JPS62265502A - Air bearing for measuring machine - Google Patents

Air bearing for measuring machine

Info

Publication number
JPS62265502A
JPS62265502A JP10924386A JP10924386A JPS62265502A JP S62265502 A JPS62265502 A JP S62265502A JP 10924386 A JP10924386 A JP 10924386A JP 10924386 A JP10924386 A JP 10924386A JP S62265502 A JPS62265502 A JP S62265502A
Authority
JP
Japan
Prior art keywords
spindle
measuring machine
air bearing
members
axial direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10924386A
Other languages
Japanese (ja)
Other versions
JPH0577001B2 (en
Inventor
Ichiro Kumagai
熊谷 一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP10924386A priority Critical patent/JPS62265502A/en
Publication of JPS62265502A publication Critical patent/JPS62265502A/en
Publication of JPH0577001B2 publication Critical patent/JPH0577001B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To adjust the gap to a spindle by abutting the tapered parts of the 1st and the 2nd members each other, and operating a displacement adjusting means and displacing the 2nd member axially and relatively. CONSTITUTION:The 2nd member 31 is provided with the tapered part 38 corresponding to the tapered part 17 of the 1st member 11 and the displacement adjusting means 50 is operated to change the axial position of the 2nd member 31 to the 1st member 11, thus adjusting the size (x) of a space 20 finely. Consequently, the gap corresponding to the outward size of the inserting spindle is obtained and the smooth sliding and high-accuracy supporting of the spindle are attained. That results in that component members such as the 1st member 11 need not be worked with extremely high accuracy, so the assembly and adjustment are facilitated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、一対の平板状第1部材と一対の平板状第2部
材とを対向配設させて測定機のスピンドルの外形に対応
させた角柱状空間を形成し、第1部材および第2部材か
ら空気を供給しスピンドルを摺動自在に案内できるよう
構成した測定機の空気軸受の改良に関し、特に、そのス
ピンドルとの隙間を調整できるようしたことを特徴とる
すものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention is characterized in that a pair of flat first members and a pair of flat second members are disposed facing each other to correspond to the outer shape of a spindle of a measuring machine. Regarding the improvement of an air bearing for a measuring instrument configured to form a prismatic space and to be able to slidably guide a spindle by supplying air from a first member and a second member. It is characterized by what it has done.

〔背景技術とその問題点〕[Background technology and its problems]

検出子等を軸方向に摺動自在に支持する多次元測定機や
デジタルコントレーサ等測定機が知られている。その検
出子等を軸方向に摺動自在に支持する一般的fl造は、
測定機本体に取り付けた角柱状空間を形成する軸受ボッ
クスに検出子等が設けられた角柱状スピンドルを嵌挿し
かつ軸受ボックスの内面壁から嵌挿したスピンドルの外
面壁へ圧搾空気を噴出させるよう構成したいわゆる空気
軸受とされてた。この空気軸受はスピンドルを手動また
は自動で軸方向に微力で変位させることがてきかつ軸方
向と直交する方向の隙間を微小とすることができるから
結果として測定精度を高く保障できるという特徴を有し
ていた。
BACKGROUND ART Measuring machines such as multidimensional measuring machines and digital contracers that support a detector etc. so as to be slidable in the axial direction are known. The general FL structure that supports the detector etc. so that it can slide freely in the axial direction is
A prismatic spindle equipped with a detector etc. is fitted into a bearing box that forms a prismatic space attached to the measuring instrument body, and compressed air is blown out from the inner wall of the bearing box to the outer wall of the fitted spindle. It was called a so-called air bearing. This air bearing has the feature that the spindle can be manually or automatically displaced in the axial direction with a small amount of force, and the gap in the direction perpendicular to the axial direction can be made very small, resulting in a high level of measurement accuracy. was.

しかしながら、従来の空気軸受は、第5図に見られるよ
うに一対の平板状第1部材11.21と一対の平板状第
2部材31.31とを対向配設させてボルト41.41
,41.41で固定し、寸法がxxyの角柱状空間20
を成立させることによって軸受ボックス10を形成し、
その角柱状空間20に軸方向に伸びる角柱状のスピンド
ル1を嵌挿させて構成されていたので、次のような問題
点を有していた。
However, in the conventional air bearing, as shown in FIG.
, 41. A prismatic space 20 fixed at 41 and having dimensions xxy
The bearing box 10 is formed by establishing
Since the prismatic spindle 1 extending in the axial direction was fitted into the prismatic space 20, it had the following problems.

