JPS63121478A - Ultrasonic motor - Google Patents

Ultrasonic motor

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Publication number
JPS63121478A
JPS63121478A JP61265063A JP26506386A JPS63121478A JP S63121478 A JPS63121478 A JP S63121478A JP 61265063 A JP61265063 A JP 61265063A JP 26506386 A JP26506386 A JP 26506386A JP S63121478 A JPS63121478 A JP S63121478A
Authority
JP
Japan
Prior art keywords
stator
rotor
motor
ultrasonic motor
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61265063A
Other languages
Japanese (ja)
Other versions
JP2629176B2 (en
Inventor
Yuichi Katagishi
勇一 片岸
Yoshiharu Shiogama
塩釜 吉晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP61265063A priority Critical patent/JP2629176B2/en
Publication of JPS63121478A publication Critical patent/JPS63121478A/en
Application granted granted Critical
Publication of JP2629176B2 publication Critical patent/JP2629176B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To miniaturize the title motor, by a method wherein a pressing means, pressing a stator and a rotor is arranged in a hollow space surrounded by both members so as to be contacted with each other. CONSTITUTION:An ultrasonic motor is constituted of a disc type motor supporting base 21, a motor outer tube 32, a leaf spring 22, having the shape of a cross substantially and screwed to the screw seat of the supporting base 21 through a screw 23, and an annular stator 24, attached to the base. A piezo-electric element 26 is bonded to the rear surface of the main body of the stator 24. A rotor 7 is provided with an annular main body, the same as the stator 24, and a connecting unit and is constituted so as to be screwed to the central mounting unit of a shaft 29 by a screw 30 through the leaf spring 28. When the motor outer tube 32 is attached to the supporting base 21, the stator 24 and the rotor 27 are pressed and contacted with each other by the resilient force of the leaf springs 22, 25, which are forming a pressing means. According to this method, the thickness of the title motor in the direction of a rotary shaft may be thinned as compared with a conventional ultrasonic motor, in which a compression force is applied from the outside thereof, and the title motor may be miniaturized.

Description

【発明の詳細な説明】 A、産業上の利用分野 本発明は、ステータに形成された進行性振動波によりそ
のステータに加圧接触されたロータを回転駆動する超音
波モータに関する。
DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to an ultrasonic motor that rotationally drives a rotor that is brought into pressure contact with a stator by progressive vibration waves formed in the stator.

B、従来の技術 従来より最も一般的に用いられている電磁力を利用した
モータは、形状や材料に対する制約が大きく、また構造
的にも巻き線や、小型で高出力を得るために希土類の永
久磁石を用いる等、コスト面でも限界を有していた。
B. Conventional technology Motors that utilize electromagnetic force, which have been most commonly used in the past, have large restrictions on shape and materials, and structurally require windings and rare earth metals to achieve high output with a small size. There were also limitations in terms of cost, such as the use of permanent magnets.

近年、このような電磁式モータに代わるべくアクチュエ
ータの開発が行なわれ、その1つとして、超音波振動を
利用した超音波モータが開発されている。
In recent years, actuators have been developed to replace such electromagnetic motors, and one example of such actuators is an ultrasonic motor that utilizes ultrasonic vibrations.

この種の超音波モータの基本構成は、例えば第5図(、
)及びそのb−b線断面図である第5図(b)に示すよ
うに、輪帯状の弾性体1と、この弾性体1に貼着された
電歪素子2と、輪帯状の移動体3とからなり、弾性体1
と移動体3とは図示しない弾性部材、例えばばねにより
互いに加圧されている。
The basic configuration of this type of ultrasonic motor is, for example, shown in Figure 5 (
) and FIG. 5(b), which is a cross-sectional view taken along line b-b, shows a ring-shaped elastic body 1, an electrostrictive element 2 attached to this elastic body 1, and a ring-shaped moving body. 3, an elastic body 1
and the movable body 3 are pressed against each other by an elastic member (not shown), such as a spring.

電歪素子2に例えば交流信号を通電すると、弾性体1に
進行性振動波が形成される。ここで、第6図に示すよう
に弾性体1の表面の1つの点Aに着目すると、点Aは長
軸1a、短軸1bで表される長楕円状の軌跡を描く。こ
の結果、移動体3は弾性体1との摩擦力で進行性振動波
の進行方向(矢印N)と逆方向(矢印M)に駆動される
When, for example, an alternating current signal is applied to the electrostrictive element 2, a progressive vibration wave is formed in the elastic body 1. Here, as shown in FIG. 6, when focusing on one point A on the surface of the elastic body 1, the point A draws an elongated locus represented by a major axis 1a and a minor axis 1b. As a result, the movable body 3 is driven by the frictional force with the elastic body 1 in a direction (arrow M) opposite to the traveling direction (arrow N) of the progressive vibration wave.

