JPS6295245A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS6295245A JPS6295245A JP23677985A JP23677985A JPS6295245A JP S6295245 A JPS6295245 A JP S6295245A JP 23677985 A JP23677985 A JP 23677985A JP 23677985 A JP23677985 A JP 23677985A JP S6295245 A JPS6295245 A JP S6295245A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- protective layer
- thermal head
- protective
- heat generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はサーマルプリンタに用いられるサーマルヘッド
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thermal head used in a thermal printer.
サーマルプリンタに塔載するサーマルヘッドは、例えば
複数個の発熱抵抗体素子を同一基板上に直線上に配列し
、情報に従ってこの発熱抵抗体素子を通電加熱させて、
感熱記録紙に発色記録させ、あるいはインクリボンを介
して、普通紙に転写記録するために用いられる。The thermal head mounted on a thermal printer, for example, arranges a plurality of heat generating resistor elements in a straight line on the same substrate, and heats the heat generating resistor elements by energizing them according to information.
It is used for color recording on thermosensitive recording paper or for transfer recording on plain paper via an ink ribbon.
第２図、第３図は、従来のこのサーマルヘッドの一般構
造例を示すものである。絶縁性基板１上には断面が半円
弧状のガラスからなるグレーズ層２が形成されており、
このグレーズ層２の上にＴａ、 Ｎ等からなる発熱抵抗
体層３が形成されている。この発熱抵抗体層３の上には
、さらにこの発熱抵抗体層３に対して給電するための給
電体層４が形成されていて、この給電体層４のグレーズ
層２の頂面部はエツチング等の手段により分断されてい
る。FIGS. 2 and 3 show an example of the general structure of this conventional thermal head. A glaze layer 2 made of glass having a semicircular arc cross section is formed on an insulating substrate 1.
On this glaze layer 2, a heating resistor layer 3 made of Ta, N, etc. is formed. A power supply layer 4 for supplying power to the heat generating resistor layer 3 is further formed on the heat generating resistor layer 3, and the top surface of the glaze layer 2 of the power supply layer 4 is etched, etc. divided by means of
給電体層４は例えばアルミニウム等からなるもので、こ
の分断部４ａの両側間に電圧を与えるさ、グレーズ層２
の頂面部に位置する発熱抵抗体層３に電流が流れて発熱
する。この発熱抵抗体層３および給電体層４の上には、
これらの保護層７が形成されている。この保護層７は発
熱抵抗体Ｎ４３を酸化による劣化から保護する５ｉｎ２
などからなる耐酸化層５と感熱記録紙（図示せず）等と
の接触による摩耗から発熱抵抗体層３および給電体層４
を保護するＴａ、 Ｏ，等からなる耐摩耗層６とからな
っている。このサーマルヘッドは中央の分断部４ａで分
断された複数の給電体層４の一方が共通’を極ライン４
ｂに接続され、他方が個別電極ライン４ｃに接続されて
いる。この個別電極ライン４ｃに情報に応じて選択的に
電圧が印加されるとグレーズ層２の頂面部の発熱抵抗体
層３が発熱し、この熱が耐酸化層５および耐摩耗層６を
伝わって保護層７の表面の発熱部３ａが発熱して、感熱
記録紙、インクリボン等に発色エネルギーが与えられる
こととなる。なお、保護層７は端子部以外のヘッド面の
すべてを覆うように設けられている。The power supply layer 4 is made of, for example, aluminum, and applies a voltage between both sides of the divided portion 4a to the glaze layer 2.
A current flows through the heat generating resistor layer 3 located on the top surface of the resistor layer 3 to generate heat. On this heating resistor layer 3 and power supply layer 4,
These protective layers 7 are formed. This protective layer 7 protects the heating resistor N43 from deterioration due to oxidation.
The heat-generating resistor layer 3 and the power supply layer 4 are protected from wear due to contact between the oxidation-resistant layer 5 consisting of the like and heat-sensitive recording paper (not shown), etc.
The wear-resistant layer 6 is made of Ta, O, etc., and protects the wear-resistant layer 6. In this thermal head, one of the plurality of power supply layers 4 divided by a central dividing part 4a has a common polar line 4.
b, and the other end is connected to the individual electrode line 4c. When a voltage is selectively applied to this individual electrode line 4c according to the information, the heating resistor layer 3 on the top surface of the glaze layer 2 generates heat, and this heat is transmitted through the oxidation-resistant layer 5 and the wear-resistant layer 6. The heat generating portion 3a on the surface of the protective layer 7 generates heat, and coloring energy is applied to the thermal recording paper, ink ribbon, etc. Note that the protective layer 7 is provided so as to cover the entire head surface other than the terminal portions.