すなわち、嵌挿されるスピンドル1の外形状に対応させ
て各対向面間に一定の隙間を確保しなければならないの
で第1部材11,21、第2部材31.31の形状寸法
(平滑度、垂直度、平行度等)を極めて精密に仕上げな
ければならず加工困難、経済的負担が大きいという欠点
があワた。また、そのように精密仕上げしてもその組立
、調整に多くの労力、時間を必要とするので作業能率が
悪いという問題があった。さらに、一旦組立てしまうと
第5図で示されるように空間断面を規定する寸法x、y
が固定化されてしまうので嵌挿されるスピンドル1の外
形寸法が変わると所定の前記隙間を確保することができ
ず結果として測定精度を劣悪化させるという大きな問題
をも有していた。
In other words, it is necessary to ensure a certain gap between each opposing surface in accordance with the outer shape of the spindle 1 to be inserted, so the dimensions (smoothness, vertical The drawback is that it requires extremely precise finishing (degrees, parallelism, etc.), making it difficult to process and imposing a heavy economic burden. Furthermore, even with such precision finishing, a lot of labor and time are required for assembly and adjustment, resulting in poor work efficiency. Furthermore, once assembled, the dimensions x, y defining the spatial cross section as shown in FIG.
is fixed, so that if the outer dimensions of the spindle 1 to be inserted are changed, a predetermined gap cannot be secured, resulting in a serious problem of deterioration of measurement accuracy.

さらにまた、スピンドル1の外形寸法のみなす、供給空
気圧力との関係すなわち摺動性の観点からも上記寸法を
調整したい場合が生じるが、これを実行できないので、
適応性が狭小化されるという問題もあった。
Furthermore, there may be cases where it is desired to adjust the above-mentioned dimensions from the viewpoint of the relationship between the outer dimensions of the spindle 1 and the supply air pressure, that is, the sliding properties, but this cannot be done.
There was also the problem of narrowing adaptability.

〔発明の目的〕[Purpose of the invention]

本発明は、上記従来問題点を除去すべく鑑みなされたも
ので、部品加工、組立、調整容易な円滑摺動かつ高精度
を保障できる優れた測定機の空気軸受を提供することを
目的とする。
The present invention was made in view of the above-mentioned conventional problems, and an object thereof is to provide an air bearing for an excellent measuring machine that can ensure smooth sliding and high accuracy with easy parts processing, assembly, and adjustment. .

〔問題点を解決するための手段および作用〕本発明は、
一対の千板状第1部材と一対の平板状第2部材とを対向
配設させて測定機のスピンドルの外径に対応させた角柱
状空間を形成し、第1部材および第2部材から空気を供
給してスピンドルを摺動自在に案内できるよう構成した
測定機の空気軸受において、少なくとも一方の前記第1
部材の幅方向両側端内面に軸方向に傾斜するテーパー部
を設けるとともに少な(とも一方の前記第2部材の側縁
端に該テーパー部と相応するテーパー部を設け、該第1
部材と第2部材とを両テーパー部が当接しかつ軸方向に
変位可能に支持し、第1部材と第2部材とを軸方向に強
制的に相対変位させる変位調整手段を設け、該変位調整
手段を作動させて対向する両筒1部材間の寸法を調整で
きるよう構成し前記目的を達成するのである。
[Means and effects for solving the problems] The present invention has the following features:
A pair of plate-shaped first members and a pair of flat plate-shaped second members are arranged opposite to each other to form a prismatic space corresponding to the outer diameter of the spindle of the measuring machine, and air is allowed to flow from the first member and the second member. In the air bearing of the measuring machine configured to be able to slidably guide the spindle by supplying at least one of the first
Tapered portions inclined in the axial direction are provided on the inner surfaces of both ends in the width direction of the member, and tapered portions corresponding to the tapered portions are provided on the side edges of one of the second members, and the first
A member and a second member are supported by both tapered portions so as to be displaceable in the axial direction, and a displacement adjustment means for forcibly displacing the first member and the second member relative to each other in the axial direction is provided, and the displacement adjustment means is provided. The above object is achieved by activating the means to adjust the dimensions between the two opposing cylinder members.

