JPS6252217A - Bearing - Google Patents

Abstract

PURPOSE:To reduce torque and friction and to lengthen the life of a bearing by injecting ions which have low friction, high fatigue strength and high corrosion resistance in relative contact moving portions of the bearing. CONSTITUTION:A ball bearing is formed by accomodating a plurality of balls 5 between an outer race 1 and an inner race 3. Ions are uniformly injected into relative contact moving portions of bearing structural parts with the other parts thereof, that is, the portions on the inner peripheral surface 1a of the outer race 1 and the outer peripheral surface 3a of the inner race 3 which contact respective balls 5, and the outer surface of the balls 5. Accordingly, the ion injection surfaces have no physical interface with a substrate to decrease friction and improve surface fatigue strength.

Description

【発明の詳細な説明】 ［産業上の利用分野］ この発明は、ころがり軸受やすべり軸受のような転勤面
あるいは摺動面を有する軸受に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a bearing having a rolling surface or sliding surface, such as a rolling bearing or a sliding bearing.

［従来技術］ 一般に、ころがり軸受やすべり軸受等の転勤面や唐動面
には、耐摩耗性向上のため潤滑が必要であるが、その潤
滑方法は軸受の用途によって異なる。[Prior Art] Generally, rolling surfaces and sliding surfaces of rolling bearings, sliding bearings, etc. require lubrication to improve wear resistance, but the lubrication method differs depending on the application of the bearing.

このうち最も一般的なものは油等の流体を潤滑剤とした
もので、玉軸受の場合には弾性流体膜の発生を活用し高
速度条ｆ１下で用いられることが多い。The most common of these uses a fluid such as oil as a lubricant, and in the case of ball bearings, it is often used under high-speed conditions f1 by taking advantage of the generation of an elastic fluid film.

ところが、この流体（油）を潤滑剤として使用した軸受
をＬＳＩ等が製造される高真空あるいはクリーンルーム
等の清浄気体中の雰囲気で用いる場合、油の蒸発やシー
ル不良等による軸受各部の焼き付きならびに環境汚染等
の問題が生じている。However, when a bearing that uses this fluid (oil) as a lubricant is used in a clean gas atmosphere such as a high vacuum or clean room where LSIs are manufactured, the bearing parts may seize due to oil evaporation or seal failure, and the environment may Problems such as pollution are occurring.

一方、比較的低連条ｆ［下で、かつ真空中での使用を志
向したＡＵ　、ＡＩＪ等の軟質金属やＭＯ８２。On the other hand, soft metals such as AU and AIJ, and MO82, which are intended to be used under relatively low continuous f[] and in vacuum.

Ｗ　８２等の硫化物等の固体潤滑膜を被覆した油等の潤
滑剤を使用しない軸受は、宇宙空間等の超高真空中で低
摩擦等の優れた特性を示寸ものの、固体潤滑膜の暫時的
破壊に伴なう摩耗粉の発生による環境汚染は避は難い問
題となっている。Bearings that do not use lubricants such as oil and are coated with a solid lubricant film such as sulfide, such as W 82, exhibit excellent characteristics such as low friction in ultra-high vacuums such as outer space, but the solid lubricant film is Environmental pollution due to the generation of abrasion powder accompanying temporary destruction has become an unavoidable problem.

上記いずれの潤滑法における軸受各部の摩耗による機構
制御精度の劣化や環境汚染等は、ＬＳＩ製造ラインの故
障、１−８Ｉチツプの不良品発生、更には衛星搭載用機
構あるいは電子機器等の故障による衛星通信システムの
致命的な破壊につながる恐れがある。In any of the above lubrication methods, deterioration of mechanism control accuracy and environmental pollution due to wear of various parts of the bearings are caused by failures in the LSI production line, occurrence of defective 1-8I chips, and failures in satellite onboard mechanisms or electronic equipment. This could lead to catastrophic destruction of satellite communication systems.