このように、超音波モータの駆動原理は摩擦接触を前提
としたものであるため1弾性体1と移動体3との間にあ
る一定の押圧力を加えて移動体3を回転駆動せしめてい
る。例えば特開昭60−210172号公報に開示され
た第7図に示す超音波モータでは、圧縮ばねにより両者
を加圧している。
As described above, since the driving principle of the ultrasonic motor is based on frictional contact, a certain pressing force is applied between the elastic body 1 and the movable body 3 to rotate the movable body 3. . For example, in the ultrasonic motor shown in FIG. 7 disclosed in Japanese Unexamined Patent Publication No. 60-210172, both are pressurized by a compression spring.

第7図において、この超音波モータは、環状のステータ
11と、このステータ11の裏面に接着される電歪素子
12と、ステータ11に形成される進行性振動波により
回転駆動されるロータ13と、ステータ11を保持する
振動吸収体14と、スラストベアリング15を介してロ
ータ13をステータ11に加圧するばね16と、これら
を支持する支持部材17と、ケースカバー18とから成
る。
In FIG. 7, this ultrasonic motor includes an annular stator 11, an electrostrictive element 12 bonded to the back surface of the stator 11, and a rotor 13 that is rotationally driven by progressive vibration waves formed in the stator 11. , a vibration absorber 14 that holds the stator 11, a spring 16 that presses the rotor 13 against the stator 11 via a thrust bearing 15, a support member 17 that supports these, and a case cover 18.

上記の構成にてステータ11には電歪素子12により進
行性振動波が形成され、ばね16にてステータ11に加
圧されるロータ13は上記進行性振動波により駆動され
回転する6 C0発明が解決しようとする問題点 しかしながら、上記の構成による超音波モータにおいて
は、ロータ13の上側から圧縮コイルばね16で加圧す
るため、回転軸方向に厚みのある構造となり小型化しに
くいという問題点があった。
With the above configuration, a progressive vibration wave is formed in the stator 11 by the electrostrictive element 12, and the rotor 13, which is pressurized against the stator 11 by the spring 16, is driven and rotated by the progressive vibration wave. Problems to be Solved However, in the ultrasonic motor having the above-mentioned configuration, since pressure is applied from the upper side of the rotor 13 by the compression coil spring 16, there is a problem that the structure is thick in the direction of the rotation axis, making it difficult to downsize. .

本発明の目的は、これらの欠点を解決し、小型化した超
音波モータを得ることにある。
An object of the present invention is to solve these drawbacks and obtain a miniaturized ultrasonic motor.

D1問題点を解決するための手段 一実施例を示す第1図により本発明を説明すると、本発
明に係わる超音波モータは、電歪素子26により進行性
振動波が形成されるステータ24と、この進行性振動波
により回転駆動されるロータ27と、このロータ27と
ステータ24とを加圧接触させる加圧手段22.28と
を有する。
The present invention will be explained with reference to FIG. 1 showing an embodiment of means for solving problem D1. The ultrasonic motor according to the present invention includes a stator 24 in which a progressive vibration wave is formed by an electrostrictive element 26; It has a rotor 27 that is rotationally driven by this progressive vibration wave, and pressure means 22 and 28 that bring the rotor 27 and the stator 24 into pressurized contact.

そして、上述の問題点は、ステータ24とロータ27と
に囲繞される中空空間に加圧手段22゜28を配設する
ことにより解決される。
The above-mentioned problem can be solved by disposing the pressurizing means 22 and 28 in the hollow space surrounded by the stator 24 and the rotor 27.

E1作用 ステータ24およびロータ27に囲繞された中空空間内
に配設された加圧手段22.28によりステータ24と
ロータ27とを加圧接触させる。
E1 action Stator 24 and rotor 27 are brought into pressurized contact by pressurizing means 22.28 disposed in a hollow space surrounded by stator 24 and rotor 27.

ステータ24に形成される進行性振動波によりロータ2
7が回転駆動される。
The progressive vibration waves formed in the stator 24 cause the rotor 2 to
7 is rotationally driven.

F、実施例 第1図〜第4図により一実施例について説明する。F. Example One embodiment will be described with reference to FIGS. 1 to 4.

