-07-30 | 1984-02-06 | Hashimoto Forming Co Ltd | 合成樹脂押出モ−ルのエンドキヤツプ成形方法 |
-
1987
- 1987-02-23 JP JP2505187U patent/JPS63133953U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922735A (ja) * | 1982-07-30 | 1984-02-06 | Hashimoto Forming Co Ltd | 合成樹脂押出モ−ルのエンドキヤツプ成形方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028220A1 (fr) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Dispositif et procede de transfert de substrats |
| US6577382B2 (en) | 1997-12-03 | 2003-06-10 | Nikon Corporation | Substrate transport apparatus and method |
| JP2013072475A (ja) * | 2011-09-27 | 2013-04-22 | Hiwin Technologies Corp | 冷却装置付き伝動モジュール |