JPS6226779A - High voltage introduction terminal - Google Patents
High voltage introduction terminalInfo
- Publication number
- JPS6226779A JPS6226779A JP60166070A JP16607085A JPS6226779A JP S6226779 A JPS6226779 A JP S6226779A JP 60166070 A JP60166070 A JP 60166070A JP 16607085 A JP16607085 A JP 16607085A JP S6226779 A JPS6226779 A JP S6226779A
- Authority
- JP
- Japan
- Prior art keywords
- high voltage
- vacuum
- receptacle
- introduction terminal
- voltage introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Insulators (AREA)
- Installation Of Indoor Wiring (AREA)
- Connector Housings Or Holding Contact Members (AREA)
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はベークアウト（焼出し）の可能な、超高真空装
置用高電圧導入端子に関し、殊に超高真空を使用する荷
電ビーム装置等に用いて効果の著るしいものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a high voltage introduction terminal for ultra-high vacuum equipment that can be baked out, and particularly for charged beam equipment that uses ultra-high vacuum. It is highly effective when used.
（従来技術とその問題点）
従来の真空装置用高電圧導入端子はすべて真空容器に対
し直接着脱される構造のものであり、第２図に例示する
ように、絶縁石３０に固着された電極３１の後端をケー
ブル３２の先端の裸出高圧線に接続し、その接続部分を
絶縁性の樹脂３４で固めたものをプラグヘッド３３、ケ
ーブルカバー３３とともに０リング５２を介して一体と
しくこされる）、それを例えば３８を支点とするヒンジ
それに取付けられた固定台３７）に圧接し固定させる構
造となっている。(Prior art and its problems) All conventional high-voltage inlet terminals for vacuum equipment have a structure that is directly attached to and detached from the vacuum vessel, and as illustrated in FIG. The rear end of the cable 31 is connected to the exposed high-voltage wire at the tip of the cable 32, and the connected part is hardened with an insulating resin 34, and the plug head 33 and cable cover 33 are connected together via the O-ring 52. For example, the structure is such that it is pressed against and fixed to a fixing base 37 attached to a hinge having a fulcrum at 38.
従って、耐熱性の乏しいケーブル３２や絶縁樹脂３４が
真空容器３７と不可分に連結されているため、この従来
の高電圧導入端子を取付けた真空容器は百数十度Ｃ以上
の温度をかけてベークアウトすることが不可能であった
。しかるところ、半導体装置の高精細度化、高性能化に
伴って、これ塗で比較的低真空で使用されていた荷電ビ
ーム装置を超高真空（１０Ｐａ以上）で使用する技術が
不可欠のものとなり、その装置では２５０℃以上でベー
クアウトする必要があるため、従来の高電圧導入端子で
は対応できないことになった。Therefore, since the cable 32 and the insulating resin 34, which have poor heat resistance, are inseparably connected to the vacuum container 37, the vacuum container to which this conventional high voltage introduction terminal is attached is baked at a temperature of more than 100 degrees Celsius. It was impossible to get out. However, as the definition and performance of semiconductor devices become higher, the technology to use charged beam equipment, which was used in relatively low vacuum in this coating, in ultra-high vacuum (10 Pa or more) has become indispensable. However, since the device requires baking out at a temperature of 250° C. or higher, conventional high-voltage lead-in terminals could not be used.
この対応東として採用されたのが高電圧導入端子そのも
のに耐熱性を持たせることである。しかし、端子には電
源から高絶縁性の電線を延長して導入する必要があり、
これに耐熱性を持たせるためには、例えば電線を裸巌に
してセラミックの碍管等を使って引き廻すことになる。The solution to this problem was to make the high voltage lead-in terminal itself heat resistant. However, it is necessary to extend a highly insulated wire from the power supply to the terminal.
In order to make it heat resistant, for example, the electric wires are made bare and routed using ceramic insulators or the like.
