JPS63122108A - Magnetic head slider - Google Patents
Magnetic head sliderInfo
- Publication number
- JPS63122108A JPS63122108A JP61267609A JP26760986A JPS63122108A JP S63122108 A JPS63122108 A JP S63122108A JP 61267609 A JP61267609 A JP 61267609A JP 26760986 A JP26760986 A JP 26760986A JP S63122108 A JPS63122108 A JP S63122108A
- Authority
- JP
- Japan
- Prior art keywords
- spinel
- magnetic head
- head slider
- slider
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052596 spinel Inorganic materials 0.000 claims abstract description 21
- 239000011029 spinel Substances 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 27
- 239000000843 powder Substances 0.000 abstract description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract description 2
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000010409 thin film Substances 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005347 demagnetization Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 heat Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はスライ、ダの端面に磁性体、導電体、及び絶縁
体の積層物より成る薄膜トランジューサを形成した形態
の薄膜磁気ヘッドに使用するに好適なスライダに関する
。[Detailed Description of the Invention] [Field of Industrial Application] The present invention is used in a thin-film magnetic head in which a thin-film transducer made of a laminate of a magnetic material, a conductor, and an insulator is formed on the end face of a slider or a slider. This invention relates to a slider suitable for
磁気ディスクファイルの分野において、薄膜磁気ヘッド
を磁気ディスクよりわずかに浮上した状態で使用する方
法が広く採用されている。特に、近年ではデータ処理技
術が長足に進歩し、データが記録ディスク面により高密
度に読み込まれるようになってきた。In the field of magnetic disk files, a method in which a thin film magnetic head is used in a slightly floating state above a magnetic disk is widely adopted. In particular, data processing technology has advanced rapidly in recent years, and data has come to be read with higher density onto the recording disk surface.
このため、ヘッドはディスク面とより近い距離を保って
使用することが必要である。このような薄膜磁気ヘッド
用のスライダ材はヘッド形成プロセスにおいては、まず
薬品や熱等に対して安定であること、機械加工時に変形
や変質がおこらないこと、必要な寸法精度が十分に出や
すいこと、切削、研削、研摩等の加工が容易に行なえる
こと、及び、スライダとして磁気ディスクとの摺動性に
優れること等が必要である。For this reason, it is necessary to use the head while keeping a closer distance from the disk surface. During the head forming process, the slider material for thin-film magnetic heads must first be stable against chemicals and heat, be free from deformation or deterioration during machining, and easily achieve the necessary dimensional accuracy. In addition, it is necessary that processing such as cutting, grinding, polishing, etc. can be easily performed, and that the slider has excellent sliding properties with respect to a magnetic disk.
ところで、従来の薄膜磁気ヘッド用スライダ材は、例え
ば、特開昭５８−５４７０号公報に開示されているＡＱ
ｚＯｓとＴｉＣとの混合物から製造されるスライダ材が
ある。この材料は高硬度物質であるＴ ｉ Ｃが分散し
ているため良好な加工性を示すが、摺動時のディスク損
傷が生じやすい、一方、持分１［５８−１２１１７９号
公報に開示されているジルコニアセラミックスから製造
されるスライダ材は、ディとして要求されろ性質を満足
させるような材料として、ＭｇＯとＡＱＮの混合物から
製造された複合焼結体も提案されている。By the way, conventional slider materials for thin film magnetic heads include, for example, AQ disclosed in Japanese Unexamined Patent Publication No. 58-5470.
There are slider materials made from a mixture of zOs and TiC. This material exhibits good workability due to the dispersion of TiC, which is a highly hard substance, but is susceptible to disk damage during sliding. As a slider material manufactured from zirconia ceramics, a composite sintered body manufactured from a mixture of MgO and AQN has also been proposed as a material that satisfies the properties required as a diode.
この材料は熱伝導率が高いため、減磁現象がおこりにく
いが、材料中のＡＱＮが不安定であるため、摺動時に材
料特性が変化し、ディスク損傷が生じやすい。Since this material has high thermal conductivity, demagnetization phenomenon does not easily occur, but since the AQN in the material is unstable, the material properties change during sliding, and disk damage is likely to occur.
〔発明が解決しようとする問題点〕
従来技術では、化学的、に安定な材料を用いて摺動によ
るディスク損傷と、摺動時の摩擦熱に磁気特性劣化を同
時に防止するという点について考慮されておらず、製品
として、信頼性に問題があった。[Problems to be solved by the invention] In the prior art, consideration has been given to the use of chemically stable materials to simultaneously prevent disk damage due to sliding and deterioration of magnetic properties due to frictional heat during sliding. As a result, there were problems with the reliability of the product.
磁気ヘッドスライダ材は、まず、薬品や熱および雰囲気
等に対して安定で、機械加工が可能であること、スライ
ダとして摺動稼動時、ディスク損傷をおこさないこと、
摺動時の摩擦熱による磁気特性劣化をおこさず、スライ
ダが安定した姿勢で浮上稼動しうるような性質が要求さ
れる。そのため、以下の物性を同時に満足する様な材料
が必要となる。すなわち、
（１）薬品や熱および雰囲気中でも安定な材料。First, the magnetic head slider material must be stable against chemicals, heat, and atmosphere, and can be machined, and must not cause damage to the disk when sliding as a slider.
The slider is required to have properties that allow the slider to fly and operate in a stable posture without causing deterioration of magnetic properties due to frictional heat during sliding. Therefore, a material that simultaneously satisfies the following physical properties is required. In other words, (1) Materials that are stable even in chemicals, heat, and atmosphere.
（２）熱膨張率が７ Ｘ １０−＠／℃〜１２Ｘ１０−
”／℃であること。(2) Thermal expansion coefficient is 7 x 10-@/℃ ~ 12 x 10-
”/°C.
（３）ヤング率は７ ｘ １０’ｋｇ／閣２以上である
こと。(3) Young's modulus must be 7 x 10'kg/kaku2 or more.
（４）ビッカース硬さは１５００ｋｇ／ｍ”以下である
こと。(4) Vickers hardness must be 1500 kg/m" or less.
（５）熱伝導率は０．０３Ｃａｆｌ／ａｍ ・Ｓ ・”
Ｃ以上であること。(5) Thermal conductivity is 0.03Cafl/am・S・”
Must be C or above.
（６）密度は４．０ｇ／ａ＃以下であること。(6) Density shall be 4.0 g/a# or less.
本発明の目的は、上記の物性をすべて満足した材料で形
成した磁気ヘッドスライダを提供することにある。An object of the present invention is to provide a magnetic head slider made of a material that satisfies all of the above physical properties.
上記目的を達成するにはこれら（１）〜（６）の物性、
すべてを満足させうる様な材料の選定が必要となる。焼
結体の一般的な性質として、炭化物系、硼化物系および
窒化物系は比較的熱伝導率が高いが、熱膨張率、硬度等
で問題となる。一方、熱伝導率と硬度、さらには、熱膨
張率について比較的良く満足しているものに、硅化物が
あげられる。しかし、これも、密度の点で問題となる。In order to achieve the above purpose, these physical properties (1) to (6),
It is necessary to select a material that satisfies all requirements. As for the general properties of sintered bodies, carbide-based, boride-based, and nitride-based sintered bodies have relatively high thermal conductivity, but they pose problems in terms of thermal expansion coefficient, hardness, and the like. On the other hand, silicides are relatively satisfactory in terms of thermal conductivity, hardness, and coefficient of thermal expansion. However, this also poses a problem in terms of density.
比較的前述の６項目を満足しているものには酸化物系が
あげられる。しかし、酸化物系の焼結体は一般に、熱伝
導率が低い。酸化物系で熱伝導率が高く、比較的安定な
ものは、Ｍ ｇ Ｏ＠ Ａ Ｑ ｚ Ｏａ ｅＴｉｅｓ
等があげられる。これらのうちでＴ ｉ Ｏｚは高温で
不安定となり変態しやすい、又。Oxide-based materials relatively satisfy the above six items. However, oxide-based sintered bodies generally have low thermal conductivity. Oxide-based materials with high thermal conductivity and relatively stability are M g O@ A Q z Oa eTies
etc. can be mentioned. Among these, T i Oz is unstable at high temperatures and easily undergoes transformation.
ＡｊｌｚＯａは硬度ＭｇＯは熱膨張率およびヤング率の
点で問題がある。この問題はＡＱｚＯｓとＭｇＯで構成
されているスピネルを用いろことにより解決できる。AjlzOa has a hardness, and MgO has problems in terms of thermal expansion coefficient and Young's modulus. This problem can be solved by using spinel composed of AQzOs and MgO.
以下、本発明を詳細にのべる。 The present invention will be described in detail below.
スピネル焼結体は化学的にも熱的にも、さらには、各種
の雰囲気でも安定な材料である。さらに、熱膨張率は？
、８ Ｘ １０””／’Ｃ、ヤング率は２．４Ｘ １０
’ｋｇ／ Ｉｌｌ’ｓビッカース硬Ｊｆハ１２００ ｋ
ｇ／Ｗｍ” 、熱伝導率は０．０３５Ｃａｆｌ／ａｍ−
ｓｅｃ・’ｃ、密度は３．５５ ｇ／ｃＪである。これ
らの値は磁気ヘッドスライダ材に要求される物性値すべ
てを満足する。従って、スピネルで形成された磁気ヘッ
ドスライダは、すぐれた摺動性を示す、さらに、Ｃを添
加して焼結したスピネルスライダは本来の摺動性に、Ｃ
による潤滑効果が追加されるため−層摺動特性が向上す
る。しかし、Ｃの添加量が多くなり過ぎるとスライダの
摩耗がはげしくなるため、添加量は２０ｗｔ％以下が妥
当である。さらに、スピネル以外の添加物は、スピネル
の焼結温度でスピネルと反応せず、組織中に安定して存
在する物質でないとスピネル製スライダの特徴が失われ
る事、又、多すぎるとスピネル本来の性質が現出しなく
なるのでスピネルの量は７０ｖｏＭ％以上が必要となる
。Spinel sintered bodies are chemically and thermally stable materials, and even in various atmospheres. Furthermore, what is the coefficient of thermal expansion?
, 8 x 10''/'C, Young's modulus is 2.4 x 10
'kg/ Ill's Vickers Hard Jf Ha 1200k
g/Wm”, thermal conductivity is 0.035Cafl/am-
sec·'c, the density is 3.55 g/cJ. These values satisfy all the physical property values required for the magnetic head slider material. Therefore, a magnetic head slider made of spinel exhibits excellent sliding properties.Furthermore, a spinel slider sintered with the addition of carbon has the original sliding properties of C.
The layer sliding properties are improved due to the additional lubrication effect. However, if the amount of C added is too large, the wear of the slider becomes severe, so it is appropriate that the amount added be 20 wt% or less. Furthermore, additives other than spinel do not react with spinel at the sintering temperature of spinel, and unless they exist stably in the structure, the characteristics of the spinel slider will be lost. The amount of spinel needs to be 70 voM% or more because the properties will not be revealed.
〈実施例１〉
純度が９９．５％で平均粒径０．８μｍのスピネル粉末
をホットプレス用ダイスに充填し、真空中、圧力３０
Ｍ Ｐ ａの加圧下で１６℃／ｓｉｎの昇温速度で加熱
し、１８５０℃、−時間保持後、冷却して得られる焼結
体を用いて、磁気ヘッドスライダを作製した。さらに、
比較例としてＺｒ０ｚを主体とした材料およびＡｕｔｏ
ｓ／ＴｉＣを用いてスライダを作製し、検討した。スラ
イダとディスクとの摺動性試験は次の様にして行なった
。なお、ディスクはアルミニウム円板に磁気記録媒体粉
（γ−Ｆｅｔ’ｓ）とアルミナ・フィシを樹脂でねり合
せた物質を塗付し、その後、表面に潤滑剤をぬった磁気
記録ディスク（塗付媒体形式の磁気記録ディスク）を用
いて行なった。具体的には、まず、ディスク損傷による
摺動寿命調査に関しては、摺動寿命把握のための加速試
験の一つとして提案されている振動打撃試験法を用い、
円板のアルミ地露出までの時間を摺動寿命として把握し
た。<Example 1> Spinel powder with a purity of 99.5% and an average particle size of 0.8 μm was filled into a hot press die, and the powder was heated at a pressure of 30 μm in a vacuum.
A magnetic head slider was manufactured using a sintered body obtained by heating at a temperature increase rate of 16° C./sin under pressure of M Pa, holding at 1850° C. for − hours, and then cooling. moreover,
As a comparative example, materials mainly composed of Zr0z and Auto
A slider was manufactured using s/TiC and examined. The sliding property test between the slider and the disk was conducted as follows. The disk is made by coating an aluminum disk with a substance made by kneading magnetic recording medium powder (γ-Fet's) and alumina fiber together with resin, and then applying a lubricant to the surface of the magnetic recording disk. This was carried out using a magnetic recording disk (media type). Specifically, first, to investigate the sliding life due to disk damage, we used the vibration impact test method, which has been proposed as one of the accelerated tests to understand the sliding life.
The time until the aluminum surface of the disc was exposed was determined as the sliding life.
なお、その時の振動打撃条件は、周速４０ ｍ ／ ｓ
、振動打撃周波数５４Ｈｚ、打撃時の最大加速度１００
０Ｇである。一方、摺動時の摩擦熱による減磁傾向把握
に関しては、一定の振動打撃時間（２０分）に対する出
力残存率を調査することで行なった。なお、この時の振
動打撃条件は、周速２４ 、５ ｍ ／ ｓ で最大加
速度、７００Ｇである。The vibration impact conditions at that time were a circumferential speed of 40 m/s.
, vibration impact frequency 54Hz, maximum acceleration during impact 100
It is 0G. On the other hand, in order to understand the demagnetization tendency due to frictional heat during sliding, this was done by investigating the output survival rate for a fixed vibration impact time (20 minutes). Note that the vibration impact conditions at this time were a peripheral speed of 24, 5 m/s, and a maximum acceleration of 700G.
表１に本項で作製したスライダ材の硬度および熱伝導率
の測定結果、および、摺動性調査結果をまとめて示した
。Table 1 summarizes the measurement results of the hardness and thermal conductivity of the slider material produced in this section, as well as the results of the sliding property investigation.
表１の結果からスピネル製スライダは既存のスライダ材
に比較してすぐれた摺動性を示すことがわかる。From the results in Table 1, it can be seen that the spinel slider exhibits superior sliding properties compared to existing slider materials.
〈実施例２〉
実施例１のスピネル粉末にＣ添加用樹脂（ノボラックフ
ェノール）を焼結後のＣ残留量５０％と仮定して所定の
量を添加して焼損した焼損体、および、炭素繊維を添加
して得られる焼結体でスライダを作製した。なお、焼結
条件は実施例１と同じである０作製したスライダを用い
て摺動性を検討した０表２にそれらの結果をまとめて示
した。<Example 2> A burnt body obtained by adding a predetermined amount of C additive resin (novolac phenol) to the spinel powder of Example 1, assuming that the residual amount of C after sintering is 50%, and carbon fibers. A slider was manufactured using a sintered body obtained by adding . The sintering conditions were the same as in Example 1. The sliding properties were examined using the manufactured slider. Table 2 summarizes the results.
表２から、スピネルにＣを添加して得られる焼結体は摺
動性が向上し、特に、Ｃが配向性をもった繊維状のもの
が有効である。Table 2 shows that sintered bodies obtained by adding C to spinel have improved sliding properties, and fibrous bodies in which C has orientation are particularly effective.
〈実施例３〉
磁気記録媒体をスパッタ方式でアルミ円板に付着させて
作った磁気ディスクを用いて、表２に示すような材料で
作られたスライダの摺動実験を実施例１と同じに行ない
、二十分後の出力残存率を調査した。その結果を表３に
示す。<Example 3> Using a magnetic disk made by attaching a magnetic recording medium to an aluminum disk using a sputtering method, a sliding experiment on a slider made of the materials shown in Table 2 was carried out in the same manner as in Example 1. The remaining output rate after 20 minutes was investigated. The results are shown in Table 3.
表３
表３から、連続媒体のディスクでもスピネルがすぐれ、
Ｃ入りで、さらに、減磁傾向が少なくなり、磁気特性が
改善されることがわかる。Table 3 From Table 3, spinel is superior even in continuous media disks.
It can be seen that the inclusion of C further reduces the demagnetization tendency and improves the magnetic properties.
Claims (1)
気記録媒体の媒体面と接触し、走行時に前記媒体面より
浮上する磁気ヘッドスライダを、ＭｇＯ、ＡｌＯ＿３か
らなるスピネルを主として、不可避的に入る元素を含み
、比較的均一な組織を持つた緻密な焼結体で形成したこ
とを特徴とする磁気ヘッドスライダ。 ２、特許請求の範囲の第１項において、 前記スピネルを主とし、これに前記スピネル中で熱的お
よび化学的に安定に存在する物質を一種類、もしくは、
それ以上添加して焼結して得られる複合焼結体であつて
、前記スピネルの含有量が７０ｖｏｌ％以上であること
を特徴とする磁気ヘッドスライダ。 ３、特許請求の範囲の第２項において、 添加する炭素の量が０．１ｗｔ％〜２０ｗｔ％の範囲で
あることを特徴とする磁気ヘッドスライダ。[Claims] 1. A magnetic head slider that comes into contact with the medium surface of the magnetic recording medium when the magnetic recording medium runs, starts or stops, and flies above the medium surface during running, is made mainly of spinel made of MgO and AlO_3. , a magnetic head slider characterized in that it is formed of a dense sintered body that contains elements that inevitably occur and has a relatively uniform structure. 2. In claim 1, the spinel is mainly composed of one kind of substance that is thermally and chemically stable in the spinel, or
1. A magnetic head slider, which is a composite sintered body obtained by adding and sintering the spinel in an amount of 70 vol% or more. 3. A magnetic head slider according to claim 2, wherein the amount of added carbon is in the range of 0.1 wt% to 20 wt%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61267609A JPS63122108A (en) | 1986-11-12 | 1986-11-12 | Magnetic head slider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61267609A JPS63122108A (en) | 1986-11-12 | 1986-11-12 | Magnetic head slider |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122108A true JPS63122108A (en) | 1988-05-26 |
Family
ID=17447095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61267609A Pending JPS63122108A (en) | 1986-11-12 | 1986-11-12 | Magnetic head slider |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122108A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03102613A (en) * | 1989-01-06 | 1991-04-30 | Hitachi Ltd | Magnetic disk device and thin film magnetic head and wafer for forming thin film magnetic head |
| US5060097A (en) * | 1989-01-06 | 1991-10-22 | Hitachi, Ltd. | Magnetic disc file including a slider which exhibits reduced deformation during operation |
-
1986
- 1986-11-12 JP JP61267609A patent/JPS63122108A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03102613A (en) * | 1989-01-06 | 1991-04-30 | Hitachi Ltd | Magnetic disk device and thin film magnetic head and wafer for forming thin film magnetic head |
| US5060097A (en) * | 1989-01-06 | 1991-10-22 | Hitachi, Ltd. | Magnetic disc file including a slider which exhibits reduced deformation during operation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4649448A (en) | Thin film magnetic head having a sliding surface | |
| JPS63122108A (en) | Magnetic head slider | |
| US5162962A (en) | Magnetic recording apparatus having reduced friction sliding parts | |
| KR930023920A (en) | Improved lifespan magnetic recording / playback heads and their materials | |
| JP2759456B2 (en) | Magnetic media recording device | |
| JPS63183146A (en) | Lightweight high stiffness aluminum alloy plate for magnetic disk substrate | |
| JPH05254938A (en) | Ceramic sintered compact | |
| JPS63208208A (en) | Slider material for magnetic disc | |
| JPH05246763A (en) | Ceramic sintered compact | |
| JP2525161B2 (en) | Glass-like carbon composite material and method for producing the same | |
| JPH05213674A (en) | Ceramic material | |
| JP2523957B2 (en) | Magnetic disk device and magnetic head slider | |
| JP2640471B2 (en) | Substrate material for thin film magnetic head | |
| JPS59144019A (en) | Magnetic head substrate | |
| JPH02180748A (en) | Sintered body for magnetic head and production thereof | |
| JPS63257206A (en) | Slider material for thin film magnetic head | |
| JPH07118073B2 (en) | Magnetic disk drive with thin-film magnetic head | |
| JPH05250638A (en) | Ceramic sintered compact for thin film magnetic head | |
| JPS63313312A (en) | Thin film magnetic head | |
| JPH05217154A (en) | Magnetic recording medium | |
| JPH05258241A (en) | Ceramic sintered compact for thin film magnetic head | |
| JPS6295810A (en) | Oxide substrate and magnetic head using same | |
| JPH06251359A (en) | Magnetic recording medium | |
| JPH05274639A (en) | Nonmagnetic substrate material and floating magnetic head | |
| JPH0782628B2 (en) | Magnetic disk device |