JPS62249493A - Eximer laser device provideo with automatic preliminary ionization - Google Patents
Eximer laser device provideo with automatic preliminary ionizationInfo
- Publication number
- JPS62249493A JPS62249493A JP9211386A JP9211386A JPS62249493A JP S62249493 A JPS62249493 A JP S62249493A JP 9211386 A JP9211386 A JP 9211386A JP 9211386 A JP9211386 A JP 9211386A JP S62249493 A JPS62249493 A JP S62249493A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- ionization
- discharge
- charging
- preliminary ionization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims abstract description 59
- 230000005284 excitation Effects 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 238000007599 discharging Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、高出力の紫外光を発生するエキシマレーザ装
置に係シ、特に、高効率のレーザ出力？得るのに好適な
自動予備電離装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an excimer laser device that generates high-power ultraviolet light, and particularly relates to an excimer laser device that generates high-power ultraviolet light. The present invention relates to an automatic preionization device suitable for obtaining.
エキシマレーザなどのパルスガスレーザ装置では、大気
圧以上のガス圧のレーザ媒質ガスをグロー放電嘔せるこ
とでレーザ媒質ガスを励起している。このように大気圧
以上のガス？放電させるガスレーザでは立ち上がりの速
い高電圧パルスと放電空間の予備電離が必要不可欠であ
る。In a pulsed gas laser device such as an excimer laser, the laser medium gas is excited by glow discharging the laser medium gas at a gas pressure higher than atmospheric pressure. Gas above atmospheric pressure like this? In a gas laser that generates a discharge, a high-voltage pulse with a fast rise and pre-ionization of the discharge space are essential.
立ち立がりの速い高電圧パルス発生回路として容量移行
形励起回路が一般に用いられており、予備電離は、充電
用コンデンサに蓄えたエネルギを高電圧、犬ｘｉスイッ
チング素子を通して主放電コンデンサに移行する閉回路
内に設けた微少ギャップの予備電極をアーク放電させる
ことで発生する紫外線光によって自動的に行なわｎでい
る。しかし、予備電離量や、予備電離開始時間は考慮さ
れていなかった。なお、この種の装置として関連するも
のには、特開昭５７−８８７８９号公報がある。A capacitive transfer type excitation circuit is generally used as a high-voltage pulse generating circuit with a fast rise. This is done automatically using ultraviolet light generated by arc discharging a preliminary electrode with a minute gap provided in the circuit. However, the amount of pre-ionization and the start time of pre-ionization were not taken into consideration. A related device of this type is JP-A-57-88789.
上記従来技術は、予備電離量や、予備電離開始時間につ
いて考慮がされておらず、予備電離が多すぎて、低い放
電圧で主放電が開始してしまう。In the above-mentioned conventional technology, no consideration is given to the amount of pre-ionization or the start time of pre-ionization, and the amount of pre-ionization is too large, causing the main discharge to start at a low discharge voltage.
つまり、充電コンデンサから主、”々′４コンデンサへ
のエネルギ移行効率が充電々圧を高くするに従って低下
してしまう問題があった。In other words, there is a problem in that the efficiency of energy transfer from the charging capacitor to the main capacitor decreases as the charging voltage increases.
本発明の目的は、容量移行回路において、予備電離量を
調整できることでエネルギ移行効率の高い容量移行形自
動予備電離エキシマレーザ装置を提供することにある。An object of the present invention is to provide a capacitance transfer type automatic preionization excimer laser device that can adjust the amount of preionization in a capacitance transfer circuit and has high energy transfer efficiency.
充電コンデンサに蓄えたエネルギは、高電圧。 The energy stored in the charging capacitor is a high voltage.
犬′ｒ！Ｌ＃、スイッチング素子を高速でオンすること
で。Dog’r! L#, by turning on the switching element at high speed.
主放電コンデンサにエネルギを移行すると同時に、整流
素子を通して分圧コンデンサと予備電離コンデンサにも
エネルギを移行する。このとき、予備ａ離コンデンサの
両端の電圧は上昇していき、予備電離電極の放、毬電圧
に達すると、放ｔを開始し。At the same time that energy is transferred to the main discharge capacitor, energy is also transferred to the voltage dividing capacitor and pre-ionization capacitor through the rectifier. At this time, the voltage across the pre-ionization capacitor increases, and when it reaches the discharge voltage of the pre-ionization electrode, it starts discharging.
主放電空間の予備電離をおこなう。分圧コンデンサと予
備電離コンデンサの容量比企選ぶことで。Perform preliminary ionization of the main discharge space. By choosing the capacitance ratio of the voltage dividing capacitor and pre-ionization capacitor.
予備！離開始時間を選定でき、予備′イ離量を調整でき
るので、過大な予備電離量を防止することができる。spare! Since the ionization start time can be selected and the pre-ionization amount can be adjusted, an excessive amount of pre-ionization can be prevented.
上記目的は、予備電離電極乞充電用コンデンサと高電圧
、大電流スイッチング素子と主放電用コンデンサの直列
に接続された閉回路内に設けずに。The above purpose is to provide a pre-ionization electrode in a closed circuit in which the charging capacitor, high voltage, large current switching element, and main discharging capacitor are connected in series.
充電用コンデンサと高電圧、大電流スイッチング素子と
整流素子と分圧コンデンサと予備電離電極コンデンサか
らなる閉回路の予備電離放電用コンデンサの両端から予
備電離電極の両端に接続することにより達成される。This is achieved by connecting both ends of a preionization discharge capacitor in a closed circuit consisting of a charging capacitor, high voltage, high current switching element, rectifying element, voltage dividing capacitor, and preionization electrode capacitor to both ends of the preionization electrode.
以下６本発明の一実施例を第１図により説明する。充電
用コンデンサ２と高電圧、大電流スイッチング素子１．
主放電用コンデンサ１２とが直列に接続された閉回路に
よって容量移行回路を構成しており、充電リアクトル３
とレーザ管１１内でレーザ放’ｆｉｋ形成する陽極９と
陰極１０とが主放電コンデンサに並列に接続されている
。レーザ管１１内にろる予備電離電極７は復数個配置さ
れており、それぞれの一端は電流バランス用リアクトル
８を介して陰極電極１０に接続されている。また、予備
電離電極７の他端は、充電用コンデンサ２と高電圧、大
電流スイッチング素子１と整流素子６、分圧コンデンサ
５．予備放電コンデンサ４の直列接続からなる閉回路の
分圧コンデンサ５と予備放電コンデンサ４との接続点に
それぞれ接続されている。こうして、充電用コンデンサ
２に充電用リアクトル３を通して高電圧＝ｉｔ源ＨＶよ
り充電しておき、高電圧、大電流スイッチング素子１を
短絡させた時のエネルギ移行と予備電離時間の関係を充
電コンデンサ２の端子電圧ＶＨ，主放電コンデンサ１２
の端子電圧ｖ２．予備放電コンデンサ４の端子電圧ｖ３
の時間的変化で７ｓ２図に示した。１ｏで高電圧、大電
流スイッチング素子１が短絡すると、充電用コンデンサ
２と高電圧、大電流スイッチング素子１と主放電コンデ
ンサ１２で構成される閉回路内の配置線のインダクタン
スと。An embodiment of the present invention will be described below with reference to FIG. Charging capacitor 2 and high voltage, large current switching element 1.
A capacitance transfer circuit is configured by a closed circuit connected in series with the main discharge capacitor 12, and the charging reactor 3
An anode 9 and a cathode 10, which form a laser beam within the laser tube 11, are connected in parallel to the main discharge capacitor. Several pre-ionization electrodes 7 are arranged inside the laser tube 11, and one end of each is connected to the cathode electrode 10 via a current balancing reactor 8. The other end of the pre-ionization electrode 7 is connected to a charging capacitor 2, a high voltage/large current switching element 1, a rectifying element 6, a voltage dividing capacitor 5. Each of the capacitors is connected to a connection point between a voltage dividing capacitor 5 and a predischarge capacitor 4 in a closed circuit formed by connecting predischarge capacitors 4 in series. In this way, the charging capacitor 2 is charged from the high voltage = it source HV through the charging reactor 3, and the relationship between the energy transfer and pre-ionization time when the high voltage, large current switching element 1 is short-circuited is determined by charging the charging capacitor 2. terminal voltage VH, main discharge capacitor 12
The terminal voltage v2. Terminal voltage v3 of pre-discharge capacitor 4
Figure 7s2 shows the temporal changes in . When the high voltage, large current switching element 1 is short-circuited at 1o, the inductance of the wiring in the closed circuit consisting of the charging capacitor 2, the high voltage, large current switching element 1, and the main discharge capacitor 12.
充電用コンデンサ２と主放電用コンデンサ１２との合成
容量で決まる周波数で、ｖ＋は低下し。At a frequency determined by the combined capacitance of the charging capacitor 2 and the main discharging capacitor 12, v+ decreases.
ｖ２＋ ｖ３は上昇する。このとき１分圧コンデンサ
５と、予備電離コンデンサ４の容量は、主放電コンデン
サ１２．充電用コンデンサ２の容量より。v2+v3 increases. At this time, the capacitance of the 1 voltage dividing capacitor 5 and the pre-ionization capacitor 4 is the same as that of the main discharge capacitor 12. From the capacity of charging capacitor 2.
充電コンデンサ２に蓄えたエネルギの大部分け。Most of the energy stored in charging capacitor 2 is used.
主管軍用コンデンサ１２に移行する。ｖ３が上昇してい
き、ｔｌの時点でｖ３は予備［株］離電画７の放″ｆｔ
開始電圧に達し、予備電離放電が開始する。Moving on to the main military capacitor 12. v3 rises, and at the time of tl, v3 is the discharge of the preliminary ionizing image 7 ``ft''
The starting voltage is reached and pre-ionization discharge begins.
一方、Ｖｌは予備ｔ′ｌＩ＆放電開始後も陽極９と陰極
１０で構成される放電空間が十分に予備電離されるまで
上昇し、ｔ２の時点で主放電が始まシ、レーザガスを励
起する。この時、整流素子６は１分圧コンデンサ５に蓄
えられた電荷が主放電に流れ込むのを防止している。従
来の容量移行形自動予備鑞離エキシマレーザでの予備゛
１離放電では。On the other hand, Vl increases until the discharge space constituted by the anode 9 and the cathode 10 is sufficiently pre-ionized even after the preliminary t'lI & start of discharge, and the main discharge starts at time t2 to excite the laser gas. At this time, the rectifying element 6 prevents the charge stored in the 1-voltage capacitor 5 from flowing into the main discharge. In the pre-discharge of the conventional capacitance transfer type automatic pre-dissociation excimer laser.
ｔｏの時点より開始していたため、予備電離量が過剰と
なり、ｖ２の低い値で主成ｔを開始していた。その様子
を、充電電圧Ｖと放電開始電圧ＶｂＶｂ２１）の変化を
第３図に比較して示した。従来の状態を破線で示し１本
発明による特性を実線で示す。このようにエネルギの移
行効率は大巾に改善することができる。Since it started from the time to, the amount of preliminary ionization was excessive, and the main component t started at a low value of v2. This situation is shown in FIG. 3 by comparing the changes in charging voltage V and discharge starting voltage VbVb21). The conventional state is shown by a broken line, and the characteristics according to the present invention are shown by a solid line. In this way, the energy transfer efficiency can be greatly improved.
本実施例（（よれば、予備１イ：ｍｉ極・、つ一端を陰
極側に取り付けていることにより、主放電の開始が陰極
側からのシ子の飛び出しで始まるので、陰極側を十分に
予備区離できる。According to this embodiment ((), by attaching one end of the preliminary 1 I:mi pole to the cathode side, the main discharge starts with the protrusion of the shield from the cathode side, so the cathode side is sufficiently You can leave the reserve.
本発明によれば、予備電離放電の開始を遅らせて、予備
電離量を調整できるので、充電用コンデンサから、主放
電コンデンサへのエネルギ移行率を高くすることができ
る。According to the present invention, since the start of pre-ionization discharge can be delayed and the amount of pre-ionization can be adjusted, the rate of energy transfer from the charging capacitor to the main discharging capacitor can be increased.
第１図は本発明の一実施例の電気回路構成図。
第２図は本発明の電圧動作状態を示す図、第３図は１本
発明と従来例との放電開始電圧と、エネルギ移行効率の
比較を示した図である。FIG. 1 is an electrical circuit configuration diagram of an embodiment of the present invention. FIG. 2 is a diagram showing the voltage operation state of the present invention, and FIG. 3 is a diagram showing a comparison of discharge starting voltage and energy transfer efficiency between the present invention and a conventional example.
Claims (1)
ザ管と、前記レーザ管の両端に共振器を構成する一対の
反射鏡と、前記主放電々極に並列に主放電コンデンサと
充電用リアクトルを接続し、前記充電用コンデンサと高
電圧、大電流スイッチング素子の直列回路が並列に接続
されている放電励起容量移行形自動予備電離エキシマレ
ーザ装置において、 前記予備電離用電極の一端が前記充電用リアクトルの一
端に接続され、前記充電用リアクトルの他端が陰極に接
続され、前記予備電離用電極の他端が、前記主放電電極
と整流素子、分圧コンデンサ、予備電離放電コンデンサ
からなる閉回路の分圧コンデンサと予備電離放電コンデ
ンサの接続点に接続したことを特徴とする自動予備電離
エキシマレーザ装置。[Claims] 1. A laser tube equipped with a main discharge pole and a pre-ionization electrode, a pair of reflecting mirrors forming a resonator at both ends of the laser tube, and parallel to the main discharge poles. In the discharge excitation capacitance transfer type automatic pre-ionization excimer laser device, in which a main discharge capacitor and a charging reactor are connected to a main discharge capacitor and a charging reactor, and a series circuit of a high voltage and large current switching element is connected in parallel to the charging capacitor, the pre-ionization One end of the charging reactor is connected to one end of the charging reactor, the other end of the charging reactor is connected to a cathode, and the other end of the pre-ionization electrode is connected to the main discharge electrode, a rectifying element, a voltage dividing capacitor, An automatic pre-ionization excimer laser device characterized in that it is connected to a connection point between a voltage dividing capacitor and a pre-ionization discharge capacitor in a closed circuit consisting of a pre-ionization discharge capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9211386A JPS62249493A (en) | 1986-04-23 | 1986-04-23 | Eximer laser device provideo with automatic preliminary ionization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9211386A JPS62249493A (en) | 1986-04-23 | 1986-04-23 | Eximer laser device provideo with automatic preliminary ionization |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62249493A true JPS62249493A (en) | 1987-10-30 |
Family
ID=14045375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9211386A Pending JPS62249493A (en) | 1986-04-23 | 1986-04-23 | Eximer laser device provideo with automatic preliminary ionization |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62249493A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH027483A (en) * | 1988-06-27 | 1990-01-11 | Nikon Corp | Discharge type excimer laser |
| EP0446072A2 (en) * | 1990-03-08 | 1991-09-11 | Matsushita Electric Industrial Co., Ltd. | Laser apparatus with preionization |
| JPH0529691A (en) * | 1991-07-22 | 1993-02-05 | Nissin Electric Co Ltd | Excimer laser apparatus |
| US5293390A (en) * | 1991-04-25 | 1994-03-08 | Matsushita Electric Industrial Co., Ltd. | Discharge-pumped gas laser with independent preionizing circuit |
| WO2011046805A3 (en) * | 2009-10-13 | 2011-06-16 | Coherent, Inc. | Pre-ionization method for co2 gas-discharge laser |
| US8391329B2 (en) | 2009-01-26 | 2013-03-05 | Coherent, Inc. | Gas laser discharge pre-ionization using a simmer-discharge |
-
1986
- 1986-04-23 JP JP9211386A patent/JPS62249493A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH027483A (en) * | 1988-06-27 | 1990-01-11 | Nikon Corp | Discharge type excimer laser |
| EP0446072A2 (en) * | 1990-03-08 | 1991-09-11 | Matsushita Electric Industrial Co., Ltd. | Laser apparatus with preionization |
| US5293390A (en) * | 1991-04-25 | 1994-03-08 | Matsushita Electric Industrial Co., Ltd. | Discharge-pumped gas laser with independent preionizing circuit |
| JPH0529691A (en) * | 1991-07-22 | 1993-02-05 | Nissin Electric Co Ltd | Excimer laser apparatus |
| US8391329B2 (en) | 2009-01-26 | 2013-03-05 | Coherent, Inc. | Gas laser discharge pre-ionization using a simmer-discharge |
| WO2011046805A3 (en) * | 2009-10-13 | 2011-06-16 | Coherent, Inc. | Pre-ionization method for co2 gas-discharge laser |
| CN102668274A (en) * | 2009-10-13 | 2012-09-12 | 相干公司 | Pre-ionization method for CO2 gas-discharge laser |
| US8369373B2 (en) | 2009-10-13 | 2013-02-05 | Coherent, Inc. | Pre-ionization method for CO2 gas-discharge laser |
| JP2013507791A (en) * | 2009-10-13 | 2013-03-04 | コヒレント， インコーポレイテッド | Pre-ionization method for CO2 gas discharge laser |
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