JPS63116478A - Carbon dioxide gas laser oscillating device - Google Patents
Carbon dioxide gas laser oscillating deviceInfo
- Publication number
- JPS63116478A JPS63116478A JP26179986A JP26179986A JPS63116478A JP S63116478 A JPS63116478 A JP S63116478A JP 26179986 A JP26179986 A JP 26179986A JP 26179986 A JP26179986 A JP 26179986A JP S63116478 A JPS63116478 A JP S63116478A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- cathode
- laser oscillation
- discharge
- oscillation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 34
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims description 17
- 239000001569 carbon dioxide Substances 0.000 title claims description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 6
- 239000010935 stainless steel Substances 0.000 claims abstract description 6
- 239000000853 adhesive Substances 0.000 claims abstract 2
- 230000001070 adhesive effect Effects 0.000 claims abstract 2
- 230000010355 oscillation Effects 0.000 claims description 16
- 230000001590 oxidative effect Effects 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 abstract 1
- 229910033181 TiB2 Inorganic materials 0.000 abstract 1
- 229910007948 ZrB2 Inorganic materials 0.000 abstract 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- CZDSWLXAULJYPZ-UHFFFAOYSA-J molybdenum(4+);dicarbonate Chemical compound [Mo+4].[O-]C([O-])=O.[O-]C([O-])=O CZDSWLXAULJYPZ-UHFFFAOYSA-J 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は放電励起形炭酸ガス・レーザ発１辰装置に係り
、特にその陰極構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a discharge-excited carbon dioxide laser emission device, and particularly to its cathode structure.
（従来の技術）
連続発振を要求される炭酸ガス・レーザ発振装置は、通
常のガラス管形の炭酸ガス・レーザ発振装置に比して単
位体積当りのレーザ媒質ガス（ＣＯ２Ｎ２ Ｈｅの混
合気体）への注入放電電力を高め、かつレーザ媒質ガス
を強制循環することによりガス冷却を効率的に図ること
ができる結果、飛躍的に高いレーザ出力を発生すること
ができる。(Prior art) Carbon dioxide laser oscillation devices that require continuous oscillation require less laser medium gas (mixed gas of CO2N2He) per unit volume than ordinary glass tube type carbon dioxide laser oscillation devices. By increasing the injected discharge power and forcing the laser medium gas to circulate, it is possible to efficiently cool the gas, and as a result, a significantly higher laser output can be generated.
（発明が解決しようとする問題点）
ところで、従来技術においては、陰極の放電ピンの材料
は、通常モリブデンが用いられている。(Problems to be Solved by the Invention) In the prior art, molybdenum is usually used as the material for the discharge pin of the cathode.
しかし、炭酸ガス・レーザ発］辰装置ではＣｏ２−Ｎ２
Ｈｅの混合気体中でレーザ放電が行われるので、炭酸ガ
スの分解により生成した酸素が陰極ピンの材料であるモ
リブデンと反応して炭酸モリブデンを生じ、陰極ピンの
表面に蓄積される。その結果、酸化モリブデンは絶縁物
であり、陰極ピンの実質上の表面積を低下させるので、
アーク限界電流が減少する。また、酸化物表面にはグロ
ー放電が点弧しないので放電ピンの点弧も不良となり、
電圧印加直後にいきなりアークが発生するというような
事態も生ずる。However, CO2-N2
Since laser discharge is performed in a mixed gas of He, oxygen generated by decomposition of carbon dioxide reacts with molybdenum, which is the material of the cathode pin, to produce molybdenum carbonate, which is accumulated on the surface of the cathode pin. As a result, molybdenum oxide is an insulator and reduces the effective surface area of the cathode pin, so
Arc limit current decreases. In addition, since the glow discharge does not ignite on the oxide surface, the ignition of the discharge pin will also be poor.
A situation may also occur in which an arc suddenly occurs immediately after voltage application.
従って、従来の炭酸ガス・レーザ発振装置では電極、特
に陰極ピンの洗浄が不可欠で、定期的にレーザ容器を開
放して放電ピンを紙ヤスリ等で研磨することが必要で、
実用面での大きな欠点の一つとなっていた。Therefore, in conventional carbon dioxide laser oscillation devices, it is essential to clean the electrodes, especially the cathode pins, and it is necessary to periodically open the laser container and polish the discharge pins with sandpaper.
This was one of the major drawbacks in practical terms.