超音波モータの縦断面を示し第2図の■−■線断面図で
ある第1図およびその分解斜視図である第2図において
、21は円板状のモータ支持台であり、中央に円柱状の
ねじ座211が突設され。
In FIG. 1, which is a cross-sectional view taken along the line ■-■ in FIG. 2, showing a vertical cross-section of the ultrasonic motor, and FIG. A columnar screw seat 211 is provided protrudingly.

周縁に後述するモータ外筒32を螺着するためのビス孔
212が貫通されている。ねじ座211には略十字形状
に形成された板ばね22がねじ23により螺着されてい
る。板ばね22は、中央の取付は円板部221と、その
周縁部から斜め下方に放射状に延在する板状の支持脚2
22とを有し。
A screw hole 212 for screwing a motor outer cylinder 32, which will be described later, is passed through the peripheral edge. A plate spring 22 formed in a substantially cross shape is screwed onto the screw seat 211 with a screw 23 . The leaf spring 22 is attached to a disk portion 221 in the center and plate-shaped support legs 2 extending radially diagonally downward from the peripheral edge of the disk portion 221.
22.

支持脚222の各先端は中央円板部221と平行な支持
面222aに形成され、ステータ取付は用のビス孔22
3が貫通されている。各支持脚222の屈曲とねじりの
固有振動数は後述するステータ24に生ずる進行性振動
波の振動数と等しくされている。
Each tip of the support leg 222 is formed on a support surface 222a parallel to the central disc portion 221, and the stator is attached to the screw hole 22.
3 is penetrated. The natural frequency of bending and twisting of each support leg 222 is made equal to the frequency of a progressive vibration wave generated in the stator 24, which will be described later.

24はステータであり、円環状の本体241と、本体2
41の内周面から内方に突設された円環状の接続部24
2とを有する。両部材241゜242の接続に関し、第
2図に示す面内における両部材241,242の半径方
向の中立軸は一致され、接続部242に本体241から
の振動が伝播しないように考慮されている。接続部24
2にはねじ孔242aが螺刻され、板ばね22の支持面
222aとステータ24における接続部242の下面と
を当接させてねじ25により互いに接続される。このス
テータ24における本体241の裏面には電歪素子26
が貼着されている。
24 is a stator, which includes an annular main body 241 and a main body 2
An annular connecting portion 24 protruding inward from the inner peripheral surface of 41
2. Regarding the connection between the two members 241 and 242, the neutral axes of the two members 241 and 242 in the radial direction in the plane shown in FIG. . Connection part 24
A screw hole 242a is threaded in 2, and the supporting surface 222a of the leaf spring 22 and the lower surface of the connecting portion 242 of the stator 24 are brought into contact with each other and connected to each other by the screw 25. An electrostrictive element 26 is provided on the back surface of the main body 241 of the stator 24.
is pasted.

27はロータであり、ステータ24と同様の円環状の本
体271と1本体271の内周面から内方に突設された
円環状の接続部272とを有する。
A rotor 27 has an annular main body 271 similar to the stator 24 and an annular connecting portion 272 protruding inward from the inner circumferential surface of the main body 271.

両部材271,272の接続に関し、第2図に示す面内
における両部材271,272の半径方向の中立軸は一
致され、接続部272に本体271から振動が伝、#I
しないように考慮されている。
Regarding the connection of both members 271 and 272, the radial neutral axes of both members 271 and 272 in the plane shown in FIG.
It is considered not to.

接続部272にはねじ孔272aが螺刻され、前述した
と同一形状の板ばね28、その支持面282aを接続部
272の表面に当接させてねじ34により接続されてい
る。この板ばね28は、その中央取付は部281を軸2
9の頂面に形成された円板部291に接した状態でねじ
30により螺着されている。軸29にスラストベアリン
グ31が遊嵌されて円板部291に装着される。
A screw hole 272a is threaded in the connecting portion 272, and the leaf spring 28 having the same shape as described above is connected to the connecting portion 272 by a screw 34 with its supporting surface 282a in contact with the surface of the connecting portion 272. This leaf spring 28 has a center mounting portion 281 on the shaft 2.
It is screwed into place with a screw 30 in contact with a disk portion 291 formed on the top surface of 9. A thrust bearing 31 is loosely fitted onto the shaft 29 and attached to the disc portion 291.

32はモータ外筒であり、モータ支持台21上にその開
放端面を載置してねじ3,3により螺着される。
Reference numeral 32 denotes a motor outer cylinder, and its open end surface is placed on the motor support stand 21 and screwed with screws 3, 3.

