JPS62273443A - Moisture sensor element - Google Patents
Moisture sensor elementInfo
- Publication number
- JPS62273443A JPS62273443A JP61116244A JP11624486A JPS62273443A JP S62273443 A JPS62273443 A JP S62273443A JP 61116244 A JP61116244 A JP 61116244A JP 11624486 A JP11624486 A JP 11624486A JP S62273443 A JPS62273443 A JP S62273443A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- anode electrode
- output current
- hydrogen
- solid electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001257 hydrogen Substances 0.000 claims abstract description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 19
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 13
- -1 hydrogen ions Chemical class 0.000 claims abstract description 9
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims abstract description 8
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 claims 1
- 239000001301 oxygen Substances 0.000 abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 5
- 239000010416 ion conductor Substances 0.000 abstract description 5
- 229910003408 SrCeO3 Inorganic materials 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 239000003792 electrolyte Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- DDBREPKUVSBGFI-UHFFFAOYSA-N phenobarbital Chemical compound C=1C=CC=CC=1C1(CC)C(=O)NC(=O)NC1=O DDBREPKUVSBGFI-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
産業上の利用分野
本発明は気体中に含有されている水分の量を検出するた
めの？Ｗｒ度センサに関する。Detailed Description of the Invention 3. Detailed Description of the Invention Field of Industrial Application The present invention is for detecting the amount of moisture contained in a gas. Regarding Wr degree sensor.
従来の技術
従来の湿度センサは主として相対湿度を利用するもので
あり、水蒸気濃度を直接測定できるセンサとしては水の
赤外線吸収スペクトルを利用する形式のものしか知られ
ていない。2. Description of the Related Art Conventional humidity sensors mainly utilize relative humidity, and the only known sensor capable of directly measuring water vapor concentration is one that utilizes the infrared absorption spectrum of water.
発明が解決すべき問題点
しかしこの形式の測定方法による場合には比較的低濃度
（ｐｐｍ領域）の水蒸気の測定は精度よく行ない得るが
、パーセントオーダーの水蒸気の濃度測定は殆んど行な
い得ないのが実情である。Problems to be Solved by the Invention However, with this type of measurement method, it is possible to measure water vapor at relatively low concentrations (ppm range) with high accuracy, but it is almost impossible to measure the concentration of water vapor on the order of percent. That is the reality.
問題点を解決するための手段
本発明はこのような状況の下に種々検討の結果なされた
もので、水分がアノード電極上で電気分解され水素イオ
ン（Ｈ゛）を生じることと、この水素イオン（Ｈ゛）を
キャリアする出力電流から湿度を検出するようにした点
に特徴がある。Means for Solving the Problems The present invention was developed as a result of various studies under these circumstances. The feature is that the humidity is detected from the output current carrying (H).
ここに用いられる固体電解質としてはＳｒＣｅＯ３系固
体電解質の如きペロブスカイト系酸化物からなる結晶構
造を有し、酸素イオンの輸率が殆んどＯで水素イオンの
輸率がは＼１のものを対象とするものである。The solid electrolyte used here has a crystal structure made of perovskite oxide such as SrCeO3-based solid electrolyte, and the transport number of oxygen ions is mostly O and the transport number of hydrogen ions is \1. That is.
実施例
第１図に示すように水素イオシ導伝性固体電解質１の両
面に多孔性電極を設けてあり、その一方はアノード２他
方はカソード３としである。そしてアノード２を蔽う小
孔４付キヤツプ５が前記水素イオン導伝性固体電解質１
に接合されている。Embodiment As shown in FIG. 1, porous electrodes are provided on both sides of a hydrogen iodine conductive solid electrolyte 1, one of which serves as an anode and the other as a cathode 3. A cap 5 with a small hole 4 that covers the anode 2 is connected to the hydrogen ion conductive solid electrolyte 1.
is joined to.