本発明は上記事情に鑑みてなされたもので、その目的は
、炭酸ガス・レーザ発振装置において用いられる酸化性
ガスや、エキシマ・レーザなとで用いられるハロゲンの
ような腐蝕性ガスに対しても強い放電ピンを提供し、メ
ンテナンスのほとんどいらない炭酸ガス・レーザ発振器
を提供することにおる。The present invention was made in view of the above circumstances, and its purpose is to protect against corrosive gases such as oxidizing gases used in carbon dioxide gas laser oscillation devices and halogens used in excimer lasers. Our objective is to provide a carbon dioxide laser oscillator that provides a strong discharge pin and requires almost no maintenance.
［発明の構成］
（問題点を解決するための手段）
本発明は上記目的を達成するために、炭酸ガス・レーザ
発振装置において、その陰極を導電性セラミックスで形
成したことを特徴とするものである。[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention is characterized in that the cathode of a carbon dioxide laser oscillation device is formed of conductive ceramics. be.
（作 用）
導電性セラミックスのＳｉＣや１ｒ８２などは高温で微
粒子を焼結して生成したもので、個々の微粒子内部での
原子間結合は強固であるから、高温の酸化ガス中に晒さ
れても酸化されにくい。(Function) Conductive ceramics such as SiC and 1r82 are produced by sintering fine particles at high temperatures, and since the interatomic bonds within each fine particle are strong, they cannot be exposed to high-temperature oxidizing gas. It is also not easily oxidized.
また、放電グローによるスパッタ作用に対しても微粒子
内部の強固な原子間結合のために強い材料となっている
。しかも、導電性が例えばｚｒＢ２では１０−５Ωｃｍ
程度と、銅より一桁大きい程度でステンレス並であるか
ら（第１表参照）、グロー放電用の電極としては十分に
使用に耐え得るものである。Moreover, it is a strong material against the sputtering action caused by discharge glow due to the strong interatomic bonds inside the fine particles. Moreover, the conductivity is 10-5Ωcm for zrB2, for example.
Since the quality is one order of magnitude higher than that of copper and comparable to that of stainless steel (see Table 1), it can be used as a glow discharge electrode.
第１表（金属の導電率）
金属 抵抗率（２０℃）銅
１．６９
モリブデン ４．７７
ステンレス ５７
ざらに、従来使われているモリブデン電極に比して抵抗
が一桁程大きいから電極自身に若干のバラスト抵抗効果
がおる。また、熱伝導率もモリブデンよりは劣るので電
極に保温効果があり、特に、パルス動作の場合、陰極グ
ローが消えても電極ピンは放電動作状態とほぼ同程度の
温度を維持している。したがって、再度パルスが印加さ
れれば直ちにピンが点弧するからパルス動作遅れのない
良好な特性の放電ピンが得られる。Table 1 (Electrical conductivity of metals) Metal Resistivity (20℃) Copper
1.69 Molybdenum 4.77 Stainless steel 57 Generally speaking, the resistance is about an order of magnitude higher than the conventionally used molybdenum electrode, so the electrode itself has a slight ballast resistance effect. In addition, since its thermal conductivity is inferior to molybdenum, it has a heat-retaining effect on the electrode, and in particular, in the case of pulse operation, even when the cathode glow disappears, the electrode pin maintains approximately the same temperature as in the discharge operation state. Therefore, when a pulse is applied again, the pin fires immediately, so a discharge pin with good characteristics without any delay in pulse operation can be obtained.
（実施例）
以下、本発明の一実施例を図面を参照しながら説明する
。第１図、第２図は平板陽極、複数の棒状陰極からなる
電極構成を採用し、高速度の気体流中でレーザを発（辰
している様子を示す。(Example) Hereinafter, an example of the present invention will be described with reference to the drawings. Figures 1 and 2 show how a laser is emitted in a high-velocity gas flow using an electrode configuration consisting of a flat plate anode and a plurality of rod-shaped cathodes.
第１図および第２図において、気密に構成されたレーザ
風胴１中に、レーザ媒質ガス（Ｃｏ２−Ｎ・２−Ｈｅの
混合気体）が低圧、例えば５０トール（Ｔｏｒｒ）で封
入されている。このレーザ風胴１中には放電励起部２と
送風機４とが配置されている。In FIGS. 1 and 2, a laser medium gas (mixed gas of Co2-N and 2-He) is sealed in a gas-tight laser barrel 1 at a low pressure, for example, 50 Torr. . A discharge excitation section 2 and a blower 4 are arranged in the laser wind barrel 1 .