これは徒らに装置周辺を煩雑なものにし、かつ高価につ
いている。そのためこの問題の解決が急務となって来た
。This unnecessarily makes the surroundings of the device complicated and expensive. Therefore, it has become urgent to solve this problem.
（発明の目的）
本発明は、ベークアウトが可能な超高真空用高電圧導入
端子の提供を目的とする。(Object of the Invention) The object of the present invention is to provide a high voltage introduction terminal for ultra-high vacuum that can be baked out.
（発明の構成）
本発明は、高電圧導入端子を耐熱性レセプタクルとプラ
グとの着脱可能な二体構造で構成し、該レセプタクルを
真空装置の真空容器に気密に固定するとともに、該レセ
プタクルとプラグの接続部には真空シール材を使用して
密閉された気密空間を設けて、この気密空間を真空排気
しかつＳＦ６等の絶縁ガスを充填しうる構造にすること
によって、前記目的を達成したものである。(Structure of the Invention) The present invention comprises a high voltage introduction terminal with a removable two-piece structure consisting of a heat-resistant receptacle and a plug, the receptacle is airtightly fixed to a vacuum container of a vacuum device, and the receptacle and the plug are The above objective is achieved by providing a hermetically sealed space at the connection part using a vacuum sealing material, and creating a structure in which this airtight space can be evacuated and filled with an insulating gas such as SF6. It is.
（実施例）
以下、本発明を実施例により、図に基いて説明する。第
１図は本発明の実施例の断面図を示し、耐熱性レセプタ
クル１０は、セラミックス（Ａｌ２０３）製の絶縁石よ
りなるレセプタクル本体１２と、その外周１４に対し気
密に銀ロー付けされた超高真空用のステンレス製フラン
ジ１６と、レセプタクル本体１２の内部の貫通孔１８の
内周２０に対しコバール２２牽介して気密に銀ロー付け
された銅製の高圧導入電極２４とよりなっている。高圧
導入電極２４の他端（大気側）は接続ビン２６となって
いる。７ランジ１６は銅ガスケット１７を用いて真空容
器３７に対しボルト１５で気密に固定される。(Example) Hereinafter, the present invention will be explained with reference to the drawings and examples. FIG. 1 shows a cross-sectional view of an embodiment of the present invention, and the heat-resistant receptacle 10 includes a receptacle body 12 made of an insulating stone made of ceramics (Al203), and an ultra-high-temperature receptacle body 12 made of an insulating stone made of ceramics (Al203), and an ultra-high It consists of a stainless steel flange 16 for vacuum use and a high voltage introduction electrode 24 made of copper which is airtightly soldered with silver to the inner periphery 20 of the through hole 18 inside the receptacle body 12 with a Kovar 22 interposed therebetween. The other end (atmospheric side) of the high voltage introduction electrode 24 is a connection bottle 26 . The 7 flange 16 is hermetically fixed to the vacuum vessel 37 with bolts 15 using a copper gasket 17.
従ってこのレセプタクル１０は、銅、ステンレス、銀ロ
ー、セラミックスよりなり、少くとも４５０℃以上の耐
熱性をもち、これを取付けたま−で真空容器３７をベー
クアウトすることができる。Therefore, this receptacle 10 is made of copper, stainless steel, silver solder, or ceramics, has a heat resistance of at least 450 DEG C., and can bake out the vacuum container 37 while it is attached.
他方、このレセプタクル１０に接続されるブラいるビン
受け４４を絶縁石４２内に高絶縁性合波樹脂４５で固め
、それを０１Ｊ ７グ５２を介して金属製プラグヘッド
４６．ケーブルカバー４６″とともに一体に結合したも
ので構成されている。そしてプラグヘッド４６には０リ
ング５１がそのリング状間隙内に収容されている。On the other hand, a bottle receptacle 44 connected to this receptacle 10 is hardened with a highly insulating composite resin 45 in an insulating stone 42, and then connected to a metal plug head 46 through a 01J7 plug 52. The plug head 46 has an O-ring 51 accommodated in its ring-shaped gap.