この従来のサーマルヘッドは給電体層４にグレーズ層２
の頂面部に位置する分断部４ａを設け、この上にスパッ
タリング等の手段により耐酸化層５および耐摩耗層６が
形成され最終工程で分割してサーマルヘッドチップとな
る。This conventional thermal head has a power supply layer 4 and a glaze layer 2.
A dividing portion 4a is provided at the top of the substrate, and an oxidation-resistant layer 5 and a wear-resistant layer 6 are formed thereon by means such as sputtering, and the thermal head chip is divided in the final step.
しかし、上述のヘッド構造においては発熱抵抗体層３を
はさんで給電体＃４が分断しているため分断部３ａは凹
を生じることになり、印字に際して感熱記録媒体に対し
て発熱抵抗体層３は空隙を生じるから、効率よく熱の伝
導が行えず印字濃度かうすいものとなりやすい。そのた
め印加エネルギーを増大させて、印字濃度を高くしなけ
ればならず、熱歪の増大をともなってサーマルヘッドの
寿命が短かくなる欠点があった。また分断部４ａがある
ため、給電体層４のエツジ部に印字の際に集中荷重が働
き機械的に保護層７のクラックやハクリを生じて発熱抵
抗体層３の酸化等による抵抗値の増加で印字不能になる
などの欠点がありた。However, in the above-mentioned head structure, since the power feeder #4 is divided across the heat generating resistor layer 3, the divided portion 3a causes a recess, and when printing, the heat generating resistor layer No. 3 creates voids, so heat cannot be conducted efficiently and printing density tends to be poor. Therefore, it is necessary to increase the applied energy to increase the print density, which has the drawback of increasing thermal strain and shortening the life of the thermal head. In addition, since there is a divided part 4a, a concentrated load is applied to the edge part of the power supply layer 4 during printing, mechanically causing cracks and peeling of the protective layer 7, and an increase in resistance value due to oxidation of the heating resistor layer 3. There were drawbacks such as the inability to print.
本発明は前記従来技術の間頌点に鑑みてなされたもので
あり、その目的とする所は高印字品質で寿命の長いサー
マルヘッドを提供するこさにある。The present invention has been made in consideration of the above-mentioned prior art, and its object is to provide a thermal head with high print quality and long life.
かかる目的を達成するために本発明のサーマルヘッドは
絶縁性基板上にグレーズ層を形成し、そのグレーズ層上
に発熱抵抗体層を配置し、その発熱抵抗体層に電力を供
給する給電体層と、その給電体層および前記発熱抵抗体
層上に形成された保護層とを備えたサーマルヘッドにお
いて％第１の保護層を耐エツチング性を有する材料で形
成し、第２の保護層を耐酸化性とエツチング性を有する
絶縁物、半導体、抵抗体材料で形成し、第３の保護層を
耐摩耗性を有する金属の高酸化物または高窒化物または
高炭化物の材料で形成し、前記第２の保護層にフォトエ
ツチング加工を施こし、発熱抵抗体層上において第２の
保護層が平担もしくは凸状にしたことを特徴としたもの
である。In order to achieve this object, the thermal head of the present invention includes a glaze layer formed on an insulating substrate, a heating resistor layer disposed on the glaze layer, and a power supply layer for supplying power to the heating resistor layer. In the thermal head, the first protective layer is made of an etching-resistant material, and the second protective layer is made of an acid-resistant material. The third protective layer is formed of a high oxide, high nitride, or high carbide material of a metal that has wear resistance, and the The second protective layer is photoetched so that the second protective layer has a flat or convex shape on the heating resistor layer.
以下図に示した一実施例を用いて、本発明を説明する。 The present invention will be explained below using an example shown in the drawings.
第１図は本発明によるサーマルヘッドの断面を示すもの
である。本発明のサーマルヘッドは絶縁性基板１上に略
半円弧状の部分グレーズ層２を形成し、その上にＴａ、
Ｎからなる発熱抵抗体層３およびＭからなる給電体層
４を積層し、フォトリソ技術により発熱抵抗体層３が略
部分グレーズ層２の略頂面部に位置するように給電体層
４を分断して形成する。更にその上にスパッタリング法
により第１の保護層５を耐エツチング性のよい例えばＴ
ａ、０１等の材料で形成し、その上に第２の保護層６を
耐酸化性とエツチング性を有する例えばＳｉ又は５ｉｎ
２等の材料で形成し、その上に第３の保護層７を耐摩耗
性を有する例えばＴａ、Ｏ，、Ｓｉ、Ｎ、、ＳｉＣ，等
の材料で形成し、その第２の保護層６をフォトリソ技術
により発熱抵抗体層３上の凹部をマスキングして沸硝酸
により図中破線で示した第２の保護層６３部を除去する
。これにより発熱抵抗体層３上の凹ｉｉ逆ｉこ凸状化さ
せることができる。なお、この凸部の突出量は第２の保
護層６の蒸着膜厚とエツチング量によって任意にコント
ロールできる。この状態における第２の保護層６は電気
伝導性を持った抵抗体模および半導体膜であっても絶縁
性の第１および第３の保護層で包含されるためサーマル
ヘッドとして機能させることができるので、第２の保護
層の耐酸化性、エツチング性を満足する材料の選択範囲
が広いものとできる。FIG. 1 shows a cross section of a thermal head according to the present invention. In the thermal head of the present invention, a substantially semicircular arc-shaped partial glaze layer 2 is formed on an insulating substrate 1, and Ta, Ta,
A heating resistor layer 3 made of N and a power feeder layer 4 made of M are laminated, and the power feeder layer 4 is divided by photolithography so that the heating resistor layer 3 is located substantially on the top surface of the partial glaze layer 2. to form. Furthermore, a first protective layer 5 is formed thereon by a sputtering method using a film having good etching resistance, for example, T.
A, 01, etc., and a second protective layer 6 is formed thereon with a material having oxidation resistance and etching property, such as Si or 5in.
A third protective layer 7 is formed on the third protective layer 7 of a wear-resistant material such as Ta, O, Si, N, SiC, etc. The concave portions on the heating resistor layer 3 are masked by photolithography, and a portion of the second protective layer 63 indicated by the broken line in the figure is removed using boiling nitric acid. As a result, the heat generating resistor layer 3 can be made to have a convex convex shape. Note that the amount of protrusion of this convex portion can be arbitrarily controlled by the thickness of the second protective layer 6 deposited and the amount of etching. In this state, even if the second protective layer 6 is an electrically conductive resistor model and semiconductor film, it can function as a thermal head because it is covered by the insulating first and third protective layers. Therefore, a wide range of materials can be selected for the second protective layer that satisfies the oxidation resistance and etching properties.
上述のように給電体層４の分断によって生じた凹部を平
担化又は凸状化することは簡単に加工でき、感熱記録媒
体（図示せず）との圧接性が著しく改善されるため熱伝
導性が増して低電力で印字発色濃度の高いものとなる。As mentioned above, it is easy to flatten or convex the recesses caused by the division of the power supply layer 4, and the pressure contact with the heat-sensitive recording medium (not shown) is significantly improved, thereby improving heat conduction. As a result, the print color density is high with low power consumption.
また感熱記録媒体との摺接において、従来保護層７上の
凹部のエツジに圧接荷重が集中することにより生じてい
た給電体層４上の保護層５の剥離が凹部がなくなったこ
とにより解消される。また本発明は第１の保護層５を耐
エツチング性の良好なＴａ、Ｏ，などからなる材料を用
い第２の保護７＃６に耐酸化性、エツチング性の良好な
Ｓｉｎ、などからなる材料を用い、第３の保護層７に耐
摩耗性の良好なＴａ、Ｏ，などからなる材料を用いるた
め摩耗による寿命の低下は問題とならない。In addition, the peeling of the protective layer 5 on the power supply layer 4, which conventionally occurred due to the concentration of pressure load on the edges of the recesses on the protective layer 7 during sliding contact with the heat-sensitive recording medium, is eliminated by eliminating the recesses. Ru. Further, the present invention uses a material such as Ta, O, etc., which has good etching resistance for the first protective layer 5, and a material such as Sin, which has good oxidation resistance and etching resistance, for the second protective layer 7#6. Since the third protective layer 7 is made of a material such as Ta, O, etc. that has good wear resistance, there is no problem with reduction in life due to wear.
以上述べたように、本発明のサーマルヘッドは第２の保
護層にエツチング性のある材料を用い、発熱抵抗体層上
を選択的にエツチング加工して凹を解消し、平担化又は
凸化させた後、耐摩耗層を被覆することにより発熱中心
が最も感熱記録媒体に摺接させることができ、熱伝導性
の向上により低電力で濃度の高い印字ができるようにな
る。また発熱抵抗体層上の凹部が解消されて密着強度が
比較的弱い給電体層上の保護層が感熱記録媒体と強く摺
接しなくなるため、機械的損傷を受けにくいバラツキの
少ないものとできる等のすぐれた効果を提供する。As described above, the thermal head of the present invention uses an etching material for the second protective layer, and selectively etches the heating resistor layer to eliminate concavities and make it flat or convex. After that, by covering the recording medium with an abrasion-resistant layer, the heat generating center can be brought into sliding contact with the heat-sensitive recording medium, and by improving thermal conductivity, printing with high density can be performed with low power. In addition, the recesses on the heating resistor layer are eliminated, and the protective layer on the power supply layer, which has relatively weak adhesion strength, no longer makes strong sliding contact with the heat-sensitive recording medium, making it less susceptible to mechanical damage and with less variation. Provides excellent effects.
第１図は本発明のサーマルヘッドの構造断面図、第２、
第３図は従来のサーマルヘッドの構造断面図である。
１・・・絶縁性基板
２・・・部分グレーズ層
３・・・発熱抵抗体層
４・・・給電体層
５・・・第１の保護層
６・・・第２の保護層
７・・・第３の保護層
特許出願人 アルプス電気株式会社
峯 １ 図
１４１ヒ李１ｋ・トタ三１ト第１〔
２、告ｔ４ｒり“レース−１
３、イー−１ブト４賃（Ｘイ；１竺〕１し４、 ｋ４シ
′ツ七、イイーＡ喬
５、＄１ のイ丼、しｌ〔層
６ 多２か偲護層
７ 療３０件！ｆ４FIG. 1 is a structural cross-sectional view of the thermal head of the present invention;
FIG. 3 is a structural sectional view of a conventional thermal head. 1... Insulating substrate 2... Partial glaze layer 3... Heat generating resistor layer 4... Power supply layer 5... First protective layer 6... Second protective layer 7...・Third protective layer patent applicant Alps Electric Co., Ltd. Mine 1 1 and 4, k4 Shi'tsu 7, Iii A 5, $ 1 bowl, Shil [layer 6 multi 2 or support layer 7 medical care 30 cases! f4
Claims (3)
ズ層上に複数個の発熱抵抗体層を直線的に配置し、その
発熱抵抗体層に電力を供給する給電体層と、その給電体
層および前記発熱抵抗体層上に形成された保護層とを備
えたサーマルヘッドにおいて、第１の保護層を耐エッチ
ング性を有する材料で形成し、第３の保護層を耐摩耗性
を有する材料で形成したことを特徴とするサーマルヘッ
ド。(1) A glaze layer is formed on an insulating substrate, a plurality of heat generating resistor layers are linearly arranged on the glaze layer, and a power supply layer that supplies power to the heat generating resistor layer, and its power supply. In the thermal head comprising a body layer and a protective layer formed on the heating resistor layer, the first protective layer is formed of a material having etching resistance, and the third protective layer is made of a material having wear resistance. A thermal head characterized by being made of a material.
抵抗体層上において平担もしくは凸状となるようにエッ
チングされていることを特徴とする特許請求の範囲第（
１）項記載のサーマルヘッド。(2) The second protective layer is etched on the heating resistor layer so as to have a flat or convex shape by photolithography.
The thermal head described in section 1).
窒化物または高炭化物からなる材料で形成され第２の保
護層は沸硝酸でエッチングが可能な絶縁物または半導体
または抵抗体材料で形成されていることを特徴とする第
１項記載のサーマルヘッド。(3) The first and third protective layers are formed of a material made of high oxide, high nitride, or high carbide, and the second protective layer is made of an insulator, semiconductor, or resistor material that can be etched with boiling nitric acid. 2. The thermal head according to claim 1, wherein the thermal head is formed of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23677985A JPS6295245A (en) | 1985-10-22 | 1985-10-22 | Thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23677985A JPS6295245A (en) | 1985-10-22 | 1985-10-22 | Thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6295245A true JPS6295245A (en) | 1987-05-01 |
| JPH0528183B2 JPH0528183B2 (en) | 1993-04-23 |
Family
ID=17005669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23677985A Granted JPS6295245A (en) | 1985-10-22 | 1985-10-22 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295245A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63297069A (en) * | 1987-05-29 | 1988-12-05 | Rohm Co Ltd | Thermal printing head |
| EP0891868A3 (en) * | 1997-07-17 | 1999-07-28 | Fuji Photo Film Co., Ltd. | Thermal head |
| WO2008105307A1 (en) * | 2007-02-26 | 2008-09-04 | Rohm Co., Ltd. | Thermal print head |
| JPWO2013080915A1 (en) * | 2011-11-28 | 2015-04-27 | 京セラ株式会社 | Thermal head and thermal printer equipped with the same |
-
1985
- 1985-10-22 JP JP23677985A patent/JPS6295245A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63297069A (en) * | 1987-05-29 | 1988-12-05 | Rohm Co Ltd | Thermal printing head |
| EP0891868A3 (en) * | 1997-07-17 | 1999-07-28 | Fuji Photo Film Co., Ltd. | Thermal head |
| WO2008105307A1 (en) * | 2007-02-26 | 2008-09-04 | Rohm Co., Ltd. | Thermal print head |
| US7969459B2 (en) | 2007-02-26 | 2011-06-28 | Rohm Co., Ltd. | Thermal print head |
| JPWO2013080915A1 (en) * | 2011-11-28 | 2015-04-27 | 京セラ株式会社 | Thermal head and thermal printer equipped with the same |
| US9238376B2 (en) | 2011-11-28 | 2016-01-19 | Kyocera Corporation | Thermal head and thermal printer equipped with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528183B2 (en) | 1993-04-23 |
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