JPS6310912B2 - - Google Patents
Info
- Publication number
- JPS6310912B2 JPS6310912B2 JP54161198A JP16119879A JPS6310912B2 JP S6310912 B2 JPS6310912 B2 JP S6310912B2 JP 54161198 A JP54161198 A JP 54161198A JP 16119879 A JP16119879 A JP 16119879A JP S6310912 B2 JPS6310912 B2 JP S6310912B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- plate
- elastic modulus
- piezoelectric
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 47
- 229920000049 Carbon (fiber) Polymers 0.000 description 21
- 239000004917 carbon fiber Substances 0.000 description 21
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 239000000835 fiber Substances 0.000 description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 11
- 239000000919 ceramic Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000010949 copper Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000008602 contraction Effects 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000003014 reinforcing effect Effects 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229920006332 epoxy adhesive Polymers 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
本発明は、電気的信号を機械的変位に変換する
電気・機械変換素子、例えばバイモルフに係わ
る。
近時、磁気記録再生装置（VTR）において、
その記録密度をできるだけ上げるために、記録ト
ラツクの幅をできるだけ幅狭とする努力がなされ
ているが、このようにトラツク幅を狭くするもの
にあつては、これに伴つて、再生磁気ヘツドの記
録トラツクに対する位置関係には、より高い正確
さが要求される。そして、この位置関係を単に装
置の機械的精度に依存させることは、技術的に困
難であるか、或いは可成りのコスト高を招来する
ので、電気・機械変換素子を用い、これによつて
磁気ヘツドの記録トラツクに対する位置関係を、
常時、所定の関係に制御する方法が採られる。即
ち、磁気ヘツドを、電気・機械変換素子に機械的
に連結し、この素子に磁気ヘツドと記録トラツク
との位置関係の変化から生ずる再生信号の変化に
よる電気信号を与え、磁気ヘツドが、常時、記録
トラツクに対し正しい位置関係にあるように設定
する。
通常、このようなVTRのトラツキングサーボ
に用いられるバイモルフ素子は、低い電圧で大き
な変位置が得られる必要がある。特にトラツク幅
の広いVTRにおいては、数100〜600μｍ程度の大
きな変位量が要求される。
通常のバイモルフ素子は、第１図に示すよう
に、夫々両主面に電極１が被着された２枚の圧電
体板２が、これら圧電体板２間に介存させたシム
板と呼称される板状部材４に夫々接着剤３によつ
て接着されて積層されて成る。圧電体板２は、セ
ラミツク、或いは高分子、又はセラミツクと高分
子の複合材等の圧電材料から成り、シム板４は、
チタン、ステンレス、りん青銅等の金属が用いら
れ、接着剤３としては、導電性接着剤が用いられ
る。この構成において、両圧電体板２に、逆向き
の電界を与えるように夫々対向電極１間に電圧を
与えるときは、一方の圧電体板２が伸長し、他方
が収縮することによつて変位が生ずる。即ち、第
１図に示すように、バイモルフの一端を機械的に
固定、すなわちクランプするときは、他端が矢印
で示すように変位する。
ところが、このような通常のバイモルフでは左
程大きな変位量が得られない。
今、第２図に示すように両主面に電極１が被着
された圧電板２に、その両主面の電極１間に所要
の電圧を与えると、圧電板２は、これに与えられ
る電界の向きに応じて伸縮するが、、この伸縮は、
互に直交する方向ｘ及びｙに関して生ずるので、
この圧電板２の一方の面に上述したような、金属
板より成るシム板のように、その弾性率がｘ方向
とｙ方向とに関して同等の、すなわち等方性を有
する補強板４によつてｘ及びｙの両方向に関して
機械的に固定、すなわちクランプさせると、第３
図に示すように、ｘ及びｙの両方向に関して「そ
り」を生ずることになる。したがつて、今、一方
向、例えばｘ方向に関するそりによる変位のみを
必要とする場合には、ｙ方向に生ずるそりがむし
ろ構造的にｘ方向のそりの発生を阻害することに
なる。
また、第１図に説明した構造において、接着剤
３としては、一般に高分子系の接着剤を用いる
が、この接着剤の柔軟性によつて圧電体板２に対
する適度なクランプが阻害されて上述のそりの発
生が抑えられる。
本発明においては、上述したように、等方性の
伸縮や、接着剤による影響によつて、上述の電
気・機械変換素子において充分な変位量が得られ
ないことの究明に基いて、バイモルフ或いはモノ
モルフ等の電気・機械変換素子において、大きな
変位置を得ることができるようにするものであ
る。
更に、本発明においては、圧電体板に被着され
る電極が、その変位置とその経時変化に大きな影
響を及ぼすことを見出し、その構成を特定するこ
とによつて更に高い変位量とその経時変化が小さ
く信頼性にすぐれた電気・機械変換素子を提供す
るものである。
すなわち、本発明においては、少くとも両主面
に電極が被着された圧電体板よりなる第１の部材
と、補強ないしはクランプ効果を得る例えばシム
板としての板状の第２の部材とを積層合体して電
気・機械変換素子を構成するものであるが、特に
本発明においては、第２の部材として、弾性率が
異方性を有する部材より構成するものとし、互に
直交する第１及び第２の２方向ｘ及びｙに関し
て、その弾性率Ex及びEyがEx＞Eyなる関係を有
し、且つ第１の部材の圧電体板の弾性率Ｅが第２
の部材の小なる方の弾性率より大なる弾性率を有
するすなわちＥ＞Eyなる関係を有するようにし、
更に圧電体板の電極の厚さを0.1μｍ〜3μｍに選定
する。
次に、本発明による電気・機械変換素子につい
て詳細に説明する。
第４図及び第５図を参照して本発明をバイモル
フに適用する場合の一例を説明する。
この例においては、両主面に夫々電極１１が被
着された２枚の圧電体板、すなわち、第１の部材
１２を設け、両者間に第２の部材１３を介存させ
て積層合体する。
第１の部材１２、すなわち圧電体板は、例えば
ジルコンチタン酸鉛のような圧電磁器板より構成
される。そして、この圧電磁器板の両主面に被着
される電極１１は、ニツケルNi若しくは銅Cu等
の金属を無電解メツキするか、又はこれらニツケ
ル若しくは銅等の無電解メツキ層上に、更に電気
抵抗を下げるとか、耐蝕性を得るなどの目的をも
つて必要に応じて金Au、銀Agを電気メツキする
ことによつて構成するか更に、或いは各種金属、
例えばAu、Ag、Ni、Cu、Cr（クロム）等を蒸着
することによつて構成する。いずれの場合も、各
電極１１の夫々の全厚さが0.1μｍ〜3μｍとなるよ
うに選定する。
第２の部材１３、すなわち圧電体板間に介存す
るクランプ或いは補強の効果を有するシム板とし
ては、特に弾性率に異方性を有する材料より構成
する。この部材１３としては、例えば一方向に沿
つて延長するようなカーボン繊維層に、例えばエ
ポキシ接着を含浸させたカーボン繊維シートを用
い得る。このカーボン繊維シートは、カーボン繊
維の延長方向に関して最大の弾性率を示し、これ
と直交する方向に最小の弾性率を示す。そして、
このカーボン繊維シートによつてバイモルフを構
成するときは、その変位量を得るに寄与する方向
の伸縮が要求される方向、図示の例ではｘ方向
に、最大の弾性率を示す方向、すなわち、カーボ
ン繊維の延長方向が沿うように配置する。
次に、本発明を実施例について説明する。
実施例 １
第１の部材１２、すなわち圧電体板として、厚
さ250μｍのジルコンチタン酸鉛（PZT）系の圧
電磁器より成る圧電体板２を用意し、その両主面
に夫々Auを1μｍの厚さに蒸着して電極１１を形
成する。一方、直径10μｍのカーボンフアイバー
１５をほぼ一方向に沿つて素子の一端から他端に
まで延長するように配列し、これにエポキシ系接
着剤１６を含浸させて成る厚さ100μｍのカーボ
ンフアイバーシートを用意し、これをシム板１３
として、前述の２枚の圧電体板１２間に挾み込
む。この状態で120℃〜130℃で３時間の加熱圧着
を行つて接着剤の硬化を行つて25mm×25mmのバイ
モルフを作る。このバイモルフのシム板１３の繊
維の延長方向をｘ方向としてこれと直交し、バイ
モルフの板面方向に沿う方向をｙ方向として、ｘ
方向の一端を５mmの幅に亘つて固定してその遊端
のｙ方向の中央から両側夫々10mmに亘るすなわち
20mmの範囲の各位置での、バイモルフの板面方向
と直交する方向の変位量を測定した結果を第６図
中曲線２４に示す。また、ｙ方向に関する一端を
同様に５mmの幅に亘つて固定してその遊端のｘ方
向の中央から両側夫々10mmに亘るすなわち20mmの