第１図は、前記レセプタクルｌＯとこのプラグ４０とが
ボルト４８で締付けられて接続状態にある図であり、前
者の接続ピン２６は後者のピン受け４４に弾力的に挿入
され両者は電気的に一体化されているが、このときその
接続部分には０１Ｊング５１，５２でシールされた気密
空間５ｏが設けられる。この気密空間５０はプラグ痴轟
→４６に固
苦役されたパイプ５５を経由して図示しない二つのパル
プに接続されており、パルプの一方はＸ空ポンプに通じ
、他方は絶縁ガスボンベに通じている。FIG. 1 shows the receptacle lO and this plug 40 in a connected state, tightened with bolts 48, the former's connecting pin 26 being elastically inserted into the latter's pin receiver 44, and both electrically connected. Although they are integrated, an airtight space 5o sealed with 01J rings 51 and 52 is provided at the connecting portion. This airtight space 50 is connected to two pulps (not shown) via a pipe 55 connected to a plug 46, one of which is connected to the X empty pump, and the other is connected to an insulating gas cylinder. .
さて、上記した高電圧導入端子は次のように使用される
。先づ真空容器３７にレセプタクル１０だけを固定した
状態で所定温度、所定時間のベークアウトが行なわれ、
その後自然放冷される。温度が７０℃以下に低下すると
レセプタクル１０にプラグ４０が挿入され接続して固定
される。次いで、気密空間５０内の空気がパルプの一つ
を通して図示しない真空ポンプで所定圧力にまで排気さ
れ、そのパルプは閉じられ、その後もう一つのパルプを
通してＣＯ２，８Ｆ６などの絶縁ガスが導入され、この
パルプもまた閉じられる。高電圧の通電はこのあとはじ
めて行なわれ、所定の超高真空処理作業が開始される。Now, the above-mentioned high voltage introduction terminal is used as follows. First, with only the receptacle 10 fixed in the vacuum container 37, a bakeout is performed at a predetermined temperature and for a predetermined time.
It is then allowed to cool naturally. When the temperature drops to 70° C. or lower, the plug 40 is inserted into the receptacle 10, connected and fixed. Next, the air in the airtight space 50 is evacuated to a predetermined pressure by a vacuum pump (not shown) through one of the pulps, that pulp is closed, and then an insulating gas such as CO2, 8F6, etc. is introduced through the other pulp, and this The pulp is also closed. High voltage is then applied for the first time, and a predetermined ultra-high vacuum processing operation begins.
絶縁ガスは装置の小型化に不可欠である。絶縁ガスを使
用しないときは、所定の絶縁耐圧を得るに必要な、絶縁
石１２の縁面距離は極めて長大モおるため、本発明の二
体構造の高電圧導入端子は余りに大型となる。Insulating gas is essential for downsizing equipment. When no insulating gas is used, the edge distance of the insulating stone 12 necessary to obtain a predetermined dielectric strength becomes extremely long, so that the two-piece structure high voltage introduction terminal of the present invention becomes too large.
従来の高電圧導入端子と同程度の大きさの、上記実九例
の高電圧導入端子で、絶縁ガスとしてＳ Ｆ６を用いる
場合、絶縁ガスの光填圧力を３気圧にすることによって
１００ ＫＶの耐電圧を得ることができた。尤も、使用
する電圧がさ程高くないときには、気密空間５０内は真
空排気するだけ、もしくは大気圧の乾燥空気の封入、な
どでも作業は充分に行ないうる。刺入するガスの也類比
力はその時々の条件によって自由に選定できるものであ
る。When using SF6 as the insulating gas with the high voltage inlet terminal of the above nine examples, which is about the same size as the conventional high voltage inlet terminal, 100 KV can be generated by setting the light filling pressure of the insulating gas to 3 atm. We were able to obtain withstand voltage. Of course, when the voltage used is not very high, the work can be carried out by simply evacuating the airtight space 50 or filling it with dry air at atmospheric pressure. The specific force of the gas to be inserted can be freely selected depending on the conditions at the time.