この放電励起部２は複数のピン状の陰極５と平板状の陽
極６とから構成されている。ここで、陰極ピン５は導電
性セラミックスより成るピン先端部５ａと、この先端部
５ａの導電性セラミックスと支持電極部５Ｃの材料との
接着性の良い接続用金属部５ｂと、熱伝導性が接続用金
Ｅ５ｂより劣るステンレス等よりなる支持電極部５Ｃと
から構成されている。This discharge excitation section 2 is composed of a plurality of pin-shaped cathodes 5 and a flat plate-shaped anode 6. Here, the cathode pin 5 has a pin tip 5a made of conductive ceramic, a connecting metal part 5b with good adhesion between the conductive ceramic of this tip 5a and the material of the supporting electrode part 5C, and a thermally conductive metal part 5b. The supporting electrode portion 5C is made of stainless steel or the like which is inferior to the connecting gold E5b.
陰極５と陽極６はバラスト抵抗９を介して、外部の直流
電源１０に接続されている。７は送風機４によるレーザ
媒質ガスの流れを示す。平板状の陽極６に平行に一対の
共振ミラー８ａ、８ｂが配置されてレーザ共振器を構成
する。１２はレーザ光の方向を示す。３はレーザ媒質ガ
スを冷却するための熱交換器である。The cathode 5 and the anode 6 are connected to an external DC power source 10 via a ballast resistor 9. 7 shows the flow of laser medium gas by the blower 4. A pair of resonant mirrors 8a and 8b are arranged parallel to the flat anode 6 to form a laser resonator. 12 indicates the direction of the laser beam. 3 is a heat exchanger for cooling the laser medium gas.
次に、上記の如く構成された本発明に係る炭酸ガス・レ
ーザ発振装置装置の作用について説明する。Next, the operation of the carbon dioxide laser oscillation device according to the present invention configured as described above will be explained.
直流電源１０により、陰極５と陽極６との間に高電圧が
印加され、グロー放電１１が電極５，６間に形成される
。このグロー放電１１により放電励起部２に入ったレー
ザ媒質ガス中の分子は励起され、誘導放出を行なって、
レーザ光を共振ミラー８ａ。A high voltage is applied between the cathode 5 and the anode 6 by the DC power supply 10, and a glow discharge 11 is formed between the electrodes 5 and 6. Molecules in the laser medium gas that entered the discharge excitation section 2 are excited by this glow discharge 11, and undergo stimulated emission.
The laser beam is transmitted to the resonant mirror 8a.
８ｂを通して矢印１２に示すように外部に放出する。8b to the outside as shown by arrow 12.
このレーザ媒質ガスは送風機４により約８０〜１００ｍ
の流速でレーザ風胴１内を循環しているが、誘導放出を
終えたガスは放電エネルギを熱として保有しているので
、熱交換器３を介して熱を外部に放出し冷却されて、再
び送風Ｒ４により放電励起部２に供給される。This laser medium gas is transported approximately 80 to 100 meters by the blower 4.
The gas that has undergone stimulated emission retains the discharge energy as heat, so it releases heat to the outside via the heat exchanger 3 and is cooled. The air is again supplied to the discharge excitation section 2 by the air blower R4.
陰極ピン５は負グローが覆う部分の先端部５ａが導電性
セラミックスで構成されているので、放電雰囲気を構成
しているヘリウム、窒素、二駿化炭素より成るレーデ−
媒質ガスの分解から生じる酸素の酸化作用に対して強い
材料で形成されている。The tip 5a of the cathode pin 5, which is the part covered by the negative glow, is made of conductive ceramics.
It is made of a material that is resistant to the oxidizing effects of oxygen generated from the decomposition of the medium gas.
また、第１図において、先端部５ａと支持電極部、５ｃ
との接続に用いられる接続用金属部５ｂは接着性が最適
である材料、例えば銅が選定されているので、放電ピン
５を長期間使用しても接着ツクの低下により先端部５ａ
が外れるという危険性がない。ざらに、支持電極部５Ｃ
は熱伝導性が接続用金属５ｂのそれより小さな材料を用
いているので、陰極ピン５を支持している絶縁板（図示
せず）への熱入力が最小に抑制でき、絶縁板の信頼性を
向上させることができる。In addition, in FIG. 1, the tip portion 5a, the supporting electrode portion, 5c
The connecting metal part 5b used for connection with the metal part 5b is made of a material with optimal adhesiveness, such as copper, so even if the discharge pin 5 is used for a long period of time, the adhesion strength will deteriorate and the tip part 5a will be damaged.
There is no risk of it coming off. Roughly, supporting electrode part 5C
uses a material whose thermal conductivity is lower than that of the connecting metal 5b, so that the heat input to the insulating plate (not shown) supporting the cathode pin 5 can be suppressed to a minimum, and the reliability of the insulating plate is improved. can be improved.
ざらにまた、支持電極部５Ｃから外部への熱伝導が最小
となるので、陰極ピン５の先端部５ａの温度をグロー放
電が消えてもグロー放電時の温度に近い値に維持できる
ので、再度、陰極５に電圧が印加された時、放電開始電
圧が余り上昇せずに、グロー放電を点弧することが出来
る。これは待にレーザ発振装置をパルス運転した時に好
ましい応答性でおる。Furthermore, since the heat conduction from the support electrode part 5C to the outside is minimized, the temperature of the tip part 5a of the cathode pin 5 can be maintained at a value close to the temperature during glow discharge even after the glow discharge disappears. When a voltage is applied to the cathode 5, the glow discharge can be ignited without the discharge starting voltage increasing much. This is a desirable response when the laser oscillation device is operated in pulses.
すなわち、第３図（ａ）に示したように、従来の陰極ピ
ン５の材料では陰極ピン５ヘゲロー放電が広がる時間Ｔ
ｒが数ｍｓ必要でおったために、これより早いパルスの
レーザ出力光を得ることは出来なかったが、本発明の陰
極ピンによれば第３図（ｂ）に示すように、放電の遅れ
が改善され、その立上がり時定数Ｔｒ” （Ｔｒ’＜＜
Ｔｒ ）となるので、良好なパルス出力光が得られる
ことが分る。That is, as shown in FIG. 3(a), with the conventional material of the cathode pin 5, the time T for the hegelow discharge of the cathode pin 5 to spread is
Since r was required to be several ms, it was not possible to obtain a laser output light with a faster pulse. However, with the cathode pin of the present invention, as shown in Figure 3(b), the delay in discharge can be reduced. The rise time constant Tr” (Tr’<<
It can be seen that good pulsed output light can be obtained.
上記実施例はパルス特性を考えて複合材料によるピンを
示したが、導電セラミックスまたはグラファイト単独で
ピンを作ることができるのは勿論でおる。Although the above embodiment shows a pin made of a composite material in consideration of pulse characteristics, it is of course possible to make the pin solely from conductive ceramics or graphite.
また、先端部１ａの材料を主としてＳｉＣおよび１ｒＢ
２について述べたが、ＴｉＣ、Ｗ Ｃ、Ｔｉ８２など、
その他の導電性セラミックスも用いることができること
は勿論である。In addition, the material of the tip portion 1a is mainly SiC and 1rB.
2, but TiC, WC, Ti82, etc.
Of course, other conductive ceramics can also be used.
［発明の効果］
以上説明したように、本発明によれば、陰１極ピンに酸
化物が付着して電極面積を縮小させる結果、アーク限界
を著しく低下させるという現象がなくなる。すなわち、
陰極ピン先端部１ａがＳｉＣまたはＺｒ８２などで作ら
れている場合には酸化が無いだけでなく、ざらには、陰
極ピン先端部１ａとそれの支持部分１ｂ、１ｃとの材料
選定を最適にしておるので、陰極ピン先端部１ａの保温
効果により、負グロー形成が容易でおり、また放電開始
電圧の変化（上昇）も最小に抑制される。従って、様々
な要求のパルス運転に耐し、応答性のよい動作を保証で
きることになる。[Effects of the Invention] As described above, according to the present invention, the phenomenon in which oxides adhere to the cathode pin and reduce the electrode area, resulting in a significant decrease in the arc limit, is eliminated. That is,
When the cathode pin tip 1a is made of SiC or Zr82, there is not only no oxidation, but also the material selection of the cathode pin tip 1a and its supporting parts 1b, 1c is optimized. Therefore, the negative glow can be easily formed due to the heat retention effect of the cathode pin tip 1a, and the change (increase) in the discharge starting voltage can also be suppressed to a minimum. Therefore, it is possible to withstand pulse operation of various demands and ensure responsive operation.
このように、本発明によれば、陰極ピンの定期的な機械
的洗浄の必要性がなくなっただけでなく、パルス応答性
も良好となり、理想的なレーザ発振器を提供することが
できる。As described above, the present invention not only eliminates the need for periodic mechanical cleaning of the cathode pin, but also improves pulse response, making it possible to provide an ideal laser oscillator.
第１図は本発明の一実施例の概略斜視図、第２図は本発
明が適用されるレーザ発振装置の概略構成図、第３図（
ａ）は従来装置のパルス応答特性図、第３図（ｂ）は本
発明に係る炭酸ガス・レーザ発振装置のパルス応答特性
図である。
１・・・レーザ風胴
２・・・放電励起部
３・・・熱交換器
４・・・送風機
５・・・陰極、５ａ・・・ピン先端部
５ｂ・・・接続用金属部、５ｃ・・・支持電極部６・・
・陽極
７・・・ガス流
３ａ、８ｂ・・・共（辰ミラー
９・・・バラスト抵抗
１０・・・交流電源
１１・・・ブロー放電
１２・・・レーザ光
（８７３３）代理人 弁理士 猪 股 祥 晃（ほか１
名）
ｖ
第 １ 図
一第 ３ 図FIG. 1 is a schematic perspective view of an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a laser oscillation device to which the present invention is applied, and FIG.
3(a) is a pulse response characteristic diagram of a conventional device, and FIG. 3(b) is a pulse response characteristic diagram of a carbon dioxide laser oscillation device according to the present invention. DESCRIPTION OF SYMBOLS 1...Laser wind cylinder 2...Discharge excitation part 3...Heat exchanger 4...Blower 5...Cathode, 5a...Pin tip 5b...Metal part for connection, 5c...・・Support electrode part 6・・
・Anode 7...Gas flow 3a, 8b...Both (Tatsumi mirror 9...Ballast resistor 10...AC power supply 11...Blow discharge 12...Laser light (8733) Agent Patent attorney Boar Yoshiaki Mata (and 1 others)
name) v Figure 1 Figure 1 Figure 3
Claims (4)
の電極を配置し、かつこの一対の電極に沿ってレーザ媒
質ガスを通過させながら前記外部電源から電力を供給し
てこの一対の電極間にグロー放電を生じさせ、レーザ光
を発振させる炭酸ガス・レーザ発振装置において、前記
陰極は導電性セラミックスで形成されていることを特徴
とする炭酸ガス・レーザ発振装置。(1) A pair of electrodes consisting of an anode and a cathode connected to an external power source are arranged, and the laser medium gas is passed along the pair of electrodes while power is supplied from the external power source to connect the pair of electrodes. 1. A carbon dioxide laser oscillation device that oscillates laser light by generating a glow discharge between the carbon dioxide gas laser oscillation devices, wherein the cathode is formed of conductive ceramics.
Ｃ、ＷＣ、ＴｉＢ＿２のいずれか１種類であることを特
徴とする特許請求の範囲第１項記載の炭酸ガス・レーザ
発振装置(2) Conductive ceramics are SiC, ZrB_2, Ti
The carbon dioxide laser oscillation device according to claim 1, characterized in that the carbon dioxide laser oscillation device is any one of C, WC, and TiB_2.
とを特徴とする特許請求の範囲第１項記載の炭酸ガス・
レーザ発振装置(3) The carbon dioxide gas according to claim 1, characterized in that only the tip of the cathode is made of conductive ceramics.
Laser oscillation device
能の良い金属からなる接続用金属部により前記先端部と
ステンレスまたはステンレスと同程度の導電率を有する
金属とからなる支持電極部とを接続したことを特徴とす
る特許請求の範囲第１項記載の炭酸ガス・レーザ発振装
置。(4) The tip of the cathode is made of conductive ceramics, and a connecting metal part made of a metal with good adhesive performance connects the tip to a supporting electrode part made of stainless steel or a metal with conductivity comparable to stainless steel. A carbon dioxide laser oscillation device according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26179986A JPS63116478A (en) | 1986-11-05 | 1986-11-05 | Carbon dioxide gas laser oscillating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26179986A JPS63116478A (en) | 1986-11-05 | 1986-11-05 | Carbon dioxide gas laser oscillating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63116478A true JPS63116478A (en) | 1988-05-20 |
Family
ID=17366873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26179986A Pending JPS63116478A (en) | 1986-11-05 | 1986-11-05 | Carbon dioxide gas laser oscillating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63116478A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6128961A (en) * | 1995-12-24 | 2000-10-10 | Haronian; Dan | Micro-electro-mechanics systems (MEMS) |
| WO2007107049A1 (en) * | 2006-03-21 | 2007-09-27 | Zaiguang Li | A gas cooling cathode insulator of a gas laser and laser thereof |
-
1986
- 1986-11-05 JP JP26179986A patent/JPS63116478A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6128961A (en) * | 1995-12-24 | 2000-10-10 | Haronian; Dan | Micro-electro-mechanics systems (MEMS) |
| WO2007107049A1 (en) * | 2006-03-21 | 2007-09-27 | Zaiguang Li | A gas cooling cathode insulator of a gas laser and laser thereof |
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