また、玉軸受や機械締結部等で問題となっているフレッ
ティング摩耗（微動摩耗）は、摩擦酸化によって生成さ
れる酸化物のアブレッシブ作用（すりへらし作用）が主
要因であり、このフレッテーｆング＃粁特竹が悪いと機
械部品、ひいてはシステム全体の信９ｉｌＩｔｌ＋を低
下さ１！ることになる。これを抑制Ｊるためには接触部
リイ１わち玉軸受であればぞの転勤面の耐酸化１勺を向
１さく！ることが必要条件とイ１っている。Furthermore, fretting wear (fine wear), which is a problem in ball bearings and mechanical fasteners, is mainly caused by the abrasive action (grinding action) of oxides produced by frictional oxidation. # If the bamboo is bad, the reliability of the mechanical parts and even the entire system will be lowered 1! That will happen. In order to suppress this, make sure that the oxidation resistance of the contact area (in the case of ball bearings) is on the rolling surface! It is said that it is a necessary condition.

［］」的１ この弁明はこのＪ、うイＩ従来の問題点に看［１して創
案されたもので、転勤面や摺動向の耐摩耗性を向−１さ
■だ軸受の提供を［目的どする。[ ] 1 This defense was devised in view of the problems of this J, U I [1], and aims to provide a bearing that improves the wear resistance of the transfer surface and sliding movement. [What is the purpose?

「構成１ この目的を達成覆るためにこの発明は、他の部位に対す
る相対的な接触移動部にイオンを注入して軸受を構成し
た。``Structure 1'' In order to achieve this object, the present invention configures a bearing by implanting ions into a portion that contacts and moves relative to other portions.

［実施例］ 双手、図面に基づ゛きこの発明の実施例を詳細に説明す
る。[Embodiment] An embodiment of the present invention will be described in detail based on the drawings.

第１図は、玉軸受を分解した状態を示しており、この軸
受は外輪１の外径が２２ｍｍ、内輪３の内径が８ｍｍの
もので、外輪１と内輪３どの間に複数の球５が収納され
てころがり玉軸受を構成４る。そして、これらの軸受構
成部品の他の部位に夕・１−づる相対的な接触移動部、
１ｈわら外輪１の内周面１ａと内輪３の外周面３ａどの
それぞれの球５に接触する部分ならびに球５の外表面に
、イオンを均一に注入する。Figure 1 shows an exploded state of a ball bearing, in which the outer ring 1 has an outer diameter of 22 mm, the inner ring 3 has an inner diameter of 8 mm, and a plurality of balls 5 are located between the outer ring 1 and the inner ring 3. When housed, it constitutes a rolling ball bearing. and a relative contact moving part that touches other parts of these bearing components,
1h Ions are uniformly implanted into the inner circumferential surface 1a of the straw outer ring 1, the outer circumferential surface 3a of the inner ring 3, and other portions that contact the balls 5, as well as the outer surface of the balls 5.

このＪ、う４ｆイオンの２１人は、第１図の矢印方向ノ
〕日らイオンを投射し、外輪１ど内輪３についてはイオ
ン投射方向に対し４５°稈度傾ｔＪた状態で、外輪１．
内輪３および球５を適宜方払により支持して回転さ４！
ながら行イｉ−′）。これにより、各部品の転動面イＺ
らびに摺動向が隈無くイオン注入されろこと（こなる。The 21 J and 4f ions project ions in the direction of the arrow in Fig. 1, with the outer ring 1 and the inner ring 3 tilted by 45° to the ion projection direction. ．．
The inner ring 3 and the ball 5 are supported by appropriate swings and rotated 4!
Nagara row i-'). As a result, the rolling surface of each part
Ion implantation should be carried out throughout the sliding motion.

なお、（二のとき１１２２１人する必要のない、外輪の
外周面ヤ）内輪の内周面にもイオン注入されることにな
るが、これ（ま差し支えない。Incidentally, ions will also be implanted into the inner circumferential surface of the inner ring (the outer circumferential surface of the outer ring, which does not require 11221 injections in the second case), but this is not a problem.