モータ外筒32をモータ支持台21に取付ける前におい
ては、板ばね22,28は第3図の実線で示すように元
の形状を保つが、モータ外筒32をモータ支持台21に
取付けると破線で示すよう変形し、その弾性力にてステ
ータ24とロータ27とを加圧接触することになる。な
お、板ばね22.28が加圧手段を構成する。
Before the motor outer cylinder 32 is attached to the motor support stand 21, the leaf springs 22 and 28 maintain their original shapes as shown by the solid lines in FIG. The stator 24 and the rotor 27 are deformed as shown in FIG. Note that the leaf springs 22 and 28 constitute the pressurizing means.

このように構成された超音波モータにおいて、図示しな
い駆動回路から電歪素子26に例えば交流信号を供給す
ると、第4図に示すように、ステータ24に進行性振動
波が形成される。そして、ステータ24に加圧接触され
ているロータ27にこの進行性振動波が伝播され、第4
図に示すとおりその表面に進行性振動波が形成されつつ
回転駆動される。この回転力は、軸29に伝達されモー
タ外筒32の外部に取り出される。
In the ultrasonic motor configured as described above, when an AC signal, for example, is supplied from a drive circuit (not shown) to the electrostrictive element 26, a progressive vibration wave is formed in the stator 24, as shown in FIG. This progressive vibration wave is then propagated to the rotor 27 which is in pressure contact with the stator 24, and the fourth
As shown in the figure, it is rotated while progressive vibration waves are formed on its surface. This rotational force is transmitted to the shaft 29 and extracted to the outside of the motor outer cylinder 32.

このようにこの実施例によれば、ステータ24とロータ
27とを互いに加圧接触させる板ばね22.28がステ
ータ24とロータ27とにより囲繞された中空空間に完
全に収容されており、従来のようにロータの外部から圧
縮力を作用させるものに比べて回転軸方向の厚みが著し
く薄くなり、小型化に寄与すること大である。また、ス
テータ24およびロータ27の接続部242,272が
本体241及び271の中立軸にそれぞれ設けられ、そ
こで板ばね22,28と接続したので、ロータ表面に進
行性振動波が形成される。いわゆる弾性型ロータを用い
た超音波モータの効率を損ねることもない。
As described above, according to this embodiment, the leaf springs 22, 28 that bring the stator 24 and the rotor 27 into pressure contact with each other are completely housed in the hollow space surrounded by the stator 24 and the rotor 27, which is different from the conventional one. Compared to a rotor in which compressive force is applied from outside, the thickness in the direction of the rotational axis is significantly thinner, which greatly contributes to miniaturization. Further, since the connecting portions 242 and 272 of the stator 24 and the rotor 27 are provided on the neutral axes of the main bodies 241 and 271, respectively, and connected to the leaf springs 22 and 28 there, progressive vibration waves are formed on the rotor surface. The efficiency of an ultrasonic motor using a so-called elastic rotor is not impaired.

以上では、十字形状の2枚の板ばね22,28により加
圧手段を構成したが、ステータ側またはロータ側にのみ
板ばねを設けるようにしてもよい。
In the above description, the pressure means is configured by the two cross-shaped leaf springs 22 and 28, but the leaf spring may be provided only on the stator side or the rotor side.

また、十字形状の板ばねに限らず、薄板円板状のいわゆ
るダイアフラムを用いたばね体あるいは皿ばね等、ステ
ータとロータとに囲続される中空空間に配設されるもの
ならば加圧手段はどのようなものでもよい。更に、加圧
手段の一部がステータとロータとで囲繞される中空空間
から突呂していてもよい。更にまた、以上では、回転軸
をロータの回転軸心と同軸としたが、偏心させてカムの
ように用いてもよい。
In addition, the pressurizing means is not limited to a cross-shaped leaf spring, but can be a spring body using a so-called diaphragm in the shape of a thin disc, or a disc spring, etc., if it is disposed in a hollow space surrounded by the stator and rotor. It can be anything. Furthermore, a part of the pressurizing means may protrude from a hollow space surrounded by the stator and rotor. Furthermore, in the above description, the rotation axis is coaxial with the rotation axis of the rotor, but it may be made eccentric and used like a cam.

