JPS63103933A - Measuring instrument for large area optical distortion - Google Patents
Measuring instrument for large area optical distortionInfo
- Publication number
- JPS63103933A JPS63103933A JP25028386A JP25028386A JPS63103933A JP S63103933 A JPS63103933 A JP S63103933A JP 25028386 A JP25028386 A JP 25028386A JP 25028386 A JP25028386 A JP 25028386A JP S63103933 A JPS63103933 A JP S63103933A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- lens
- plate
- convex lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 50
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 238000005259 measurement Methods 0.000 claims description 3
- 238000000149 argon plasma sintering Methods 0.000 abstract description 8
- 238000000465 moulding Methods 0.000 abstract description 3
- 230000004075 alteration Effects 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract description 2
- 230000000007 visual effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000002985 plastic film Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 241001494479 Pecora Species 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光学的に透明あるいは半透明な物質の光学歪
みを測定して、該物質の光学的性吠を測定する装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an apparatus for measuring the optical distortion of an optically transparent or translucent substance to measure the optical distortion of the substance. .
（従来の技術）
光学的に透明なプラスチックシー）、成Ｅ物、ガラス製
品などの成形時の光学歪みを簡単に測定する方法として
、これら成形体すなわち被測定物の複屈折を光強度的に
測定する方法が従来から既に知られている。この方法は
、第２図に示すように相直交する二枚の偏光板４，９の
間に測定しようとする被検査物１２を置き、該被検査物
の複屈折に応じた光強度で表示する方法である。光［＋
から出た光は、被検査物１２を通過しない部分では、第
２偏光板に遮断されて観測者に届かず、従って暗視野に
なる（Ｅ）。(Prior art) As a method to easily measure the optical distortion during molding of optically transparent plastic sheets, electronic products, glass products, etc., the birefringence of these molded objects, that is, the object to be measured, is measured in terms of light intensity. Methods for measuring this have already been known. In this method, as shown in Fig. 2, an object to be measured 12 is placed between two orthogonal polarizing plates 4 and 9, and the light intensity is displayed according to the birefringence of the object. This is the way to do it. light [+
The portion of the light that does not pass through the object to be inspected 12 is blocked by the second polarizing plate and does not reach the observer, resulting in a dark field (E).
他方、複屈折を存する被検査物１２を通過する場合、光
は、被検査物１２で歪みを生じるため、複屈折の程度に
応じて第２偏光板０を通過するため明るくなる（Ｄ）。On the other hand, when passing through the object to be inspected 12 that has birefringence, the light becomes distorted in the object to be inspected 12 and becomes brighter as it passes through the second polarizing plate 0 depending on the degree of birefringence (D).
従って被検査物１２の複屈折の程度に応じた明るい像が
表示される。ところが、表示が白黒であり、且つ複屈折
の主軸方向を表わすことが不可能である。このため、例
えば、光デイスク基板の射出成形現場において、複屈折
の方向に対応して、簡単に成形条件を変更するといった
用途には使用不可能であった。また光学歪みの程度を定
量に把握することができず、定性評価用途に限定されて
いた。Therefore, a bright image corresponding to the degree of birefringence of the object 12 to be inspected is displayed. However, the display is black and white, and it is impossible to indicate the principal axis direction of birefringence. For this reason, it cannot be used, for example, in an application where molding conditions are easily changed in response to the direction of birefringence at an injection molding site for optical disk substrates. Furthermore, it was not possible to quantitatively determine the degree of optical distortion, and the use of this method was limited to qualitative evaluation.
（発明が解決しようとする問題点）
これらの欠点を改良するために、第３図に示すように相
直交する偏光板４．９の間に鋭敏赤色検板５を入れ光学
歪みの主軸を表わすことを可能にした光学歪み検査装置
も知られている。この鋭敏赤色検板５は、相直交する偏
光板の主軸と４５゜の角度で挿入すると、被検査物１２
が複屈折のない場合には赤色をしめすが、複屈折を有す
る場合その程度と方向に応じて、色相が鋭敏に変化する
性質を有する透明な位相板である。このときの鋭敏赤色
検［５のレターデージ９ン値（複屈折ＸｖＬ厚）は約５
３０ｎｍであるが、複屈折に対して、上記の被検査物の
光学歪みを主軸に対して検出する機能を発揮しさえすれ
ば、レターデーションｆＪ１の範囲は限定されない。こ
の性質を利用して、被検査物１２を通過して検出された
色相から、被検査物の複屈折と、その主軸方向を検出で
きる（Ｆ）。ところが用いられる鋭敏赤色検板５は、上
述したように微少のレターデーション値の変動に対し色
相を赤色から鋭敏に変化させる性質を仔しているため、
加工精度が要求され、大面積の鋭敏赤色検板の作成は困
ｎであり、該鋭敏赤色検板５は高々５０■■直径程度の
ものしか得られていない。従って従来の光学歪み検査装
置では、大面積の被検査物を１回のセットでは検出およ
び測定はできなかった。ここで大面積の被検査物として
は例えば直径１２０■−から直径３００．、の光ディス
クの基板などがあげられる。さらに大面積の被検査物の
測定も可能である。(Problems to be Solved by the Invention) In order to improve these drawbacks, a sensitive red detector plate 5 is inserted between the mutually orthogonal polarizing plates 4 and 9 to represent the principal axis of optical distortion, as shown in FIG. An optical distortion inspection device that makes it possible to do this is also known. When this sensitive red detection plate 5 is inserted at an angle of 45 degrees with the main axis of the polarizing plate, which is orthogonal to the main axis, the object to be inspected 12
It is a transparent phase plate that exhibits a red color when there is no birefringence, but when it has birefringence, its hue changes sharply depending on the degree and direction of birefringence. At this time, the retardage 9 value (birefringence XvL thickness) of the sensitive red test [5] was approximately 5
Although the retardation fJ1 is 30 nm, the range of the retardation fJ1 is not limited as long as it exhibits the function of detecting the optical distortion of the object to be inspected with respect to the principal axis with respect to birefringence. Utilizing this property, the birefringence of the object to be inspected and its principal axis direction can be detected from the hue detected after passing through the object 12 to be inspected (F). However, the sensitive red detection plate 5 used has the property of sensitively changing the hue from red in response to minute changes in the retardation value, as described above.
Processing accuracy is required, and it is difficult to produce a large-area sensitive red detection plate, and the sensitive red detection plate 5 has only been available with a diameter of about 50mm. Therefore, conventional optical distortion inspection devices cannot detect and measure large-area objects to be inspected in one set. Here, as a large-area object to be inspected, for example, the diameter is 120mm to 300mm. , substrates for optical discs, etc. It is also possible to measure large-area objects.
また、第４図に示すように点光源１′を用いることによ
り、光を拡大して大面積の被検査物の光学歪みを検出す
る試みもなされている。点光源１′から出た光１１Ｊは
、鋭敏赤色検板５と角度ａを保ち光散乱板７を経て被検
査物１２に達する。Further, as shown in FIG. 4, an attempt has been made to use a point light source 1' to expand the light and detect optical distortion of a large-area object to be inspected. The light 11J emitted from the point light source 1' reaches the object to be inspected 12 through the light scattering plate 7 while maintaining an angle a with the sensitive red detection plate 5.
この時の鋭敏赤色検板５中での光Ｉ！Ｊの光路を第５図
に拡大して示す、鋭敏赤色検板５の厚みをｄａ ％光路
Ｊと該検板５の垂線とのなす角度をａとすると斜めに通
過する時の光路長ｄはｄ、 ／ ｃｏｓ（ａ）で表わさ
れ、ｄ、Ｘ（１／ｃｏ ｓ （ａ）−１）増加する。レ
ターデーション値は光路長に比例するため、レターデー
ション値も変動する。At this time, light I in the sensitive red detection plate 5! The optical path of J is enlarged in Fig. 5. If the thickness of the sensitive red detection plate 5 is da%, and the angle between the optical path J and the perpendicular to the detection plate 5 is a, then the optical path length when passing obliquely is d. It is expressed as d, /cos(a) and increases by d,X(1/cos(a)-1). Since the retardation value is proportional to the optical path length, the retardation value also varies.
従って、検出位置に、Ｌにて色相の変化を生じるため、
結局、大面積の物体の光学歪みの評価は不可能であった
。Therefore, since a hue change occurs at the detection position at L,
In the end, it was impossible to evaluate the optical distortion of a large-area object.
（問題点を解決するための手段）
本発明は、従来の光学歪測定機のこれらの欠点を改良し
、大面積の成形体等の被検査物の光学歪みを光学的に検
出可能にした装置に関するものである。(Means for Solving the Problems) The present invention improves these drawbacks of conventional optical strain measuring machines and provides a device that is capable of optically detecting optical distortion of objects to be inspected such as large-area molded bodies. It is related to.
本発明は、前記問題点を解決し、比較的簡単な構成によ
り被検査物の面積が大きくても、被検査物の全体を、１
回のセットで光学歪みを検出し、かつ該被検査物の光学
的性状を測定することができる大面積光学歪み測定装置
である。The present invention solves the above-mentioned problems, and uses a relatively simple configuration to cover the entire inspected object in one piece even if the area of the inspected object is large.
This is a large-area optical distortion measuring device that can detect optical distortion in one set and measure the optical properties of the object to be inspected.
すなわち本発明は
光源１、第１偏光板４、被検査物１２、第２偏光板９、
検出部１１の順に配設され、被検査物１２の光学歪みを
検出部１１にて検出することによって該被検査物の光学
性状を測定する装置において、光源１からの光を、凸レ
ンズ３を通過させ、次いで第１偏光板４を通過させ、次
いで鋭敏赤色検板５を通過させ、その直後に凸レンズ６
を通過させ、次いで被検査物１２を通過させ、次いで第
２偏光板９を通過させ、次いで検出部１１で検出するこ
とによって、該被検査物１２の光学性状を測定すること
を特徴とする大面積光学歪み測定装置である。That is, the present invention includes a light source 1, a first polarizing plate 4, an object to be inspected 12, a second polarizing plate 9,
In the apparatus, which is arranged in the order of the detection section 11 and measures the optical properties of the object to be inspected by detecting the optical distortion of the object 12 with the detection section 11, light from the light source 1 passes through the convex lens 3. Then, it passes through the first polarizing plate 4, then the sensitive red detection plate 5, and immediately after that, the convex lens 6
The optical property of the object to be inspected 12 is measured by passing the object to be inspected, passing the object to be inspected 12, passing the second polarizing plate 9, and then detecting with the detection section 11. This is an area optical distortion measurement device.
以下、図面により、本発明の原理、および実施例を説明
する。第１図は、本発明の実施例の１例である。１は光
源、２は断熱フィルター、３は凸レンズ、４，９は、相
直交する偏光板である。偏光板４．９は、例えば、ポリ
ビニールアルコール−よう素糸、ポリビニールアルコー
ル−染料系などの吸収型プラスチック偏光板が用いられ
るが、光源に近いｉｆ偏光板は、グラ／トムソンプリズ
ム、とコル氏偏光プリズム、薄膜型偏光板なども用いる
ことができる。５は鋭敏赤色横板、Ｇは凸レンズ、７は
光散乱板である。光散乱板７は、例えば擦りガラス、マ
ット加工したプラスチック板であり、光源および光学系
の不必要な光をカットするものである。なお、図中の矢
印は、光または光路を示す。１２は測定しようとする成
形体等であり、すなわち被検査物である。Hereinafter, the principle and embodiments of the present invention will be explained with reference to the drawings. FIG. 1 is an example of an embodiment of the present invention. 1 is a light source, 2 is a heat insulating filter, 3 is a convex lens, and 4 and 9 are mutually orthogonal polarizing plates. As the polarizing plate 4.9, for example, an absorptive plastic polarizing plate such as polyvinyl alcohol-iodine yarn or polyvinyl alcohol-dye type is used, but the IF polarizing plate near the light source is a Gra/Thomson prism, A polarizing prism, a thin film type polarizing plate, etc. can also be used. 5 is a sensitive red horizontal plate, G is a convex lens, and 7 is a light scattering plate. The light scattering plate 7 is, for example, frosted glass or a matte-treated plastic plate, and serves to cut unnecessary light from the light source and the optical system. Note that arrows in the figures indicate light or optical paths. Reference numeral 12 indicates a molded object or the like to be measured, that is, an object to be inspected.
１０は集光用の凸レンズで、ｖ５２偏光板９を通過した
光を検出部１１に集光する。８はカラースケールである
。カラースケール８は、例えば、透明プラスチックフィ
ルムを引きのばして所定の光学歪みを持たせたものを段
階的に並べて色により光学歪みの大きさを判定できるよ
うにしたものである。カラースケール８は、他に写真或
いは印刷された色見本を用いてもよい。Reference numeral 10 denotes a convex lens for condensing light, which condenses the light that has passed through the V52 polarizing plate 9 onto the detection section 11 . 8 is a color scale. The color scale 8 is, for example, a transparent plastic film that has been stretched to have a predetermined optical distortion and is arranged in stages so that the magnitude of the optical distortion can be determined based on the color. The color scale 8 may also be a photograph or a printed color sample.
光源１から出た光は断熱フィルター２を通過後、凸し／
ズ３により平行光線にされ、第１偏光板４、鋭敏赤色横
板５を通り凸し／ズ６にて拡大される。拡大された光線
は更に光散乱板７、大面積の被検査物１２、第２偏光板
９、集光レンズ１０を経て検出部１１に達する。After the light emitted from the light source 1 passes through the heat insulating filter 2, it becomes convex/
The light is made into parallel light by the lens 3, passes through the first polarizing plate 4 and the sensitive red horizontal plate 5, and is expanded by the lens 6. The expanded light beam further passes through the light scattering plate 7, the large-area object to be inspected 12, the second polarizing plate 9, and the condensing lens 10, and reaches the detection unit 11.
光学歪みを検出しようとする被検査物１２の測定可能な
面積は、凸レンズ６の焦点距離と、該レンズと光散乱板
７との距離（正確には、該レンズと被検査物１２との距
離）で決まる。該距離が長いか、レンズ６の焦点距離が
短いと、測定可能な面積は増加する。凸レンズ６の焦点
距ｍは、色集差をおこさなければ短い方が好ましい。こ
れは、該装置の高さまたは長さを減少できるためである
。また、本発明に使用する全ての凸レンズは、凹レンズ
、フィルター、他の光学系と凸レンズの組み合わせであ
ってもより、機能的に凸レンズとしての光路拡散（拡大
）機能を有するものであればよ（、円筒型の凸レンズで
あってもよい。The measurable area of the inspected object 12 for which optical distortion is to be detected is determined by the focal length of the convex lens 6 and the distance between the lens and the light scattering plate 7 (more precisely, the distance between the lens and the inspected object 12). ) is determined. If the distance is long or the focal length of the lens 6 is short, the measurable area increases. The focal length m of the convex lens 6 is preferably short unless chromatic aggregation occurs. This is because the height or length of the device can be reduced. In addition, all convex lenses used in the present invention may be concave lenses, filters, or combinations of other optical systems and convex lenses, as long as they have the optical path diffusion (expansion) function of a convex lens. , or may be a cylindrical convex lens.
凸レンズ３は鋭敏赤色横板５中での高踏が実質的に垂直
に通過することが好ましいため、光路を平行光線に直す
ためのものである。この凸レンズ３を入れる位置は、光
源ｌとフィルター２との間であってもよいし、フィルタ
ー２ト第１偏光板４との間であってもよいし、第１偏光
板４と鋭敏赤色検板５との間でもよい。The convex lens 3 is for converting the optical path into a parallel light beam, since it is preferable that the tread in the sensitive red horizontal plate 5 pass substantially perpendicularly. The convex lens 3 may be inserted between the light source 1 and the filter 2, between the filter 2 and the first polarizing plate 4, or between the first polarizing plate 4 and the sensitive red detector. It may also be between the plate 5.
断熱フィルター２は、光源１の熟練をカットするため、
偏光板等の熱に対する保護が必要な場合に使用すること
が好ましい。The heat insulation filter 2 cuts the light source 1's skill.
It is preferable to use it when protection against heat, such as a polarizing plate, is required.
光源１は特にに限定されないが、例えば５ Ｑ光源、ハ
ロゲンランプ等である。高強度の光源の使用により、よ
り大面積の検査物の測定ができる。The light source 1 is not particularly limited, but may be, for example, a 5Q light source, a halogen lamp, or the like. The use of a high-intensity light source allows measurement of larger areas of test objects.
また、光の強度を変えられるように、光強度：！！４
節部を皐りつけておくのが好ましい。Also, you can change the intensity of the light:! ! 4
It is preferable to tighten the joints.
凸し７ズ１０は色収差のないものであれば、凹レンズ、
フィルター、他の光学系凸レンズの組み合わせや、フレ
ネルレンズ等であってもよ＜、機能的に凸レンズとして
の集光機能ををするものであればよい。If the convex lens 7 lens 10 has no chromatic aberration, it can be a concave lens.
It may be a filter, a combination of other optical convex lenses, a Fresnel lens, etc., as long as it functions as a convex lens to condense light.
検出部１１は肉眼でもよいが、受光素子を用いて画像処
理機器により図面や数値データを取り出した方がより筒
便正確であり、被測定物の生産ラインにおいて、合格、
不合格の信号を出させる方法でもよい。この受光素子は
例えば、ＭＯＳ形、或いはＣＣＤ形のエリアイメージセ
ンサ、ラインイメージセンサ等である。またカメラによ
り撮影記録してもよい。The detection unit 11 may be detected with the naked eye, but it is more accurate to extract the drawings and numerical data using an image processing device using a light receiving element.
It is also possible to issue a signal of failure. This light receiving element is, for example, a MOS type or CCD type area image sensor, line image sensor, or the like. Alternatively, it may be photographed and recorded using a camera.
（発明の効果）
以上説明したように、本発明の大面積光学歪み検査装置
は、鋭敏赤色検板５と凸レンズ６を用いることにより、
大面積の透明な成形体等の被検査物１２の全面を１視野
で検出することができ、且つ、該被検査物の光学歪みを
、その大きさと歪みの主軸方向につき定量的に検出（ま
たは表示）可能とするものである。例えば、直径１２０
〜３００−■の大きさの光デイスク基板の射出成形現場
や、プラスチックフィルムの製造条件へのフィードバッ
クを可能にする。(Effects of the Invention) As explained above, the large-area optical distortion inspection device of the present invention uses the sensitive red detection plate 5 and the convex lens 6 to achieve the following:
It is possible to detect the entire surface of an inspection object 12 such as a large-area transparent molded object in one field of view, and quantitatively detect (or display). For example, diameter 120
This makes it possible to provide feedback to injection molding sites for optical disk substrates up to 300 mm in size and to manufacturing conditions for plastic films.
第１図は、本発明の１実施例を示す構成図、第２図は、
従来の光学歪み検出のための概略構成図、第３図は、従
来の鋭敏赤色検板を用いたときの小面積の光学歪みの大
きさと主軸の方向を定址的に検出するための概略構成図
、第７１図は、従来の点光源を用いての大面積の光学歪
みを検出するだめの概略構成図、第５図は、第４図にお
ける鋭敏赤色検板中での光路の拡大図である。
図中１は光源、１′は点光源、２は断熱フィルター、３
は凸レンズ、４は第１偏光板、５は鋭敏赤色検板、６は
凸レンズ、７は光散乱板、８はカラースケール、９はｉ
２偏光板、１０は凸レンズ、１１は検出部（肉眼または
光学的検出機器）、１２は被検査物である。図中の矢印
は、光または光路を示す。
特許出願人 東洋紡績株式会社
羊２ 図
Ｅ
嬰３２
ＦＧ）−１
第 ４ Ｂ
手５ 凹FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG. 2 is a configuration diagram showing one embodiment of the present invention.
A schematic configuration diagram for conventional optical distortion detection. Figure 3 is a schematic configuration diagram for constant detection of the magnitude of optical distortion and the direction of the principal axis in a small area when using a conventional sensitive red detection plate. , FIG. 71 is a schematic configuration diagram of a device for detecting optical distortion in a large area using a conventional point light source, and FIG. 5 is an enlarged view of the optical path in the sensitive red detection plate in FIG. 4. . In the figure, 1 is a light source, 1' is a point light source, 2 is a heat insulating filter, and 3
is a convex lens, 4 is a first polarizing plate, 5 is a sensitive red detection plate, 6 is a convex lens, 7 is a light scattering plate, 8 is a color scale, 9 is i
2 polarizing plates, 10 is a convex lens, 11 is a detection unit (naked eye or optical detection device), and 12 is an object to be inspected. Arrows in the figures indicate light or optical paths. Patent applicant Toyobo Co., Ltd. Sheep 2 Figure E 32 FG)-1 4th B Hand 5 Concave
Claims (1)
検出部１１の順に配設され、被検査物１２の光学歪みを
検出部１１にて検出することによって該被検査物の光学
性状を検査測定する装置において、光源１からの光を、
凸レンズ３を通過させ、次いで第１偏光板４を通過させ
、次いで鋭敏赤色検板５を通過させ、その直後に凸レン
ズ６を通過させ、次いで被検査物１２を通過させ、次い
で第２偏光板９を通過させ、次いで検出部１１で検出す
ることによって、該被検査物１２の光学歪みを光学的に
検出し、該被検査物１２の光学性状を測定することを特
徴とする大面積光学歪み測定装置。Light source 1, first polarizing plate 4, object to be inspected 12, second polarizing plate 9,
In an apparatus for inspecting and measuring the optical properties of the object to be inspected by detecting the optical distortion of the object to be inspected 12 by detecting the optical distortion of the object to be inspected 11, the light from the light source 1 is
It passes through the convex lens 3, then the first polarizing plate 4, then the sensitive red detection plate 5, immediately after that, the convex lens 6, the object to be inspected 12, and then the second polarizing plate 9. A large area optical distortion measurement characterized in that the optical distortion of the object to be inspected 12 is optically detected by passing through the object 12 and then detected by the detection unit 11, and the optical properties of the object to be inspected 12 are measured. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25028386A JPS63103933A (en) | 1986-10-20 | 1986-10-20 | Measuring instrument for large area optical distortion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25028386A JPS63103933A (en) | 1986-10-20 | 1986-10-20 | Measuring instrument for large area optical distortion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63103933A true JPS63103933A (en) | 1988-05-09 |
Family
ID=17205595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25028386A Pending JPS63103933A (en) | 1986-10-20 | 1986-10-20 | Measuring instrument for large area optical distortion |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63103933A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998096A (en) * | 2012-12-17 | 2013-03-27 | 吉林大学 | Method for measuring focal distance of convex lens |
-
1986
- 1986-10-20 JP JP25028386A patent/JPS63103933A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998096A (en) * | 2012-12-17 | 2013-03-27 | 吉林大学 | Method for measuring focal distance of convex lens |
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