二体構造にした利益は、プラグ４０１４１にも生ずる。The benefits of the two-piece construction also accrue to plug 40141.
プラグ４０を真空内に入れる必要がなくなったため、そ
の構成材料の選択には温度や真壁への配慮が不要となり
選択の自由度が大いに増したことである。絶縁性の良い
、かつシール材との密着性の良い、そして成型性の良い
樹脂材料を自由に選ぶことができる。Since the plug 40 does not need to be placed in a vacuum, there is no need to consider temperature or wall thickness when selecting its constituent materials, and the degree of freedom in selection is greatly increased. You can freely choose a resin material that has good insulation, good adhesion to the sealing material, and good moldability.
なお、実ゐ例には電極か単一の場合をか＼げたが、電極
が複数ある高電圧導入端子にも本発明を適用できること
は明らかである。電気的な接続が複数ケ所になるため、
レセプタクルとプラグの挿 ・入接続には位置合せ用の
ガイドを設けることが必要となる。Incidentally, although the case with a single electrode has been shown in the actual example, it is clear that the present invention can also be applied to a high voltage introduction terminal having a plurality of electrodes. Because there are multiple electrical connections,
It is necessary to provide a guide for alignment when inserting and connecting the receptacle and plug.
（発明の効果）
本発明は、ベークアウトの可能な超高真空用高電圧導入
端子を提供する効果がある。(Effects of the Invention) The present invention has the effect of providing a high voltage introduction terminal for ultra-high vacuum that can be baked out.
第１図は、本発明の高電圧導入端子の実施例断面図。 第２図は、従来の同様の図。 １０・−・耐熱性レセプタクル。４ｏ・・・プラグ。 ３７・・・真空容器。 ５１・−・真空シール材。 ５０・・・気密空間。 FIG. 1 is a sectional view of an embodiment of the high voltage introduction terminal of the present invention. FIG. 2 is a similar conventional diagram. 10.--Heat-resistant receptacle. 4o...Plug. 37...Vacuum container. 51.--Vacuum sealing material. 50...Airtight space.
Claims (1)
子において、該高電圧導入端子を耐熱性レセプタクルと
プラグとの着脱可能な二体構造で構成し、該レセプタク
ルを該真空装置の真空容器に気密に固定するとともに、
該レセプタクルとプラグの接続部には真空シール材を使
用する気密空間を設けて、この気密空間を真空排気しか
つＳＦ＿６等の絶縁ガスを充填しうる構造としたことを
特徴とする高電圧導入端子。In a high voltage introduction terminal used in a vacuum device that requires bakeout, the high voltage introduction terminal is composed of a removable two-piece structure consisting of a heat-resistant receptacle and a plug, and the receptacle is airtightly attached to the vacuum container of the vacuum device. In addition to fixing it to
A high voltage introduction terminal characterized in that an airtight space using a vacuum sealing material is provided at the connection between the receptacle and the plug, and the airtight space is evacuated and filled with an insulating gas such as SF_6. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166070A JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166070A JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226779A true JPS6226779A (en) | 1987-02-04 |
| JPH0256784B2 JPH0256784B2 (en) | 1990-12-03 |
Family
ID=15824419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60166070A Granted JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226779A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6413679U (en) * | 1987-07-17 | 1989-01-24 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04212678A (en) * | 1990-12-06 | 1992-08-04 | Nissan Shatai Co Ltd | Reinforced structure for floor panel |
-
1985
- 1985-07-27 JP JP60166070A patent/JPS6226779A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6413679U (en) * | 1987-07-17 | 1989-01-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0256784B2 (en) | 1990-12-03 |
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