JPS6295810A - Oxide substrate and magnetic head using same - Google Patents
Oxide substrate and magnetic head using sameInfo
- Publication number
- JPS6295810A JPS6295810A JP60236651A JP23665185A JPS6295810A JP S6295810 A JPS6295810 A JP S6295810A JP 60236651 A JP60236651 A JP 60236651A JP 23665185 A JP23665185 A JP 23665185A JP S6295810 A JPS6295810 A JP S6295810A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic
- oxide
- nio
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気ヘッド等に用いられる基板およびこれを
用いて構成した磁気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a substrate used in a magnetic head, etc., and a magnetic head constructed using the same.
従来の技術
従来、磁気ヘッドの構成として、磁気コア材料ニ軟磁性
のパーマロイ・センダスト・アモルファス合金・Ｍｎ−
Ｚｎ−フェライト等を使用し、これを基板に接合又は接
着するか、基板上に蒸着・スパッタ・ＣｖＤ・メッキ等
の方法で形成したものが用いられてきた。Conventional technology Conventionally, magnetic heads have been constructed using magnetic core materials such as soft magnetic permalloy, sendust, amorphous alloy, or Mn-
Zn-ferrite or the like has been used, and it has been bonded or adhered to a substrate, or formed on the substrate by methods such as vapor deposition, sputtering, CVD, and plating.
このようが構成の磁気へ、ラドでは、軟磁性材料と基板
材料の熱膨張係数が等しいか又はその差が極めて小さく
なければ、温度変化によって両材料の接合界面に応力が
生じ、亀裂発生の原因となったり、あるいは磁歪効果に
よって軟磁性体の磁気特性が悪化する。このため使用す
る軟磁性材料の種類０組成による熱膨張係数に対応して
、自由に熱膨張係数を変える事の出来る基板材料が必要
となり、結晶化ガラス、ＣａＯ−３ｒＯ−ＴｉＯ２系セ
ラミック基板（特開昭５２−５７２１８号公報）、Ｎｉ
ＭｎＯ２系セラミ・ツク基板（特開昭６３−１６３９９
号公報）、ＭｇＯ−ＴｉＯ２系セラミック基板（特開昭
６８−１３９３２２号公報）などが提案されている。こ
れらの基板材料は、その組成を調整する事により、広い
範囲で熱膨張係数を選択できるものである。This is due to the magnetic structure of the RAD. Unless the thermal expansion coefficients of the soft magnetic material and the substrate material are equal or the difference is extremely small, temperature changes will generate stress at the bonding interface between the two materials, causing cracks. or the magnetic properties of the soft magnetic material deteriorate due to the magnetostrictive effect. Therefore, it is necessary to use a substrate material whose thermal expansion coefficient can be freely changed according to the thermal expansion coefficient depending on the type and composition of the soft magnetic material used. Publication No. 52-57218), Ni
MnO2-based ceramic substrate (Japanese Patent Application Laid-Open No. 63-16399
JP-A-68-139322) and MgO-TiO2 ceramic substrates (JP-A-68-139322) have been proposed. The coefficient of thermal expansion of these substrate materials can be selected from a wide range by adjusting the composition.
