JPH0577001B2 - - Google Patents
Info
- Publication number
- JPH0577001B2 JPH0577001B2 JP61109243A JP10924386A JPH0577001B2 JP H0577001 B2 JPH0577001 B2 JP H0577001B2 JP 61109243 A JP61109243 A JP 61109243A JP 10924386 A JP10924386 A JP 10924386A JP H0577001 B2 JPH0577001 B2 JP H0577001B2
- Authority
- JP
- Japan
- Prior art keywords
- members
- axial direction
- spindle
- measuring machine
- air bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 230000000694 effects Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、一対の平板状第１部材と一対の平板
状第２部材とを対向配設させて測定機のスピンド
ルの外形に対応させた角柱状空間を形成し、第１
部材および第２部材から空気を供給しスピンドル
を摺動自在に案内できるよう構成した測定機の空
気軸受の改良に関し、特に、そのスピンドルとの
隙間を調整できるようしたことを特徴とるすもの
である。[Detailed Description of the Invention] [Industrial Application Field] The present invention is characterized in that a pair of flat first members and a pair of flat second members are disposed facing each other to correspond to the outer shape of a spindle of a measuring machine. Forming a prismatic space, the first
This invention relates to an improvement in an air bearing for a measuring machine configured to be able to slidably guide a spindle by supplying air from a member and a second member, and is particularly characterized in that the gap between the bearing and the spindle can be adjusted. .
検出子等を軸方向に摺動自在に支持する多次元
測定機やデジタルコントレーサ等測定機が知られ
ている。その検出子等を軸方向に摺動自在に支持
する一般的構造は、測定機本体に取り付けた角柱
状空間を形成する軸受ボツクスに検出子等が設け
られた角柱状スピンドルを嵌挿しかつ軸受ボツク
スの内面壁から嵌挿したスピンドルの外面壁へ圧
搾空気を噴出させるよう構成したいわゆる空気軸
受とされていた。この空気軸受はスピンドルを手
動または自動で軸方向に微力で変位させることが
できかつ軸方向と直交する方向の隙間を微小とす
ることができるから結果として測定精度を高く保
障できるという特徴を有していた。
BACKGROUND ART Measuring machines such as multidimensional measuring machines and digital contracers that support a detector etc. so as to be slidable in the axial direction are known. The general structure for supporting the detector etc. so that it can freely slide in the axial direction is to fit a prismatic spindle on which the detector etc. is installed into a bearing box which is attached to the measuring instrument body and forms a prismatic space. It was a so-called air bearing that was configured to blow compressed air from the inner wall of the spindle to the outer wall of the fitted spindle. This air bearing has the feature that the spindle can be manually or automatically displaced in the axial direction with very little force, and the gap in the direction perpendicular to the axial direction can be made very small, resulting in a high level of measurement accuracy. was.
しかしながら、従来の空気軸受は、第５図に見
られるように一対の平板状第１部材１１，２１と
一対の平板状第２部材３１，３１とを対向配設さ
せてボルト４１．４１，４１，４１で固定し、寸
法がｘ×ｙの角柱状空間２０を成立させることに
よつて軸受ボツクス１０を形成し、その角柱状空
間２０に軸方向に伸びる角柱状のスピンドル１を
嵌挿させて構成されていたので、次のような問題
点を有していた。 However, as shown in FIG. 5, in the conventional air bearing, a pair of flat plate-shaped first members 11, 21 and a pair of flat plate-shaped second members 31, 31 are disposed facing each other, and the bolts 41, 41, 41 are arranged oppositely. , 41 to form a prismatic space 20 having dimensions of However, it had the following problems.
すなわち、嵌挿されるスピンドル１の外形状に
対応させて各対向面間に一定の隙間を確保しなけ
ればならないので第１部材１１，２１、第２部材
３１，３１の形状寸法（平滑度、垂直度、平行度
等）を極めて精密に仕上げなければならず加工困
難、経済的負担が大きいという欠点があつた。ま
た、そのように精密仕上げしてもその組立、調整
に多くの労力、時間を必要とするので作業能率が
悪いという問題があつた。さらに、一旦組立てし
まうと第５図で示されるように空間断面を規定す
る寸法ｘ，ｙが固定化されてしまうので嵌挿され
るスピンドル１の外形寸法が変わると所定の前記
隙間を確保することができず結果として測定精度
を劣悪化させるという大きな問題をも有してい
た。さらにまた、スピンドル１の外形寸法のみな
ず、供給空気圧力との関係すなわち摺動性の観点
からも上記寸法を調整したい場合が生じるが、こ
れを実行できないので、適応性が狭小化されると
いう問題もあつた。 In other words, it is necessary to ensure a certain gap between each opposing surface in accordance with the outer shape of the spindle 1 to be inserted, so the dimensions (smoothness, vertical The disadvantage was that it required extremely precise finishing (degrees, parallelism, etc.), making it difficult to process and imposing a heavy economic burden. Furthermore, even with such precision finishing, a lot of labor and time are required for assembly and adjustment, resulting in a problem of poor work efficiency. Furthermore, once assembled, the dimensions x and y that define the spatial cross section are fixed as shown in FIG. As a result, there was a major problem in that the measurement accuracy deteriorated. Furthermore, there may be cases where it is desired to adjust the above dimensions not only from the external dimensions of the spindle 1 but also from the perspective of the relationship with the supply air pressure, that is, from the sliding property perspective, but since this cannot be done, the adaptability is limited. There were also problems.
本発明は、上記従来問題点を除去すべく鑑みな
されたもので、部品加工、組立、調整容易な円滑
摺動かつ高精度を保障できる優れた測定機の空気
軸受を提供することを目的とする。
The present invention was made in view of the above-mentioned conventional problems, and an object thereof is to provide an air bearing for an excellent measuring machine that can ensure smooth sliding and high accuracy with easy parts processing, assembly, and adjustment. .
本発明は、一対の平板状第１部材と一対の平板
状第２部材とを対向配設させて測定機のスピンド
ルの外径に対応させた角柱状空間を形成し、第１
部材および第２部材から空気を供給してスピンド
ルを摺動自在に案内できるよう構成した測定機の
空気軸受において、少なくとも一方の前記第１部
材の幅方向両側端内面に軸方向に傾斜するテーパ
ー部を設けるとともに、その各テーパー部と対向
する第２部材の側端縁に前記テーパー部と相応す
るテーパー部を設け、前記第１部材と第２部材と
を両テーパー部が当接した状態において軸方向に
変位可能かつ固定可能に支持する支持手段を設け
るとともに、第１部材と第２部材とを軸方向に強
制的に相対変位させる変位調整手段を設け、前記
支持手段を、前記各第２部材の幅方向に沿つて貫
通形成された貫通穴と、この貫通穴の穴径より十
分細い径でその貫通穴を挿通して対向する第１部
材間を締め付けるボルトとから構成するととも
に、前記変位調整手段を、前記第１部材に基端側
が固定された支持プレートと、この支持プレート
に前記軸方向に進退可能かつ前記第２部材に当接
可能に螺合された調整ネジとから構成し、前記目
的を達成するのである。
In the present invention, a pair of flat plate-shaped first members and a pair of flat plate-shaped second members are arranged facing each other to form a prismatic space corresponding to the outer diameter of a spindle of a measuring machine.
In an air bearing of a measuring machine configured to be able to slidably guide a spindle by supplying air from a member and a second member, at least one tapered portion inclined in the axial direction on the inner surface of both widthwise ends of the first member. and a tapered portion corresponding to the tapered portion is provided on the side edge of the second member facing each of the tapered portions, and when the first member and the second member are in contact with each other, the shaft A supporting means for displaceably and fixably supporting the first member and the second member is provided, and a displacement adjusting means for forcibly displacing the first member and the second member relative to each other in the axial direction is provided, and the supporting means and a bolt having a diameter sufficiently smaller than the diameter of the through hole to tighten between the opposing first members. The means includes a support plate whose proximal end side is fixed to the first member, and an adjustment screw screwed into the support plate such that it can move forward and backward in the axial direction and come into contact with the second member, It accomplishes its purpose.
本発明は、このように構成されているから、第
１部材のテーパー部と第２部材のテーパー部とを
当接させて第１部材と第２部材とをボルトで仮締
めしておく。この状態において、第２部材の貫通
穴とボルトとの〓間を利用して第２部材間の間隔
を調整した後、変位調整手段を操作して第１部材
に対し第２部材を軸方向に相対変位させると角柱
状空間の第２部材の幅方向寸法すなわちｘ寸法を
微小づつ調整することができる。そして、ボルト
を増締めすれば所定寸法の軸受ボツクスが形成さ
れ、これに当該スピンドルを嵌挿し空気軸受が確
立される。したがつて、第１部材および第２部材
の各内面よりスピンドルの外面に圧搾空気を噴出
させると低摩擦抵抗でスピンドルを摺動させるこ
とができる。 Since the present invention is configured in this manner, the tapered portion of the first member and the tapered portion of the second member are brought into contact with each other, and the first member and the second member are temporarily fastened with bolts. In this state, after adjusting the distance between the second members using the gap between the through hole of the second member and the bolt, the displacement adjustment means is operated to move the second member in the axial direction with respect to the first member. By relative displacement, the width direction dimension, that is, the x dimension of the second member of the prismatic space can be adjusted minute by minute. Then, by retightening the bolts, a bearing box of a predetermined size is formed, and the spindle is inserted into this to establish an air bearing. Therefore, when compressed air is blown onto the outer surface of the spindle from the inner surfaces of the first member and the second member, the spindle can be slid with low frictional resistance.
本発明に係る測定機の空気軸受の一実施例を図
面を参照して詳細に説明する。この実施例におけ
る測定機は三次元測定機とされている。なお、前
出第５図に示した従来の空気軸受と同一または同
一的部分については同一の符号を付するものとす
る。
An embodiment of the air bearing of the measuring instrument according to the present invention will be described in detail with reference to the drawings. The measuring machine in this embodiment is a three-dimensional measuring machine. Note that the same reference numerals are given to the same parts as those of the conventional air bearing shown in FIG. 5 mentioned above.
まず、空気軸受を導入する測定機たる三次元測
定機の概略構成を第１図を参照して確認する。 First, the schematic configuration of a three-dimensional measuring machine, which is a measuring machine incorporating an air bearing, will be confirmed with reference to FIG.
第１図において、三次元測定機９は、基台３の
両側に基端部を固定して立設された支柱４，４、
この支柱４，４間に渡架された横桁部材５、この
横桁部材５に沿つて摺動可能なＸスライダ６、こ
のＸスライダ６に一体的に支持されたＺ案内手段
７、先端に検出子たるビデオカメラ２が設けられ
たスピンドル１および測定対象物（図示省略）を
取り付けるＹ軸方向に移動可能な載物台８から構
成されている。ここに、空気軸受１００はＺ案内
手段７の構成要素の一部として用いられ角柱状の
スピンドル１すなわちその先端の検出子たるビデ
オカメラ２をＺ軸方向に摺動案内する役目を果た
すものである。 In FIG. 1, the three-dimensional measuring machine 9 includes columns 4, 4, which are erected with their base ends fixed on both sides of the base 3;
A cross beam member 5 spanned between the pillars 4, 4, an X slider 6 that can slide along the cross beam member 5, a Z guide means 7 integrally supported by the X slider 6, and a It is comprised of a spindle 1 provided with a video camera 2 serving as a detector, and a stage 8 movable in the Y-axis direction on which an object to be measured (not shown) is attached. Here, the air bearing 100 is used as a part of the component of the Z guide means 7, and plays the role of slidingly guiding the prismatic spindle 1, that is, the video camera 2, which is the detector at its tip, in the Z-axis direction. .
さて、空気軸受１００は、第２図ないし第４図
に示された軸受ボツクス１０に図示省略した角柱
状のスピンドル１を嵌挿し、かつ第４図で見るよ
うな空気噴出口３６，３６，…から圧搾空気を噴
流させるようにして構成されている。 Now, the air bearing 100 has a prismatic spindle 1 (not shown) fitted into the bearing box 10 shown in FIGS. 2 to 4, and air jet ports 36, 36, . . . as shown in FIG. It is configured to jet compressed air from.
軸受ボツクス１０は、支持手段４０を介して角
柱状の空間２０を形成する第１部材１１，２１と
第２部材３１，３１とから形成されている。第１
部材１１，２１はそれそれ平板材からなり、第１
部材１１の内面１３側の側端内面１４，１４には
第２図、第３図に見られように図で上方側から下
方側に向かつたテーパ部１７，１７が設けられ、
また、外面１２から内面１３に貫通する穴１５お
よび長穴段部１６を設け形成されている。第１部
材２１は第１部材１１の穴１５と対応させた位置
で内面２３から外面２２にわたるネジ穴２５が設
けられている。さらに第４図に示すように空気流
路３７に連通された空気噴出口３６，３６，…が
その内面３３側に開口されて設けられている。 The bearing box 10 is formed from first members 11, 21 and second members 31, 31 which form a prismatic space 20 via a support means 40. 1st
The members 11 and 21 are each made of a flat plate material, and the first
As seen in FIGS. 2 and 3, tapered portions 17, 17 directed from the upper side to the lower side in the drawings are provided on the side end inner surfaces 14, 14 on the inner surface 13 side of the member 11,
Further, a hole 15 and a long hole stepped portion 16 penetrating from the outer surface 12 to the inner surface 13 are formed. The first member 21 is provided with a screw hole 25 extending from the inner surface 23 to the outer surface 22 at a position corresponding to the hole 15 of the first member 11 . Furthermore, as shown in FIG. 4, air jet ports 36, 36, .
なお、第２部材３１，３１では、その空気流路
および空気噴出口を図示省略した。一方、第２部
材３１，３１は、外面３２と内面３３にわたる側
縁端面３４に前記テーパー部１７と相応するテー
パー部３８が設けられかつ第１部材１１，２１の
穴１５、ネジ穴２５に対応する位置に貫通穴３５
が形成されている。なお、上記各テーパー部１
７，３８は、軸方向（図で上下方向）に170mmで
その直交方向に１mm偏るテーパーとされている。
また、貫通穴３５はバカ穴とされている。これは
そのテーパー部１７，３８をもつて第２部材３
１，３１の幅方向と等しい方向の寸法ｘを調整し
ようとするのに対して第１部材１１，２１の幅方
向と等しい方向の寸法ｙを調整できるようするた
めのである。ここに、第１及び第２部材１１，２
１，３１，３１の各内面１３，２３，３３，３３
で囲まれるところの角柱状空間２０が形成され
る。 Note that in the second members 31, 31, the air flow paths and air jet ports are not shown. On the other hand, the second members 31, 31 are provided with a tapered part 38 corresponding to the tapered part 17 on the side edge end face 34 extending between the outer surface 32 and the inner surface 33, and corresponds to the hole 15 and screw hole 25 of the first member 11, 21. Through hole 35 at the position where
is formed. In addition, each of the above taper parts 1
7 and 38 are tapered 170 mm in the axial direction (vertical direction in the figure) and deviated by 1 mm in the orthogonal direction.
Further, the through hole 35 is a blank hole. This connects the second member 3 with its tapered portions 17, 38.
This is to enable adjustment of the dimension y of the first members 11 and 21 in the width direction, while adjusting the dimension x of the first members 1 and 31 in the width direction. Here, the first and second members 11, 2
Each inner surface 13, 23, 33, 33 of 1, 31, 31
A prismatic space 20 surrounded by .
また、支持手段４０は、第１部材１１の穴１
５、第２部材３１の貫通穴３５、第１部材２１の
ネジ穴２５に嵌通されるボルト４１から形成され
ている。 Further, the support means 40 includes the hole 1 of the first member 11.
5. It is formed of a bolt 41 that is fitted into the through hole 35 of the second member 31 and the screw hole 25 of the first member 21.
変位調整手段５０は、第１部材１１の上端面１
８に基端部５２がビス５６で固定された支持ブレ
ート５１，５１と、この支持プレート５１，５１
の先端部５３に設けられたネジ穴５４に前記軸方
向に進退可能なかつその先端が第２部材３１，３
１の上端面３９，３９に当接可能な位置で螺合さ
れた調整ネジ５５とから構成されている。したが
つて、調整ネジ５５，５５を回動進行させると、
第１部材１１に対し第２部材３１，３１を軸方向
に変位させることが可能である。すなわち、寸法
ｘを微調整させることができる。 The displacement adjusting means 50 includes an upper end surface 1 of the first member 11.
Support plates 51, 51 whose proximal ends 52 are fixed to 8 with screws 56, and these support plates 51, 51.
The tip can move forward and backward in the axial direction into the screw hole 54 provided in the tip 53 of the second member 31, 3.
and an adjustment screw 55 screwed into the upper end surfaces 39, 39 of 1 at a position where it can come into contact with them. Therefore, when the adjustment screws 55, 55 are rotated,
It is possible to displace the second members 31, 31 in the axial direction with respect to the first member 11. That is, the dimension x can be finely adjusted.
このように構成された実施例の空気軸受１００
はまず、次のようして組立てられる。 Air bearing 100 of the embodiment configured in this way
First, it is assembled as follows.
第１部材１１，２１と第２部材３１，３１とを
各内面１３，２３，３３，３３を内側に向けて角
柱状空間２０を形成させるようして各対向配設
し、第１部材１１の長穴段部１６を介し支持手段
４０である各ボルト４１．４１，４１，４１を第
１部材１１の穴１５，１５，１５，１５、第２部
材３１，３１の貫通穴３５，３５，３５，３５を
通し第１部材２１のネジ穴２５，２５，２５，２
５に螺合して締付ける。次に、図示省略した寸法
ｙと等しい基準体を空間２０に挿入して寸法ｙを
成立させておき、変位調整手段５０の調整ネジ５
５を回動させて第２部材３１をボルト４１の締付
力による摩擦抵抗に抗し軸方向に強制的に変位さ
せて寸法ｘを所定値に調整する。その後各ボルト
４１，４１，４１，４１を増締めすることによつ
て、所定空間２０をもつ軸受ボツクス１０が形成
される。 The first members 11 , 21 and the second members 31 , 31 are arranged facing each other with their inner surfaces 13 , 23 , 33 , 33 facing inward to form a prismatic space 20 . Each bolt 41, 41, 41, which is the support means 40, is inserted into the hole 15, 15, 15, 15 of the first member 11 and the through hole 35, 35, 35 of the second member 31, 31 through the elongated hole stepped portion 16. , 35 through the screw holes 25, 25, 25, 2 of the first member 21.
5 and tighten. Next, a reference body (not shown) equal to the dimension y is inserted into the space 20 to establish the dimension y, and the adjustment screw 5 of the displacement adjustment means 50 is
5 to forcibly displace the second member 31 in the axial direction against the frictional resistance caused by the tightening force of the bolt 41, thereby adjusting the dimension x to a predetermined value. Thereafter, by tightening each bolt 41, 41, 41, 41, a bearing box 10 having a predetermined space 20 is formed.
次に、形成された軸受ボツクス１０に軸方向か
らスピンドル１を挿入し、第１部材１１，２１側
から空気流路３７，３７を介し各空気噴出口３
６，３６，３６，…から圧搾空気を供給（第２部
材３１，３１側からも同様に供給される）すれ
ば、スピンドルＹを低抵抗で摺動案内する空気軸
受１００の機能が発揮される。なお、スピンドル
１は、図示しない手段によつて軸方向に自然落下
しないものとされている。 Next, the spindle 1 is inserted into the formed bearing box 10 from the axial direction, and each air outlet 3 is
If compressed air is supplied from 6, 36, 36, ... (it is similarly supplied from the second members 31, 31 side), the function of the air bearing 100 for slidingly guiding the spindle Y with low resistance is exhibited. . Note that the spindle 1 is prevented from falling naturally in the axial direction by means not shown.
この実施例によれば、第１部材１１のテーパー
部１７と対応するテーパー部３８を第２部材３１
に設け、変位調整手段５０を操作することによつ
て、第１部材１１に対する第２部材３１の軸方向
位置を変化させ空間２０の寸法ｘを微小調整でき
るようしたから嵌挿されるスピンドル１の外形寸
法に相応させた隙間を確立することができ、スピ
ンドル１の円滑摺動と、高精度支持をすることが
できる。このことは、また例えば第１部材１１
等々の構成要素部材を極限的高精度加工を必要と
しないから経済的効果はもとよりその組立、調整
を飛躍的に簡素化できる。 According to this embodiment, the tapered portion 38 corresponding to the tapered portion 17 of the first member 11 is connected to the second member 31.
By operating the displacement adjustment means 50, the axial position of the second member 31 with respect to the first member 11 can be changed, and the dimension x of the space 20 can be finely adjusted. A gap corresponding to the dimensions can be established, and the spindle 1 can be smoothly slid and supported with high precision. This also means that, for example, the first member 11
Since extremely high-precision machining is not required for these component parts, not only is there an economical effect, but assembly and adjustment can be dramatically simplified.
また、この空気軸受１００は構造簡単であるか
ら、いずれの測定機に採用する場合にも統合化が
容易であつて、また、既存の測定機にも取り付け
ることができる。スピンドル１の寸法が変わつて
も全体を交換する必要がなく適応性が拡大でき
る。 Furthermore, since the air bearing 100 has a simple structure, it can be easily integrated into any measuring machine, and can also be installed in existing measuring machines. Even if the dimensions of the spindle 1 change, there is no need to replace the entire spindle 1, and adaptability can be expanded.
さらに、第２部材３１の貫通穴３５をバカ穴と
しているので寸法ｙの調整も可能であるから、こ
の点も空間２０、隙間をより適正寸法とするので
スピンドル１の円滑摺動と高精度摺動を保障する
ことになる。 Furthermore, since the through hole 35 of the second member 31 is a blank hole, it is possible to adjust the dimension y, which also allows the space 20 and the gap to have a more appropriate size, so that the spindle 1 can slide smoothly and with high precision. This will ensure movement.
このような効果を有する空気軸受１００は、結
果として三次元測定機の第１図で示したＸおよび
Ｙ方向のガタを皆無または測定精度に影響を与え
ない範囲に規制することができるから、測定精度
を高くすることに重要な役割をなすという効果を
も有する。 As a result, the air bearing 100 having such an effect can suppress the play in the X and Y directions shown in FIG. It also has the effect of playing an important role in increasing accuracy.
なお、以上の実施例では、測定機を三次元測定
機としたが、二次元測定機やデジタルコントレー
サ等その型種は問わない。また、変位調整手段５
０は第２部材３１の上端面３９に当接可能な調整
ネジ５５としたが、調整ネジ５５の先端側を回動
可能としてその上端面３９と一体的に連結させて
もよい。このようにすると軸方向の両方向に変位
調整をすることが容易となる。さらに、第２部材
３１の幅方向についてのみ変位調整手段５０で寸
法調整するよう構成したが、第１部材１１，２１
の幅方向についても同様な構造とすることによつ
て寸法調整することも可能である。 In the above embodiments, a three-dimensional measuring machine was used as the measuring machine, but the type thereof may be used, such as a two-dimensional measuring machine or a digital contracer. Moreover, the displacement adjustment means 5
0 is an adjustment screw 55 that can come into contact with the upper end surface 39 of the second member 31, but the tip side of the adjustment screw 55 may be made rotatable and connected integrally with the upper end surface 39. This makes it easy to adjust the displacement in both axial directions. Furthermore, although the configuration is such that the displacement adjusting means 50 adjusts the dimensions only in the width direction of the second member 31, the first members 11, 21
It is also possible to adjust the dimensions in the width direction by using a similar structure.
以上の通り、本発明の測定機の空気軸受によれ
ば、部品加工、組立、調整容易で、しかも、円滑
摺動かつ高精度を保障できるという効果が期待で
きる。
As described above, the air bearing of the measuring instrument of the present invention can be expected to have the effect of facilitating parts processing, assembly, and adjustment, as well as ensuring smooth sliding and high accuracy.
第１図は本発明に係る測定機の空気軸受を採用
する三次元測定機の全体構成図、第２図は本発明
に係る測定機の空気軸受の要部斜視図、第３図は
同じく第２図の−矢視線に基づく断面図、第
４図は同じく−矢視線に基づく断面図および
第５図は従来の測定機の空気軸受の要部を示す斜
視図である。
１……スピンドル、７……Ｚ案内手段、９……
三次元測定機、１０……軸受ボツクス、１１……
第１部材、１４……側端内面、１７……テーパー
部、２０……角柱状空間、２１……第１部材、３
１……第２部材、３４……側縁端面、３５……貫
通穴、３８……テーパー部、４０……支持手段、
４１……ボルト、５０……変位調整手段、５１…
…支持プレート、５５……調整ネジ、１００……
空気軸受。
Fig. 1 is an overall configuration diagram of a three-dimensional measuring machine that employs an air bearing of a measuring machine according to the present invention, Fig. 2 is a perspective view of essential parts of an air bearing of a measuring machine according to the present invention, and Fig. FIG. 2 is a cross-sectional view taken along the arrow line, FIG. 4 is a cross-sectional view taken along the same arrow line, and FIG. 5 is a perspective view showing the main parts of an air bearing of a conventional measuring instrument. 1...Spindle, 7...Z guide means, 9...
Coordinate measuring machine, 10...Bearing box, 11...
First member, 14... Side end inner surface, 17... Taper portion, 20... Prismatic space, 21... First member, 3
DESCRIPTION OF SYMBOLS 1... Second member, 34... Side edge end surface, 35... Through hole, 38... Taper part, 40... Support means,
41... Bolt, 50... Displacement adjustment means, 51...
...Support plate, 55...Adjustment screw, 100...
Air bearing.
Claims (1)
材とを対向配設させて測定機のスピンドルの外径
に対応させた角柱状空間を形成し、第１部材およ
び第２部材から空気を供給してスピンドルを摺動
自在に案内できるよう構成した測定機の空気軸受
において、 少なくとも一方の前記第１部材の幅方向両側端
内面に軸方向に傾斜するテーパー部を設けるとと
もに、その各テーパー部と対向する第２部材の側
端縁に前記テーパー部と相応するテーパー部を設
け、 前記第１部材と第２部材とを両テーパー部が当
接した状態において軸方向に変位可能かつ固定可
能に支持する支持手段を設けるとともに、第１部
材と第２部材とを軸方向に強制的に相対変位させ
る変位調整手段を設け、 前記支持手段を、前記各第２部材の幅方向に沿
つて貫通形成された貫通穴と、この貫通穴の穴径
より十分細い径でその貫通穴を挿通して対向する
第１部材間を締め付けるボルトとから構成すると
ともに、 前記変位調整手段を、前記第１部材に基端側が
固定された支持プレートと、この支持プレートに
前記軸方向に進退可能かつ前記第２部材に当接可
能に螺合された調整ネジとから構成した、 ことを特徴とする測定機の空気軸受。[Scope of Claims] 1 A pair of flat plate-shaped first members and a pair of flat plate-shaped second members are arranged facing each other to form a prismatic space corresponding to the outer diameter of the spindle of the measuring machine, and the first member and an air bearing of a measuring machine configured to be able to slidably guide a spindle by supplying air from a second member, wherein at least one of the first members has a tapered portion inclined in the axial direction on the inner surface of both widthwise ends thereof. At the same time, a tapered portion corresponding to the tapered portion is provided on a side edge of the second member facing each of the tapered portions, and the first member and the second member are aligned in the axial direction in a state in which both the tapered portions are in contact with each other. a support means for movably and fixably supporting the first member and the second member, and a displacement adjusting means for forcibly displacing the first member and the second member relative to each other in the axial direction; The displacement adjusting means is composed of a through hole formed in the width direction, and a bolt having a diameter sufficiently smaller than the diameter of the through hole and tightening between the opposing first members. comprises a support plate whose proximal end side is fixed to the first member, and an adjustment screw screwed into the support plate so that it can move forward and backward in the axial direction and can come into contact with the second member. The measuring machine features an air bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10924386A JPS62265502A (en) | 1986-05-12 | 1986-05-12 | Air bearing for measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10924386A JPS62265502A (en) | 1986-05-12 | 1986-05-12 | Air bearing for measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62265502A JPS62265502A (en) | 1987-11-18 |
| JPH0577001B2 true JPH0577001B2 (en) | 1993-10-25 |
Family
ID=14505242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10924386A Granted JPS62265502A (en) | 1986-05-12 | 1986-05-12 | Air bearing for measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62265502A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0400208A1 (en) * | 1989-05-30 | 1990-12-05 | THE WARNER & SWASEY COMPANY | Way bearing arrangement for a horizontal arm coordinate measuring machine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224016A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three dimensional measuring machine |
-
1986
- 1986-05-12 JP JP10924386A patent/JPS62265502A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224016A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three dimensional measuring machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62265502A (en) | 1987-11-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5163651A (en) | Movable table | |
| US5173613A (en) | Coordinate measuring machine with improved table support | |
| US20040129856A1 (en) | Vertical guide unit and stage system with the same unit | |
| GB1586108A (en) | Table or other support for work-pieces | |
| EP1469277B1 (en) | Linear guide rail with an air bearing for measuring machine | |
| GB2163256A (en) | Surface tracer | |
| US6463667B1 (en) | Machine tool precision-measuring apparatus | |
| US6238092B1 (en) | Air bearing for a motion system | |
| JPS63502812A (en) | Devices for holding and manipulating flat objects | |
| JPH0577001B2 (en) | ||
| JPH0421052Y2 (en) | ||
| JP2628523B2 (en) | Tracer for surface shape measurement | |
| JP2000503910A (en) | High precision translation guide | |
| CN101300429B (en) | Guide table device | |
| JPS61112216A (en) | Noncontacting drive type planar shift stage | |
| JPH0525789Y2 (en) | ||
| JPS61239307A (en) | Positioning device | |
| JPS62208839A (en) | Machine tool conducting cutting work | |
| JPS60224009A (en) | Three dimensional automatic measuring machine | |
| JP3153767B2 (en) | Lower mold device for press brake, die and die holder | |
| JPH07214438A (en) | X and y stage | |
| KR0131604Y1 (en) | Universal chuck of eccentric work | |
| JPS63237831A (en) | Positioning device for xy table | |
| KR100933793B1 (en) | Setting adjustment device | |
| JPS61204501A (en) | Three-dimensional measuring machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |