JP3405618B2 - Bimorph piezoelectric actuator - Google Patents
Bimorph piezoelectric actuatorInfo
- Publication number
- JP3405618B2 JP3405618B2 JP08570695A JP8570695A JP3405618B2 JP 3405618 B2 JP3405618 B2 JP 3405618B2 JP 08570695 A JP08570695 A JP 08570695A JP 8570695 A JP8570695 A JP 8570695A JP 3405618 B2 JP3405618 B2 JP 3405618B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- bimorph
- piezoelectric
- bimorph piezoelectric
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000919 ceramic Substances 0.000 claims description 34
- 239000000463 material Substances 0.000 claims description 31
- 230000003014 reinforcing effect Effects 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 229910001374 Invar Inorganic materials 0.000 claims description 6
- 239000011888 foil Substances 0.000 claims description 6
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 5
- 239000004917 carbon fiber Substances 0.000 claims description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 18
- 230000010287 polarization Effects 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Manipulator (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電気・機械変換素子の
うち、例えば精密位置決め、リレースイッチ等の用途に
用いるバイモルフ圧電アクチュエータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bimorph piezoelectric actuator used for precision positioning, relay switches and the like among electromechanical conversion elements.
【０００２】[0002]
【従来の技術】一般的な従来のバイモルフ圧電アクチュ
エータの構成を図２に示す。図２において、２枚の圧電
体板１及び２は、それらの各主面にそれぞれ電極３、
５、６及び７が被着され、シム材と呼称される板状部材
４を介して接着剤により接着され、積層されている。圧
電体板１及び２の材料として、一般にセラミックス材料
が用いられている。また、シム材４の材料としては、チ
タン、ステンレス、りん青銅等の金属が用いられてい
る。また、接着剤としては導電性接着剤が用いられてい
る。2. Description of the Related Art The structure of a general conventional bimorph piezoelectric actuator is shown in FIG. In FIG. 2, two piezoelectric plates 1 and 2 have electrodes 3,
Nos. 5, 6 and 7 are adhered, adhered by an adhesive through a plate member 4 called a shim member, and laminated. Ceramic materials are generally used as materials for the piezoelectric plates 1 and 2. As the material of the shim material 4, a metal such as titanium, stainless steel, phosphor bronze or the like is used. A conductive adhesive is used as the adhesive.
【０００３】上記構成において、両圧電体板１及び２の
各々対向電極３及び６、５及び７の間に電界を与えるこ
とにより、両圧電体１及び２の間に長さの差が生じる。
両圧電体１及び２のいずれかの一端を機械的に固定する
ことにより他端が変位し、バイモルフ圧電アクチュエー
タとして機能する。圧電体１及び２の伸縮変化が大きい
ほど、すなわち、圧電体の性能を示す圧電定数が大きい
ほど変位量は大きい。In the above structure, an electric field is applied between the opposing electrodes 3 and 6, 5 and 7 of the piezoelectric plates 1 and 2, respectively, so that a difference in length occurs between the piezoelectric plates 1 and 2.
By mechanically fixing one end of either of the piezoelectric bodies 1 and 2, the other end is displaced and functions as a bimorph piezoelectric actuator. The larger the expansion / contraction change of the piezoelectric bodies 1 and 2, that is, the larger the piezoelectric constant indicating the performance of the piezoelectric body, the larger the displacement amount.
【０００４】[0004]
【発明が解決しようとする課題】従来、バイモルフ圧電
アクチュエータに使われるセラミックスとしては、Ｐｂ
ＴｉxＺｒyＯ3などのセラミックス材料が用いられてき
た。これらのセラミックス材料は、一般に、圧電定数が
大きいものはキュリー温度が低い傾向にある。従って、
大振幅バイモルフ圧電アクチュエータを得るためには、
キュリー温度の低い材料を用いれば有利であることがわ
かる。Conventionally, as a ceramic used in a bimorph piezoelectric actuator, Pb has been used.
Ceramic materials such as Ti x Zr y O 3 have been used. Of these ceramic materials, generally, those having a large piezoelectric constant tend to have a low Curie temperature. Therefore,
To obtain a large amplitude bimorph piezoelectric actuator,
It turns out that it is advantageous to use a material having a low Curie temperature.
【０００５】しかし、一般的にキュリー点が１４０℃以
下の圧電材料及び電歪材料を用いた場合、圧電定数が大
きい反面、抗電場が低く、温度安定性や経時変化に弱
く、用途が限定されるため、あまり用いられていない。
一方、キュリー点が１５０℃以上のものを用いた場合、
温度安定性や経時変化に強い反面、圧電定数がせいぜい
２００×１０-12ｍ／Ｖ程度であり、あまり大きくな
く、これら通常の圧電セラミックスをそのまま用いたバ
イモルフ圧電アクチュエータでは、それほど大きな変位
量が得られないという問題点を有していた。However, in general, when a piezoelectric material or an electrostrictive material having a Curie point of 140 ° C. or lower is used, the piezoelectric constant is large, but the coercive electric field is low, and the temperature stability and the change with time are weak, and the application is limited. Therefore, it is not often used.
On the other hand, when a Curie point of 150 ° C. or higher is used,
Although it is strong against temperature stability and aging, the piezoelectric constant is at most about 200 × 10 -12 m / V, which is not so large, and a bimorph piezoelectric actuator using these ordinary piezoelectric ceramics can obtain a large displacement amount. It had a problem that it could not be done.
【０００６】一方、大振幅を得るために、一般的には高
い電圧を印加すればよいが、圧電材料自体に耐電圧があ
り、電圧に対応する歪も飽和し、ある値以上の歪で圧電
材料自体の破壊に至る。そのため、印加電圧をあまり高
くすることはできず、大振幅バイモルフ圧電アクチュエ
ータを得ることは困難であった。さらに、繰り返し高電
圧を印加することにより圧電材料自体がその歪により劣
化し、その結果、圧電材料全体の分極状態にも影響を及
ぼし、バイモルフ圧電アクチュエータ特性が経時劣化す
るという問題点を有していた。On the other hand, in order to obtain a large amplitude, it is generally sufficient to apply a high voltage, but the piezoelectric material itself has a withstand voltage, and the strain corresponding to the voltage is saturated, and the piezoelectric strain exceeds a certain value. Destruction of the material itself. Therefore, the applied voltage cannot be increased so much, and it is difficult to obtain a large amplitude bimorph piezoelectric actuator. Furthermore, when a high voltage is repeatedly applied, the piezoelectric material itself deteriorates due to its strain, and as a result, the polarization state of the entire piezoelectric material is affected, and the bimorph piezoelectric actuator characteristics deteriorate over time. It was
【０００７】本発明は以上のような従来の問題点を解決
するためになされたものであり、キュリー点が低い圧電
材料を用いて、経時劣化が少なく、安定して大振幅変位
が得られるバイモルフ圧電アクチュエータを提供するこ
とを目的としている。The present invention has been made in order to solve the above-mentioned conventional problems, and uses a piezoelectric material having a low Curie point, and is a bimorph which is stable with a large amplitude displacement and is less likely to deteriorate over time. It is intended to provide a piezoelectric actuator.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するた
め、本発明のバイモルフ圧電アクチュエータは、それぞ
れ一の主面どうしを張合わされた２つの圧電セラミック
ス板と、前記各圧電セラミックス板の主面にそれぞれ被
覆された電極と、前記電極の外側にそれぞれ固着された
補強部材を具備する。In order to achieve the above object, a bimorph piezoelectric actuator of the present invention has two piezoelectric ceramic plates, one main surface of which is bonded to each other, and a main surface of each piezoelectric ceramic plate. Each of the electrodes includes a covered electrode and a reinforcing member fixed to the outside of the electrode.
【０００９】上記構成において、前記圧電セラミックス
板は、シム材を介して張合わされたことが好ましい。ま
た、上記各構成において、前記補強部材はインバー箔で
あることが好ましい。In the above-mentioned structure, it is preferable that the piezoelectric ceramic plates are attached to each other via a shim material. Further, in each of the above configurations, it is preferable that the reinforcing member is an Invar foil.
【００１０】また、上記構成において、前記シム材はカ
ーボン繊維樹脂製であることが好ましい。また、上記各
構成において、前記電極は、鏡面研磨された圧電セラミ
ックス表面上に真空蒸着法又はスパッタリング法により
形成されたＣｒ金属の第１電極層と、第１電極層の上に
形成されたＮｉ金属の第２電極層を含み、膜厚が２μｍ
以上であることが好ましい。Further, in the above construction, the shim material is preferably made of carbon fiber resin. Further, in each of the above configurations, the electrode is a Cr metal first electrode layer formed on a mirror-polished piezoelectric ceramic surface by a vacuum deposition method or a sputtering method, and a Ni electrode formed on the first electrode layer. Including the metal second electrode layer, the film thickness is 2μm
The above is preferable.
【００１１】また、上記各構成において、前記圧電セラ
ミックス板はＰｂ（Ｎｉ1/3Ｎｂ2/3）AＴｉBＺｒCＯ
3（Ａ＋Ｂ＋Ｃ＝１）で表され、キュリー温度が２０℃
から１４０℃の範囲の強誘電体であることが好ましい。In each of the above constructions, the piezoelectric ceramic plate is made of Pb (Ni 1/3 Nb 2/3 ) A Ti B Zr C O.
3 (A + B + C = 1), Curie temperature is 20 ℃
It is preferably a ferroelectric substance in the range of 1 to 140 ° C.
【００１２】[0012]
【作用】発明者らは、圧電セラミックス部材の表面構成
が、その上に被着される電極の構成を含めて、大振幅バ
イモルフ圧電アクチュエータにおける振幅（変位量）の
経時変化に大きな影響を及ぼすことを見いだした。すな
わち、バイモルフ圧電アクチュエータの動作において、
最も大きな変位を与える時の、材料に対する歪変化は、
その一番外側の表面が最も大きくなる。従って、歪変化
の大きい表面から亀裂が進展し、亀裂の進展に伴い、電
極部の導通がとりにくくなり、圧電セラミックス部材の
性能劣化が起こると考えられる。The inventors have found that the surface configuration of the piezoelectric ceramic member has a great influence on the change over time of the amplitude (displacement amount) in the large-amplitude bimorph piezoelectric actuator, including the configuration of the electrode deposited thereon. I found it. That is, in the operation of the bimorph piezoelectric actuator,
The strain change to the material when giving the largest displacement is
Its outermost surface is the largest. Therefore, it is considered that a crack develops from the surface with a large strain change, and it becomes difficult for the electrode part to be electrically connected with the progress of the crack, and the performance of the piezoelectric ceramic member deteriorates.
【００１３】一方、本発明のバイモルフ圧電アクチュエ
ータは、従来のバイモルフ圧電アクチュエータの構成に
加えて、各電極の外側にそれぞれ補強部材が固着されて
いるので、補強部材の作用により、亀裂の進展が従来の
ものよりも遅いと考えられる。その結果、振幅の経時変
化が遅く、長期間にわたって安定した動作を行うことが
できる。On the other hand, in the bimorph piezoelectric actuator of the present invention, in addition to the structure of the conventional bimorph piezoelectric actuator, the reinforcing members are fixed to the outer sides of the respective electrodes. Considered to be slower than the ones. As a result, the change in amplitude over time is slow, and stable operation can be performed over a long period of time.
【００１４】また、２つの圧電セラミックス板をシム材
を介して張合わせることにより、シム材により強度が補
強され、性能劣化がさらに少なくなる。Further, by laminating the two piezoelectric ceramic plates through the shim material, the strength is reinforced by the shim material, and the performance deterioration is further reduced.
【００１５】また、補強部材をインバー箔とすることに
より、熱膨脹差に起因する応力を制御して張り合わせ工
程を行うことができる。また、シム材をカーボン繊維樹
脂製とすることにより、変位に関係ない方向にはシム材
の効果として変位を阻害する方向に働き、変位に関係す
る方向には変位を助長する方向に作用させることができ
る。Further, by using the invar foil as the reinforcing member, it is possible to control the stress caused by the difference in thermal expansion and perform the laminating step. Also, by making the shim material from carbon fiber resin, the shim material acts in the direction that impedes displacement as the effect of the shim material in the direction that is not related to displacement, and acts in the direction that promotes displacement in the direction that is related to displacement. You can
【００１６】また、電極を鏡面研磨された圧電セラミッ
クス表面上に真空蒸着法又はスパッタリング法により形
成されたＣｒ金属の第１電極層と第１電極層の上に形成
されたＮｉ金属の第２電極層を含み、膜厚を２μｍ以上
の補強部材の厚さに合わせた適切な膜厚とすることによ
り、性能劣化が少なく、かつ初期性能が安定したバイモ
ルフ圧電アクチュエータを得ることができる。A first electrode layer of Cr metal formed by a vacuum deposition method or a sputtering method on the surface of the piezoelectric ceramic whose electrodes are mirror-polished, and a second electrode of Ni metal formed on the first electrode layer. By including the layers and adjusting the film thickness to an appropriate value in accordance with the thickness of the reinforcing member of 2 μm or more, it is possible to obtain a bimorph piezoelectric actuator with little performance deterioration and stable initial performance.
