JP3544012B2 - Solid lubricated rolling bearing - Google Patents
Solid lubricated rolling bearing Download PDFInfo
- Publication number
- JP3544012B2 JP3544012B2 JP28899594A JP28899594A JP3544012B2 JP 3544012 B2 JP3544012 B2 JP 3544012B2 JP 28899594 A JP28899594 A JP 28899594A JP 28899594 A JP28899594 A JP 28899594A JP 3544012 B2 JP3544012 B2 JP 3544012B2
- Authority
- JP
- Japan
- Prior art keywords
- rolling
- inner ring
- outer ring
- rolling elements
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【0001】
【産業上の利用分野】
本発明は、真空中、腐食性ガス雰囲気下、高温、低温、放射線下など、潤滑油やグリースが使用できない厳しい環境下で使用される固体潤滑転がり軸受に関する。
【0002】
【従来の技術】
従来、固体潤滑転がり軸受は、内輪と外輪とを備え、内輪と外輪との対向面にそれぞれ周方向に伸びる転走溝を設け、転走溝の間には転動し得る複数の転動体と、隣接する転動体どうしの接触を防ぐ保持器とを挿入して構成してある。
一般の軸受では内輪、外輪および転動体に使用する軸受材料として、大量生産されて安価で品揃いの多い高炭素クロム軸受鋼や高速度鋼などの金属材料が使用されるが、厳しい環境下で使用される軸受の場合は、防錆の役目をする潤滑油やグリースが使用できないため、錆が発生するので高炭素クロム軸受鋼や高速度鋼などの金属材料は使用できない。
その対策として、軸受の構成要素の表面に無電解Ni−Pメッキを施し、あるいは更に熱処理によって、防錆効果を高めると共に、耐摩耗性を向上させたものが開示されている(例えば、特開昭50−1244号、特開昭63−180722号、特開平3−138374号)。
また、軸受材料としてステンレス鋼SUS440やSUS630などの金属材料を用いて錆の発生を防ぐようにしたものがある。
【0003】
【発明が解決しようとする課題】
ところが、従来技術では、高炭素クロム軸受鋼、高速度鋼、ステンレス鋼の軸受構成要素の表面に無電解Ni−Pメッキを施しても、メッキ面どうしの接触になるので摩擦が大きくなり、焼きつきを生じるという問題があった。
また、軸受材料にステンレス鋼を使用した場合は、表面硬度が低いため、軸受負荷容量が小さくなるという問題があった。とくに、SUS440の材料を使用すると塩素ガスや臭素ガスなどのハロゲンガスによって腐食が発生し、発塵が多くなったり寿命が短くなるという問題があった。また、SUS630の材料を使用すると、ハロゲンガスに対する耐腐食性は向上するが、SUS440よりも硬度が低いため、軸受負荷容量が小さくなると共に、SUS630の材料に含まれているCu(約4%含有)が使用中に析出して、半導体製造工程などでこの軸受を使用した時に、搬送中のウエハを汚染するという問題があった。
本発明は、防錆効果が高く、かつ大きい軸受荷重に耐えることができる固体潤滑転がり軸受を提供することを目的とするものである。
【0004】
【課題を解決するための手段】
上記問題を解決するため、本発明は、内輪と、外輪と、前記内輪と前記外輪のそれぞれ対向する面に設けた周方向に伸びる転走溝と、前記二つの転走溝の間に挿入した複数の転動体と、前記転動体を保持する自己潤滑性の高い複合材料で形成した保持器とを備え、前記内輪、前記外輪および前記転動体の表面に無電解Ni−Pメッキ膜を施し、前記転動体および前記転送溝の両方または一方の表面の無電解Ni−Pメッキ膜の上に層状固体潤滑膜を施し、前記保持器の複合材料を、重量割合で20%のポリテトラフルオロエチレン樹脂と、10%の二硫化モリブデン粉末と、10%のケプラー繊維と、残部がポリエーテルエーテルケトン樹脂で構成した固体潤滑転がり軸受において、前記内輪、前記外輪および前記転動体は、高炭素クロム軸受鋼または高速度鋼の少なくとも一つからなり、前記保持器の層状固体潤滑は、二硫化モリブデンまたは二硫化タングステンのスパッタ膜からなるものである。
【0005】
【作用】
上記手段により、内輪、外輪および転動体の表面に無電解Ni−Pメッキ膜を施すと共に、内輪、外輪の転走溝や転動体に二硫化モリブデンなどの層状固体潤滑膜を付着させてあるので、防錆効果を高めることができ、さらに転走溝と転動体表面の潤滑性を高めることができる。
また、内輪、外輪および転動体にステンレス鋼を使用する場合は、ハロゲンガスなどの耐腐食性を高め、ステンレス鋼などから析出するCuの汚染を防止できる。
【0006】
【実施例】
以下、本発明を図に示す実施例について説明する。
図1は本発明の第1の実施例を示す側断面図である。