本発明は、このように構成されているから、第1部材の
テーパー部と第2部材のテーパー部とを当接させて第1
部材と第2部材とをボルトで仮締めしておいて、変位調
整手段を操作して第1部材に対し第2部材を軸方向に相
対変位させると角柱状空間の第2部材の幅方向寸法すな
わちX寸法を微小づつ調整することができる。そして、
ボルトを増締めすれば所定寸法の軸受ボックスが形成さ
れ、これに当該スピンドルを嵌挿し空気軸受が確立され
る。したがって、第1部材および第2部材の各内面より
スピンドルの外面に圧搾空気を噴出させると低摩擦抵抗
でスピンドルを摺動させることができる。
Since the present invention is configured in this way, the tapered portion of the first member and the tapered portion of the second member are brought into contact with each other, and the first
When the member and the second member are temporarily tightened with bolts and the displacement adjustment means is operated to displace the second member relative to the first member in the axial direction, the width direction dimension of the second member in the prismatic space is changed. That is, the X dimension can be adjusted minute by minute. and,
By retightening the bolts, a bearing box of predetermined dimensions is formed, and the spindle is inserted into this box to establish an air bearing. Therefore, when compressed air is blown onto the outer surface of the spindle from the inner surfaces of the first member and the second member, the spindle can be slid with low frictional resistance.

〔実施例〕〔Example〕

本発明に係る測定機の空気軸受の一実施例を図面を参照
して詳細に説明する。この実施例における測定機は三次
元測定機とされている。なお、前出第5図に示した従来
の空気軸受と同一または同−的部分については同一の符
号を付するものとする。
An embodiment of the air bearing of the measuring instrument according to the present invention will be described in detail with reference to the drawings. The measuring machine in this embodiment is a three-dimensional measuring machine. Incidentally, the same reference numerals are given to the same or similar parts as those of the conventional air bearing shown in FIG. 5 mentioned above.

まず、空気軸受を導入する測定機たる三次元測定機の概
略構成を第1図を参照して確認する。
First, the schematic configuration of a three-dimensional measuring machine, which is a measuring machine incorporating an air bearing, will be confirmed with reference to FIG.

第1図において、三次元測定機9は、基台3の両側に基
端部を固定して立設された支柱4.4、この支柱4.4
間に渡架された横桁部材5、この横桁部材5に沿って摺
動可能なXスライダ6、このXスライダ6に一体的に支
持されたZZ内手段7、先端に検出子たるビデオカメラ
2が設けられたスピンドル1および測定対象物(図示省
略)を取り付けるY軸方向に移動可能な載物台8から構
成されている。ここに、゛空気軸受100はZIC内手
段7の構成要素の一部として用いられ角柱状のスピンド
ル1すなわちその先端の検出子たるビデオカメラ2をZ
軸方向に摺動案内する役目を果たすものである。
In FIG. 1, the three-dimensional measuring machine 9 includes a column 4.4 which is erected on both sides of the base 3 with its base end fixed, and this column 4.4.
A cross beam member 5 spanned between, an X slider 6 that can slide along the cross beam member 5, a ZZ internal means 7 integrally supported by the X slider 6, and a video camera serving as a detector at the tip. 2 and a stage 8 movable in the Y-axis direction on which an object to be measured (not shown) is attached. Here, the air bearing 100 is used as a component of the ZIC internal means 7, and is used to move the prismatic spindle 1, that is, the video camera 2 which is the detector at its tip, to the ZIC.
It serves as sliding guide in the axial direction.

さて、空気軸受100は、第2図ないし第4図に示され
た軸受ボックス10に図示省略した角柱状のスピンドル
lを嵌挿し、かつ第4図で見るような空気噴出口36,
36.・・・から圧搾空気を噴流させるようして構成さ
れている。
Now, the air bearing 100 is constructed by fitting a prismatic spindle l (not shown) into the bearing box 10 shown in FIGS. 2 to 4, and an air jet nozzle 36 as shown in FIG.
36. It is constructed so that compressed air is jetted from...