【００１７】また、圧電セラミックス板をＰｂ（Ｎｉ
1/3Ｎｂ2/3）AＴｉBＺｒCＯ3（Ａ＋Ｂ＋Ｃ＝１）で表さ
れたキュリー温度が２０℃から１４０℃の範囲の強誘電
体とすることにより、大振幅のバイモルフ圧電アクチュ
エータを得ることができる。Further, the piezoelectric ceramic plate is made of Pb (Ni
1/3 Nb 2/3 ) A Ti B Zr C O 3 (A + B + C = 1) A ferroelectric material having a Curie temperature in the range of 20 ° C. to 140 ° C. makes it possible to realize a large amplitude bimorph piezoelectric actuator. Obtainable.
【００１８】[0018]
【実施例】本発明のバイモルフ圧電アクチュエータの実
施例を図１を参照しつつ詳細に説明する。図１に示すよ
うに、本発明のバイモルフ圧電アクチュエータは、シム
材４を介して、それぞれ一の主面どうしを張合わされた
２つの圧電セラミックス板１及び２と、各圧電セラミッ
クス板１及び２の他の主面にそれぞれ被覆された電極３
及び５と、電極３及び５の外側にそれぞれ固着された補
強部材８及び９を具備する。EXAMPLE An example of the bimorph piezoelectric actuator of the present invention will be described in detail with reference to FIG. As shown in FIG. 1, the bimorph piezoelectric actuator of the present invention includes two piezoelectric ceramic plates 1 and 2 each having one principal surface bonded to each other via a shim member 4, and each piezoelectric ceramic plate 1 and 2. Electrodes 3 coated on the other main surfaces, respectively
And 5 and reinforcing members 8 and 9 fixed to the outside of the electrodes 3 and 5, respectively.
【００１９】圧電セラミックス板１及び２の材料として
は、キュリー点が１４０℃以下のセラミックス、例えば
Ｐｂ（Ｎｉ1/3Ｎｂ2/3）AＴｉBＺｒCＯ3（Ａ＋Ｂ＋Ｃ＝
１）で表されたキュリー温度が２０℃から１４０℃の範
囲のものを用いた。また、シム材４の材料としてカーボ
ン繊維樹脂を用いた。セラミックス基板を０．２ｍｍの
厚さに鏡面研磨して複数の圧電セラミックス板１及び２
を成型し、各圧電セラミックス板の主面にそれぞれＣｒ
−Ｎｉ蒸着を順に施し、電極３、５、６及び７を形成し
た。その際、膜圧を制御し、０．２〜４μｍの厚さの電
極３及び５をもつ圧電セラミックス板１及び２をいくつ
か用意した。電極３及び５が形成された圧電セラミック
ス板１及び２をシリコン油中に浸し、２．５ＫＶ／ｍｍ
の電界を印加し、分極処理を行った。As a material for the piezoelectric ceramic plates 1 and 2, ceramics having a Curie point of 140 ° C. or lower, for example, Pb (Ni 1/3 Nb 2/3 ) A Ti B Zr C O 3 (A + B + C =
A Curie temperature represented by 1) in the range of 20 ° C to 140 ° C was used. Further, carbon fiber resin was used as the material of the shim material 4. The ceramic substrate is mirror-polished to a thickness of 0.2 mm to form a plurality of piezoelectric ceramic plates 1 and 2
And then Cr on the main surface of each piezoelectric ceramics plate.
-Ni vapor deposition was sequentially applied to form electrodes 3, 5, 6 and 7. At that time, the membrane pressure was controlled to prepare some piezoelectric ceramic plates 1 and 2 having electrodes 3 and 5 having a thickness of 0.2 to 4 μm. The piezoelectric ceramic plates 1 and 2 on which the electrodes 3 and 5 are formed are dipped in silicone oil to obtain 2.5 KV / mm.
The electric field of was applied to perform polarization treatment.