図において、1は内輪、11は内輪1の外周に設けた転走溝、2は外輪、21は外輪2の内周面に内輪1の転走溝11と対向して設けた転走溝、3は転走溝11および21の間に挿入した転動体の表面、4は隣接する転動体どうしの接触を防ぐ保持器である。
内輪1、外輪2、転動体3の材料はそれぞれ高炭素クロム軸受鋼または高速度鋼で構成し、それぞれ内輪1、外輪2、転動体3の表面には無電解Ni−Pメッキ膜5を4μmの膜厚で施してある。転動体3の表面の無電解Ni−Pメッキ膜5の上には、更に、膜厚が0.3μmの二硫化モリブデンのスパッタ膜を処理して、層状固体潤滑膜6を形成してある。
保持器4の材料は重量割合で20%のポリテトラフルオロエチレン(以下PTFEという)樹脂と、10%の二硫化モリブデン粉末または二硫化タングステン粉末と、10%のケプラー繊維と、残部がポリエーテルエーテルケトン(以下PEEKという)樹脂からなる自己潤滑性の高い複合材料で構成してある。
このような構成により、メッキ処理により防錆効果を高めるとともに、転動体3に層状固体潤滑膜6を施してあるので、内輪1と外輪2が相対的に回転し、転動体3が軸受荷重を負担した状態で回転する場合、転動体3に施した層状固体潤滑膜6によって潤滑される。更に、自己潤滑性の高い二硫化モリブデンまたは二硫化タングステンを含んだ複合材料で保持器4を構成しているので、保持器4から転動体3の表面に二硫化モリブデンまたは二硫化タングステンが転移して潤滑性を高めるので、転動体3の摩擦を低下させ、焼きつきを防ぐことができる。
【0007】
なお、本実施例では、転動体3にのみ層状固体潤滑膜6を形成した例について説明したが、内輪1、外輪2の転走溝11、21にも層状固体潤滑膜6を形成することにより、更に軸受の寿命を長くすることができる。また、内輪1、外輪2および転動体3を、高炭素クロム軸受鋼、高速度鋼またはステンレス鋼のいずれか同種または異種の材料で構成して、それぞれにメッキ処理を施しても同様の効果が得られる。
【0008】
【発明の効果】
以上述べたように、本発明によれば、固体潤滑転がり軸受の内輪、外輪および転動体の表面に無電解Ni−Pメッキを施して防錆効果を高めると共に、層状固体潤滑膜を施して潤滑性を高めるようにしてあるので、防錆効果が高く、かつ大きい軸受荷重に耐えることができる、寿命の長い固体潤滑転がり軸受を提供するできる効果がある。
【図面の簡単な説明】
【図1】本発明の第1の実施例を示す側断面図である。
【符号の説明】
1 内輪、11 転送溝、2 外輪、21 転走溝、3転動体、4 保持器、5 無電解Ni−Pメッキ膜、6 層状固体潤滑膜[0001]
[Industrial applications]
The present invention relates to a solid lubricated rolling bearing used in a severe environment where lubricating oil or grease cannot be used, such as in a vacuum, in a corrosive gas atmosphere, at a high temperature, at a low temperature, or under radiation.
[0002]
[Prior art]
Conventionally, solid lubricated rolling bearings include an inner ring and an outer ring, and provide rolling grooves extending in the circumferential direction on opposing surfaces of the inner ring and the outer ring, and a plurality of rolling elements that can roll between the rolling grooves. And a retainer for preventing contact between adjacent rolling elements is inserted.
In general bearings, metal materials such as high-carbon chromium bearing steel and high-speed steel, which are mass-produced, inexpensive and assorted, are used as bearing materials for inner and outer rings and rolling elements. In the case of a bearing to be used, lubricating oil or grease that plays a role of rust prevention cannot be used, and rust is generated. Therefore, metal materials such as high carbon chromium bearing steel and high speed steel cannot be used.
