JPS6240737Y2 - - Google Patents
Info
- Publication number
- JPS6240737Y2 JPS6240737Y2 JP14703978U JP14703978U JPS6240737Y2 JP S6240737 Y2 JPS6240737 Y2 JP S6240737Y2 JP 14703978 U JP14703978 U JP 14703978U JP 14703978 U JP14703978 U JP 14703978U JP S6240737 Y2 JPS6240737 Y2 JP S6240737Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- rigid member
- support
- porous rigid
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 14
- 238000012856 packing Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 239000006061 abrasive grain Substances 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
【考案の詳細な説明】
本考案は砥粒加工において被加工物を保持する
砥粒加工用保持体の改良に関する。[Detailed Description of the Invention] The present invention relates to an improvement of a holder for abrasive processing that holds a workpiece during abrasive processing.
被加工物が薄片状の場合、従来被加工物を保持
体に接着して砥粒加工することが行なわれてい
る。しかしこの方法は、被加工物と保持体間に接
着材が介在すること、接着のため加熱が行なわれ
ることなどに起因して砥粒加工の精度が損なわれ
るばかりでなく、接着と剥離作業が生産性向上の
障害になつている。そこで第1および第2図に示
す如き保持体1の被加工物取着面2に減圧通路3
と、この減圧通路3に連通する吸引溝4を設け、
被加工物Wを減圧吸着することも考えられている
が、吸引溝4と密着部5……の配置が粗く、かつ
偏在するために密着部5と被加工物W間に空気が
残留するとか、吸引溝4により被加工物Wが湾曲
する現象が生じて加工精度を損なう恐れがある。 When the workpiece is in the form of a flake, conventionally the workpiece is bonded to a holder and subjected to abrasive processing. However, this method not only impairs the precision of abrasive processing due to the presence of adhesive between the workpiece and the holder and the heating required for adhesion, but also the adhesion and peeling work. This has become an obstacle to improving productivity. Therefore, as shown in FIGS. 1 and 2, a vacuum passage 3 is provided on the workpiece attachment surface 2 of the holder 1.
and a suction groove 4 communicating with this decompression passage 3,
It has been considered to suction the workpiece W under reduced pressure, but the arrangement of the suction grooves 4 and the contact portions 5 is rough and unevenly distributed, resulting in air remaining between the contact portions 5 and the workpiece W. , a phenomenon in which the workpiece W is curved by the suction groove 4 may occur, which may impair the machining accuracy.
本考案は上述の事情に基づいてなされたもの
で、支持体に取囲まれかつ上記支持体と一体に平
滑に研摩された被加工物吸着面を有する10μm以
上50μm以下のろ過度の通気性多孔質剛性部材と
上記被加工物吸着面の近傍に上記被加工物吸着面
を取囲んで上記支持体に設けられた還状パツキン
とを設けて加工中異物が被加工物吸着面に侵入す
るのを防止するとともに吸着に起因する被加工物
の変形を防止して平面度が良好で精度が高い砥粒
加工が行えるようにしたものである。 The present invention has been made based on the above-mentioned circumstances, and has a permeable porous hole with a filtration rate of 10 μm or more and 50 μm or less, which is surrounded by a support and has a workpiece adsorption surface that is polished smoothly together with the support. A rigid member and a circular packing provided on the support surrounding the workpiece suction surface are provided near the workpiece suction surface to prevent foreign matter from entering the workpiece suction surface during processing. In addition to preventing deformation of the workpiece due to adsorption, it is possible to perform abrasive processing with good flatness and high precision.
以下、本考案を図面を参照し、実施例に基づい
て説明する。 Hereinafter, the present invention will be described based on examples with reference to the drawings.
第3図および第4図に示すように、本考案の砥
粒加工用保持体は支持体11と、この支持体11
に設けられる減圧通路12と、上記支持体11に
取着けられる多孔質剛性部材13およびパツキン
14とから構成されている。 As shown in FIGS. 3 and 4, the abrasive processing holder of the present invention includes a support 11 and a
It is composed of a decompression passage 12 provided in the support body 11, a porous rigid member 13 and a packing 14 attached to the support body 11.
