JPS6265654U - - Google Patents

Info

Publication number
JPS6265654U
JPS6265654U JP1985158401U JP15840185U JPS6265654U JP S6265654 U JPS6265654 U JP S6265654U JP 1985158401 U JP1985158401 U JP 1985158401U JP 15840185 U JP15840185 U JP 15840185U JP S6265654 U JPS6265654 U JP S6265654U
Authority
JP
Japan
Prior art keywords
magnetic band
frame
pellicle
mask substrate
attracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985158401U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985158401U priority Critical patent/JPS6265654U/ja
Publication of JPS6265654U publication Critical patent/JPS6265654U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａおよびｂは本考案にかかるフオトマス
クの断面図と平面図、第２図はペリクルを吸着さ
せた本考案にかかるフオトマスクの断面図、第３
図は従来のペリクルを接着したフオトマスクの断
面図である。 図において、１はマスク基板、２はペリクル、
１１はクロム膜パターン、１２は磁性帯、２１は
ペリクル膜、２２，２２′はペリクル保持枠を示
している。

Claims (1)

    【実用新案登録請求の範囲】
  1. マスク基板の両面または片面の周縁部分に、枠
    状の磁性帯を設け、ペリクル保持枠を該磁性帯に
    吸着させるようにしたことを特徴とするフオトマ
    スク。
JP1985158401U 1985-10-15 1985-10-15 Pending JPS6265654U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985158401U JPS6265654U (ja) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985158401U JPS6265654U (ja) 1985-10-15 1985-10-15

Publications (1)

Publication Number Publication Date
JPS6265654U true JPS6265654U (ja) 1987-04-23

Family

ID=31081854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985158401U Pending JPS6265654U (ja) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPS6265654U (ja)

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