As a countermeasure, a bearing is disclosed in which the surface of the bearing component is subjected to electroless Ni-P plating, or further subjected to a heat treatment to enhance the rust-preventing effect and improve the wear resistance (for example, Japanese Patent Application Laid-Open (JP-A) no. JP-A-50-1244, JP-A-63-180722, JP-A-3-138374).
Further, there is a material in which a metal material such as stainless steel SUS440 or SUS630 is used as a bearing material to prevent generation of rust.
[0003]
[Problems to be solved by the invention]
However, in the prior art, even if electroless Ni-P plating is applied to the surface of high carbon chromium bearing steel, high-speed steel, or stainless steel bearing components, friction is increased because the plated surfaces come into contact with each other. There was a problem of causing sticking.
Further, when stainless steel is used as the bearing material, there is a problem that the bearing load capacity is reduced due to low surface hardness. In particular, when SUS440 material is used, there is a problem that corrosion is generated by a halogen gas such as a chlorine gas or a bromine gas, thereby increasing dust generation and shortening the service life. When the SUS630 material is used, the corrosion resistance to halogen gas is improved, but the hardness is lower than SUS440, so that the bearing load capacity is reduced and the Cu (about 4% content) contained in the SUS630 material is reduced. ) Precipitates during use and contaminates the wafer being transported when this bearing is used in a semiconductor manufacturing process or the like.
An object of the present invention is to provide a solid lubricated rolling bearing that has a high rust prevention effect and can withstand a large bearing load.
[0004]
[Means for Solving the Problems]
To solve the above problem, the present invention provides an inner ring, an outer ring, a circumferentially extending rolling groove provided on each of the facing surfaces of the inner ring and the outer ring, and a groove inserted between the two rolling grooves. A plurality of rolling elements, comprising a cage formed of a highly self-lubricating composite material holding the rolling elements, applying an electroless Ni-P plating film on the surface of the inner ring, the outer ring and the rolling elements, A layered solid lubricating film is applied on the electroless Ni-P plating film on both or one of the surfaces of the rolling elements and the transfer grooves, and the composite material of the cage is made of a 20% by weight polytetrafluoroethylene resin. If, and 10% molybdenum disulfide powder, and 10% Kepler fiber, in the solid lubricating rolling bearing balance being constituted by polyether ether ketone resin, the inner ring, the outer ring and the rolling elements, high-carbon chromium-axis Consists of at least one of steel or high speed steel, layered solid lubricant of the retainer is made of molybdenum disulfide or tungsten disulfide of sputtered film.
[0005]
[Action]
By the above means, an electroless Ni-P plating film is applied to the surfaces of the inner ring, the outer ring and the rolling elements, and a layered solid lubricating film such as molybdenum disulfide is adhered to the rolling grooves and the rolling elements of the inner ring and the outer ring. In addition, the rust prevention effect can be improved, and the lubrication of the rolling grooves and the rolling element surface can be further improved.
Further, when stainless steel is used for the inner ring, the outer ring and the rolling elements, the corrosion resistance of halogen gas and the like is increased, and contamination of Cu precipitated from stainless steel and the like can be prevented.
[0006]
【Example】
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a side sectional view showing a first embodiment of the present invention.
In the figure, 1 is an inner ring, 11 is a rolling groove provided on the outer periphery of the inner ring 1, 2 is an outer ring, 21 is a rolling groove provided on the inner peripheral surface of the outer ring 2 so as to face the rolling groove 11 of the inner ring 1, Reference numeral 3 denotes a surface of the rolling element inserted between the rolling grooves 11 and 21, and reference numeral 4 denotes a retainer for preventing contact between adjacent rolling elements.
The material of the inner ring 1, the outer ring 2 and the rolling elements 3 is made of high carbon chromium bearing steel or high-speed steel, respectively, and the surface of the inner ring 1, the outer ring 2 and the rolling elements 3 is coated with an electroless Ni-
The material of the cage 4 is 20% by weight of polytetrafluoroethylene (hereinafter referred to as PTFE) resin, 10% of molybdenum disulfide powder or tungsten disulfide powder, 10% of Kepler fiber, and polyether ether as the rest. It is composed of a highly self-lubricating composite material made of ketone (hereinafter referred to as PEEK) resin.
With such a configuration, the rust-preventing effect is enhanced by plating, and the layered solid lubricating film 6 is applied to the rolling elements 3, so that the inner ring 1 and the outer ring 2 rotate relatively, and the rolling elements 3 reduce the bearing load. When rotating under a burden, the rolling element 3 is lubricated by the layered solid lubricating film 6. Further, since the cage 4 is made of a composite material containing molybdenum disulfide or tungsten disulfide having high self-lubricating properties, molybdenum disulfide or tungsten disulfide is transferred from the cage 4 to the surface of the rolling element 3. Therefore, the friction of the rolling elements 3 can be reduced and seizure can be prevented.
[0007]
In the present embodiment, an example in which the layered solid lubricating film 6 is formed only on the rolling element 3 has been described. However, by forming the layered solid lubricating film 6 also on the rolling grooves 11 and 21 of the inner ring 1 and the outer ring 2. In addition, the life of the bearing can be prolonged. The same effect can be obtained even if the inner ring 1, the outer ring 2 and the rolling elements 3 are made of the same or different materials of high carbon chromium bearing steel, high speed steel or stainless steel and plated respectively. can get.
[0008]
【The invention's effect】
As described above, according to the present invention, the inner ring, the outer ring and the surfaces of the rolling elements of the solid lubricated rolling bearing are subjected to electroless Ni-P plating to enhance the rust-preventive effect, and are provided with a layered solid lubricating film for lubrication. Since the lubrication performance is enhanced, there is an effect that a solid lubricated rolling bearing having a long life and a high rust prevention effect and capable of withstanding a large bearing load can be provided.
[Brief description of the drawings]
FIG. 1 is a side sectional view showing a first embodiment of the present invention.
[Explanation of symbols]
Reference Signs List 1 inner ring, 11 transfer groove, 2 outer ring, 21 rolling groove, 3 rolling element, 4 cage, 5 electroless Ni-P plating film, 6 layered solid lubricating film
Claims (1)
前記内輪、前記外輪および前記転動体は、高炭素クロム軸受鋼または高速度鋼の少なくとも一つからなり、前記保持器の層状固体潤滑は、二硫化モリブデンまたは二硫化タングステンのスパッタ膜からなることを特徴とする固体潤滑転がり軸受。An inner ring, an outer ring, a circumferentially extending rolling groove provided on each of opposing surfaces of the inner ring and the outer ring, a plurality of rolling elements inserted between the two rolling grooves, and holding the rolling elements. A cage made of a composite material having a high self-lubricating property, and applying an electroless Ni-P plating film on the surfaces of the inner race , the outer race and the rolling element, and / or one or both of the rolling element and the transfer groove The surface of is provided with a layered solid lubricating film on the electroless Ni-P plating film, and the composite material of the retainer is obtained by adding 20% by weight of polytetrafluoroethylene resin and 10% of molybdenum disulfide powder, In a solid lubricated rolling bearing composed of 10% Kepler fiber and the remainder polyetheretherketone resin ,
The inner ring, the outer ring and the rolling elements are made of at least one of high-carbon chromium bearing steel or high-speed steel, and the layered solid lubrication of the cage is made of a sputtered film of molybdenum disulfide or tungsten disulfide. Characterized by solid lubricated rolling bearings.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28899594A JP3544012B2 (en) | 1994-10-28 | 1994-10-28 | Solid lubricated rolling bearing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28899594A JP3544012B2 (en) | 1994-10-28 | 1994-10-28 | Solid lubricated rolling bearing |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08128449A JPH08128449A (en) | 1996-05-21 |
JP3544012B2 true JP3544012B2 (en) | 2004-07-21 |
Family
ID=17737488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28899594A Expired - Lifetime JP3544012B2 (en) | 1994-10-28 | 1994-10-28 | Solid lubricated rolling bearing |
Country Status (1)
Country | Link |
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JP (1) | JP3544012B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102817921A (en) * | 2012-08-30 | 2012-12-12 | 吉林省达美水利水电工程有限公司 | Bearing and outer ring thereof |
-
1994
- 1994-10-28 JP JP28899594A patent/JP3544012B2/en not_active Expired - Lifetime
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Publication number | Publication date |
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JPH08128449A (en) | 1996-05-21 |
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