範囲の各位置での、バイモルフの板面方向と直交
する方向の変位量を測定した結果を第６図中曲線
２５に示す。これら曲線２４及び２５を比較する
ことによつて明らかなようにカーボンフアイバー
の延長方向に沿うｘ方向に関する一端を固定した
場合の変位量（以下ｘ方向に関する変位量とい
う）は、ｙ方向に関する一端を固定した場合の変
位量（以下ｙ方向に関する変位量という）に比
し、中央位置で約2.5倍、両端位置で約1.8倍の大
きな変位量、すなわち高い感度を示す。このよう
にｙ方向に関する変位量がｘ方向のそれより低い
のはシム板１３のｙ方向がカーボンフアイバーの
並置方向であるがために、この方向の弾性率が低
く、圧電体板１２に圧電効果、或いは電歪効果に
よる伸縮が生じた場合、このｙ方向に関しては、
圧電体板１２の伸縮に伴つてシム板１３が或る程
度伸縮してしまつてクランプ効果が小さくなり、
この方向に関して圧電体板１２にそりが生じにく
くなつて大きな変位量が得られなくなるものと思
われる。これに比し、ｘ方向に関しては、この方
向がシム板１３のカーボンフアイバーの長手方向
に沿う方向であつてその弾性率が大きいので圧電
体板１２に対するクランプ効果は大きく、したが
つて大きな変位量が得られ、その上、上述したｙ
方向のそりの発生が抑えられることによつて、ｘ
方向に関するそりが生じ易くなり、より大きな変
位量が得られる。そして、曲線２４を２５と比較
してみると、曲線２４の場合、曲線２５に比し、
中央部での変位量の低下が小さい。これはｘ及び
ｙ方向のそりの発生は、特に夫々の中央におい
て、他の方向のｙ及びｘ方向のそりによつて抑止
され易いが、上述したようにこのバイモルフで
は、ｙ方向に関するそりが生じにくくなつている
ために、ｘ方向に関するそりが中央部でも大きく
得られ、中央部での変位量の低下が回避されるも
のと思われる。
また、上述した例のように、シム板１３として
カーボンフアイバーのような繊維に接着剤を含浸
させて圧電体板１２間に介存させて圧着硬化を行
つて得たバイモルフは、第７図にその要部の拡大
断面図を示すように、その繊維１５が接着剤１６
によつて、接合されるがこの場合、繊維１５が殆
んど直接的に電極１１を有する圧電体板１２に接
して接合されるので、両者間には、比較的柔軟性
に富み、ずれの生じ易い接着剤１６が殆んど介存
されないか極く薄く介存されるに過ぎないのでこ
の接着剤１６によるクランプ効果が阻害されるを
回避できる。
次に、本発明の特徴を明確にするために、弾性
率に異方性のないシム板を用いる場合を比較例と
して説明する。
比較例 １
実施例１で説明したバイモルフにおいて、圧電
体板１２として、圧電磁器に代えてポリ弗化ビニ
リデンと圧電セラミツク粉末の複合材より成るい
わゆる高分子圧電体板を用いたバイモルフを作成
した。この比較例によるバイモルフの変位量を、
前述の実施例１によるバイモルフに対する変位量
の測定方法と同様の測定方法によつてｘ方向に関
する変位量と、ｙ方向に関する変位量の測定結果
は、夫々第８図中曲線１７及び１８に示す。これ
ら曲線１７及び１８から明らかなように、ｘ方向
に関する変位量と、ｙ方向に関する変位量とには
殆んど差が生じていない。すなわち、この比較例
ではシム板として、弾性率が異方性を有し、ｘ方
向の弾性率が、ｙ方向の弾性率より大なるものを
用いるにもかかわらず、ｘ及びｙ方向に関する変
位量には差が生じない。これは、この比較例によ
るバイモルフにおける圧電体板が高分子圧電体板
より成り、これの弾性率がシム板の弾性率の小さ
い値を示すｙ方向の弾性率より更に小さいがため
に、クランプの効果が強過ぎるためと思われる。
そして、ここに、本発明においては、圧電体板１
２（第１の部材）の弾性率Ｅがシム板（第２の部
材）のｙ方向の弾性率Eyより大となる関係を保
持するように第１及び第２の部材の弾性率を選定
する所以がある。
因みに、実施例１における圧電磁器の弾性率
は、５〜10×105Kg/cm2、例えば７×105Kg/cm2でカ
ーボンフアイバーシートの繊維方向のそれは13.5
×105Kg/cm2、これと直交する方向のそれは1.0×
105Kg/cm2で、比較例１における高分子圧電体のそ
れは2.6×104Kg/cm2である。また従来のシム板の
Tiは10×105Kg/cm2である。
尚、実施例１においては、シム板１３として、
ｘ方向に最大の弾性率を有し、ｙ方向に最小の弾
性率を有する配置をとつた場合であるがシム板１
３の繊維の延長方向をｘ方向と一致させずに或る
程度の角度を保有させるようにすることもでき
る。今、実施例１においてシム板１３のカーボン
繊維の延長方向と、ｘ方向のなす角度θを0゜から
5゜づつ変化させて得た各バイモルフのｘ方向に関
する変位量を測定したところ第９図中曲線３７に
示す結果が得られた。第９図において破線ａで示
す変位量は、従来のように、バイモルフのシム板
として金属板を用いた場合の値で、この値は角度
θが45゜の場合にほぼ相当する。すなわち、角度
θを45゜以下に選定するとき、シム板の弾性率の
異方性が生じ、これによる感度上昇の効果が生ず
る。因みに、表１に実施例１で説明したシム板１
３としのカーボンフアイバーシートにおいて、そ
の繊維の方向とｘ方向とのなす角度θを変化させ
た場合のｘ方向の弾性率Exの測定結果と、これ
とｙ方向の弾性率Eyとの比を示す。
The present invention relates to an electro-mechanical conversion element, such as a bimorph, that converts an electrical signal into a mechanical displacement. Recently, in magnetic recording and reproducing devices (VTR),
In order to increase the recording density as much as possible, efforts are being made to make the recording track width as narrow as possible. Higher accuracy is required for positional relationship to the track. Since it would be technically difficult to simply make this positional relationship depend on the mechanical precision of the device or would result in a considerable increase in cost, an electro-mechanical transducer was used, and thereby the magnetic The positional relationship of the head to the recording track is
A method is adopted that always maintains a predetermined relationship. That is, the magnetic head is mechanically connected to an electromechanical transducer element, and an electric signal is applied to this element due to a change in the reproduction signal caused by a change in the positional relationship between the magnetic head and the recording track, so that the magnetic head always Set it so that it is in the correct position relative to the recording track. Normally, the bimorph element used in the tracking servo of such a VTR needs to be able to achieve a large displacement with a low voltage. Particularly in VTRs with wide track widths, a large displacement amount of several 100 to 600 μm is required. As shown in Fig. 1, a normal bimorph element has two piezoelectric plates 2 each having an electrode 1 adhered to its main surface, and is called a shim plate interposed between these piezoelectric plates 2. They are laminated and bonded to plate-like members 4 with adhesive 3, respectively. The piezoelectric plate 2 is made of a piezoelectric material such as ceramic, polymer, or a composite material of ceramic and polymer, and the shim plate 4 is