このようにして１３２７１人した軸受け、従来技術にお
（Ｊる油等の流体のみを用いた軸受等とは、これらにお
ける流体潤滑に対し固体潤滑という貞で本質的に異り、
イオンプレーディング、スパッタリング蒸着法等の各秤
Ａｌ膜形成法により形成Ｊ−る固体潤滑膜を］−ティン
グした軸受とは、イオン注入表面は基板どの間に明確４
丁物理的界面を持たないこと、づべりにおいても著しく
摩糺が少なく、かつ表面疲労強度が白土されるため、イ
オン注入表面をころがり接触に用いた場合、表面クラッ
クの進展の抑制、薄膜の破壊的な剥離がないこと等の相
乗効果により、摩耗粉の発生が著しく減少させられると
いう点で異なる。The 13,271 bearings produced in this way are essentially different from conventional bearings using only fluids such as oil in that they use solid lubrication as opposed to fluid lubrication.
Bearings with a solid lubricant film formed by various Al film forming methods such as ion plating and sputtering vapor deposition have an ion-implanted surface that is clearly spaced between the substrates.
Since there is no physical interface, there is significantly less abrasion during rolling, and the surface fatigue strength is similar to clay, when the ion-implanted surface is used for rolling contact, it suppresses the development of surface cracks and destroys thin films. The difference is that the generation of wear debris is significantly reduced due to the synergistic effect such as the absence of physical peeling.

第２図は、窒素をイオン注入したＳ　ＬＪ　Ｓ　４４０
Ｃステンレス鋼製の平板（実線）、外輪（破線）および
球（一点鎖線）の窒素の濃度分布を示す。Figure 2 shows S LJ S 440 with nitrogen ion implantation.
The nitrogen concentration distribution of the flat plate (solid line), outer ring (dashed line), and sphere (dotted chain line) made of C stainless steel is shown.

それぞれにおける窒素の平均投ｑ・１飛程（最大濃度深
さ）は５２０人（５２ｎｍ）と類似した値を示すものの
、分布形状および総注入出は責なっている。Although the average throw q·1 range (maximum concentration depth) of nitrogen in each shows a similar value to 520 people (52 nm), the distribution shape and total injection are responsible.

次に、玉軸受や機械締結部等で問題になっているフレッ
ティング摩粁特性を検討（るために用いた第３図に示す
玉軸受揺動試験装置を説明する。Next, a description will be given of the ball bearing rocking test device shown in FIG. 3, which was used to examine fretting friction characteristics, which are a problem in ball bearings, mechanical fasteners, etc.

この装置の揺動駆動は図外の永久電磁石の磁界中に置か
れたムービングコイル７を用いており、この装置に用い
た二つの玉軸受９の内輪３は、装置本体に固定した軸１
１に嵌合して固着し、外輪１はムービングコイル７と一
体の筒状のハウジング１３内に固定づる。軸１１のト端
部にはナラ１〜１Ｆ５により固定されたスプリングホル
ダ１７が装着され、このスプリングホルダ１７と内輪３
どの間にスプリング１９を弾装して内輪３に予圧を与え
る。　ハウジング１３のムービング：１イル７と反対側
にハウジング１３ど一体的に形成された被検出部２１の
先端２１ａの両側部には、この先端２１ａを検出づる一
対のフ４［・セン’ｔ２３．２５が配設され、ムービン
グコイル７、ハウジング１３および被検出部２１が一体
的に１ボ動する範囲が、このフォト１？ン−’Ｊ−２３
，２５により規定される。The oscillating drive of this device uses a moving coil 7 placed in the magnetic field of a permanent electromagnet (not shown), and the inner ring 3 of the two ball bearings 9 used in this device is attached to a shaft 1 fixed to the main body of the device.
1, and the outer ring 1 is fixed in a cylindrical housing 13 integral with the moving coil 7. A spring holder 17 fixed by nuts 1 to 1F5 is attached to the end of the shaft 11, and the spring holder 17 and the inner ring 3 are connected to each other.
A spring 19 is elastically loaded between the holes to apply preload to the inner ring 3. Moving the housing 13: On both sides of the tip 21a of the detected portion 21, which is integrally formed with the housing 13 on the opposite side from the tile 7, there are a pair of holes 4[.cnd23. 25 is arranged, and the range in which the moving coil 7, the housing 13, and the detected part 21 move integrally by one movement is this photo 1? N-'J-23
, 25.

なお、ここでの揺動範囲は」：３，７°、揺動速ｊαは
１７ｔ１ｚ、スプリング１９によるスラスト荷重は２９
．４Ｎどしである。また、この試験は大気中で３Ｘ１０
６回まで行ない、起動１ヘルク測定、転勤痕の表面観察
および形状のプロファイル測定を行なった。起動トルク
は揺動範囲内と範囲外とにお【プる値を比較測定した。The swing range here is 3.7 degrees, the swing speed jα is 17t1z, and the thrust load due to the spring 19 is 29.
．． 4N both. Also, this test was performed in the atmosphere at 3X10
The test was repeated up to 6 times to measure the starting herb, observe the surface of transfer marks, and measure the profile of the shape. The starting torque was measured by comparing the values within and outside the oscillation range.

