JPS622685B2 - - Google Patents

Info

Publication number: JPS622685B2
Authority: JP; Japan
Prior art keywords: film; temperature; thermistor; sensitive resistor; thin film
Prior art date: 1981-12-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP20273181A

Other languages

English (en)

Japanese (ja)

Other versions

JPS58103102A (ja

Inventor

Takeshi Nagai

Kazushi Yamamoto

Ikuo Kobayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Panasonic Holdings Corp

Original Assignee

Matsushita Electric Industrial Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-12-15

Filing date

1981-12-15

Publication date

1987-01-21

1981-12-15 Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd

1981-12-15 Priority to JP20273181A priority Critical patent/JPS58103102A/ja

1982-03-30 Priority to US06/363,498 priority patent/US4424507A/en

1982-04-06 Priority to EP82301808A priority patent/EP0063445B1/en

1982-04-06 Priority to DE8282301808T priority patent/DE3268363D1/de

1983-06-20 Publication of JPS58103102A publication Critical patent/JPS58103102A/ja

1987-01-21 Publication of JPS622685B2 publication Critical patent/JPS622685B2/ja

Status Granted legal-status Critical Current

Links

239000010408 film Substances 0.000 claims description 37
239000010409 thin film Substances 0.000 claims description 19
239000011521 glass Substances 0.000 claims description 18
239000000758 substrate Substances 0.000 claims description 11
239000000919 ceramic Substances 0.000 claims description 8
238000005219 brazing Methods 0.000 claims description 7
239000011248 coating agent Substances 0.000 claims description 7
238000000576 coating method Methods 0.000 claims description 7
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
229910052810 boron oxide Inorganic materials 0.000 claims 1
JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
229910052814 silicon oxide Inorganic materials 0.000 claims 1
239000000463 material Substances 0.000 description 9
239000011888 foil Substances 0.000 description 7
239000010936 titanium Substances 0.000 description 6
WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
239000012530 fluid Substances 0.000 description 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
238000010304 firing Methods 0.000 description 3
229910001006 Constantan Inorganic materials 0.000 description 2
229910004298 SiO 2 Inorganic materials 0.000 description 2
229910007472 ZnO—B2O3—SiO2 Inorganic materials 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
239000002131 composite material Substances 0.000 description 2
238000001514 detection method Methods 0.000 description 2
239000000203 mixture Substances 0.000 description 2
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
239000000843 powder Substances 0.000 description 2
229910052719 titanium Inorganic materials 0.000 description 2
229910052726 zirconium Inorganic materials 0.000 description 2
VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
239000001856 Ethyl cellulose Substances 0.000 description 1
ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical group CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
229910020617 PbO—B2O3—SiO2 Inorganic materials 0.000 description 1
LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 description 1
230000003321 amplification Effects 0.000 description 1
239000011230 binding agent Substances 0.000 description 1
238000009835 boiling Methods 0.000 description 1
229910001179 chromel Inorganic materials 0.000 description 1
238000009833 condensation Methods 0.000 description 1
230000005494 condensation Effects 0.000 description 1
238000010411 cooking Methods 0.000 description 1
238000001816 cooling Methods 0.000 description 1
229920001249 ethyl cellulose Polymers 0.000 description 1
235000019325 ethyl cellulose Nutrition 0.000 description 1
239000006023 eutectic alloy Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
229910052748 manganese Inorganic materials 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
238000003199 nucleic acid amplification method Methods 0.000 description 1
239000002245 particle Substances 0.000 description 1
UPIXZLGONUBZLK-UHFFFAOYSA-N platinum Chemical compound [Pt].[Pt] UPIXZLGONUBZLK-UHFFFAOYSA-N 0.000 description 1
229910052703 rhodium Inorganic materials 0.000 description 1
239000010948 rhodium Substances 0.000 description 1
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1

Landscapes

Thermistors And Varistors (AREA)

JP20273181A 1981-04-10 1981-12-15 薄膜サ−ミスタ Granted JPS58103102A (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP20273181A JPS58103102A (ja)	1981-12-15	1981-12-15	薄膜サ−ミスタ
US06/363,498 US4424507A (en)	1981-04-10	1982-03-30	Thin film thermistor
EP82301808A EP0063445B1 (en)	1981-04-10	1982-04-06	A thin film thermistor
DE8282301808T DE3268363D1 (en)	1981-04-10	1982-04-06	A thin film thermistor

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP20273181A JPS58103102A (ja)	1981-12-15	1981-12-15	薄膜サ−ミスタ

Publications (2)

Publication Number	Publication Date
JPS58103102A JPS58103102A (ja)	1983-06-20
JPS622685B2 true JPS622685B2 (es)	1987-01-21

Family

ID=16462222

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP20273181A Granted JPS58103102A (ja)	1981-04-10	1981-12-15	薄膜サ−ミスタ

Country Status (1)

Country	Link
JP (1)	JPS58103102A (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62287601A (ja) *	1986-06-06	1987-12-14	松下電器産業株式会社	薄膜サ−ミスタ

1981
- 1981-12-15 JP JP20273181A patent/JPS58103102A/ja active Granted

Also Published As

Publication number	Publication date
JPS58103102A (ja)	1983-06-20

Publication	Publication Date	Title
JP5719303B2 (ja)	2015-05-13	センサ素子及びセンサ素子の製造方法
US4001586A (en)	1977-01-04	Thick film sensor and infrared detector
US4424507A (en)	1984-01-03	Thin film thermistor
JPH02213733A (ja)	1990-08-24	電熱感知器
JPH0810645B2 (ja)	1996-01-31	薄膜サーミスタ
JPS622685B2 (es)	1987-01-21
US5681111A (en)	1997-10-28	High-temperature thermistor device and method
JPH0342485B2 (es)	1991-06-27
JPS6328325B2 (es)	1988-06-08
JPS5946401B2 (ja)	1984-11-12	サ−ミスタ
JPS5892201A (ja)	1983-06-01	薄膜白金温度センサ
JPS5932042B2 (ja)	1984-08-06	サ−ミスタ
JPS5831502A (ja)	1983-02-24	薄膜サ−ミスタ
JPS6219954Y2 (es)	1987-05-21
JPH0333215B2 (es)	1991-05-16
JP2548365B2 (ja)	1996-10-30	薄膜サーミスタ
JPS6337587A (ja)	1988-02-18	セラミツクヒ−タ
JPS6157682B2 (es)	1986-12-08
JPS61105803A (ja)	1986-05-23	サ−ミスタ素子とその製造方法
JPS60179619A (ja)	1985-09-13	薄膜サ−ミスタ
JPS6150361B2 (es)	1986-11-04
JP2858352B2 (ja)	1999-02-17	薄膜サーミスタ
JPS5811082B2 (ja)	1983-03-01	温度湿度検出素子
JPS6129651B2 (es)	1986-07-08
JPS6057904A (ja)	1985-04-03	薄膜サ−ミスタ