G0発明の効果 本発明によれば、ステータとロータとを互いに加圧接触
させる加圧手段を両部材で囲繞される中空空間内に配設
したので、超音波モータの回転軸方向の厚みを薄くでき
、その小型化に寄与する。
G0 Effects of the Invention According to the present invention, the pressure means for bringing the stator and rotor into pressure contact with each other is disposed in the hollow space surrounded by both members, so that the thickness of the ultrasonic motor in the direction of the rotation axis can be reduced. This contributes to its miniaturization.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第4図は本発明の一実施例を説明するもので、
第1図は第2図の■−■線に沿った断面図、第2図は全
体構成を示す分解斜視図、第3図はその板ばねの撓みを
説明する断面図、第4図はステータとロータの進行性振
動波を説明する図である。 第5図〜第7図は従来例を説明するもので、第5図(a
)は超音波モータの平面図、第5図(b)はそのb−b
線断面図、第6図は原理図、第7図は従来例の縦断面図
である。 21:支持台   22,28:板ばね24:ステータ
     26:電歪素子27:ロータ       
29:軸 31ニスラストベアリング 32:モータ外筒 特許出願人  日本光学工業株式会社 代理人弁理士   永 井 冬 紀 第1図 第5図 第4図 第5図(b)     第6図 第7図
Figures 1 to 4 illustrate one embodiment of the present invention.
Fig. 1 is a sectional view taken along the line ■-■ in Fig. 2, Fig. 2 is an exploded perspective view showing the overall configuration, Fig. 3 is a sectional view explaining the deflection of the leaf spring, and Fig. 4 is a stator. FIG. 3 is a diagram illustrating progressive vibration waves of the rotor. Figures 5 to 7 explain the conventional example, and Figure 5 (a)
) is a plan view of the ultrasonic motor, and Fig. 5(b) is its b-b
A line sectional view, FIG. 6 is a principle diagram, and FIG. 7 is a longitudinal sectional view of a conventional example. 21: Support base 22, 28: Leaf spring 24: Stator 26: Electrostrictive element 27: Rotor
29: Shaft 31 Ni-last bearing 32: Motor outer cylinder Patent applicant: Nippon Kogaku Kogyo Co., Ltd. Representative Patent Attorney Fuyuki Nagai Figure 1 Figure 5 Figure 4 Figure 5 (b) Figure 6 Figure 7

Claims (1)

【特許請求の範囲】 進行性振動波が形成されるステータと、この進行性振動
波により回転駆動されるロータと、このロータと前記ス
テータとを加圧接触させる加圧手段とを有する超音波モ
ータにおいて、 前記ステータとロータとに囲繞される中空空間に前記加
圧手段を配設したことを特徴とする超音波モータ。
[Claims] An ultrasonic motor having a stator in which progressive vibration waves are formed, a rotor rotationally driven by the progressive vibration waves, and a pressurizing means for bringing the rotor into pressure contact with the stator. An ultrasonic motor, characterized in that the pressurizing means is disposed in a hollow space surrounded by the stator and rotor.
JP61265063A 1986-11-07 1986-11-07 Vibration motor Expired - Lifetime JP2629176B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61265063A JP2629176B2 (en) 1986-11-07 1986-11-07 Vibration motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61265063A JP2629176B2 (en) 1986-11-07 1986-11-07 Vibration motor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6004773A Division JP2692571B2 (en) 1994-01-20 1994-01-20 Vibration actuator

Publications (2)

Publication Number Publication Date
JPS63121478A true JPS63121478A (en) 1988-05-25
JP2629176B2 JP2629176B2 (en) 1997-07-09

Family

ID=17412069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61265063A Expired - Lifetime JP2629176B2 (en) 1986-11-07 1986-11-07 Vibration motor

Country Status (1)

Country Link
JP (1) JP2629176B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0352570A (en) * 1989-07-19 1991-03-06 Mitsubishi Steel Mfg Co Ltd Ultrasonic motor
JPH0529293U (en) * 1991-09-17 1993-04-16 オリエンタルモーター株式会社 Ultrasonic motor
CH684731GA3 (en) * 1992-07-20 1994-12-15 Asulab Sa Piezoelectric motor.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277068A (en) * 1985-08-31 1987-04-09 Shinsei Kogyo:Kk Improvement in support of surface wave motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277068A (en) * 1985-08-31 1987-04-09 Shinsei Kogyo:Kk Improvement in support of surface wave motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0352570A (en) * 1989-07-19 1991-03-06 Mitsubishi Steel Mfg Co Ltd Ultrasonic motor
JPH0529293U (en) * 1991-09-17 1993-04-16 オリエンタルモーター株式会社 Ultrasonic motor
CH684731GA3 (en) * 1992-07-20 1994-12-15 Asulab Sa Piezoelectric motor.

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