第４図は、窒素注入軸受と未注入軸受（リテーナ材料：
　ＰＴＦＦ複合材）の上記試験による起動トルクと揺動
回数との関係を示す。なお、ここでは黒塗のプロットが
窒素注入軸受で１白塗のプロットが未ン１人軸受を示し
、更に破線で示１ものが揺動範囲外で、実線で承すもの
が揺動範囲内のものである。Figure 4 shows nitrogen-injected bearings and non-injected bearings (retainer material:
The relationship between the starting torque and the number of swings of the PTFF composite material according to the above test is shown. In addition, here, the black plot shows nitrogen-injected bearings, the white plot shows bearings without one person, and the dashed line shows the one outside the swing range, and the solid line shows the one inside the swing range. belongs to.

これによれば、揺動範囲内外いずれにおいても窒素注入
軸受の起動トルクの方が小さく、特に揺動範囲外の起動
トルクが急増する揺動回数は未注入軸受の７０３回であ
るのに対し、窒素注入軸受では、その１００倍の１０５
回となっている。したがって、窒素注入軸受が未注入軸
受に比べ潤滑特性が向上していることがわかる。According to this, the starting torque of the nitrogen-injected bearing is smaller both inside and outside the oscillation range, and in particular, the number of oscillations at which the starting torque suddenly increases outside the oscillation range is 703 times for the non-injected bearing. For nitrogen-injected bearings, 105
It has been times. Therefore, it can be seen that the lubrication characteristics of the nitrogen-injected bearing are improved compared to the non-injected bearing.

第５図は、」−記試験後の内輪３の外周面３ａに形成さ
れる転勤層のプロファイル測定個所を（ａ）〜（ｈ）に
示し、第６図は窒素注入による転勤層のプロファイル、
第７図は未注入による同プロファイルを示す。これによ
れば、窒素注入による内輪３の転勤層は未２を人のそれ
より約１／１０と小さくなっており、窒素注入により耐
摩耗性は略１゜倍程麿に増大していることになる。すな
わち、耐フレッティング摩耗時１４が向上することにな
る。FIG. 5 shows (a) to (h) the measurement points of the profile of the transferred layer formed on the outer circumferential surface 3a of the inner ring 3 after the "-" test, and FIG. 6 shows the profile of the transferred layer formed by nitrogen injection,
FIG. 7 shows the same profile without injection. According to this, the transfer layer of the inner ring 3 due to nitrogen injection is about 1/10 smaller than that of the inner ring 3, and the wear resistance is increased by approximately 1° due to nitrogen injection. become. In other words, the fretting wear resistance 14 is improved.

また、窒素注入軸受および未注入軸受の内輪外周面に形
成された転勤層を比較観察すると、未注入内輪表面には
酸化物と推定される黒色生成物が認められ、これに起因
するアブレッシブ作用による転勤層の損傷は大きいと思
われる。これに対し窒素注入軸受の内輪外表面の損傷は
小さく、酸化物の生成も認められない。In addition, when comparing and observing the transfer layer formed on the outer circumferential surface of the inner ring of a nitrogen-injected bearing and a non-injected bearing, a black product presumed to be an oxide was observed on the uninjected inner ring surface, and the abrasive action caused by this was observed. The damage to the transferee class is thought to be significant. On the other hand, the damage to the outer surface of the inner ring of the nitrogen-injected bearing was small, and no oxide was observed.

なお、この発明は＃ｊボの実施例に限定されるものでは
ない。例えば、前述の実施例では、Ｓ　Ｕ　５４４０Ｃ
製の玉軸受に窒素をイオン注入したが、ホウ素、炭素、
クロム等を各種金属あるいはセラミックス製の玉軸受な
らびにすべり軸受にイオン注入してもよい。ただし、す
べり軸受の場合は、必要とするイオン注入部分は軸を回
転支持する開動部であることは言うまでもない。Note that this invention is not limited to the embodiment #j. For example, in the embodiment described above, S U 5440C
Nitrogen ions were implanted into ball bearings made of steel, but boron, carbon,
Chromium or the like may be ion-implanted into ball bearings and plain bearings made of various metals or ceramics. However, in the case of a sliding bearing, it goes without saying that the necessary ion implantation part is the opening part that rotatably supports the shaft.