A metal such as titanium, stainless steel, or phosphor bronze is used, and the adhesive 3 is a conductive adhesive. In this configuration, when a voltage is applied between the opposing electrodes 1 to give opposite electric fields to both piezoelectric plates 2, one piezoelectric plate 2 expands and the other contracts, causing displacement. occurs. That is, as shown in FIG. 1, when one end of the bimorph is mechanically fixed, that is, clamped, the other end is displaced as shown by the arrow. However, such a normal bimorph cannot obtain such a large amount of displacement. Now, as shown in FIG. 2, if a required voltage is applied between the electrodes 1 on both main surfaces of the piezoelectric plate 2, which has electrodes 1 adhered to both main surfaces, the piezoelectric plate 2 It expands and contracts depending on the direction of the electric field, but this expansion and contraction is
This occurs in mutually orthogonal directions x and y, so
One surface of the piezoelectric plate 2 is provided with a reinforcing plate 4 whose elastic modulus is the same in the x direction and the y direction, that is, is isotropic, such as a shim plate made of a metal plate as described above. When mechanically fixed or clamped in both the x and y directions, the third
As shown in the figure, this results in "warping" in both the x and y directions. Therefore, if only displacement due to warpage in one direction, for example the x direction, is required, the warpage that occurs in the y direction will rather structurally inhibit the occurrence of warp in the x direction. Furthermore, in the structure illustrated in FIG. 1, a polymer adhesive is generally used as the adhesive 3, but the flexibility of this adhesive hinders proper clamping of the piezoelectric plate 2, as described above. The occurrence of warpage is suppressed. In the present invention, as described above, based on the investigation that a sufficient amount of displacement cannot be obtained in the above-mentioned electro-mechanical transducer due to isotropic expansion and contraction and the influence of adhesive, bimorph or This makes it possible to obtain large displacements in electromechanical transducers such as monomorphs. Furthermore, in the present invention, it has been discovered that the electrode attached to the piezoelectric plate has a large effect on its displacement and its change over time, and by specifying its configuration, it is possible to obtain an even higher amount of displacement and its change over time. The present invention provides an electromechanical transducer that exhibits small changes and is highly reliable. That is, in the present invention, a first member is made of a piezoelectric plate having electrodes adhered to at least both principal surfaces, and a plate-shaped second member, for example, a shim plate, which provides a reinforcing or clamping effect. The electromechanical transducer is constructed by laminating and combining them, and in particular in the present invention, the second member is constructed of a member having anisotropic elastic modulus, and the first member is orthogonal to each other. And regarding the second two directions x and y, the elastic moduli E x and E y have the relationship E x >E y , and the elastic modulus E of the piezoelectric plate of the first member is the second
has an elastic modulus greater than the smaller elastic modulus of the member, that is, has the relationship E>E y ,
Furthermore, the thickness of the electrode of the piezoelectric plate is selected to be 0.1 μm to 3 μm. Next, the electro-mechanical conversion element according to the present invention will be explained in detail. An example of applying the present invention to a bimorph will be described with reference to FIGS. 4 and 5. In this example, two piezoelectric plates, that is, a first member 12, each having an electrode 11 adhered to each main surface are provided, and the second member 13 is interposed between the two piezoelectric plates to be laminated together. . The first member 12, that is, the piezoelectric plate, is composed of a piezoelectric ceramic plate made of, for example, lead zirconium titanate. The electrodes 11 to be adhered to both main surfaces of the piezoelectric ceramic plate are formed by electroless plating of a metal such as nickel (Ni) or copper (Cu), or by electroless plating of a metal such as nickel (Ni) or copper (Cu), or by further electroless plating on the electroless plating layer of nickel or copper. For the purpose of lowering resistance or obtaining corrosion resistance, it may be constructed by electroplating gold Au, silver Ag, or various metals, as necessary.
For example, it is constructed by depositing Au, Ag, Ni, Cu, Cr (chromium), etc. In either case, the total thickness of each electrode 11 is selected to be 0.1 μm to 3 μm. The second member 13, that is, the shim plate interposed between the piezoelectric plates and having a clamping or reinforcing effect, is made of a material particularly having anisotropy in elastic modulus. As this member 13, for example, a carbon fiber sheet can be used, in which a carbon fiber layer extending in one direction is impregnated with, for example, epoxy adhesive. This carbon fiber sheet exhibits a maximum elastic modulus in the direction in which the carbon fibers extend, and a minimum elastic modulus in a direction perpendicular to this direction. and,
When constructing a bimorph with this carbon fiber sheet, the direction in which expansion and contraction is required to contribute to obtaining the amount of displacement, in the illustrated example, the x direction, and the direction showing the maximum elastic modulus, that is, the carbon Arrange so that the fibers extend in the same direction. Next, the present invention will be described with reference to examples. Example 1 A piezoelectric plate 2 made of lead zirconate titanate (PZT) piezoelectric ceramic with a thickness of 250 μm is prepared as the first member 12, that is, a piezoelectric plate, and a 1 μm thick layer of Au is coated on each of its main surfaces. The electrode 11 is formed by vapor deposition to a certain thickness. On the other hand, a carbon fiber sheet with a thickness of 100 μm is made by arranging carbon fibers 15 with a diameter of 10 μm so as to extend from one end of the element to the other end along approximately one direction, and impregnating this with an epoxy adhesive 16. Prepare and attach this to shim board 13
As such, it is sandwiched between the two piezoelectric plates 12 described above. In this state, heat and pressure bonding is performed at 120°C to 130°C for 3 hours to harden the adhesive and create a 25mm x 25mm bimorph. The direction in which the fibers of the bimorph shim plate 13 extend is defined as the x direction, which is perpendicular to this, and the direction along the plate surface direction of the bimorph is defined as the y direction.
One end in the direction is fixed over a width of 5 mm, and the width is 10 mm on each side from the center of the free end in the y direction.
Curve 24 in FIG. 6 shows the results of measuring the amount of displacement in the direction perpendicular to the plate surface direction of the bimorph at each position within a range of 20 mm. In addition, one end in the y direction is similarly fixed over a width of 5 mm, and the free end is perpendicular to the plate surface direction of the bimorph at each position within a range of 10 mm on both sides from the center in the x direction, that is, 20 mm. The results of measuring the amount of displacement in the direction are shown in curve 25 in FIG. As is clear from comparing these curves 24 and 25, the amount of displacement when one end in the x direction along the extension direction of the carbon fiber is fixed (hereinafter referred to as the amount of displacement in the x direction) is the same as the amount of displacement when one end in the y direction is fixed. Compared to the amount of displacement when fixed (hereinafter referred to as the amount of displacement in the y direction), the amount of displacement is approximately 2.5 times greater at the center position and approximately 1.8 times greater at both end positions, that is, exhibits high sensitivity. The reason why the displacement amount in the y direction is lower than that in the x direction is because the y direction of the shim plate 13 is the direction in which the carbon fibers are juxtaposed, so the elastic modulus in this direction is low, and the piezoelectric plate 12 has a piezoelectric effect. , or when expansion and contraction occurs due to the electrostrictive effect, regarding this y direction,
As the piezoelectric plate 12 expands and contracts, the shim plate 13 expands and contracts to a certain extent, reducing the clamping effect.
It is thought that the piezoelectric plate 12 is less likely to warp in this direction, making it impossible to obtain a large amount of displacement. In contrast, in the x direction, since this direction is along the longitudinal direction of the carbon fibers of the shim plate 13 and has a large elastic modulus, the clamping effect on the piezoelectric plate 12 is large, and therefore a large displacement amount is generated. is obtained, and in addition, the above-mentioned y
By suppressing the occurrence of warpage in the x direction,
Warpage in the direction is more likely to occur, and a larger amount of displacement can be obtained. Then, when comparing curve 24 with curve 25, in the case of curve 24, compared to curve 25,
The drop in displacement at the center is small. This is because the occurrence of warpage in the x and y directions is likely to be suppressed by warpage in the other directions, especially in the respective centers, but as mentioned above, in this bimorph, warpage in the y direction occurs. It is thought that because of this, a large warp in the x direction is obtained even at the center, and a decrease in the amount of displacement at the center is avoided. In addition, as in the above-mentioned example, a bimorph obtained by impregnating a fiber such as carbon fiber with adhesive as the shim plate 13, interposing it between the piezoelectric plates 12, and performing pressure hardening is shown in FIG. As shown in the enlarged cross-sectional view of the main part, the fibers 15 are bonded to the adhesive 16.
In this case, the fibers 15 are joined almost directly to the piezoelectric plate 12 having the electrodes 11, so there is a relatively high degree of flexibility between the two and there is no misalignment. Since the adhesive 16, which tends to form easily, is hardly present or is only present very thinly, the clamping effect of the adhesive 16 can be prevented from being inhibited. Next, in order to clarify the features of the present invention, a case where a shim plate having no anisotropy in elastic modulus is used will be described as a comparative example. Comparative Example 1 In the bimorph described in Example 1, a so-called polymer piezoelectric plate made of a composite material of polyvinylidene fluoride and piezoelectric ceramic powder was used as the piezoelectric plate 12 instead of the piezoelectric ceramic. The amount of displacement of the bimorph according to this comparative example is
The results of measuring the amount of displacement in the x direction and the amount of displacement in the y direction by a measuring method similar to the method of measuring the amount of displacement for the bimorph according to Example 1 described above are shown in curves 17 and 18 in FIG. 8, respectively. As is clear from these curves 17 and 18, there is almost no difference between the amount of displacement in the x direction and the amount of displacement in the y direction. That is, in this comparative example, although a shim plate having an anisotropic elastic modulus and a larger elastic modulus in the x direction than the elastic modulus in the y direction is used as the shim plate, the amount of displacement in the x and y directions is There is no difference. This is because the piezoelectric plate in the bimorph according to this comparative example is made of a polymeric piezoelectric plate, and its elastic modulus is even smaller than the elastic modulus in the y direction, which indicates a small value of the elastic modulus of the shim plate. This seems to be because the effect is too strong.
Here, in the present invention, the piezoelectric plate 1
The elastic modulus of the first and second members is selected so that the elastic modulus E of the shim plate (second member) is larger than the elastic modulus E of the shim plate (second member) in the y direction. There is a reason to do so. Incidentally, the elastic modulus of the piezoelectric ceramic in Example 1 is 5 to 10×10 5 Kg/cm 2 , for example 7×10 5 Kg/cm 2 , and that of the carbon fiber sheet in the fiber direction is 13.5.
×10 5 Kg/cm 2 , and that in the direction perpendicular to this is 1.0 ×
10 5 Kg/cm 2 , and that of the polymer piezoelectric material in Comparative Example 1 is 2.6×10 4 Kg/cm 2 . Also, the conventional shim plate
Ti is 10×10 5 Kg/cm 2 . In addition, in Example 1, as the shim plate 13,
This is a case where the shim plate 1 has the maximum elastic modulus in the x direction and the minimum elastic modulus in the y direction.
It is also possible to make the extension direction of the fibers of No. 3 not coincident with the x direction but at a certain angle. Now, in Example 1, the angle θ between the extension direction of the carbon fibers of the shim plate 13 and the x direction is changed from 0°.
When the displacement in the x direction of each bimorph obtained by changing the angle by 5 degrees was measured, the results shown by curve 37 in FIG. 9 were obtained. The amount of displacement indicated by the broken line a in FIG. 9 is the value when a metal plate is used as the shim plate of the bimorph as in the conventional case, and this value approximately corresponds to the case where the angle θ is 45°. That is, when the angle θ is selected to be 45° or less, anisotropy in the elastic modulus of the shim plate occurs, thereby producing the effect of increasing sensitivity. Incidentally, Table 1 shows the shim plate 1 explained in Example 1.
Measurement results of the elastic modulus E x in the x direction and the ratio of this to the elastic modulus E y in the y direction when the angle θ between the fiber direction and the x direction is changed in the carbon fiber sheet No. 3 shows.