即ち型としては限界電流式酸素センサの酸素イオン導伝
体（ジルコニア固体電解質）の代りに、水素イオン導伝
体を用いているもので水分（１１２０）は矢印方向に小
孔より流れ、水素イオン導伝体１の中に入る。ここでア
ノード電極及びカソード電極上では次の反応が起る。（
注、図示の如く、アノードとカソードの位置は酸素セン
サの場合とは逆になる。）
アノード電極ＨｚＯ−２Ｈ” ＋ −０□＋２ｅ−（ｔ
ｌ〉水素の存在しない雰囲気中〈
本発明で雰囲気中に水素の存在しない場合、専ら水分が
アノード電極上で電気分解され、これによって生じた水
素イオン（Ｈｏ）をキャリアとする出力電流を利用する
こととなる。In other words, the model uses a hydrogen ion conductor instead of the oxygen ion conductor (zirconia solid electrolyte) of the limiting current type oxygen sensor, and water (1120) flows from the small hole in the direction of the arrow, and hydrogen ions are generated. Enter conductor 1. Here, the following reaction occurs on the anode and cathode electrodes. (
Note: As shown, the anode and cathode positions are reversed for the oxygen sensor. ) Anode electrode HzO-2H" + -0□+2e-(t
l〉In an atmosphere where hydrogen does not exist〈 In the case where hydrogen does not exist in the atmosphere in the present invention, water is exclusively electrolyzed on the anode electrode, and the output current using the resulting hydrogen ions (Ho) as carriers is used. That will happen.
その印加電圧と出力電流の関係は第２図に示すとおりで
あり、水蒸気分圧と限界電流の関係は第３図に示すとお
りとなる。The relationship between the applied voltage and output current is as shown in FIG. 2, and the relationship between water vapor partial pressure and limiting current is as shown in FIG. 3.
通常の雰囲気（水素の存在しない）中では、センサ印加
電圧が■、以下では水が電気分解しないので出力電流は
観察されない。In a normal atmosphere (no hydrogen present), no output current is observed when the sensor applied voltage is below ■ because water does not electrolyze.
■。以上の電圧をセンサに印加した場合にはア〉水素を
含む雰囲気中〈
アノード電極 Ｈ，−＋ ２Ｈ” ＋２ｅ−（４）本雰
囲気中ではアノード電極で水素が水素イオン化される反
応（４）が反応（１）に加わるために、第４図に示すよ
うに二段の限界電流特性になり、水蒸気分圧とΔＩＬ（
Ｈ”の存在により増加した電流値）との関係は第５図に
示すとおりである。■. When the above voltage is applied to the sensor, the reaction (4) in which hydrogen is ionized at the anode electrode occurs in an atmosphere containing hydrogen. In order to participate in reaction (1), a two-stage limiting current characteristic occurs as shown in Figure 4, and water vapor partial pressure and ΔIL(
The relationship with the current value (increased due to the presence of H'') is as shown in FIG.
本発明の更に別の応用例は第６図に示すとおりである。Yet another example of application of the present invention is shown in FIG.
即ち図に於いて実線は含湿空気、点線は乾燥空気で印加
電圧と出力電流の関係グラフであり、ＩＬ、、ＩＬ２は
含湿空気の各段の出力電流値、ΔＩＬ、、 ΔＩＬ２
は含湿空気と乾燥空気のＩＬ、、ＩＬ２に対応する出力
電流の差である。That is, in the figure, the solid line is a graph of the relationship between applied voltage and output current for humid air and the dotted line is for dry air, where IL, , IL2 are the output current values of each stage for humid air, ΔIL,, ΔIL2
is the difference in output current corresponding to IL, IL2 of humid air and dry air.
具体的には同図を元にして次のように湿度を求めること
ができる。Specifically, the humidity can be determined as follows based on the figure.
■ Δ■、より求める方法
Ｉ２０が分解しない領域の限界電流値ＴＬ＋ と、Ｉ２
０が１００％分解するときに生ずる電流値ＩＬ。■ Δ■, the method to find from I20 is the limit current value TL+ in the region where it does not decompose,
Current value IL that occurs when 0 decomposes 100%.
