JPS62256936A - Method for recovering au - Google Patents
Method for recovering auInfo
- Publication number
- JPS62256936A JPS62256936A JP61098642A JP9864286A JPS62256936A JP S62256936 A JPS62256936 A JP S62256936A JP 61098642 A JP61098642 A JP 61098642A JP 9864286 A JP9864286 A JP 9864286A JP S62256936 A JPS62256936 A JP S62256936A
- Authority
- JP
- Japan
- Prior art keywords
- chloride
- base metal
- temp
- oxide
- recovered material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 20
- 239000010953 base metal Substances 0.000 claims abstract description 31
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000010494 dissociation reaction Methods 0.000 claims abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000005593 dissociations Effects 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 7
- 238000001704 evaporation Methods 0.000 claims abstract description 5
- 230000008020 evaporation Effects 0.000 claims abstract description 4
- 238000000859 sublimation Methods 0.000 claims abstract description 4
- 230000008022 sublimation Effects 0.000 claims abstract description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 17
- 150000004706 metal oxides Chemical class 0.000 claims description 17
- 238000011084 recovery Methods 0.000 claims description 14
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 abstract description 4
- 150000001805 chlorine compounds Chemical class 0.000 abstract description 2
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 239000003365 glass fiber Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 10
- 239000000460 chlorine Substances 0.000 description 8
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- 229910001510 metal chloride Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 3
- 208000018459 dissociative disease Diseases 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 241000588731 Hafnia Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y02W30/54—
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Abstract
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、Au及び基体金属酸化物の塩化物化 。[Detailed description of the invention] (Industrial application field) The present invention relates to chloride conversion of Au and base metal oxides.
反応と、Au塩化物の解離反応及び基体金属塩化物の揮
発分離とを行うことによるAu回収方法に係る。The present invention relates to a method for recovering Au by performing a reaction, a dissociation reaction of Au chloride, and volatilization separation of base metal chloride.
(従来の技術とその問題点)
従来よりアルミナ、シリカ、ジルコニア等の金属酸化物
基体上にAuを保持せしめた状態のものが電子工業関係
にも大量に使用されている。(Prior art and its problems) Conventionally, materials in which Au is supported on metal oxide substrates such as alumina, silica, and zirconia have been used in large quantities in the electronic industry.
このような電子材料は装置ならびに部品が寿命となると
取り替えられる。Such electronic materials are replaced when devices and components reach the end of their service life.
こうした使用済の材料中には、なお相当量の高価なAu
が残存し、これを回収し、有効利用することは工業上重
要である。There is still a considerable amount of expensive Au in these used materials.
remains, and it is industrially important to recover and utilize it effectively.
従来、Auの回収方法としては、硫酸、王水などによる
溶解法があるが、これらの方法は溶解工程において長時
間の多段湿式処理を要する。また基体金属酸化物をも液
中に入れるため大型の装置が必要になる。さらにAuと
基体金属を分離する際、基体金属酸化物が析出すること
や洗浄に大量の水を必要とする。従って、甚だ回収効率
が悪く、工業的には不適な回収方法であった。Conventionally, methods for recovering Au include dissolving it using sulfuric acid, aqua regia, etc., but these methods require a long multi-stage wet process in the dissolving process. Furthermore, since the base metal oxide is also placed in the liquid, a large-sized device is required. Furthermore, when Au and the base metal are separated, the base metal oxide is precipitated and a large amount of water is required for cleaning. Therefore, the recovery efficiency was extremely poor and the recovery method was unsuitable for industrial use.
(発明の目的)
本発明は、上記の問題点を解決すべくなされたものであ
り、その目的は基体金属化合物にAuを保持せしめた材
料よりAuを簡便且つ効率良く回収する方法を堤供せん
とするものである。(Object of the Invention) The present invention was made to solve the above problems, and its purpose is to provide a method for easily and efficiently recovering Au from a material in which Au is retained in a base metal compound. That is.
(問題点を解決するための手段)
上記問題点を解決するための本発明のAu回収方法は、
Au、、!:基体金属化合物を含む回収物をCO又はカ
ーボンの存在下で加熱し乍ら塩素ガスを流すことにより
、少なくとも基体金属酸化物を塩化物にして蒸発分離す
ることを特徴とするものである。(Means for solving the problems) The Au recovery method of the present invention for solving the above problems is as follows:
Au...! : The method is characterized in that at least the base metal oxide is converted into chloride and evaporated and separated by heating the recovered material containing the base metal compound in the presence of CO or carbon while flowing chlorine gas.
そして塩素分圧と温度を利用してAu塩化物のみを金属
状態まで解離させた後、分離回収する。Then, only the Au chloride is dissociated into a metallic state using chlorine partial pressure and temperature, and then separated and recovered.
塩化物化においては、Auと基体金属酸化物を含む回収
物をCO又はカーボンの存在下で、塩素を流し乍ら加熱
すると、Auと基体金属酸化物は塩化物に変わるが、そ
の回収物が塩素量に対して過剰にあると、塩素は略完全
に反応し、塩素分圧が微小となり、Au塩化物は容易に
解離反応を起こし、金属Auとなる。In chloridation, when the recovered material containing Au and the base metal oxide is heated in the presence of CO or carbon while flowing chlorine, the Au and the base metal oxide are converted to chloride, but the recovered material is converted into chloride. When the amount is in excess, chlorine reacts almost completely, the chlorine partial pressure becomes extremely small, and the Au chloride easily undergoes a dissociation reaction to become metallic Au.
一般的に使用される基体金属塩化物は、容易に解離反応
を起こさず、又Au塩化物の解離温度(以下単に解離温
度という)が回収物加熱温度以下になるような塩素分圧
にすることは容易で、基体金属塩化物を気体相として反
応系外へ運び出すことができる。Generally used base metal chlorides do not easily undergo a dissociation reaction, and the chlorine partial pressure must be set so that the dissociation temperature of Au chloride (hereinafter simply referred to as dissociation temperature) is below the temperature at which the recovered material is heated. is easy, and the base metal chloride can be carried out of the reaction system as a gas phase.
反応部分の温度は700℃以上が好ましいが、塩化物化
反応が発熱反応である場合、加熱温度が700℃未満で
あっても反応熱により700℃以上に保持することは可
能である。しかし加熱温度が400°C未満になると塩
化物化反応が起こりにくく、それによる発熱が期待でき
なくなる。又、1063℃よりも高い温度ではAuが溶
融してしまいAuとしての蒸気が高くなるため、回収率
を下げてしまうことや取出しの際、未反応材料に付着し
てしまい他の処理を必要とすることが考えられる。従っ
て、回収物の加熱温度は400℃〜1063℃が良い。The temperature of the reaction part is preferably 700°C or higher, but if the chloridation reaction is an exothermic reaction, it is possible to maintain the temperature at 700°C or higher due to the heat of reaction even if the heating temperature is lower than 700°C. However, when the heating temperature is less than 400°C, the chloride reaction is difficult to occur, and the resulting heat generation cannot be expected. In addition, at temperatures higher than 1063°C, Au melts and the vapor as Au becomes high, which lowers the recovery rate and adheres to unreacted materials when taken out, requiring other treatment. It is possible to do so. Therefore, the heating temperature of the recovered material is preferably 400°C to 1063°C.
CO又はカーボンの存在下で加熱する理由は、CO、カ
ーボンの酸化により酸素分圧を低くして反応平衡をずら
し、反応を促進させる為である。The reason for heating in the presence of CO or carbon is to lower the oxygen partial pressure by oxidizing CO and carbon, shift the reaction equilibrium, and accelerate the reaction.
尚、Au及び基体金属の代表的な塩化物の諸性質は次の
通りである。The properties of typical chlorides of Au and base metals are as follows.
A u Cl z 解離塩素圧 164*nHg/
170℃〃” 199.3mHg/ 240℃A
u Cl 3 ” 46.7+nHg/
170℃〃〃397 、2 w Ilg /’240
℃AlCl2 昇華点 182.7℃T i C
l 4沸点 136.4℃
SiCβa ” 57 、57℃S n
C1a 〃114.1℃
(実施例)
本発明のAu回収方法の一実施例と従来例を説明する。A u Cl z Dissociated chlorine pressure 164*nHg/
170℃〃” 199.3mHg/240℃A
u Cl 3 ” 46.7+nHg/
170℃〃〃397、2 w Ilg /'240
℃AlCl2 Sublimation point 182.7℃T i C
l 4 Boiling point 136.4℃ SiCβa ” 57, 57℃S n
C1a 〃114.1°C (Example) An example of the Au recovery method of the present invention and a conventional example will be described.
先ず本発明のAu回収方法の一実施例について説明する
と、セラミックス基板(AA203)にA u (0,
05wt%)を担持した材料15kgを粒径0.1〜0
.5 mmまで粉砕し、これに粒径0.2〜0 、8
m粛のカーボン粉末を6.4kgを混合し、図に示す如
くこの混合物1を底部にガス繊維の底板2を敷いた塩化
物化容器3中に入れ、電気炉4により混合物1を100
0℃に加熱し、底の塩素ガス導入管5から塩素ガスを1
01/min流すことにより基体金属酸化物であるAl
□o3を塩化物にして蒸発させ、それを蒸発ダクト6を
通して塩化物トラップ7により捕捉した。First, an example of the Au recovery method of the present invention will be described. A ceramic substrate (AA203) is coated with A u (0,
0.05wt%) was added to a particle size of 0.1 to 0.
.. Grind to 5 mm and add particle size of 0.2 to 0.8 mm.
Mix 6.4 kg of carbon powder of 100 ml, put this mixture 1 into a chloride container 3 with a gas fiber bottom plate 2 on the bottom as shown in the figure, and heat the mixture 1 in an electric furnace 4 to 100 ml of carbon powder.
Heat to 0°C and supply 1 chlorine gas from the chlorine gas introduction pipe 5 at the bottom.
By flowing 01/min, the base metal oxide Al
□O3 was converted into chloride and evaporated, which was passed through the evaporation duct 6 and captured by the chloride trap 7.
これを12時間続けた後、残材料を塩化物化容器3より
取り出し、比重分離により未反応材料ならびにカーボン
粉末を分離して金属状Au粉末を回収したところ、回収
率は99%以上で、回収されたAuの純度も99%以上
であった。After continuing this for 12 hours, the remaining material was taken out from the chloride container 3, and the unreacted material and carbon powder were separated by specific gravity separation to recover the metallic Au powder. The recovery rate was over 99%. The purity of the Au was also 99% or higher.
次に従来例について説明すると、実施例と同様にセラミ
ックス基板(AAzOi)にA u (0,05wt%
)を担持した材料15kgを王水液中に入れてAuを溶
解し、濾過によりAu王水液を取り出す方法でAuを回
収したところ、回収率は95%であった。Next, a conventional example will be explained. Similar to the example, a ceramic substrate (AAzOi) is coated with A u (0.05wt%
) was put into an aqua regia solution to dissolve the Au, and the Au aqua regia solution was collected by filtration, and the recovery rate was 95%.
この回収において回収率を高くする為濾過の際の洗浄等
で液■が大幅に増えるという問題が生じた。In this recovery, in order to increase the recovery rate, a problem arose in that the amount of liquid (2) increased significantly due to cleaning during filtration.
尚、本発明のAu回収方法においては、図において蒸発
ダクト6の途中に一点鎖線のタロく加熱器8を設けて、
Auと基体金属酸化物を含む回収物を塩化物化容器3中
で解離温度以下で且つ基体金属塩化物の沸点以上で加熱
し、Au及び基体金属酸化物を塩化物にして蒸発させ、
更に加熱器8で解離温度以上に加熱してAu塩化物のみ
を解離してAuを捕捉し、基体金属塩化物のみを蒸発分
離して塩化物トラップ7にて捕捉するようにしても良い
。In addition, in the Au recovery method of the present invention, a heater 8 is provided in the middle of the evaporation duct 6 as indicated by a dashed dotted line in the figure.
Heating the recovered material containing Au and the base metal oxide in a chloride container 3 below the dissociation temperature and above the boiling point of the base metal chloride to convert Au and the base metal oxide into chloride and evaporate it,
Further, it is also possible to heat the material to a temperature higher than the dissociation temperature using the heater 8 to dissociate only the Au chloride and capture the Au, and only the base metal chloride may be evaporated and separated and captured in the chloride trap 7.
尚、基体金属酸化物は、上記実施例のAlzoz(アル
ミナ)ばかりでなく、Stow(シリカ)、SnO,(
酸化錫)、TtOz(チタニア)、BaT i 03
(チタン酸バリウム) 、Fe2o3 (酸化鉄)、M
g0(マグネシア)、Zr0z(ジルコニア) 、Al
zCh+S i 0zC1’ルミナ+”’)力)、Hf
O,(ハフニア)、In0z(酸化インジウム)、p
bo <酸化鉛)、GeO□(酸化ゲルマニウム)等の
基体金属酸化物がある。The base metal oxide is not only Alzoz (alumina) in the above example, but also Stow (silica), SnO, (
tin oxide), TtOz (titania), BaT i 03
(barium titanate), Fe2o3 (iron oxide), M
g0 (magnesia), Zr0z (zirconia), Al
zCh+S i 0zC1'lumina+"') force), Hf
O, (hafnia), In0z (indium oxide), p
There are base metal oxides such as bo <lead oxide) and GeO□ (germanium oxide).
(発明の効果)
以上の説明で判るように本発明のAu回収方法によれば
、Auを基体金属酸化物から極めて効率良く分離回収す
ることができ、また従来のような多段の湿式処理工程は
必要としないので簡便に短時間に回収することができる
という優れた効果がある。(Effects of the Invention) As can be seen from the above explanation, according to the Au recovery method of the present invention, Au can be separated and recovered from the base metal oxide very efficiently, and the conventional multi-stage wet treatment process is unnecessary. Since it is not necessary, it has the excellent effect of being able to be collected easily and in a short time.
図は本発明のAu回収方法の一実施例を示す図である。 The figure shows an example of the Au recovery method of the present invention.
Claims (1)
ボンの存在下で加熱し乍ら塩素ガスを流すことにより、
少なくとも基体金属酸化物を塩化物にして蒸発分離する
ことを特徴とするAu回収方法。 2)回収物の加熱温度が、Au塩化物の解離温度以上で
、且つ基体金属酸化物の沸点又は昇華温度以上の温度で
あることを特徴とする特許請求の範囲第1項記載のAu
回収方法。 3)回収物の加熱温度が、Au塩化物の解離温度以下で
、且つ基体金属酸化物の沸点又は昇華温度以上の温度で
あることを特徴とする特許請求の範囲第1項記載のAu
回収方法。 4)回収物の加熱温度が400℃〜1063℃であるこ
とを特徴とする特許請求の範囲第1項乃至第3項記載の
Au回収方法。[Claims] 1) By heating the recovered material containing Au and the base metal oxide in the presence of CO or carbon while flowing chlorine gas,
A method for recovering Au, characterized in that at least a base metal oxide is converted into chloride and separated by evaporation. 2) Au according to claim 1, characterized in that the heating temperature of the recovered material is higher than the dissociation temperature of the Au chloride and higher than the boiling point or sublimation temperature of the base metal oxide.
Collection method. 3) Au according to claim 1, wherein the heating temperature of the recovered material is below the dissociation temperature of the Au chloride and above the boiling point or sublimation temperature of the base metal oxide.
Collection method. 4) The Au recovery method according to claims 1 to 3, wherein the heating temperature of the recovered material is 400°C to 1063°C.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61098642A JPS62256936A (en) | 1986-04-28 | 1986-04-28 | Method for recovering au |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61098642A JPS62256936A (en) | 1986-04-28 | 1986-04-28 | Method for recovering au |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62256936A true JPS62256936A (en) | 1987-11-09 |
Family
ID=14225157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61098642A Pending JPS62256936A (en) | 1986-04-28 | 1986-04-28 | Method for recovering au |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62256936A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10249520A1 (en) * | 2002-10-23 | 2004-05-19 | W. C. Heraeus Gmbh & Co. Kg | Dissolving iron out of an iron-based collector alloy, especially in mobilization of noble metals from spent catalysts, involves addition of ferric chloride and chlorine |
JP2015017279A (en) * | 2013-07-08 | 2015-01-29 | 国立大学法人秋田大学 | Method and system for recovery of gold by chloride volatilization method |
JP2017013066A (en) * | 2016-09-30 | 2017-01-19 | 株式会社アステック入江 | Method of processing integrated circuit |
-
1986
- 1986-04-28 JP JP61098642A patent/JPS62256936A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10249520A1 (en) * | 2002-10-23 | 2004-05-19 | W. C. Heraeus Gmbh & Co. Kg | Dissolving iron out of an iron-based collector alloy, especially in mobilization of noble metals from spent catalysts, involves addition of ferric chloride and chlorine |
DE10249520B4 (en) * | 2002-10-23 | 2009-08-27 | W.C. Heraeus Gmbh | Dissolving of iron-based collector alloys by means of the Fe 3+ / Cl 2 system |
JP2015017279A (en) * | 2013-07-08 | 2015-01-29 | 国立大学法人秋田大学 | Method and system for recovery of gold by chloride volatilization method |
JP2017013066A (en) * | 2016-09-30 | 2017-01-19 | 株式会社アステック入江 | Method of processing integrated circuit |
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