JPS63127427A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS63127427A JPS63127427A JP27253186A JP27253186A JPS63127427A JP S63127427 A JPS63127427 A JP S63127427A JP 27253186 A JP27253186 A JP 27253186A JP 27253186 A JP27253186 A JP 27253186A JP S63127427 A JPS63127427 A JP S63127427A
- Authority
- JP
- Japan
- Prior art keywords
- lubricating agent
- film
- magnetic recording
- treatment chamber
- lubricant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000314 lubricant Substances 0.000 claims abstract description 22
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 229920006254 polymer film Polymers 0.000 claims abstract description 7
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 229920006395 saturated elastomer Polymers 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 235000021355 Stearic acid Nutrition 0.000 abstract description 4
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 abstract description 4
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 abstract description 4
- 239000008117 stearic acid Substances 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 3
- 239000002904 solvent Substances 0.000 abstract description 3
- 238000005461 lubrication Methods 0.000 abstract description 2
- 230000002542 deteriorative effect Effects 0.000 abstract 2
- 239000010408 film Substances 0.000 description 10
- -1 polyethylene terephthalate Polymers 0.000 description 5
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020676 Co—N Inorganic materials 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020705 Co—Rh Inorganic materials 0.000 description 1
- 229910020514 Co—Y Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適する磁気記録媒体の製造方
法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic recording medium suitable for high-density magnetic recording.
従来の技術
近年、磁気記録の高密度化の進歩は著しいものがあり、
強磁性金属薄膜を磁気記録層とする磁気ＭＡＧ−ＮＥＴ
ＩＣ３Ｖｏｌ 、ＭＡＧ−２１、Ａ−３、Ｐ 、Ｐ。Conventional technology In recent years, there has been remarkable progress in increasing the density of magnetic recording.
Magnetic MAG-NET with ferromagnetic metal thin film as magnetic recording layer
IC3Vol, MAG-21, A-3, P, P.
１２１７〜１２２０ （１９８５））参照〕。1217-1220 (1985))].
現在検討中の代表的な磁気記録媒体の構成は、ポリイミ
ド等の高分子フィルム上にＣｒを２０ｗｔ％前後含有す
るＣｏ合金系の垂直磁化膜を配し、その上に保護膜、潤
滑膜を配したもの〔例えば特開昭６１−１２０３３１号
公報参照〕とポリエチレンテレフタレートフィルム等の
上に電子ビーム蒸着法、無電解めっき法、スパンタリン
グ法等の方法でＣｏ −Ｎ ｉ 、 Ｃｏ −Ｎ ｉ−
０膜等を配し、その上に保護膜、潤滑膜を積層したもの
が挙げられる〔例えば特公昭４１−１９３８９号公報、
特開昭６３−４２０１０号公報参照〕。The configuration of a typical magnetic recording medium currently under consideration is a perpendicular magnetization film made of a Co alloy containing about 20 wt% Cr on a polymer film such as polyimide, and a protective film and a lubricant film are placed on top of this. Co-N i , Co -N i- is deposited on a polyethylene terephthalate film or the like using methods such as electron beam evaporation, electroless plating, and sputtering.
0 film, etc., and a protective film and a lubricating film are laminated thereon [for example, Japanese Patent Publication No. 41-19389,
See Japanese Patent Application Laid-Open No. 63-42010].
脂肪酸に代表される潤滑剤を磁気記録層表面に被着させ
る方法としては、メチルイソブチルケトン、メタノール
、トルエン等の溶剤中に溶解させて滑剤を含む溶液を塗
布、乾燥する方法〔特開昭５７−１７９９４８号公報、
特開昭６１−１７８７１８号公報等参照〕、真空蒸着す
る方法は溶剤を用いず直接的で材料により保護効果が改
善され、特にグロー放電等の前処理と組みあわせること
でも改善される〔特開昭５７−１６４４３４号、特公昭
５７−４６１２９号公報等参照〕ことが知られている。A method for depositing a lubricant, typically a fatty acid, on the surface of a magnetic recording layer is to apply a solution containing the lubricant by dissolving it in a solvent such as methyl isobutyl ketone, methanol, or toluene, and then drying it [JP-A-57-1992]. -179948 publication,
JP-A No. 61-178718, etc.], the vacuum deposition method is direct without using a solvent, and the protective effect is improved depending on the material, and it can also be particularly improved by combining it with a pre-treatment such as glow discharge [JP-A-61-178718]. [Refer to Japanese Patent Publication No. 57-164434, Japanese Patent Publication No. 57-46129, etc.] is known.
発明が解決しようとする問題点
しかしながら、上記した構成では、十分な耐久性を得よ
うとすると潤滑剤の量が多くなり、短波長でのスペーシ
ング損失が無視できなくなり、高密度記録特性を低下さ
せるため改善が望まれていた。Problems to be Solved by the Invention However, with the above configuration, in order to obtain sufficient durability, the amount of lubricant increases, spacing loss at short wavelengths cannot be ignored, and high-density recording characteristics deteriorate. Improvements were desired to make this possible.
本発明は上記した事情に鑑みなされたもので、高密度記
録特性と耐久性を兼ね備えた磁気記録媒体を大量に得る
ことの出来る磁気記録媒体の製造方法を提供するもので
ある。The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a magnetic recording medium that can produce a large amount of magnetic recording media that have both high-density recording characteristics and durability.
問題点を解決するだめの手段
上記した問題点を解決するだめに本発明の磁気記録媒体
の製造方法は、高分子フィルム上に強磁性金属薄膜を配
した被処理体を電子線又はγ線を照射しながら、潤滑剤
の飽和蒸気圧雰囲気を通過させるようにしたものである
。Means for Solving the Problems In order to solve the above-mentioned problems, the method for producing a magnetic recording medium of the present invention involves irradiating an object to be processed, which has a thin ferromagnetic metal film on a polymer film, with electron beams or gamma rays. While irradiating, a saturated vapor pressure atmosphere of the lubricant is passed through.
作 用
本発明の磁気記録媒体の製造方法は上記のようにするこ
とにより、強磁性金属薄膜を構成する柱状粒子間にも潤
滑剤が浸透し、かつ、電子線又はγ線の照射を受けて強
く反応するため、耐久性が少い潤滑剤量であっても十分
な水準とすることができるのと、飽和蒸気圧に保たれる
ので、処理時間により、潤滑量がコントロールできるの
と、幅。Function: By carrying out the method for manufacturing a magnetic recording medium of the present invention as described above, the lubricant penetrates even between the columnar particles constituting the ferromagnetic metal thin film, and the lubricant penetrates between the columnar particles constituting the ferromagnetic metal thin film, and when irradiated with electron beams or gamma rays, Because it reacts strongly, even the amount of lubricant with low durability can be maintained at a sufficient level.Since the saturated vapor pressure is maintained, the amount of lubrication can be controlled by the processing time. .
長手に関しての均一性も理想的な状態で実現できるので
ある。Uniformity in the longitudinal direction can also be achieved in an ideal state.
実施例
以下、図面を参照しながら本発明の実施例について説明
する。図は本発明の方法を実施するのに用いた処理装置
の一例の要部構成図である。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. The figure is a diagram showing the main part of an example of a processing device used to carry out the method of the present invention.
図で、１は被処理体で、高分子フィルム上に強磁性金属
薄膜を直接配するか、非磁性下地層、軟磁性下地層を介
して配するかしたもので、必要であれば、高分子フィル
ムの一方にフィラーを含んだ樹脂層を塗布してあっても
よい。２は処理室、３は潤滑剤、４は潤滑剤加熱容器で
ある。２は処理室は、スリット５を配した加熱制御可能
な容器壁６と、成子線取出し窓７を含めてなり、処理室
２内が潤滑剤の飽和蒸気圧になるように一定の温度に制
御されるようになっている。８は真空排気系である。９
は送り出し軸、１０は巻取り軸、１１は処理室２と大気
の差圧を維持するためのニップローラーである。１２は
電子銃、１３はスキャンナー、１４は走査磁界発生コイ
ルである。電子銃１２より放射された電子は、チタン箔
などで構成した、電子線取出し窓７より処理室２へ引き
出され、被処理体１を照射するものである。In the figure, 1 is the object to be processed, which has a ferromagnetic metal thin film disposed directly on a polymer film or via a non-magnetic underlayer or a soft magnetic underlayer. A resin layer containing a filler may be coated on one side of the molecular film. 2 is a processing chamber, 3 is a lubricant, and 4 is a lubricant heating container. The processing chamber 2 includes a heating controllable container wall 6 with a slit 5 arranged therein, and a seiko beam extraction window 7, and is controlled to a constant temperature so that the inside of the processing chamber 2 reaches the saturated vapor pressure of the lubricant. It is supposed to be done. 8 is a vacuum exhaust system. 9
10 is a take-up shaft, and 11 is a nip roller for maintaining the differential pressure between the processing chamber 2 and the atmosphere. 12 is an electron gun, 13 is a scanner, and 14 is a scanning magnetic field generating coil. Electrons emitted from the electron gun 12 are drawn out into the processing chamber 2 through an electron beam extraction window 7 made of titanium foil or the like, and irradiate the object 1 to be processed.
図示の装置を用いて、厚みが１０μｍのポリエチレンテ
レフタレートフィルム上に高周波スパッタリング法で形
成した０、１μｍのＣｏ−Ｃｒ（Ｃｒ ：２０ｗｔ％）
垂直磁化膜を配したものを被処理体として、本発明を実
施し、比較として、真空蒸着法で潤滑剤を配したものと
の特性を調べた。なお、真空蒸着は、被処理体１の面を
反対にして巻取るようにして、図示の装置を用いた。Co-Cr (Cr: 20 wt%) of 0.1 μm was formed by high-frequency sputtering on a polyethylene terephthalate film with a thickness of 10 μm using the illustrated apparatus.
The present invention was carried out using an object to be processed having a perpendicularly magnetized film arranged thereon, and for comparison, the characteristics of an object to which a lubricant was applied using a vacuum evaporation method were investigated. In the vacuum deposition, the apparatus shown in the figure was used, with the object 1 to be processed being wound up with its surface reversed.
潤滑剤としてステアリン酸を用い、飽和蒸気圧が１０
（Ｔｏｒｒ）になるように加熱（約７６℃）して、１
５ＱＫ■の電子線を厚みが３Ｑμのチタン箔を透過させ
て、１０５μＡ／ｃＭで照射しながら、６９ｍ１ｓｉｎ
で巻取シ、ステアリン酸の蒸気処理を行った。この処理
は、６ｏｃｒｎ幅の高分子フィルムで長さ３ 、ＯＯＯ
ｍの被処理体で行った。これから８ミ・９幅の磁気テー
プを得た。比較として、ステアリン酸を蒸着したものを
同じく５ｏｃＴｎ幅、３００ ′ｍ長で製造し、
それから８ミリ幅の磁気テープを得た。実施例と比較例
の幅方向、長手方向任意の抽出を行って、各５０ ｍ長
のテープ３０巻について調べた。初期のＰＣＭ録音のエ
ラー率は８ミリビデオテープレコーダで１．５Ｘ１０”
−”〜３．ｌＸ１０−”と差がなかったが、６６℃ａｓ
％ＲＨに１ケ月放置後のＰＣＭエラー率は、本実施例が
２．２Ｘ１０−５〜４．９Ｘ１０ と良好であったの
に対して、比較例は４．ｌＸ１０”−”〜２．Ｉ Ｘｌ
０づ とバラツキが大きく、本実施例の均一性も製造
法の特徴といえることが確認された。Stearic acid is used as a lubricant, and the saturated vapor pressure is 10
(Torr) (approximately 76℃),
An electron beam of 5QK■ was passed through a titanium foil with a thickness of 3Qμ, and while irradiating it at 105μA/cM, 69ml1sin was applied.
The sample was wound up and treated with stearic acid by steam. This process is performed using a 6ocrn wide polymer film with a length of 3 OOO
The test was carried out using a number of objects to be processed. From this, a magnetic tape of 8mm x 9 width was obtained. For comparison, a material with stearic acid vapor deposited was also produced with a width of 5ocTn and a length of 300'm.
Then an 8 mm wide magnetic tape was obtained. Samples of the examples and comparative examples were arbitrarily extracted in the width direction and longitudinal direction, and 30 rolls of tape each having a length of 50 m were investigated. The error rate for early PCM recording was 1.5 x 10" on an 8mm videotape recorder.
-"~3.1X10-", there was no difference, but 66℃as
The PCM error rate after being left at %RH for one month was 2.2X10-5 to 4.9X10 in the present example, while it was 4.9X10 in the comparative example. lX10”-”~2. I Xl
It was confirmed that the uniformity of this example can also be said to be a characteristic of the manufacturing method.
本発明は磁気テープに限らず、磁気ディスクにおいても
適した製法である。The present invention is a manufacturing method suitable not only for magnetic tapes but also for magnetic disks.
なお、強磁性金属薄膜としては、Ｃｏ−Ｃｒに限らず、
Ｃｏ −Ｔ ａ 、 Ｃｏ −Ｔ ｉ 、 Ｃｏ−Ｍｏ
、 Ｃｏ −Ｒｕ 。Note that the ferromagnetic metal thin film is not limited to Co-Cr.
Co-T a , Co-T i , Co-Mo
, Co-Ru.
Ｃｏ −Ｐ ｔ 、 Ｃｏ−Ｒｈ 、 Ｃｏ−３ｍ 、
Ｃｏ−Ｃｕ 、 Ｃｏ −Ｆ ｅ 。Co-Pt, Co-Rh, Co-3m,
Co-Cu, Co-Fe.
Ｃｏ−Ｎｉ 、Ｃｏ−０，Ｃｏ−〇ｓ 、 Ｃｏ −Ｙ
、 Ｃｏ −Ｎ ｉ −Ｐ 。Co-Ni, Co-0, Co-〇s, Co-Y
, Co-Ni-P.
Ｃｏ −Ｎ １−Ｏｒ 、 Ｃｏ−Ｃｒ−Ｎｂ 、 Ｃ
ｏ −Ｎ ｉ−０等でもよく、潤滑剤は、脂肪酸、脂肪
酸エステル、シリコーン化合物、弗素化合物、リン酸エ
ステル等、特に限定されるものではない。また、電子線
に代えてγ線でも、その効果は同じであるが、均一性の
制御の点では電子線の方がやや有利である。Co-N1-Or, Co-Cr-Nb, C
The lubricant may be a fatty acid, a fatty acid ester, a silicone compound, a fluorine compound, a phosphate ester, etc., and the lubricant is not particularly limited. Furthermore, although the effect is the same when γ rays are used instead of electron beams, electron beams are slightly more advantageous in terms of uniformity control.
発明の効果
以上のように本発明によれば、耐久性の向上と、高密度
特性の低下防止を共に満足せしめることと、均一な性能
を大面積にわたって与えることができるといったすぐれ
た効果がある。Effects of the Invention As described above, the present invention has excellent effects such as improving durability, preventing deterioration of high-density characteristics, and providing uniform performance over a large area.
図は本発明の実施に用いた処理装置の一例の要部構成図
である。
１・・・・・・被処理体、２・・・・・・処理室、３・
・・・・・潤滑剤、７・・・・・・電子線取出し窓、１
２・・・・・・電子銃。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名１
・−芹ヂを文ごし【イ２ト
２・〜処理室
ｔ２・Ｉｂ仇The figure is a diagram showing the main parts of an example of a processing device used to implement the present invention. 1...Object to be processed, 2...Processing chamber, 3.
...Lubricant, 7...Electron beam extraction window, 1
2...Electron gun. Name of agent: Patent attorney Toshio Nakao and 1 other person1
・-Seniji is written [I2 to 2・～Processing room t2・Ib enemy
Claims (1)
電子線又はγ線を照射しながら滑剤の飽和蒸気圧雰囲気
を通過させるようにしたことを特徴とする磁気記録媒体
の製造方法。1. A method for manufacturing a magnetic recording medium, comprising passing a saturated vapor pressure atmosphere of a lubricant while irradiating an object having a ferromagnetic metal thin film on a polymer film with electron beams or gamma rays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27253186A JPS63127427A (en) | 1986-11-14 | 1986-11-14 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27253186A JPS63127427A (en) | 1986-11-14 | 1986-11-14 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127427A true JPS63127427A (en) | 1988-05-31 |
Family
ID=17515190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27253186A Pending JPS63127427A (en) | 1986-11-14 | 1986-11-14 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127427A (en) |
-
1986
- 1986-11-14 JP JP27253186A patent/JPS63127427A/en active Pending
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