との差ΔＩＬの大きさからそれに比例するとこちの湿度
を求める。From the size of the difference ΔIL between the two and proportional to it, the humidity can be found.
■ Δ■５．より求める方法
被測電気体を乾燥剤等を通過させて、殆んど湿度骨を有
しなくなったドライな気体を測定した結果が点線で示す
特性である。これを基準として除湿しない気体の第１の
平坦部との電流値の差ΔＩＬ、を求めれば、その値が被
測定体の湿度を示す。■Δ■5. The characteristics shown by the dotted line are the results of passing a desiccant or the like through the electrical object to be measured and measuring dry gas that has almost no moisture content. If the difference ΔIL in current value between the current value and the first flat part of the gas that is not dehumidified is calculated using this as a reference, that value indicates the humidity of the object to be measured.
■ ΔＩＬ２より求める方法
原理的には前記■と同様であるが、たソ′■の場合は気
体中の湿度（水分）の存在により、水素の気体中に占め
る割合（％）が低下し、その結果水素分圧が低くなるこ
とにより、ΔＴＬ、が観測されるのに対し、ΔＩＬ２は
気体中のｌＩ２０が実際に分解し、Ｈｏが発生すること
による限界電流値の増分を観測することになる。■ Method for determining from ΔIL2 The principle is the same as in ■ above, but in the case of Taso'■, the proportion (%) of hydrogen in the gas decreases due to the presence of humidity (moisture) in the gas. As a result, as the hydrogen partial pressure becomes lower, ΔTL is observed, whereas ΔIL2 is an increase in the limiting current value due to the actual decomposition of lI20 in the gas and generation of Ho.
第６図は本発明の他の実施例で、水素イオン導伝性固体
電解質１の両面に多孔性電極を設けてあり、その一方は
アノード２、他方はカソード３である。そしてアノード
２を蔽う小孔（ピンホール）４ｂ付ドーム状の金属薄膜
５ｂが設けられている。FIG. 6 shows another embodiment of the present invention, in which porous electrodes are provided on both sides of a hydrogen ion-conducting solid electrolyte 1, one of which is an anode 2 and the other is a cathode 3. A dome-shaped metal thin film 5b with a small hole (pinhole) 4b covering the anode 2 is provided.
なお本発明で用いられる水素イオン導伝体としては５ｒ
ＣｅＯｔ系固体電解質の如きペロブスカイト系酸化物か
らなる結晶構造を有し、酸素イオンの輸率が殆んど０で
水素イオンの輸率がはｖ’ ｌのものを対象とするもの
であるし、限界電流センサもこの実施例に限定されるも
のではない。The hydrogen ion conductor used in the present invention is 5r.
It has a crystal structure made of a perovskite oxide such as a CeOt-based solid electrolyte, and the transport number of oxygen ions is almost 0 and the transport number of hydrogen ions is v'l. The limiting current sensor is also not limited to this embodiment.
発明の効果
本発明は固体電解質として水素イオン（Ｈ＋）導伝体を
用いた限界電流式湿度センサであり以下の効果を存する
。Effects of the Invention The present invention is a limiting current type humidity sensor using a hydrogen ion (H+) conductor as a solid electrolyte, and has the following effects.
■ 湿度濃度（水蒸気分圧）に比例した出力電流（限界
電流）が得られる。■ Output current (limit current) proportional to humidity concentration (water vapor partial pressure) can be obtained.
即ち水素がない雰囲気中ではＩ ＬＣ）ＣＰ Ｉ（ｚＯ
水素がある雰囲気中ではΔＩ 、ｃ＝＜ Ｐ Ｈ，０■
気体拡散孔の面積や長さを変えることによって、低濃
度から高濃度領域の水蒸気分圧を測定することができる
。That is, in an atmosphere without hydrogen, ILC)CPI(zO
In an atmosphere with hydrogen, ΔI, c=< PH, 0■
By changing the area and length of the gas diffusion holes, it is possible to measure the water vapor partial pressure in the low to high concentration range.