軸受ボックス10は、支持手段40を介し角柱状の空間
20を形成する第1部材11.21と第2部材31.3
1とから形成されている。第1部材11.21はそれぞ
れ平板材からなり、第1部材11の内面13側の側端内
面14.14には第2図、第3図に見られように図で上
方側から下方側に向かったテーバ部17.17が設けら
れ、また、外面12から内面13に貫通する穴15およ
び長穴段部16を設は形成されいる。第1部材21は第
1部材11の穴15と対応させた位置で内面23から外
面22にわたるネジ穴25が設けられている。さらに第
4図に示すように空気流路37に連通された空気噴出口
36.36.・・・がその内面33側に開口されて設け
られている。
The bearing box 10 includes a first member 11.21 and a second member 31.3 that form a prismatic space 20 via a support means 40.
It is formed from 1. Each of the first members 11.21 is made of a flat plate material, and the side end inner surface 14.14 on the inner surface 13 side of the first member 11 is provided with A tapered section 17.17 is provided, and a hole 15 and an elongated hole step 16 are formed extending from the outer surface 12 to the inner surface 13. The first member 21 is provided with a screw hole 25 extending from the inner surface 23 to the outer surface 22 at a position corresponding to the hole 15 of the first member 11 . Furthermore, as shown in FIG. ... is provided with an opening on its inner surface 33 side.

なお、第2部材31.31では、その空気流路および空
気噴出口を図示省略した。一方、第2部材31(31)
は、外面32と内面33にわたる側縁端面34に前記テ
ーパー部17と相応するテーバ一部38が設けられかつ
第1部材11.21の穴15、ネジ穴25に対応する位
置に貫通穴35が形成されている。 なお、上記各テー
パー部17.38は、軸方向(図で上下方向)に170
mmでその直交方向に1mm偏るテーパーとされている
。また、貫通穴35はバカ穴とされている。
Note that in the second member 31.31, the air flow path and air outlet are not shown. On the other hand, the second member 31 (31)
A tapered portion 38 corresponding to the tapered portion 17 is provided on a side edge end surface 34 extending between an outer surface 32 and an inner surface 33, and a through hole 35 is provided at a position corresponding to the hole 15 and the screw hole 25 of the first member 11.21. It is formed. Note that each of the tapered portions 17.38 has a diameter of 170 mm in the axial direction (vertical direction in the figure).
mm, and the taper is deviated by 1 mm in the orthogonal direction. Further, the through hole 35 is a blank hole.

これはそのテーパー部17.38をもって第2部材31
(31)の幅方向と等しい方向の寸法Xを調整しようと
するのに対して第1部材11.21の幅方向と等しい方
向の寸法yを調整できるようするためのである。ここに
、第1及び第2部材11.21,31.31の各内面1
3,23,33゜33で囲まれるところの角柱状空間2
0が形成される。
This connects the second member 31 with its tapered portion 17.38.
This is to make it possible to adjust the dimension y of the first member 11.21 in a direction equal to the width direction while adjusting the dimension X in the direction equal to the width direction of (31). Here, each inner surface 1 of the first and second members 11.21, 31.31
3, 23, 33゜Prismatic space 2 surrounded by 33
0 is formed.

また、支持手段40は、第1部材11の穴15、第2部
材31の貫通穴35、第1部材21のネジ穴25に嵌通
されるボルト41から形成されている。
Further, the support means 40 is formed of a bolt 41 that is fitted into the hole 15 of the first member 11 , the through hole 35 of the second member 31 , and the screw hole 25 of the first member 21 .

変位調整手段50は、第1部材11の上端面18に基端
部52がビス56で固定された支持プレート51(51
)と、この支持プレート51 (51)の先端部53に
設けられたネジ穴54に前記軸方向に進退可能かつその
先端が第2部材31(31)の上端面39(39)に当
接可能な位1で螺合された調整ネジ55とから構成され
ている。
The displacement adjusting means 50 includes a support plate 51 (51
), the support plate 51 (51) can move forward and backward into the screw hole 54 provided in the tip 53 of the support plate 51 (51) in the axial direction, and its tip can come into contact with the upper end surface 39 (39) of the second member 31 (31). The adjustment screw 55 is screwed together at the position 1.

したがって、調整ネジ55(55)を回動進行させると
、第1部材11に対し第2部材31 (31)を軸方向
に変位させることが可能である。すなわち、寸法Xを微
調整させることができる。
Therefore, when the adjustment screw 55 (55) is rotated, it is possible to displace the second member 31 (31) with respect to the first member 11 in the axial direction. That is, the dimension X can be finely adjusted.

このように構成された実施例の空気軸受100はまず、
次のようして組立てられる。
The air bearing 100 of the embodiment configured as described above first has the following features:
It is assembled as follows.

第1部材11.21と第2部材31.31とを各内面1
3.23,33.33を内側に向けて角柱状空間20を
形成させるようして各対向配設し、第1部材11の長穴
段部16を介し支持手段4゜である各ボルト41,41
,41.41を第1部材11の穴15,15,15,1
5、第2部材31.31の貫通穴35,35,35.3
5を通し第1部材21のネジ穴25,25.25.25
に螺合して締付ける0次に、図示省略した寸法yと等し
い基準体を空間20に挿入して寸法yを成立させておき
、変位調整手段50の調整ネジ55を回動させて第2部
材31をボルト41の締付力による摩擦砥抗に抗し軸方
向に強制的に変位させて寸法Xを所定値に調整する。そ
の後各ポル)41゜41.41.41を増締めすること
によって、所定空間20をもつ軸受ボックス10が形成
される。
The first member 11.21 and the second member 31.31 are connected to each inner surface 1.
3.23, 33.33 facing inward to form a prismatic space 20, and each bolt 41, which is a support means 4°, is inserted through the elongated hole stepped portion 16 of the first member 11. 41
, 41.41 in the holes 15, 15, 15, 1 of the first member 11
5. Through holes 35, 35, 35.3 of second member 31.31
5 through the screw holes 25, 25.25.25 of the first member 21
Then, a reference body (not shown) equal to the dimension y is inserted into the space 20 to establish the dimension y, and the adjustment screw 55 of the displacement adjustment means 50 is rotated to tighten the second member. 31 is forcibly displaced in the axial direction against the frictional resistance caused by the tightening force of the bolt 41, and the dimension X is adjusted to a predetermined value. Thereafter, the bearing box 10 having the predetermined space 20 is formed by further tightening each pole 41°41.41.41.

次に、形成された軸受ボックス10に軸方向からスピン
ドルlを挿入し、第1部材11.21側から空気流路3
7.37を介し各空気噴出口36゜36.36・・・か
ら圧搾空気を供給(第2部材31゜31側からも同様に
供給される)すれば、スピンドル1を低抵抗で摺動案内
する空気軸受100の機能が発揮される。なお、スピン
ドル1は、図示しない手段によって軸方向に自然落下し
ないものとされている。
Next, the spindle l is inserted into the formed bearing box 10 from the axial direction, and the air flow path 3 is inserted from the first member 11.21 side.
If compressed air is supplied from each air outlet 36, 36, 36, etc. through the air outlet 7.37 (it is similarly supplied from the second member 31, 31 side), the spindle 1 can be slidably guided with low resistance. The functions of the air bearing 100 are exhibited. Note that the spindle 1 is prevented from falling naturally in the axial direction by means not shown.

この実施例によれば、第1部材11のテーパー部17と
対応するテーパー部38を第2部材31に設け、変位調
整手段50を操作することによって、第1部材11に対
する第2部材31の軸方向位置を変化させ空間20の寸
法Xを微小調整できるようしたから嵌挿されるスピンド
ル1の外形寸法に相応させた隙間を確立することができ
、スピンドルIの円滑摺動と、高精度支持をすることが
できる。このことは、また例えば第1部材11等々の構
成要素部材を権限的高精度加工を必要としないから経済
的効果はもとよりその組立、調整を飛躍的に簡素化でき
る。
According to this embodiment, the second member 31 is provided with a tapered portion 38 corresponding to the tapered portion 17 of the first member 11, and by operating the displacement adjusting means 50, the axis of the second member 31 with respect to the first member 11 is adjusted. Since the dimension X of the space 20 can be finely adjusted by changing the directional position, it is possible to establish a gap that corresponds to the external dimensions of the spindle 1 to be inserted, and the spindle I can be smoothly slid and supported with high precision. be able to. This also eliminates the need for high-precision machining of component members such as the first member 11, which not only provides economical benefits but also dramatically simplifies assembly and adjustment.

また、この空気軸受lOOは構造簡単であるから、いず
れの測定機に採用する場合にも統合化が容易であって、
また、既存の測定機にも取り付けることができる。スピ
ンドル1の寸法が変わっても全体を交換する必要がなく
適応性が拡大できる。
In addition, since this air bearing lOO has a simple structure, it can be easily integrated into any measuring instrument.
It can also be attached to existing measuring instruments. Even if the dimensions of the spindle 1 change, there is no need to replace the entire spindle 1, and adaptability can be expanded.

さらに、第2部材31の貫通穴35をバカ穴としている
ので寸法yの調整も可能であるから、この点も空間20
、隙間をより適正寸法とするのでスピンドル1の円滑摺
動と高精度摺動を保障することになる。
Furthermore, since the through hole 35 of the second member 31 is a blank hole, the dimension y can be adjusted.
Since the gap is set to a more appropriate size, smooth and highly accurate sliding of the spindle 1 is ensured.

このような効果を有する空気軸受100は、結果として
三次元測定機の第1図で示したXおよびY方向のガタを
皆無または測定精度に影響を与えない範囲に規制するこ
とができるから、測定精度を高くすることに重要な役割
をなすという効果をも有する。
As a result, the air bearing 100 having such an effect can suppress the play in the X and Y directions shown in FIG. It also has the effect of playing an important role in increasing accuracy.

なお、以上の実施例では、測定機を三次元測定機とした
が、二次元測定機やデジタルコントレーサ等その型種は
問わない、また、変位調整手段50は第2部材31の上
端面39に当接可能な調整ネジ55としたが、調整ネジ
55の先端側を回動可能としてその上端面39と一体的
に連結させてもよい。このようにすると軸方向の両方向
に変位調整をすることが容易となる。さらに、第2部材
31の幅方向についてのみ変位調整手段50で寸法調整
するよう構成したが、第1部材11 (21)の幅方向
についても同様な構造とすることによって寸法調整する
ことも可能である。
In the above embodiments, a three-dimensional measuring machine was used as the measuring machine; however, the type of measuring machine, such as a two-dimensional measuring machine or a digital contracer, does not matter. Although the adjustment screw 55 is configured to be able to come into contact with the adjustment screw 55, the tip side of the adjustment screw 55 may be made rotatable and connected integrally with the upper end surface 39 thereof. This makes it easy to adjust the displacement in both axial directions. Furthermore, although the configuration is such that the dimensions are adjusted by the displacement adjusting means 50 only in the width direction of the second member 31, it is also possible to adjust the dimensions in the width direction of the first member 11 (21) by using a similar structure. be.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る測定機の空気軸受を採用する三次
元測定機の全体構成図、第2図は本発明に係る測定機の
空気軸受の要部斜視図、第3図は同じく第2図のト(矢
視線に基づく側断面図、第4図は同じ<II/−IV矢
視線に基づく正断面図および第5図は従来の測定機の空
気軸受の要部を示す斜視図である。 l・・・スピンドル、7・・・ZX内手段、9・・・三
次元測定機、10・・・軸受ボックス、11・・・第1
部材、14・・・側端内面、17・・・テーパー部、2
o・・・角柱状空間、21・・・第1部材、31・・・
第2部材、34・・・側縁端面、35・・・貫通穴、3
8・・・テーパー部、40・・・支持手段、41・・・
ボルト、5o・・・変位調整手段、51・・・支持プレ
ート、55・・・調整ネジ、lOO・・・空気軸受。
Fig. 1 is an overall configuration diagram of a three-dimensional measuring machine that employs an air bearing of a measuring machine according to the present invention, Fig. 2 is a perspective view of a main part of an air bearing of a measuring machine according to the present invention, and Fig. Figure 2 is a side sectional view based on the arrow line, Figure 4 is a front sectional view based on the same <II/-IV arrow line, and Figure 5 is a perspective view showing the main parts of the air bearing of a conventional measuring machine. 1...Spindle, 7...ZX internal means, 9...3D measuring machine, 10...Bearing box, 11...First
Member, 14... Side end inner surface, 17... Taper part, 2
o...Prismatic space, 21...First member, 31...
Second member, 34...Side edge end surface, 35...Through hole, 3
8...Tapered portion, 40...Supporting means, 41...
Bolt, 5o...Displacement adjustment means, 51...Support plate, 55...Adjustment screw, lOO...Air bearing.

Claims (3)

【特許請求の範囲】[Claims] (1)一対の平板状第1部材と一対の平板状第2部材と
を対向配設させて測定機のスピンドルの外径に対応させ
た角柱状空間を形成し、第1部材および第2部材から空
気を供給してスピンドルを摺動自在に案内できるよう構
成した測定機の空気軸受において、少なくとも一方の前
記第1部材の幅方向両側端内面に軸方向に傾斜するテー
パー部を設けるとともに少なくとも一方の前記第2部材
の側縁端に該テーパー部と相応するテーパー部を設け、
該第1部材と第2部材とを両テーパー部が当接しかつ軸
方向に変位可能に支持し、第1部材と第2部材とを軸方
向に強制的に相対変位させる変位調整手段を設け、該変
位調整手段を作動させて対向する両第1部材間の寸法を
調整できるよう構成したことを特徴とする測定機の空気
軸受。
(1) A pair of flat plate-shaped first members and a pair of flat plate-shaped second members are arranged facing each other to form a prismatic space corresponding to the outer diameter of the spindle of the measuring machine, and the first member and the second member In an air bearing for a measuring machine configured to be able to slidably guide a spindle by supplying air from a a tapered portion corresponding to the tapered portion is provided at a side edge end of the second member;
The first member and the second member are supported by both tapered portions so as to be displaceable in the axial direction, and a displacement adjusting means is provided for forcibly displacing the first member and the second member relative to each other in the axial direction, An air bearing for a measuring instrument, characterized in that the displacement adjusting means is operated to adjust the dimension between the opposing first members.
(2)前記特許請求の範囲第1項において、前記第1部
材と第2部材とが、第2部材の幅方向に貫通するバカ穴
を通し両第1部材間を締付ける貫通ボルトによって支持
されている測定機の空気軸受。
(2) In claim 1, the first member and the second member are supported by a through bolt that passes through a hole passing through the second member in the width direction and tightens the two first members. Air bearing of measuring machine.
(3)前記特許請求の範囲第1項または第2項において
、前記変位調整手段が、前記第1部材に基端側が固定さ
れた支持プレートと、この支持プレートに前記軸方向に
進退可能かつ前記第2部材に当接可能に螺合された調整
ネジとから形成されている測定機の空気軸受。
(3) In claim 1 or 2, the displacement adjusting means includes a support plate whose proximal end side is fixed to the first member, and a support plate that is movable toward and retracted from the support plate in the axial direction; and an adjustment screw screwed into the second member so as to be able to come into contact with the second member.
JP10924386A 1986-05-12 1986-05-12 Air bearing for measuring machine Granted JPS62265502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10924386A JPS62265502A (en) 1986-05-12 1986-05-12 Air bearing for measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10924386A JPS62265502A (en) 1986-05-12 1986-05-12 Air bearing for measuring machine

Publications (2)

Publication Number Publication Date
JPS62265502A true JPS62265502A (en) 1987-11-18
JPH0577001B2 JPH0577001B2 (en) 1993-10-25

Family

ID=14505242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10924386A Granted JPS62265502A (en) 1986-05-12 1986-05-12 Air bearing for measuring machine

Country Status (1)

Country Link
JP (1) JPS62265502A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312510A (en) * 1989-05-30 1991-01-21 Warner & Swasey Co:The Way bearing device for horizontal-arm rectangular coordinate measuring machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224016A (en) * 1984-04-20 1985-11-08 Mitsutoyo Mfg Co Ltd Three dimensional measuring machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224016A (en) * 1984-04-20 1985-11-08 Mitsutoyo Mfg Co Ltd Three dimensional measuring machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312510A (en) * 1989-05-30 1991-01-21 Warner & Swasey Co:The Way bearing device for horizontal-arm rectangular coordinate measuring machine

Also Published As

Publication number Publication date
JPH0577001B2 (en) 1993-10-25

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