【表】【table】
【表】
また上述したように、弾性率に異方性を有する
第２の部材１３として、カーボンフアイバーのよ
うな繊維配列によるシートを用いる場合、その繊
維の延長方向は上述したように角度θを0゜〜45゜
をもつて一方向に配列する場合に限られるもので
はなく、例えば第１０図に細線をもつて示すよう
にｘ方向に角度＋θをもつてカーボンフアイバー
のような繊維１５を配列したシートと、同様に細
線をもつて示すようにｙ方向に角度−θをもつて
カーボンフアイバーのような繊維１５を配列した
シートとを積層合体するか渾然一体に構成するこ
ともできるし、更に或る場合は、ｙ方向の補強の
ために、例えば両シート間にθ＝90゜をもつて図
示しないが同様の繊維を配列したシートを介存さ
せて積層合体するか全体として渾然一体に構成す
ることもできる。
更に、また本発明においては、上述したよう
に、圧電体板１２への電極１１の厚さを0.1μｍ〜
3μｍに選定するものであるが、次にこの電極１
１の厚さについてみる。
実施例 ２
厚さ200μｍのジルコンチタン酸鉛系の圧電磁
器より成る圧電体板２を２枚設け、その夫々の両
主面の全面に、Niを1μｍの厚さに無電解メツキ
し、その上に夫々Auを0.1μｍの厚さに電気メツ
キして電極１１を構成する。両圧電体２間に厚さ
170μｍのカーボンフアイバーをエポキシ系接着
剤を含浸させた状態で挾み込み、加熱圧着して全
体の厚さが580μｍの第１１図に示すバイモルフ
１９を構成する。このバイモルフ１９は、第１１
図に示すようにカーボンフアイバーの延長方向に
沿う長さＬを27mmとし、その一端側を第１２図に
示すように、固定台２０上に、ホルダー２１をも
つて長さls＝９mmをもつて固定し、他端側を長さ
ｌ＝18mmだけ変位自在に支持する。固定端側の幅
Wsは26mmに選定し、遊端側は先端に向つて幅狭
となして先端の幅ｗは４mmに選定する。このよう
な構成のサンプルを５個作成した。これらを試料
１〜５とした。
比較例 ２
実施例１と同様の構成において圧電体板に対す
る電極を、銀ペイントの焼付けによつて構成した
厚さ８mmの銀電極とし、この構成のものを５個作
成した。これらを試料６〜10とした。
これら試料１〜10のバイモルフにピーク・ト
ウ・ピークの電圧Vppが200Vの周波数60Hzの電
圧を与えたときの先端における振れを測定した結
果を表２に示す。[Table] Furthermore, as described above, when a sheet made of fiber arrangement such as carbon fiber is used as the second member 13 having anisotropy in elastic modulus, the extending direction of the fibers is set at an angle θ as described above. The fibers 15, such as carbon fibers, are not limited to being arranged in one direction at an angle of 0° to 45°; for example, as shown by the thin line in FIG. It is also possible to laminate or combine a sheet with a sheet in which fibers 15 such as carbon fibers are arranged at an angle -θ in the y direction as shown by a thin line, or to form an integrated structure. In some cases, for reinforcement in the y direction, for example, both sheets may be laminated together with sheets arranged with similar fibers interposed (not shown) with θ = 90° between them, or they may be constructed as a whole in a harmonious manner. You can also. Furthermore, in the present invention, as described above, the thickness of the electrode 11 on the piezoelectric plate 12 is set to 0.1 μm to 0.1 μm.
This electrode is selected to have a diameter of 3 μm.
Let's look at the thickness of 1. Example 2 Two piezoelectric plates 2 made of zirconate lead titanate-based piezoelectric ceramic having a thickness of 200 μm were provided, and Ni was electrolessly plated to a thickness of 1 μm on both main surfaces of each plate. The electrodes 11 are formed by electroplating Au to a thickness of 0.1 μm. Thickness between both piezoelectric bodies
Carbon fibers of 170 .mu.m impregnated with epoxy adhesive were sandwiched together and bonded under heat to form a bimorph 19 shown in FIG. 11 having a total thickness of 580 .mu.m. This bimorph 19 is the 11th
As shown in the figure, the length L along the extending direction of the carbon fiber is 27 mm, and one end of the carbon fiber is placed on a fixed base 20 with a holder 21 having a length l s =9 mm, as shown in Figure 12. The other end is supported so that it can be freely displaced by a length l = 18 mm. Fixed end width
W s is selected to be 26 mm, and the free end side is made narrower toward the tip, and the width w of the tip is selected to be 4 mm. Five samples with such a configuration were created. These were designated as samples 1 to 5. Comparative Example 2 In the same structure as in Example 1, the electrodes for the piezoelectric plate were silver electrodes with a thickness of 8 mm formed by baking silver paint, and five pieces of this structure were produced. These were designated as samples 6 to 10. Table 2 shows the results of measuring the deflection at the tip when a voltage with a peak-to-peak voltage Vpp of 200 V and a frequency of 60 Hz was applied to the bimorphs of Samples 1 to 10.
【表】
これより明らかなように、本発明によるもの
は、同一電圧で大きな振れ、すなわち大きな変位
量を得ることができ、前述したように弾性率に異
方性を有するシム板を用いることによつて大きな
変位量を得ることができるものであるが、更に電
極が大きな影響を与えていることが判る。
第１３図中曲線３０は、実施例２の構成におい
て、その電極を無電解メツキによるNiによつて
構成した場合の、厚みと感度（変位量）の関係を
測定したものであつて、従来一般の電極の厚さ
8μｍに対しての相対値として示した。また同図
中曲線３１は、ピーク・トウ・ピークのふれが
500μｍとなるような電圧（周波数60Hz）を与え
て500時間連続動作させて後の変位量の変化を測
定したものである。これら曲線３０及び３１より
明らかなように、電極１１の厚さが大となるにつ
れ、感度が低下してくるが、これは電極１１が厚
くなると、圧電板の伸縮が電極によるクランプに
よつて阻害されてくることに因ると思われ、また
電極の厚さが薄くなると、特に0.1μｍ未満では変
位量の変化率が顕著となるが、これは圧電体板の
繰返えし撓曲による電極の疲労が激しくなつて圧
電体板の全域において所要の電圧が与えられなく
なつてくることに因るものと思われる。そこで、
電極の厚さは、従来に比し十分高い感度を得るた
めに3μｍ以下とし、変化率を低くするために0.1μ
ｍ以上に選定するものであり、ここに、本発明に
おける電極の厚さの特定の所以がある。
以上したように本発明構成によれば、大きな変
位量を得ることができるので、冒頭に述べたよう
に、例えばVTRにおける磁気ヘツドのトラツキ
ングサーボに用いて好適であり、同一変位量に対
しては、低電圧駆動を可能にするものである。
また、上述した例のように、第２の部材、すな
わちシム板としてカーボンフアイバーのような繊
維に、接着剤を含浸させたシートを用いるとき
は、従来のように接着剤を塗布する工程が不要と
なるので、製造工程の簡略化、ひいては価格の低
廉化をはかることができる。また、変位量を得る
に供しないｙ方向に関する変位はこれを抑えるよ
うにしたので、大振幅動作時の亀裂の発生を回避
できる効果もある。
尚、上述した例では、主として２枚の圧電体板
が積層されて成るバイモルフに本発明を適用する
場合について説明したが、モノモルフを始めとし
て種々の構成を採る電気・機械変換素子に本発明
を適用できることは明らかであろう。[Table] As is clear from this, the device according to the present invention can obtain a large swing, that is, a large amount of displacement with the same voltage, and as mentioned above, it is possible to obtain a large amount of displacement by using a shim plate having anisotropy in the elastic modulus. Therefore, it is possible to obtain a large amount of displacement, but it can be seen that the electrodes have a large influence. Curve 30 in FIG. 13 is a curve 30 obtained by measuring the relationship between thickness and sensitivity (displacement) when the electrode is made of electroless plated Ni in the configuration of Example 2. electrode thickness
It is shown as a relative value to 8 μm. In addition, curve 31 in the same figure shows the peak-to-peak fluctuation.
A voltage (frequency: 60 Hz) was applied to give a voltage of 500 μm, and the change in displacement was measured after continuous operation for 500 hours. As is clear from these curves 30 and 31, as the thickness of the electrode 11 increases, the sensitivity decreases. This is because as the electrode 11 becomes thicker, the expansion and contraction of the piezoelectric plate is inhibited by the clamping by the electrode. Furthermore, as the electrode thickness becomes thinner, the rate of change in displacement becomes remarkable, especially when the electrode thickness is less than 0.1 μm. This is thought to be due to the fact that the piezoelectric plate becomes increasingly fatigued and the required voltage cannot be applied to the entire area of the piezoelectric plate. Therefore,
The thickness of the electrode is 3 μm or less to obtain sufficiently high sensitivity compared to conventional methods, and 0.1 μm to reduce the rate of change.
m or more, and this is the reason why the thickness of the electrode is specified in the present invention. As described above, according to the configuration of the present invention, a large amount of displacement can be obtained, so as mentioned at the beginning, it is suitable for use in a tracking servo of a magnetic head in a VTR, for example, and for the same amount of displacement. This enables low voltage driving. In addition, as in the above example, when a sheet made of carbon fiber or other fibers impregnated with adhesive is used as the second member, that is, the shim plate, the conventional process of applying adhesive is unnecessary. Therefore, the manufacturing process can be simplified and the price can be reduced. Further, since the displacement in the y direction, which is not used to obtain the amount of displacement, is suppressed, it is possible to avoid the occurrence of cracks during large amplitude operation. In the above example, the present invention was mainly applied to a bimorph formed by laminating two piezoelectric plates, but the present invention can also be applied to electromechanical transducers having various configurations including a monomorph. It is obvious that it can be applied.
第１図は従来のバイモルフの拡大断面図、第２
図及び第３図はその説明図、第４図は本発明によ
る電気・機械変換素子の一例の拡大断面図、第５
図はその要部の一部を切り欠いた拡大斜視図、第
６図はその変位量の測定結果を示す図、第７図は
本発明素子の更に要部の拡大断面図、第８図は本
発明に対する比較例の変位量の測定結果を示す
図、第９図は本発明の説明に供する第２の部材の
繊維の方向と変位量の関係の測定結果を示す図、
第１０図は、本発明素子の他の例の第２の部材の
拡大平面図、第１１図は本発明素子の上面図、第
１２図はその支持状態の側面図、第１３図は電極
の厚さと感度及び変位量の変化率との関係の測定
曲線図である。
１２は圧電体板、すなわち第１の部材、１１は
その電極、１３はシム板ないしは補強板、すなわ
ち第２の部材である。
Figure 1 is an enlarged cross-sectional view of a conventional bimorph;
3 and 3 are explanatory diagrams thereof, FIG. 4 is an enlarged sectional view of an example of the electromechanical conversion element according to the present invention, and FIG.
The figure is an enlarged perspective view with a part of the main part cut away, Fig. 6 is a view showing the measurement results of the displacement amount, Fig. 7 is an enlarged sectional view of the main part of the element of the present invention, and Fig. 8 is FIG. 9 is a diagram showing the measurement results of the displacement amount of a comparative example with respect to the present invention, and FIG.
FIG. 10 is an enlarged plan view of the second member of another example of the device of the invention, FIG. 11 is a top view of the device of the invention, FIG. 12 is a side view of the device in its supported state, and FIG. 13 is an electrode FIG. 3 is a measurement curve diagram of the relationship between thickness and rate of change in sensitivity and displacement amount. 12 is a piezoelectric plate, that is, a first member; 11 is an electrode thereof; and 13 is a shim plate or a reinforcing plate, that is, a second member.