また、前述の実施例ではｌＩ／ｌ消油を用いない乾燥摩
擦（固体潤滑）条件下で使用した場合を示したが、油等
を用いた流体潤滑条件下に適用した場合についても同様
の効果が得られる。In addition, although the above-mentioned example shows the case where it is used under dry friction (solid lubrication) conditions without using lI/l quenching oil, the same effect can be obtained when it is applied under fluid lubrication conditions using oil etc. is obtained.

［発明の効果］ 以」−のようにこの発明によれば、軸受の仙の部位に対
する相対的な接触移動部に低摩擦、高疲労強度、高耐食
性のイオンを注入したため、低トルク、低摩擦、長期寿
命化を図ることができる。[Effects of the Invention] As described below, according to the present invention, ions with low friction, high fatigue strength, and high corrosion resistance are injected into the contact moving portion of the bearing relative to the center portion, resulting in low torque and low friction. , it is possible to achieve a long service life.

したがって、この発明のイオン注入軸受を、例えば大気
中のみならず真空中における通信衛星用機構部品や＋８
１製造装置用機構部品等どして用いると極めて有効であ
る。また、この発明による軸受は塩水中等の腐食性環境
下においてもイオン注入表面の高耐食性により耐久性の
向上を図ることができる。Therefore, the ion-implanted bearing of the present invention can be used, for example, in mechanical parts for communication satellites not only in the atmosphere but also in vacuum.
1. It is extremely effective when used as mechanical parts for manufacturing equipment, etc. Further, the bearing according to the present invention can improve durability even in corrosive environments such as salt water due to the high corrosion resistance of the ion-implanted surface.

【図面の簡単な説明】[Brief explanation of drawings]

第１図〜第６図はこの発明の一実施例に係わり、第１図
は分解した玉軸受にイオーン注入する方法を示した説明
図、第２図は窒素をイオン注入した第１図の玉軸受各部
品における窒素の濃度プロファー〇− イルを示す説明図、第３図は第１図の玉軸受の揺動試験
装置の部分的な断面を示す斜視図、第４図は窒素注入玉
軸受と未注入玉軸受との起動トルクの比較測定例を示す
説明図、第５図は揺動試験後に形成された玉軸受の内輪
外周面の転勤層の測定個所を示す説明図、第６図は第５
図の測定個所における窒素注入玉軸受の転勤層のプロフ
ァイルを示す説明図、第７図は同測定個所における未注
入玉軸受の転勤層のプロファイルを示す説明図。 第１図 第２図 斤 ＋　　１ 濃１０　　・−・、 ・　パ・＼ （’／、） 第３図 スパッタリング渫と　（ｎｍ） 第４図 モ動回収 第５回 第６因 第７＠Figures 1 to 6 relate to one embodiment of the present invention, with Figure 1 being an explanatory diagram showing a method of implanting ions into a disassembled ball bearing, and Figure 2 showing the ball bearing shown in Figure 1 in which nitrogen ions have been implanted. An explanatory diagram showing the nitrogen concentration profile in each part of the bearing. Figure 3 is a perspective view showing a partial cross section of the rocking test device for ball bearings in Figure 1. Figure 4 is a nitrogen-injected ball bearing. Fig. 5 is an explanatory drawing showing measurement points of the transfer layer on the outer peripheral surface of the inner ring of the ball bearing formed after the rocking test. Fifth
FIG. 7 is an explanatory diagram showing the profile of the transferred layer of the nitrogen-injected ball bearing at the measurement location shown in the figure, and FIG. 7 is an explanatory diagram showing the profile of the transferred layer of the uninjected ball bearing at the same measurement location. Figure 1 Figure 2 + 1 Dark 10 ・-・, ・ Pa・＼ ('/,) Figure 3 Sputtering and (nm) Figure 4 Motion recovery 5th cause 6th cause 7@

Claims (1)

【特許請求の範囲】[Claims] 他の部位に対する相対的な接触移動部にイオン注入して
なることを特徴とする軸受。A bearing characterized in that ions are implanted into a portion that moves in contact with another portion.