発明が解決しようとする問題点
しかしながら、結晶化ガラスやＣａＯ−ＳｒＯ−Ｔ１０
２系セラミツク基板では、成分としてアルカリ金属ある
いは（ａを含むために化学的に不安定であり、これらの
基板を用いて磁気ヘッドを構成した場合、磁気テープ等
を実際に走行させると、基板表面に磁性粉が付着する現
象を生じ、磁気ヘッド特性が低下する。ＮｉＭｎＯ２系
セラミック基板では、このような磁気テープからの付着
現象は生じないが、ＭｎＯが空気中で加熱されると酸化
されてＭｎ２Ｃ）５ になりやすいために、焼成時の
雰囲気を非酸化性としなければならず、通常の方法では
高密度焼結体を作成することが困難であり、よっτ製造
コストが高くなる。又、使用形状に加工する際の研削加
工性が悪く、加工能率が悪いなどの欠点があった。Problems to be solved by the invention However, crystallized glass and CaO-SrO-T10
2-based ceramic substrates are chemically unstable because they contain alkali metals or This causes magnetic particles to adhere to the magnetic tape, degrading the magnetic head characteristics.With NiMnO2 ceramic substrates, such adhesion from the magnetic tape does not occur, but when MnO is heated in air, it oxidizes and becomes Mn2C. ) 5, the atmosphere during firing must be non-oxidizing, and it is difficult to produce a high-density sintered body using normal methods, which increases the production cost. In addition, there were drawbacks such as poor grindability and poor processing efficiency when processing into the shape to be used.
一方、ＭｇＯ−ＴｉＯ２系セラミック基板では、上記の
ような問題点は生じないが、熱膨張係数が９５Ｘ１０−
’／’Ｃ（２５〜４００°Ｃ）を越えるような組成のも
のでは、遊離のＭｇＯを含むために、高湿度条件下で潮
解現象を起こすという欠点があった。更に、これらの基
板材料は、機械加工時に、カケたり、いわゆるチ・ソピ
ングを生じたり又は、結晶粒子が脱落したりして、磁気
ヘッド用基板として実用化するうえで問題があった。On the other hand, MgO-TiO2 ceramic substrates do not have the above problems, but their thermal expansion coefficient is 95X10-
Those with a composition exceeding '/'C (25 to 400°C) have the disadvantage of causing deliquescence under high humidity conditions because they contain free MgO. Furthermore, these substrate materials have problems in being put into practical use as substrates for magnetic heads because they may chip, cause so-called chi-soping, or cause crystal grains to fall off during machining.
問題点を解決するだめの手段
本発明の酸化物基板は、Ｎｉ０ｆ、６０〜９０重量％、
残分ＴｉＯ２よりなる酸化物複合焼結体を主成分とする
。Means for Solving the Problems The oxide substrate of the present invention contains NiOf, 60 to 90% by weight,
The main component is an oxide composite sintered body consisting of residual TiO2.
作用
ＮｉＯ−ＴｉＯ２系の複合酸化物は、組成比により熱膨
張係数を８６〜１３０Ｘ１０”／”Ｃ（２５°Ｃ〜４０
０’Ｃ）の範囲内で調整可能であり、又、基板表面に磁
気テープを走行させても磁性粉が付着せず、高密度焼結
体を作成しやすい。ＮｉＯの含量を、５０〜９６重量％
に限定することにより、基板表面上に蒸着・スパッタ・
ＣｖＤ・メウキ等の方法で形成する金属磁性膜の熱膨張
係数１００〜１２５ Ｘ １０−７／”Ｃ（２５〜４０
０’Ｃ）と同等の熱膨張係数を得ることができる。Function The NiO-TiO2-based composite oxide has a thermal expansion coefficient of 86 to 130X10"/"C (25°C to 40°C) depending on the composition ratio.
It can be adjusted within the range of 0'C), and magnetic powder does not adhere even when a magnetic tape is run on the surface of the substrate, making it easy to create a high-density sintered body. The content of NiO is 50-96% by weight.
By limiting evaporation, sputtering, and
The thermal expansion coefficient of the metal magnetic film formed by CvD, Meuki, etc. is 100 to 125
0'C) can be obtained.
実施例 以下実施例をしめす。Example Examples are shown below.
試薬特級のＮｉＯ、ＴｉＯ２，ＺｒＯ２ｆそれぞれ秤量
し、アルコールを分散媒としたボールミルにて１６時間
混合した後、１５０°Ｃで乾燥して各種組成の混合粉末
を得た。これらの混合粉末を９００″Ｃで空気中仮焼し
た後、再度ボールミルにて１６時間粉砕し、１５０℃で
乾燥した。この仮焼粉末に６重量％のポリビニールアル
コール水溶液を１０重量％加えて造粒し、１０００に９
／ｃ４の圧力で加圧成形した。成形体は、その組成に応
じて、１２ｏＯ〜１３５０℃の間の温度で加圧（ｓｏｏ
ｋｇ／ｄ）焼結した。得られた焼結体に対して、アルキ
メデス法による密度測定の結果、いずれの組成において
も焼結体密度は真密度の、９９．５％以上であった。そ
こでこの焼結体より試料を切り出し、熱膨張率針による
２６°Ｃ〜４００°Ｃ間の熱膨張係数測定を行った。そ
の結果を第−表に示す。Reagent grade NiO, TiO2, and ZrO2f were each weighed, mixed for 16 hours in a ball mill using alcohol as a dispersion medium, and then dried at 150°C to obtain mixed powders of various compositions. These mixed powders were calcined in air at 900''C, then ground again in a ball mill for 16 hours, and dried at 150℃.To this calcined powder, 10% by weight of a 6% polyvinyl alcohol aqueous solution was added. Granulate, 9 to 1000
Pressure molding was performed at a pressure of /c4. The molded body is pressed at a temperature between 12°C and 1350°C, depending on its composition.
kg/d) sintered. The density of the obtained sintered body was measured by the Archimedes method, and the density of the sintered body was 99.5% or more of the true density in all compositions. Therefore, a sample was cut out from this sintered body, and the thermal expansion coefficient was measured between 26°C and 400°C using a thermal expansion coefficient needle. The results are shown in Table 1.
第−表 Ｎ１Ｏ−Ｔｉ０２系焼結体の諸特性第−表に示
すよう、Ｎｉ０−Ｔ工０２系においてＮｉＯが６０〜９
０重量％の組成物では、その熱膨張係数が１００〜１２
６Ｘ１０−’ ／”Ｃ（２５〜４００″Ｃ）となり、金
属磁性膜の熱膨張係数と一致する。更に、各々の焼結体
の機械加工時のカフやテフビング及び結晶粒子の脱落の
発生状況を光学顕微鏡にて調べた。第２表にその結果を
示す。Table - Properties of N1O-Ti02 system sintered bodies As shown in Table -2, NiO is 60 to 9 in the Ni0-T process 02 system.
For a 0% by weight composition, its coefficient of thermal expansion is 100-12
The coefficient of thermal expansion is 6X10-'/"C (25 to 400"C), which matches the coefficient of thermal expansion of the metal magnetic film. Furthermore, the occurrence of cuffs, teffing, and falling off of crystal particles during machining of each sintered body was examined using an optical microscope. Table 2 shows the results.
第二衣 Ｚｒの添加量と焼結体の緒特性ｚｒに換算して
ｏ、ｏｏｓ〜０．６重量％含有した焼結体表面には、結
晶粒子の脱落は、認められなかったが、ＺｒＯ２を添加
しなかった焼結体では面積１−当たり１０〜２０個の結
晶粒子の脱落が認められた。本発明の基板を用いて、Ｇ
ｏ−Ｚｒ系のアモルファス磁性薄膜をスパッタリングに
よシ形成し、磁気ヘッドを作成した。比較のため、結晶
化ガラス、ＮｉＭｎＯ２系セラミック、 ＭｇＯ−Ｔｉ
０２系セラミツクを用いてそれぞれ同様の方法で磁気ヘ
ッドを作成した。これらの磁気ヘッドに対して各種環境
下で金属磁気テープを実走行させて、ヘッドの出力変化
・耐摩耗性・耐環境性をテストした。その結果、測定開
始後数時間の場合、環境条件が温度２０°Ｃ・湿度６０
チでは基板の種類による特性差は特に見られなかったが
、温度２０°Ｃ・湿度１０％では結晶化ガラスを基板と
した磁気ヘッドでは、基板表面上に磁気テープの金属粉
が付着し、ヘッド出力が数ｄＢ低下した。また、温度４
０°Ｃ−湿度ｓｏ％ではＭｇＯ−ＴｉＯ２系セラミック
基板を用いた磁気ヘッドでは、遊離のＭｇＯの溶解によ
り、基板に粒径に対応した段差が生じ、ヘッド出力が２
〜３ ｄＢ低下した。測定開始後約１００時間の場合、
ＭｇＯ−Ｔｉｅｚ系セラミック基板を用いた磁気ヘッド
では、温度２０’Ｃ・湿度８０％おいても前述した遊離
のＭｇＯの溶解が生じ、ヘッド出力が数ｄＢ低下した。Second Coating Amount of Zr added and characteristics of sintered body Although no crystal grains were observed to fall off on the surface of the sintered body containing o, oos ~ 0.6% by weight in terms of Zr, ZrO2 In the sintered body to which no additive was added, 10 to 20 crystal grains per area were found to have fallen off. Using the substrate of the present invention, G
An o-Zr based amorphous magnetic thin film was formed by sputtering to create a magnetic head. For comparison, crystallized glass, NiMnO2 ceramic, MgO-Ti
Magnetic heads were made using 02 series ceramics in the same manner. These magnetic heads were actually run on a metal magnetic tape under various environments to test the output changes, wear resistance, and environmental resistance of the heads. As a result, in the case of several hours after starting measurement, the environmental conditions were 20°C and 60°C.
In the case of a magnetic head using crystallized glass as a substrate, at a temperature of 20°C and a humidity of 10%, metal powder from the magnetic tape adheres to the substrate surface, causing the head to deteriorate. The output decreased by several dB. Also, temperature 4
At 0°C and so% humidity, in a magnetic head using an MgO-TiO2 ceramic substrate, dissolution of free MgO creates a step on the substrate corresponding to the particle size, and the head output decreases by 2.
-3 dB decrease. Approximately 100 hours after the start of measurement,
In a magnetic head using an MgO-Tiez ceramic substrate, the above-mentioned free MgO dissolved even at a temperature of 20'C and a humidity of 80%, resulting in a drop in head output of several dB.
また、ＮｉＭｎ０２系セラミツク基板を用いた磁気へヮ
ドにおいても、１００時間後には基板とアモルフ、アス
軟磁性体との摩耗性に差があるためヘッド表面に段差を
生じ、ヘッド出方が低下した。しかるに本発明のＮｉＯ
−ＴｉＯ２基板を用いた磁気ヘッドでは、あらゆる環境
条件下においても付着・溶解等を起こすことがなく、ま
たアモルファス軟磁性体との摩耗性のマツチングも良く
、長時間使用してもへ・ンド出力の変化は１ ６８以内
であった。In addition, even in a magnetic head using a NiMn02 ceramic substrate, after 100 hours there was a difference in abrasion between the substrate and the amorphous and amorphous soft magnetic materials, resulting in a step on the head surface and a decrease in head protrusion. . However, the NiO of the present invention
-Magnetic heads using TiO2 substrates do not cause adhesion or melting under any environmental conditions, and also have good abrasion matching with amorphous soft magnetic materials, resulting in no head output even after long periods of use. The change was within 168.
又、ＺｒＯ２を添加した焼結体基板を用いた磁気ヘッド
では、磁気テープが走行する基板表面の面荒れが、無添
加のものに比べ℃、著しく改善された。Furthermore, in a magnetic head using a sintered substrate to which ZrO2 was added, surface roughness on the surface of the substrate on which the magnetic tape runs was significantly improved in degrees Celsius compared to a head without the addition of ZrO2.
以上の実施例においては、熱膨張係数が１１０Ｘ１０／
”Ｃのアモルファス軟磁性薄膜を用いる場合を示したが
、軟磁性材料としてはこれに限らず、その熱膨張係数に
応じて、ＮｉＯ、ＴｉＯ２の含有量を変えることにより
、最適の基板を提供出来るものである。In the above example, the coefficient of thermal expansion is 110X10/
Although we have shown the case where an amorphous soft magnetic thin film of carbon is used, the soft magnetic material is not limited to this, and by changing the content of NiO and TiO2 according to its thermal expansion coefficient, an optimal substrate can be provided. It is something.
また、本発明で用いる基板材料はＮｉｐ、 ＴｉＯ２を
主成分とし、機械加工性を改善するためや、焼結性を改
善するため、少量の添加物を加えても、なんら問題を生
じるものではない。Furthermore, the substrate material used in the present invention has NIP and TiO2 as its main components, and even if a small amount of additives are added to improve machinability or sinterability, no problems will occur. .
発明の効果
本発明の酸化物基板は、ＮｉＯを６０〜９０重量％、残
分ＴｉＯ２よりなる酸化物焼結体を主成分とする熱膨張
係数の調整されたものである。この基板は例えば磁気記
録媒体による接触走行に対して安定で、また、軟磁ビＬ
材料との摩耗性のマツチングも良い。さらに、基板材料
自体、製造および加工が容易である。Effects of the Invention The oxide substrate of the present invention has an adjusted coefficient of thermal expansion and is mainly composed of an oxide sintered body containing 60 to 90% by weight of NiO and the balance being TiO2. This substrate is stable against, for example, contact running with a magnetic recording medium, and is
Good abrasion matching with materials. Furthermore, the substrate material itself is easy to manufacture and process.
Claims (2)
なる酸化物複合焼結体を主成分とする酸化物基板。(1) An oxide substrate whose main component is an oxide composite sintered body consisting of 50 to 90% by weight of NiO and the balance of TiO_2.
、特徴とする特許請求の範囲第１項記載の酸化物基板。 （２）ＮｉＯを５０〜９０重量％、残分ＴｉＯ＿２より
なる酸化物複合焼結体を主成分とする酸化物基板を用い
、この基板に磁気コアとして軟磁性材料を形成したこと
を特徴とする磁気ヘッド。(2) The oxide substrate according to claim 1, characterized in that Zr is added in an amount of 0.005 to 0.5% by weight. (2) An oxide substrate whose main component is an oxide composite sintered body consisting of 50 to 90% by weight of NiO and a balance of TiO_2 is used, and a soft magnetic material is formed as a magnetic core on this substrate. magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60236651A JPS6295810A (en) | 1985-10-23 | 1985-10-23 | Oxide substrate and magnetic head using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60236651A JPS6295810A (en) | 1985-10-23 | 1985-10-23 | Oxide substrate and magnetic head using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6295810A true JPS6295810A (en) | 1987-05-02 |
Family
ID=17003770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60236651A Pending JPS6295810A (en) | 1985-10-23 | 1985-10-23 | Oxide substrate and magnetic head using same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295810A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430308A (en) * | 1990-05-25 | 1992-02-03 | Hitachi Ltd | Magnetic head and its manufacture |
| US6426848B1 (en) * | 1999-06-23 | 2002-07-30 | Sony Corporation | Non-magnetic substrate including TiO2 for a magnetic head and magnetic head |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60204668A (en) * | 1984-03-28 | 1985-10-16 | ティーディーケイ株式会社 | Non-magnetic ceramic material for magnetic head |
-
1985
- 1985-10-23 JP JP60236651A patent/JPS6295810A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60204668A (en) * | 1984-03-28 | 1985-10-16 | ティーディーケイ株式会社 | Non-magnetic ceramic material for magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430308A (en) * | 1990-05-25 | 1992-02-03 | Hitachi Ltd | Magnetic head and its manufacture |
| US6426848B1 (en) * | 1999-06-23 | 2002-07-30 | Sony Corporation | Non-magnetic substrate including TiO2 for a magnetic head and magnetic head |
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