【００２０】圧電セラミックス板１及び２の分極方向の
プラス側をシム側（電極３又は５が形成されていない
側）とし、それぞれ室温及び１５０℃の温度で硬化する
２種類の接着剤を用い、それぞれ電極３及び５が外側に
なるように２枚の圧電セラミックス板１及び２とシム材
４とを張合わせ、さらに電極３及び５の外側に厚さ５μ
ｍのインバー箔（補強部材８及び９）を接着剤を用いて
張り合わせ、バイモルフ圧電アクチュエータを作製し
た。比較例として、電極３及び５の外側に補強部材（イ
ンバー箔）を設けていない従来のバイモルフ圧電アクチ
ュエータも作製した。The positive side of the polarization direction of the piezoelectric ceramic plates 1 and 2 is the shim side (the side on which the electrode 3 or 5 is not formed), and two kinds of adhesives which cure at room temperature and 150 ° C. respectively are used. The two piezoelectric ceramic plates 1 and 2 and the shim member 4 are attached to each other so that the electrodes 3 and 5 are on the outside, respectively, and a thickness of 5 μm is provided on the outside of the electrodes 3 and 5.
The Invar foil of m (reinforcing members 8 and 9) were bonded together with an adhesive to manufacture a bimorph piezoelectric actuator. As a comparative example, a conventional bimorph piezoelectric actuator in which no reinforcing member (invar foil) was provided outside the electrodes 3 and 5 was also manufactured.
【００２１】バイモルフ圧電アクチュエータの大きさを
４ｍｍ×２０ｍｍとし、バイモルフ圧電アクチュエータ
の有効長を１５ｍｍとした。バイモルフ圧電アクチュエ
ータの駆動に際し、分極方向のプラス側をシム側とし、
分極方向の正の方向には３５０Ｖまで電圧を印加し、負
の方向には電界が印加されないように電圧を制御した。
これらのバイモルフ圧電アクチュエータについて、ピー
ク間電圧７００Ｖの電圧を印加し、その際の変位振幅の
経時変化を、レーザ式変位計を用いて測定した。結果を
図３に示す。図３から明らかなように、本発明のバイモ
ルフ圧電アクチュエータは、従来の構成の比較例と比
べ、バイモルフ圧電アクチュエータの振幅特性の経時変
化に関して向上が見られた。The size of the bimorph piezoelectric actuator was 4 mm × 20 mm, and the effective length of the bimorph piezoelectric actuator was 15 mm. When driving the bimorph piezoelectric actuator, the positive side of the polarization direction is the shim side,
A voltage was applied up to 350 V in the positive direction of the polarization direction, and the voltage was controlled so that the electric field was not applied in the negative direction.
A voltage of 700 V between peaks was applied to these bimorph piezoelectric actuators, and the temporal change in displacement amplitude at that time was measured using a laser displacement meter. The results are shown in Fig. 3. As is clear from FIG. 3, the bimorph piezoelectric actuator of the present invention showed an improvement in the change over time of the amplitude characteristics of the bimorph piezoelectric actuator as compared with the comparative example having the conventional configuration.
【００２２】[0022]
【発明の効果】以上のように、本発明のバイモルフ圧電
アクチュエータは、従来のバイモルフ圧電アクチュエー
タの構成に加えて、各電極の外側にそれぞれ補強部材が
固着されているので、補強部材の作用により、バイモル
フ圧電アクチュエータの動作において歪変化が最も大き
い部分の亀裂の進展が従来のものよりも遅く、亀裂の進
展に伴うセラミックス材料が劣化又はセラミックス材料
の部分的破壊の速度が遅くなり、振幅の経時変化が遅
く、長期間にわたって安定した動作を行うことができ
る。また、２つの圧電セラミックス板をシム材を介して
張合わせることにより、シム材により強度が補強され、
性能劣化をさらに少なくすることができる。As described above, in the bimorph piezoelectric actuator of the present invention, in addition to the structure of the conventional bimorph piezoelectric actuator, the reinforcing member is fixed to the outside of each electrode. In the operation of the bimorph piezoelectric actuator, the crack growth in the part where the strain change is the largest is slower than the conventional one, the ceramic material deteriorates or the partial fracture speed of the ceramic material slows down due to the crack growth, and the amplitude changes with time. Is slow and stable operation can be performed over a long period of time. In addition, the strength is reinforced by the shim material by laminating the two piezoelectric ceramic plates through the shim material,
Performance degradation can be further reduced.
【００２３】また、補強部材をインバー箔とすることに
より、熱膨脹差に起因する応力を制御してバイモルフの
変位に有利な応力状態とし、大きな変位量を得ることが
できる。また、シム材をカーボン繊維樹脂製とすること
により、変位に関係ない方向にはシム材の効果として変
位を阻害する方向に働き、変位に関係する方向には変位
を助長する方向に作用させることができる。Further, by using the invar foil as the reinforcing member, it is possible to control the stress caused by the difference in thermal expansion and bring it into a stress state advantageous for the displacement of the bimorph, and to obtain a large displacement amount. Also, by making the shim material from carbon fiber resin, the shim material acts in the direction that impedes displacement as the effect of the shim material in the direction that is not related to displacement, and acts in the direction that promotes displacement in the direction that is related to displacement. You can
【００２４】また、電極を鏡面研磨された圧電セラミッ
クス表面上に真空蒸着法又はスパッタリング法により形
成されたＣｒ金属の第１電極層と第１電極層の上に形成
されたＮｉ金属の第２電極層を含み、膜厚を２μｍ以上
とすることにより、性能劣化が少なく、かつ初期性能が
安定したバイモルフ圧電アクチュエータを得ることがで
きる。尚、膜厚が２μｍより小さいものは劣化率が大き
かった。尚、外部補強部材の厚みが５μｍより薄い場
合、膜厚をその分厚くすれば同様の効果が得られる。Further, a first electrode layer of Cr metal, which is formed on the surface of the mirror-polished piezoelectric ceramics by a vacuum deposition method or a sputtering method, and a second electrode of Ni metal, which is formed on the first electrode layer. By including a layer and having a film thickness of 2 μm or more, it is possible to obtain a bimorph piezoelectric actuator with little deterioration in performance and stable initial performance. The deterioration rate was large when the film thickness was smaller than 2 μm. When the thickness of the external reinforcing member is smaller than 5 μm, the same effect can be obtained by increasing the film thickness accordingly.
【００２５】また、圧電セラミックス板をＰｂ（Ｎｉ
1/3Ｎｂ2/3）AＴｉBＺｒCＯ3（Ａ＋Ｂ＋Ｃ＝１）で表さ
れたキュリー温度が２０℃から１４０℃の範囲の強誘電
体とすることにより、大振幅のバイモルフ圧電アクチュ
エータを得ることができる。Further, the piezoelectric ceramic plate is made of Pb (Ni
1/3 Nb 2/3 ) A Ti B Zr C O 3 (A + B + C = 1) A ferroelectric material having a Curie temperature in the range of 20 ° C. to 140 ° C. makes it possible to realize a large amplitude bimorph piezoelectric actuator. Obtainable.
【００２６】その結果、本発明の構成のバイモルフ圧電
アクチュエータによれば、圧電セラミックスの表面歪が
少なく、分極状態が変化しにくく、大振幅駆動でも変位
振幅の変化率が少ないバイモルフ圧電アクチュエータが
得られるという顕著な効果が得られる。As a result, according to the bimorph piezoelectric actuator having the structure of the present invention, it is possible to obtain a bimorph piezoelectric actuator in which the surface strain of the piezoelectric ceramics is small, the polarization state is hard to change, and the displacement amplitude change rate is small even at large amplitude driving. That is a remarkable effect.
【図１】本発明のバイモルフ圧電アクチュエータの構成
を示す断面図FIG. 1 is a sectional view showing a configuration of a bimorph piezoelectric actuator of the present invention.
【図２】従来のバイモルフ圧電アクチュエータの構成を
示す断面図FIG. 2 is a sectional view showing the structure of a conventional bimorph piezoelectric actuator.
【図３】本発明のバイモルフ圧電アクチュエータと従来
のバイモルフ圧電アクチュエータの初期振幅特性及び長
期駆動後の振幅特性を示す特性図FIG. 3 is a characteristic diagram showing an initial amplitude characteristic and an amplitude characteristic after long-term driving of the bimorph piezoelectric actuator of the present invention and a conventional bimorph piezoelectric actuator.
【符号の説明】 １：圧電セラミック板 ２：圧電セラミック板 ３：電極 ４：シム材 ５：電極 ６：電極 ７：電極 ８：補強部材 ９：補強部材[Explanation of symbols] 1: Piezoelectric ceramic plate 2: Piezoelectric ceramic plate 3: Electrode 4: Shim material 5: Electrode 6: Electrode 7: Electrode 8: Reinforcement member 9: Reinforcing member
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｈ０１Ｌ 41/18 １０１Ｆ (72)発明者 河島 俊一郎 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 釘宮 公一 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭56−83983（ＪＰ，Ａ) 特開 平６−203351（ＪＰ，Ａ) 特開 昭60−208880（ＪＰ，Ａ) 特開 平７−41363（ＪＰ，Ａ) 特開 平６−268381（ＪＰ，Ａ) 実開 昭61−81296（ＪＰ，Ｕ) 実開 平１−130568（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 41/09 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 7 Identification code FI H01L 41/18 101F (72) Inventor Shunichiro Kawashima 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Kouichi Kazunomiya 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) Reference JP 56-83983 (JP, A) JP 6-203351 (JP, A) JP 60- 208880 (JP, A) JP-A-7-41363 (JP, A) JP-A-6-268381 (JP, A) Actually open 61-81296 (JP, U) Actually open 1-130568 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) H01L 41/09
Claims (6)
２つの圧電セラミックス板と、前記各圧電セラミックス
板の主面にそれぞれ被覆された電極と、前記電極の外側
にそれぞれ固着された補強部材を具備するバイモルフ圧
電アクチュエータ。1. Two piezoelectric ceramic plates each having one main surface bonded to each other, electrodes coated on the main surfaces of each piezoelectric ceramic plate, and reinforcing members fixed to the outer sides of the electrodes, respectively. A bimorph piezoelectric actuator provided.
して張合わされたことを特徴とする請求項１記載のバイ
モルフ圧電アクチュエータ。2. The bimorph piezoelectric actuator according to claim 1, wherein the piezoelectric ceramic plates are attached to each other via a shim material.
１又は２記載のバイモルフ圧電アクチュエータ。3. The bimorph piezoelectric actuator according to claim 1, wherein the reinforcing member is an Invar foil.
請求項２記載のバイモルフ圧電アクチュエータ。4. The bimorph piezoelectric actuator according to claim 2, wherein the shim member is made of carbon fiber resin.
ックス表面上に真空蒸着法又はスパッタリング法により
形成されたＣｒ金属の第１電極層と、第１電極層の上に
形成されたＮｉ金属の第２電極層を含み、膜厚が２μｍ
以上である請求項１から４のいずれかに記載のバイモル
フ圧電アクチュエータ。5. The electrode comprises a first electrode layer of Cr metal formed on a mirror-polished surface of a piezoelectric ceramic by a vacuum deposition method or a sputtering method, and a Ni metal formed on the first electrode layer. Including the second electrode layer, the film thickness is 2 μm
It is above, The bimorph piezoelectric actuator in any one of Claim 1 to 4.
1/3Ｎｂ2/3）AＴｉBＺｒ CＯ3（Ａ＋Ｂ＋Ｃ＝１）で表さ
れ、キュリー温度が２０℃から１４０℃の範囲の強誘電
体である請求項１から５のいずれかに記載のバイモルフ
圧電アクチュエータ。6. The piezoelectric ceramic plate is made of Pb (Ni
1/3Nb2/3)ATiBZr CO3Expressed as (A + B + C = 1)
And the Curie temperature is in the range of 20 ℃ to 140 ℃
The bimorph according to any one of claims 1 to 5, which is a body
Piezoelectric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08570695A JP3405618B2 (en) | 1995-04-11 | 1995-04-11 | Bimorph piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08570695A JP3405618B2 (en) | 1995-04-11 | 1995-04-11 | Bimorph piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08288564A JPH08288564A (en) | 1996-11-01 |
| JP3405618B2 true JP3405618B2 (en) | 2003-05-12 |
Family
ID=13866276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08570695A Expired - Fee Related JP3405618B2 (en) | 1995-04-11 | 1995-04-11 | Bimorph piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3405618B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4332966A1 (en) * | 1993-09-28 | 1995-03-30 | Philips Patentverwaltung | Torsion actuator and a method for its production |
| WO1999017383A1 (en) * | 1997-09-30 | 1999-04-08 | Siemens Aktiengesellschaft | Piezo-electric element |
| JP2000332313A (en) | 1999-05-21 | 2000-11-30 | Matsushita Electric Ind Co Ltd | Thin film piezoelectric bimorph element and application thereof |