Claims (1)
第１の部材と、該第１の部材の一主面に固着され
た第２の部材とより成り、該第２の部材は、第１
の方向の弾性率が該第１の方向に直交する第２の
方向の弾性率より大きく、且つ上記第１の部材の
弾性率が上記第２の部材の上記第２の方向の弾性
率より大きく選ばれ上記電極の厚さが0.1μｍ〜3μ
ｍに選ばれた電気・機械変換素子。1. Consists of a first member made of a piezoelectric plate with electrodes adhered to both main surfaces, and a second member fixed to one main surface of the first member, the second member comprising: 1st
the elastic modulus in the direction is greater than the elastic modulus in the second direction perpendicular to the first direction, and the elastic modulus of the first member is greater than the elastic modulus of the second member in the second direction. The thickness of the selected electrode is 0.1μm to 3μm.
Electrical/mechanical conversion element selected as m.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16119879A JPS5683983A (en) | 1979-12-12 | 1979-12-12 | Electricity-machinery conversion element |
| CA000366256A CA1165860A (en) | 1979-12-12 | 1980-12-05 | Piezoelectric electro-mechanical bimorph transducer |
| US06/213,875 US4363993A (en) | 1979-12-12 | 1980-12-08 | Piezoelectric electro-mechanical bimorph transducer |
| NL8006692A NL8006692A (en) | 1979-12-12 | 1980-12-09 | ELECTROMECHANICAL TRANSDUCENT. |
| DE19803046535 DE3046535A1 (en) | 1979-12-12 | 1980-12-10 | ELECTROMECHANICAL CONVERTER |
| GB8039714A GB2066563B (en) | 1979-12-12 | 1980-12-11 | Electromechanical transducers |
| FR8026472A FR2472325B1 (en) | 1979-12-12 | 1980-12-12 | ELECTROMECHANICAL TRANSDUCER |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16119879A JPS5683983A (en) | 1979-12-12 | 1979-12-12 | Electricity-machinery conversion element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5683983A JPS5683983A (en) | 1981-07-08 |
| JPS6310912B2 true JPS6310912B2 (en) | 1988-03-10 |
Family
ID=15730444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16119879A Granted JPS5683983A (en) | 1979-12-12 | 1979-12-12 | Electricity-machinery conversion element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5683983A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022084A1 (en) * | 2004-08-24 | 2006-03-02 | Taiheiyo Cement Corporation | Piezoelectric device and piezoelectric switch employing same |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2739043B2 (en) * | 1988-04-06 | 1998-04-08 | 三菱電機株式会社 | Optical disk recording and playback device |
| JPH02164284A (en) * | 1988-04-12 | 1990-06-25 | Tomio Kotaki | Ultrasonic actuator |
| JP3405618B2 (en) * | 1995-04-11 | 2003-05-12 | 松下電器産業株式会社 | Bimorph piezoelectric actuator |
| DK1019972T3 (en) * | 1997-09-30 | 2007-03-12 | Argillon Gmbh | Piezoelectric element |
| WO2006025138A1 (en) * | 2004-08-30 | 2006-03-09 | Murata Manufacturing Co., Ltd. | Piezoelectric electroacoustic transducer |
| JP5776270B2 (en) * | 2011-03-29 | 2015-09-09 | セイコーエプソン株式会社 | Piezoelectric actuators, motors, robot hands and robots |
-
1979
- 1979-12-12 JP JP16119879A patent/JPS5683983A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022084A1 (en) * | 2004-08-24 | 2006-03-02 | Taiheiyo Cement Corporation | Piezoelectric device and piezoelectric switch employing same |
| US7535155B2 (en) | 2004-08-24 | 2009-05-19 | Taiheiyo Cement Corporation | Piezoelectric device and piezoelectric switch provided with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5683983A (en) | 1981-07-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4363993A (en) | Piezoelectric electro-mechanical bimorph transducer | |
| JPS6048112B2 (en) | Electrical/mechanical conversion element | |
| JP3675315B2 (en) | Head gimbal assembly having an actuator for minute positioning of a head element and disk apparatus having the head gimbal assembly | |
| US6724127B2 (en) | Piezoelectric/electrostrictive device | |
| US4374402A (en) | Piezoelectric transducer mounting structure and associated techniques | |
| US7099115B2 (en) | Head gimbal assembly with precise positioning actuator for head element, disk drive apparatus with the head gimbal assembly, and manufacturing method of the head gimbal assembly | |
| JP4075475B2 (en) | Head gimbal assembly having an actuator for minute positioning of a head element and disk apparatus having the head gimbal assembly | |
| US6934127B2 (en) | Precise positioning actuator for head element, head gimbal assembly with the actuator and disk drive apparatus with the head gimbal assembly | |
| JP2002133803A (en) | Very small positioning actuator for head element, head gimbal assembly equipped with the actuator, disk device equipped with the head gimbal assembly, actuator manufacturing method, and head gimbal assembly manufacturing method | |
| US7242132B2 (en) | Piezoelectric actuator and head assembly using the piezoelectric actuator | |
| JPS6310912B2 (en) | ||
| JP3210011B2 (en) | Piezoelectric bending transducer and method of manufacturing the same | |
| JP2001211668A (en) | Fine positioning actuator, thin film magnetic head device positioning actuator and head suspension assembly having the same | |
| JP4360053B2 (en) | Head slider bonded to micropositioning actuator, head gimbal assembly provided with head slider, method of bonding head slider and actuator, and method of manufacturing head gimbal assembly | |
| JP3535111B2 (en) | Piezo actuator | |
| JP2000317898A (en) | Piezoelectric/electrostrictive device | |
| JP4110802B2 (en) | Head element micropositioning actuator, head gimbal assembly including the actuator, and disk device including the head gimbal assembly | |
| JP2893765B2 (en) | Method for manufacturing multimorph element | |
| JP3717141B2 (en) | Piezoelectric actuator | |
| JP2001185773A (en) | Piezoelectric/electrostrictive device | |
| JP2001025093A (en) | Compound piezoelectric diaphragm and production thereof | |
| WO2005110235A1 (en) | Ultrasonic probe and method for the fabrication thereof | |
| JPH11126318A (en) | Actuator and magnetic head device |