上記支持体11はステンレス等で作られた円板
状体で、円周を等分する位置に一端面15側を大
径とする複数の段付穴16…が設けられ、(1個
のみ図示)、これら段付穴16の大径部16aに
は多孔質剛性部材13が嵌合し、小径部はこの多
孔質剛性部材13を介して被加工物Wを吸引する
図示せぬ減圧源に連通する減圧通路12をなす。
支持体11は更に上記一端面15に上記大径部1
6aに近接かつ回撓する還状のパツキン溝18が
形成され、このパツキン溝18には適当な硬度と
パツキン溝18からの突出量をもち被加工物を介
し研摩圧が加わつたときに被加工物吸着面19と
同一平面上に位置するパツキン14が保持され
る。 The support body 11 is a disc-shaped body made of stainless steel or the like, and is provided with a plurality of stepped holes 16 having a larger diameter on one end surface 15 side at positions equally dividing the circumference (only one is shown). ), a porous rigid member 13 is fitted into the large diameter portion 16a of these stepped holes 16, and the small diameter portion communicates with a vacuum source (not shown) that sucks the workpiece W through the porous rigid member 13. A decompression passage 12 is formed.
The support body 11 further has the large diameter portion 1 on the one end surface 15.
A ring-shaped packing groove 18 is formed in the vicinity of 6a and has an appropriate hardness and an amount of protrusion from the packing groove 18, so that when polishing pressure is applied through the workpiece, The gasket 14 located on the same plane as the object suction surface 19 is held.
しかして多孔質剛性部材13は通気性を表わす
ろ過度が10μm(称呼寸法)以上50μm以下であ
り、材料としてはフイルター等に用いられている
青銅、ステンレス等の焼結金属を使用する。な
お、ここでいうろ過度とはその称呼寸法を超える
粒子径をもつ粒子が通過を阻止されることを意味
する値である。また、この多孔質剛性部材13は
形状が本実施例においては一様な厚さの円板状の
ものが示されているが、たとえば周辺部を薄く形
成することなどにより被加工物に加わる吸着力を
均等にすることが可能である。 The porous rigid member 13 has a filtration value representing air permeability of 10 μm (nominal size) to 50 μm, and is made of sintered metal such as bronze or stainless steel, which is used for filters and the like. Note that the filtration degree here means a value that means that particles having a particle size exceeding the nominal size are prevented from passing through. In this embodiment, the porous rigid member 13 is shown to have a disk-like shape with a uniform thickness. It is possible to equalize the forces.
しかしてこの多孔質剛性部材13はその吸着面
19が第5図に示すように、支持体11の一端面
15と同一平面をなすように研摩されている。こ
の研摩面精度は2μm以下の粗さにするとよい。
図において19a…は密着部、19b…は吸引溝
である。 However, the porous rigid member 13 of the lever is polished so that its suction surface 19 is flush with one end surface 15 of the support 11, as shown in FIG. The accuracy of this polished surface is preferably set to a roughness of 2 μm or less.
In the figure, 19a... is a close contact part, and 19b... is a suction groove.
上述の構成による保持体を使用してポリシング
加工を行なう場合について説明すると、図示せぬ
減圧源により通気性多孔質剛性部材13を介して
支持体1に薄片状の被加工物Wが吸着される。そ
してこの被加工物Wに第5図に示すようにポリシ
ング用の回転盤20を回転しポリシング材を懸濁
したポリシング液を供給しながら押しつけ加工を
進行する。 When polishing is performed using the holder configured as described above, a flaky workpiece W is adsorbed onto the support 1 via the air permeable porous rigid member 13 by a vacuum source (not shown). . Then, as shown in FIG. 5, the polishing rotary disk 20 is rotated to press the workpiece W while supplying a polishing liquid in which a polishing material is suspended.
この加工中被加工物Wはつぎの理由によりあま
り湾曲せずかつ密接して多孔質剛性部材に吸着さ
れ結果として平面度良好にポリシング加工され
る。 During this processing, the workpiece W does not curve much for the following reason and is closely adsorbed to the porous rigid member, resulting in polishing with good flatness.
(イ) 多孔質剛性部材13を使用したから従来さけ
ることのできなかつた密着部19aと吸引溝1
9bの偏在を解決して均一に分布せしめること
ができる。(b) The close contact portion 19a and the suction groove 1, which could not be avoided conventionally because the porous rigid member 13 is used.
The uneven distribution of 9b can be solved and distributed uniformly.
(ロ) 多孔質剛性部材13をろ過度50μm以下に形
成したから吸引溝19bが大き過ぎるために起
因する被加工物Wの湾曲を小さくすることがで
きる。(b) Since the porous rigid member 13 is formed to have a filtration rate of 50 μm or less, it is possible to reduce the curvature of the workpiece W caused by the suction groove 19b being too large.
(ハ) 多孔質剛性部材13をろ過度10μm以上に
形成したからポリシング材の不所望の侵入があ
つた場合にも、ポリシング材は通常1μm以下
であるので目づまりによる吸着力の減退を防止
できる。(c) Since the porous rigid member 13 is formed to have a filtration rate of 10 μm or more, even if the polishing material intrudes undesirably, the polishing material usually has a thickness of 1 μm or less, so it is possible to prevent the adsorption force from decreasing due to clogging. .
(ニ) パツキン14はポリシング液が被加工物Wと
支持体11との間に入り込むのを防止して両者
W(支持体11および多孔質剛性部材13)の
密接に役立つ。(d) The packing 14 prevents the polishing liquid from entering between the workpiece W and the support 11, and serves to keep the two W (the support 11 and the porous rigid member 13) in close contact with each other.
(ホ) 吸着面の研摩は一段と被加工物Wの平面度向
上に役立つ。(e) Polishing the suction surface helps to further improve the flatness of the workpiece W.
本考案は以上詳述したように10μm以上50μ
m以下のろ過度の通気性多孔質剛性部材に吸着さ
せるように形成したことによつて密着部と吸引溝
の偏在による空気の残存および吸引溝の過大によ
る被加工物の湾曲を防止していること、パツキン
を設けポリシング液の侵入を防止することによつ
てポリシング剤の介在を無くして吸着部に被加工
物を密接させていること、および吸着部を研摩す
ることとによつて被加工物の平面度を向上させて
従来に比べ格段に精度の高い砥粒加工を行うこと
ができた。 As detailed above, the present invention has a diameter of 10 μm or more and 50 μm.
By forming it so that it is adsorbed to a permeable porous rigid member with a filtration rate of less than m, it is possible to prevent air remaining due to uneven distribution of the contact area and suction grooves, and to prevent bending of the workpiece due to excessive suction grooves. In addition, by providing a gasket to prevent the polishing liquid from entering, the workpiece is brought into close contact with the suction part without the presence of polishing agent, and by polishing the suction part, the workpiece is removed. By improving the flatness of the material, we were able to perform abrasive processing with much higher precision than before.
本考案は上述の実施例に限定されるものではな
くその要旨を逸脱しない範囲において種々変更可
能であることはいうまでもない。 It goes without saying that the present invention is not limited to the above-described embodiments, and can be modified in various ways without departing from the gist thereof.
第1図は従来の砥粒加工用保持体の一部切欠平
面図、第2図は第1図の−線に沿う平面での
断面図、第3図は本考案の実施例の砥粒加工用保
持体の一部切欠平面図、第4図は第3図の−
線に沿う平面での断面図、第5図は第4図のA部
拡大図である。
11……支持体、12……減圧通路、13……
多孔質剛性部材、14……パツキン、18……パ
ツキン溝、19……吸着面、W……被加工物。
Fig. 1 is a partially cutaway plan view of a conventional holder for abrasive processing, Fig. 2 is a sectional view taken along the - line in Fig. 1, and Fig. 3 is an abrasive processing example of the present invention. A partially cutaway plan view of the holder, FIG. 4 is the same as in FIG.
FIG. 5 is an enlarged view of section A in FIG. 4, which is a sectional view taken along the line. 11... Support body, 12... Decompression passage, 13...
Porous rigid member, 14... Packing, 18... Packing groove, 19... Adsorption surface, W... Workpiece.
Claims (1)
に研摩された被加工物吸着面を有する10μm以上
50μm以下のろ過度の通気性多孔質剛性部材と、
上記通気性多孔質剛性部材に連通する減圧通路
と、上記被加工物吸着面の近傍に上記被加工物吸
着面を取囲んで上記支持体に設けられ上記減圧通
路の減圧で吸引された被加工物に加わる研摩圧で
変形して上記被加工物吸着面と同一平面上に位置
する環状パツキンとを具備することを特徴とする
砥粒加工用保持体。 10 μm or more with a workpiece adsorption surface surrounded by a support and polished smoothly together with the support
an air permeable porous rigid member with a filtration rate of 50 μm or less;
A vacuum passage communicating with the air permeable porous rigid member; and a workpiece provided in the support body surrounding the workpiece suction surface near the workpiece suction surface, the workpiece being sucked by the reduced pressure of the vacuum passageway. 1. A holder for abrasive grain processing, comprising an annular packing that is deformed by the polishing pressure applied to the object and positioned on the same plane as the workpiece adsorption surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14703978U JPS6240737Y2 (en) | 1978-10-27 | 1978-10-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14703978U JPS6240737Y2 (en) | 1978-10-27 | 1978-10-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5566743U JPS5566743U (en) | 1980-05-08 |
JPS6240737Y2 true JPS6240737Y2 (en) | 1987-10-19 |
Family
ID=29128122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14703978U Expired JPS6240737Y2 (en) | 1978-10-27 | 1978-10-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6240737Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11309638A (en) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | Vacuum suction pad |
-
1978
- 1978-10-27 JP JP14703978U patent/JPS6240737Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5566743U (en) | 1980-05-08 |
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