■ センサ出力のドリフト（経時変化）やヒステリシス
が殆んどないので正確に測定することができる。■ Accurate measurement is possible because there is almost no drift (change over time) or hysteresis in the sensor output.
第１図は本発明による湿度センサ素子の一例を示す断面
図、第２図、第４図、第６図は本発明の湿度センサ素子
の出力電流−印加電流のグラフ、第３図は限界電流−水
蒸気分圧のグラフ、第５図はΔＩＬ−水蒸気分圧のグラ
フ、第７図は本発明による湿度センサ素子の他の一例を
示す断面図である。
１・・・水素イオン導伝性固体電解質、２・・・アノー
ド、３・・・カソード、４，４ｂ・・・小孔、５・・・
キャップ、５ｂ・・・ドーム状の金属薄膜 ・代
理人 弁理士 竹 内 ９
第１図
第２図 第３図
第４図 第５図
Ｅｐｉｌｏｌを圧
菊６図
卯、加電圧FIG. 1 is a cross-sectional view showing an example of a humidity sensor element according to the present invention, FIGS. 2, 4, and 6 are graphs of output current vs. applied current of the humidity sensor element according to the present invention, and FIG. 3 is a limit current - a graph of water vapor partial pressure; FIG. 5 is a graph of ΔIL - water vapor partial pressure; FIG. 7 is a cross-sectional view showing another example of the humidity sensor element according to the present invention. DESCRIPTION OF SYMBOLS 1... Hydrogen ion conductive solid electrolyte, 2... Anode, 3... Cathode, 4, 4b... Small hole, 5...
Cap, 5b...Dome-shaped metal thin film Agent: Patent attorney Takeuchi 9 Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Pressure on Epilol 6 Figure 2 Apply voltage
Claims (2)
を設け、その一方をアノード電極、他方をカソード電極
とし、アノード電極を蔽う水素拡散制御体を設け、雰囲
気中に含まれる水分がアノード電極上で電気分解するこ
とにより生じた水素イオン（Ｈ＾＋）をキャリアする出
力電流により湿度を検出するようにしたことを特徴とす
る湿度センサ素子(1) Porous electrodes are provided on both sides of the hydrogen ion conductive solid electrolyte, one of which is used as an anode electrode and the other as a cathode electrode, and a hydrogen diffusion control body is provided that covers the anode electrode, so that moisture contained in the atmosphere is removed from the anode electrode. A humidity sensor element that detects humidity using an output current that carries hydrogen ions (H^+) generated by electrolysis on an electrode.
如きペロブスカイト系酸化物である特許請求の範囲第１
項記載の湿度センサ素子(2) Claim 1, wherein the hydrogen ion conductive solid electrolyte is a perovskite oxide such as SrCeO_3.
Humidity sensor element described in section
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61116244A JPS62273443A (en) | 1986-05-22 | 1986-05-22 | Moisture sensor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61116244A JPS62273443A (en) | 1986-05-22 | 1986-05-22 | Moisture sensor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62273443A true JPS62273443A (en) | 1987-11-27 |
Family
ID=14682353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61116244A Pending JPS62273443A (en) | 1986-05-22 | 1986-05-22 | Moisture sensor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62273443A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112098478A (en) * | 2020-09-17 | 2020-12-18 | 昆明理工大学 | All-inorganic lead-free double perovskite humidity sensor and preparation method thereof |
-
1986
- 1986-05-22 JP JP61116244A patent/JPS62273443A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112098478A (en) * | 2020-09-17 | 2020-12-18 | 昆明理工大学 | All-inorganic lead-free double perovskite humidity sensor and preparation method thereof |
| CN112098478B (en) * | 2020-09-17 | 2021-07-20 | 昆明理工大学 | All-inorganic lead-free double perovskite humidity sensor and preparation method thereof |
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