| JP4625553B2 (en) * | 1999-05-31 | 2011-02-02 | 貞夫 秋下 | Vibration / sound wave insulation structure of double structure |
| GB0111003D0 (en) * | 2001-05-04 | 2001-06-27 | New Transducers Ltd | Electrostrictive transducer and method of manufacture thereof |
| US7031099B2 (en) | 2001-07-31 | 2006-04-18 | Matsushita Electric Industrial Co., Ltd. | Head positioner and information recording/replaying apparatus |
| JP4904656B2 (en) * | 2001-09-27 | 2012-03-28 | パナソニック株式会社 | Thin film piezoelectric element and method for manufacturing the same |
| CN1273960C (en) | 2002-04-22 | 2006-09-06 | 新科实业有限公司 | Equipment and method for electrically and physically coupling microactuator and magnetic head to drwe suspension for component replacement after detachment from the suspension |
| JP4539084B2 (en) * | 2002-12-03 | 2010-09-08 | パナソニック株式会社 | Method for manufacturing thin film piezoelectric element |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5683983A (en) * | 1979-12-12 | 1981-07-08 | Sony Corp | Electricity-machinery conversion element |
| JPS60208880A (en) * | 1984-04-03 | 1985-10-21 | Sumitomo Special Metals Co Ltd | Piezoelectric bimorph vibrator |
| JPH0811004Y2 (en) * | 1984-11-01 | 1996-03-29 | 住友特殊金属株式会社 | Piezoelectric bimorph oscillator |
| JP2547499Y2 (en) * | 1988-03-02 | 1997-09-10 | 株式会社 トーキン | Piezoelectric bimorph actuator |
| JP3340206B2 (en) * | 1992-10-06 | 2002-11-05 | 松下電器産業株式会社 | Piezo actuator and head actuator |
| JPH06268381A (en) * | 1993-03-11 | 1994-09-22 | Hitachi Ltd | Multilayer wiring structure and its manufacture |
| JP3384048B2 (en) * | 1993-07-29 | 2003-03-10 | 株式会社村田製作所 | Piezoelectric ceramic composition |
-
1995
- 1995-04-11 JP JP08570695A patent/JP3405618B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08288564A (en) | 1996-11-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5940947A (en) | Method of making a piezoelectric/electrostrictive film element with a diaphragm having at least one stress releasing end section | |
| JP3521499B2 (en) | Piezoelectric / electrostrictive film type element | |
| EP0408305A2 (en) | Piezoelectric/electrostrictive actuator | |
| EP0810676B1 (en) | Piezoelectric film-type element | |
| EP0408306B1 (en) | Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film | |
| US5210455A (en) | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion | |
| JP2665106B2 (en) | Piezoelectric / electrostrictive film element | |
| US6605887B2 (en) | Piezoelectric/electrostrictive device and method of manufacturing same | |
| US9136820B2 (en) | Piezoelectric device | |
| EP1148561B1 (en) | Piezoelectric/electrostrictive film type elements and process for producing the same | |
| JP2842448B2 (en) | Piezoelectric / electrostrictive film type actuator | |
| US20020063496A1 (en) | Actuator device | |
| JPS6048112B2 (en) | Electrical/mechanical conversion element | |
| JP3405618B2 (en) | Bimorph piezoelectric actuator | |
| CA2155523A1 (en) | Monolithic prestressed ceramic devices and method for making same | |
| US6472799B2 (en) | Piezoelectric/electrostrictive device and method of manufacturing same | |
| US20030076009A1 (en) | Piezoceramic bending transducer and use thereof | |
| US6498419B1 (en) | Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same | |
| JPH08116103A (en) | Piezoelectric actuator and manufacture thereof | |
| JP4934924B2 (en) | Ferroelectric actuator element and manufacturing method thereof | |
| JP3428773B2 (en) | Bimorph piezoelectric element and method of manufacturing the same | |
| JPS5963783A (en) | Piezoelectric bimorph element | |
| JPH0223035B2 (en) | ||
| JPH08167746A (en) | Layered piezoelectric actuator | |
| JP2893765B2 (en) | Method for manufacturing multimorph element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |