JPS62249107A - Polarizing beam splitter - Google Patents
Polarizing beam splitterInfo
- Publication number
- JPS62249107A JPS62249107A JP9314586A JP9314586A JPS62249107A JP S62249107 A JPS62249107 A JP S62249107A JP 9314586 A JP9314586 A JP 9314586A JP 9314586 A JP9314586 A JP 9314586A JP S62249107 A JPS62249107 A JP S62249107A
- Authority
- JP
- Japan
- Prior art keywords
- polarized light
- beam splitter
- polarizing beam
- diffraction grating
- diffraction efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 4
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 claims abstract description 4
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 claims abstract 3
- 229920000642 polymer Polymers 0.000 claims abstract 3
- 238000000926 separation method Methods 0.000 claims description 10
- 239000002075 main ingredient Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 3
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
ホログラフインクに作成される位相型回折格子を、Ｓ偏
光とＰ偏光との回折効率の差が大きくなるように作成す
ることで、位相型回折格子によって偏光ビームスプリッ
タを実現可能とする。[Detailed Description of the Invention] [Summary] By creating a phase-type diffraction grating on holographic ink so that the difference in diffraction efficiency between S-polarized light and P-polarized light becomes large, polarized beams can be To make a splitter possible.
情報の大容量記憶装置として光ディスクの研究・開発が
盛んになされている。光ディスクへの書込み／読取りは
光ヘッドで行なわれるが、その光学系には、光ディスク
への入射光から反射光を分離する偏光ビームスプリッタ
が用いられている。Optical disks are being actively researched and developed as large-capacity storage devices for information. Writing/reading on an optical disk is performed by an optical head, and its optical system uses a polarizing beam splitter that separates reflected light from light incident on the optical disk.
本発明は、この偏光ビームスプリッタを小型軽量化する
ものである。The present invention aims to reduce the size and weight of this polarizing beam splitter.
第５図は従来の光学レンズを用いた光ピツクアップの側
面図である。半導体レーザＬＤから出射した直線偏光ビ
ームは、コリメートレンズ１で平行光に変換された後、
真円補正プリズム２−偏光ビームスブリソタ３−１／４
波長板４の光路を経て、対物レンズ５で絞られ、光ディ
スク６に照射される。そして情報を読取った反射ビーム
は、対物レンズ５−１／４波長板４−偏光ビームスブリ
ソタ３−集光レンズ７−光検知器８の光路を通り、光検
知器８によって電気信号に変換される。FIG. 5 is a side view of a conventional optical pickup using an optical lens. After the linearly polarized beam emitted from the semiconductor laser LD is converted into parallel light by the collimating lens 1,
Perfect circularity correction prism 2-polarized beam sub-soter 3-1/4
The light passes through the optical path of the wavelength plate 4, is focused by the objective lens 5, and is irradiated onto the optical disc 6. The reflected beam that has read the information passes through the optical path of the objective lens 5 - 1/4 wavelength plate 4 - polarization beam sub-slotter 3 - condensing lens 7 - photodetector 8, and is converted into an electrical signal by the photodetector 8. Ru.
このように従来の光ピツクアップでは、多数の群レンズ
や、プリズムを使用した偏光ビームスプリッタを使用し
ているため、光ピツクアップが大型でかつ重量が大きく
なり、高速駆動に支障を来している。As described above, the conventional optical pickup uses a large number of group lenses and a polarizing beam splitter using a prism, which makes the optical pickup large and heavy, which hinders high-speed driving.
すなわち偏光ビームスプリッタ３は、第６図（ａ）（ｂ
）に示すように、２つの直角プリズム３１と３２の間に
偏光分離膜１０を挟んだ構成になっている。That is, the polarizing beam splitter 3 is as shown in FIGS.
), the polarization separation film 10 is sandwiched between two right-angled prisms 31 and 32.
そのため、（ａ）のようにＳ偏光が入射すると、該偏光
分離膜１０で反射され、（ｂ）のようにＰ偏光が入射す
ると偏光分離膜１０を透過し、Ｓ偏光とＰ偏光との分離
が行なわれる。Therefore, when S-polarized light is incident as shown in (a), it is reflected by the polarization separation film 10, and when P-polarized light is incident as shown in (b), it is transmitted through the polarization separation film 10 and separated into S-polarized light and P-polarized light. will be carried out.
ところがこのように偏光分離膜を用いたものは、偏光分
離膜をプリズムで挟むため重量が重くなり、平板ではさ
む場合でも、多層膜構造であるため、コスト高になると
いう欠点がある。However, devices using polarized light separation films as described above have the drawbacks of being heavy because the polarization separation films are sandwiched between prisms, and even when sandwiched between flat plates, the cost is high because of the multilayer structure.
また第７図（ａ） （ｂ）のように、表面レリーフ型回
折格子１１を用い、その格子溝と平行方向のＳ偏光は回
折し、格子溝と交差する方向のＰ偏光は透過する性質を
利用した偏光ビームスプリッタも試みられている。とこ
ろがこのように表面レリーフ型回折格子を用いたものは
、表面に微細な格子溝を有しているため、表面保護が困
難であるという問題がある。In addition, as shown in FIGS. 7(a) and 7(b), a surface relief type diffraction grating 11 is used, and the S-polarized light in the direction parallel to the grating grooves is diffracted, and the P-polarized light in the direction crossing the grating grooves is transmitted. Polarizing beam splitters have also been tried. However, since the surface relief type diffraction grating has fine grating grooves on the surface, it is difficult to protect the surface.
本発明の技術的課題は、従来の偏光ビームスプリッタに
おけるこのような問題を解消し、表面保護′などが容易
で取扱いが簡便となり、かつ小型・軽量の偏光ビームス
プリッタを実現することにある。A technical object of the present invention is to solve such problems with conventional polarizing beam splitters, and to realize a polarizing beam splitter that is easy to protect its surface, easy to handle, and is small and lightweight.
第１図は本発明による偏光ビームスプリッタの基本原理
を説明する断面図である。本発明は、ホログラフィック
に作成される位相型回折格子を偏光ビームスプリッタと
して使用可能とするものである。位相型回折格子は、２
つの光をホログラム媒体に照射し、互いに干渉させて露
光・現像することで作成される。その際、屈折率が周期
的に異なる干渉縞が形成され、回折作用が得られる。と
ころが、位相型回折格子は、その作成方法によって、Ｓ
偏光とＰ偏光とで回折効率に顕著な差を持たせうろこと
が判明した。例えば、回折格子の空間周波数と使用波長
の積によって、Ｓ偏光とＰ偏光との回折効率に大きな変
化が生じる。このように、Ｓ偏光とＰ偏光とで回折効率
の異なる領域で、位相型回折格子を作成することにより
、位相型回折格子を偏光ビームスプリッタとして使用す
るものである。FIG. 1 is a sectional view illustrating the basic principle of a polarizing beam splitter according to the present invention. The present invention enables a holographically produced phase diffraction grating to be used as a polarizing beam splitter. The phase type diffraction grating is 2
It is created by irradiating a hologram medium with two lights and allowing them to interfere with each other for exposure and development. At this time, interference fringes with periodically different refractive indices are formed, and a diffraction effect is obtained. However, the phase-type diffraction grating has an S
It has been found that there is a significant difference in diffraction efficiency between polarized light and P-polarized light. For example, the diffraction efficiency of S-polarized light and P-polarized light varies greatly depending on the product of the spatial frequency of the diffraction grating and the wavelength used. In this way, by creating a phase-type diffraction grating in a region where the diffraction efficiency differs between S-polarized light and P-polarized light, the phase-type diffraction grating is used as a polarization beam splitter.
Ｓ偏光とＰ偏光とで回折効率が異なり、例えばＳ偏光の
回折効率がＰ偏光のそれより大きくなるように作成する
ことで、第１図のようにＳ偏光が入射したときは回折さ
れ、Ｐ偏光が入射したときは、真直ぐ透過する。そのた
め、位相型回折格子においても、入射光の偏光面の違い
によって、偏光分離が行なわれる。S-polarized light and P-polarized light have different diffraction efficiencies. For example, by making the diffraction efficiency of S-polarized light higher than that of P-polarized light, when S-polarized light is incident, it will be diffracted, and P-polarized light will be diffracted as shown in Figure 1. When polarized light is incident, it is transmitted straight through. Therefore, even in the phase type diffraction grating, polarization separation is performed due to the difference in the plane of polarization of the incident light.
次に本発明による偏光ビームスプリッタが実際上どのよ
うに具体化されるかを実施例で説明する。Next, examples will be used to explain how the polarizing beam splitter according to the present invention is actually implemented.
第２図は位相型回折格子の作成方法を示す側面図である
。基板１３にホログラム材料としてＰＶＣｚ （ポリ−
Ｎ−ビニルカルバゾール）系材料を塗布し、その上に２
つの平行光Ｌ１、Ｌ２を、入射角θをもって照射し、干
渉露光を行なう。このとき、入射角θの選定によって、
回折格子の空間周波数を設定できる。すなわち入射角θ
を大きくして、２つのビームし１、Ｌ２の交角を大きく
すると、空間周波数が増大する。露光後、現像すること
で、位相型回折格子が得られる。FIG. 2 is a side view showing a method for producing a phase type diffraction grating. The substrate 13 is made of PVCz (poly-
N-vinylcarbazole) based material is applied, and 2
Two parallel beams L1 and L2 are irradiated at an incident angle θ to perform interference exposure. At this time, depending on the selection of the incident angle θ,
You can set the spatial frequency of the diffraction grating. That is, the angle of incidence θ
By increasing the angle of intersection of the two beams 1 and L2, the spatial frequency increases. After exposure, development is performed to obtain a phase type diffraction grating.
第２図に示すように、等角の２つの平行光Ｌ１、Ｌ２の
角度θを変えて、種々の空間周波数で膜厚２μｍのＰＶ
Ｃｚ系ホログラムを作成する。このようにして作成した
ホログラムを種々の波長の直線偏光レーザで再生し、偏
光特性評価を行った結果を第３図に示す。第３図の縦軸
は回折効率、横軸は空間周波数と使用波長の積（以下ｆ
・λと略記する）である。破線ＳがＳ偏光の回折効率、
ＰがＰ偏光の回折効率である。この特性図から明らかな
ように、ｆ・λによって回折効率ηが異なる。特に、ｆ
・λが１８２を上回ると、Ｓ偏光とＰ偏光との偏光特性
に顕著な違いが表われて（ることがわかる。As shown in Fig. 2, by changing the angle θ of two equiangular parallel beams L1 and L2, a PV film with a film thickness of 2 μm is produced at various spatial frequencies.
Create a Cz-based hologram. The holograms thus created were reproduced using linearly polarized lasers of various wavelengths, and the polarization characteristics were evaluated. The results are shown in FIG. The vertical axis in Figure 3 is the diffraction efficiency, and the horizontal axis is the product of the spatial frequency and the wavelength used (hereinafter f
・Abbreviated as λ). The broken line S is the diffraction efficiency of S-polarized light,
P is the diffraction efficiency of P-polarized light. As is clear from this characteristic diagram, the diffraction efficiency η differs depending on f·λ. In particular, f
- It can be seen that when λ exceeds 182, a remarkable difference appears in the polarization characteristics of S-polarized light and P-polarized light.
このようにＳ偏光とＰ偏光との回折効率の差の大きい領
域で、位相型回折格子を作成し、偏光ビームスプリッタ
として使用すると、優れた偏光分離効果が得られる。If a phase-type diffraction grating is created in such a region where the difference in diffraction efficiency between S-polarized light and P-polarized light is large and used as a polarization beam splitter, an excellent polarization separation effect can be obtained.
さらに具体的な例として、ｆ・λ＝１．６３に着目し、
Ｓ偏光およびＰ偏光の偏光面と回折格子との成す角度を
変えて回折効率を見ると、第４図に示す特性が得られる
。この図は、空間周波数２５００本／ｆｆ＋ｍ、再生波
長 ６３３ｎｍにおける結果である。As a more specific example, focusing on f・λ=1.63,
When looking at the diffraction efficiency by changing the angles formed between the polarization planes of S-polarized light and P-polarized light and the diffraction grating, the characteristics shown in FIG. 4 are obtained. This figure shows the results at a spatial frequency of 2500 lines/ff+m and a reproduction wavelength of 633 nm.
これから明らかなように、入射光と位相型回折格子との
間に、１／２波長板などを入れて、Ｓ偏光およびＰ偏光
の偏光面を位相型回折格子に対し次第にずらしていくと
、Ｓ偏光の回折効率は次第に低下し、Ｐ偏光の回折効率
が次第に増加している。As is clear from this, if a half-wave plate or the like is inserted between the incident light and the phase-type diffraction grating, and the planes of polarization of the S-polarized light and P-polarized light are gradually shifted relative to the phase-type diffraction grating, the S The diffraction efficiency of polarized light is gradually decreasing, and the diffraction efficiency of P-polarized light is gradually increasing.
そして丁度４５°回転した状態では、回折効率が逆転し
ている。When rotated by exactly 45 degrees, the diffraction efficiency is reversed.
したがってこの位相型回折格子を偏光ビームスプリッタ
として使用する場合、Ｓ偏光の偏光面が回折格子に対し
０°すなわち平行となるように直線偏光を入射すること
で、良好な偏光分離作用が得られる。Therefore, when using this phase-type diffraction grating as a polarization beam splitter, a good polarization separation effect can be obtained by inputting linearly polarized light so that the polarization plane of the S-polarized light is 0°, that is, parallel to the diffraction grating.
以上のように本発明によれば、位相型回折格子でも偏光
ビームスプリッタを実現できるため、従来ノブリズム式
偏光ビームスプリッタに比べ、薄くかつ小型軽量化され
る。しかも表面レリーフ型回折格子と違って、表面が平
らなため、表面保護の問題がなく、かつ取扱いも簡便と
なり、低コストな偏光ビーム・スブリフタが実現できる
。As described above, according to the present invention, a polarizing beam splitter can be realized using a phase-type diffraction grating, so that the polarizing beam splitter can be made thinner, smaller, and lighter than a conventional knob rhythm type polarizing beam splitter. Moreover, unlike a surface relief type diffraction grating, since the surface is flat, there is no problem of surface protection, and handling is simple, making it possible to realize a low-cost polarizing beam subrifter.
第１図は本発明による偏光ビームスプリッタの基本原理
を説明する断面図、第２図は本発明による位相型回折格
子の作成方法を示す側面図、第３図はｆ・λに対するＳ
偏光とＰ偏光との回折効率の差を示す特性図、第４図は
Ｓ偏光およびＰ偏光の回折格子に対するずれ角と回折効
率との関係を示す特性図、第５図は従来の光ピツクアッ
プを示す側面図、第６図は従来のプリズム式偏光ビーム
スプリッタを示す斜視図、第７図は従来の表面レリーフ
型回折格子による偏光ビームスプリッタの斜視図である
。
図において、３は偏光ビームスプリッタ、３１．３２は
プリズム、１０は偏光分離膜、１１は表面レリーフ型回
折格子、１２は位相型回折格子、１３は基板をそれぞれ
示す。
特許出願人 富士通株式会社
代理人 弁理士 青 柳 稔
第１図
第２図
ｆ入
第３図
チ・λ ８１６うｌ（之タ丁１七Ｊ−負５念龜−８虹。
第４図Fig. 1 is a cross-sectional view explaining the basic principle of the polarizing beam splitter according to the present invention, Fig. 2 is a side view showing the method for producing a phase type diffraction grating according to the present invention, and Fig. 3 is a
A characteristic diagram showing the difference in diffraction efficiency between polarized light and P-polarized light. Figure 4 is a characteristic diagram showing the relationship between the deviation angle and diffraction efficiency of S-polarized light and P-polarized light with respect to the diffraction grating. Figure 5 shows a conventional optical pickup. 6 is a perspective view of a conventional prism type polarizing beam splitter, and FIG. 7 is a perspective view of a conventional polarizing beam splitter using a surface relief type diffraction grating. In the figure, 3 is a polarizing beam splitter, 31 and 32 are prisms, 10 is a polarization separation film, 11 is a surface relief type diffraction grating, 12 is a phase type diffraction grating, and 13 is a substrate. Patent Applicant: Fujitsu Limited Representative, Patent Attorney Minoru Aoyagi Figure 1 Figure 2 Figure f included Figure 3 Chi/λ 816 ul (No.
Claims (4)
型回折格子を、Ｓ偏光とＰ偏光との回折効率の差が大き
くなる領域で作成することによって、位相型回折格子に
よって偏光分離を行なうことを特徴とする偏光ビームス
プリッタ。(1) By creating a phase-type diffraction grating created by interference and exposure of multiple lights in a region where the difference in diffraction efficiency between S-polarized light and P-polarized light becomes large, polarization separation can be achieved using a phase-type diffraction grating. A polarizing beam splitter characterized by:
有する重合体を主剤とする材料であることを特徴とする
特許請求の範囲第（１）項記載の偏光ビームスプリッタ
。(2) The polarizing beam splitter according to claim (1), wherein the material of the phase type diffraction grating is a material whose main ingredient is a polymer having a carbazole ring.
ルカルバゾール（ＰＶＣｚ）であることを特徴とする特
許請求の範囲第（２）項記載の偏光ビームスプリッタ。(3) The polarizing beam splitter according to claim (2), wherein the polymer having a carbazole ring is polyvinylcarbazole (PVCz).
積が１．２より大きいことを特徴とする特許請求の範囲
第（１）項記載の偏光ビームスプリッタ。(4) The polarizing beam splitter according to claim (1), wherein the product of the spatial frequency of the phase type diffraction grating and the wavelength used is greater than 1.2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9314586A JPS62249107A (en) | 1986-04-22 | 1986-04-22 | Polarizing beam splitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9314586A JPS62249107A (en) | 1986-04-22 | 1986-04-22 | Polarizing beam splitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62249107A true JPS62249107A (en) | 1987-10-30 |
Family
ID=14074363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9314586A Pending JPS62249107A (en) | 1986-04-22 | 1986-04-22 | Polarizing beam splitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62249107A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0547949B1 (en) * | 1991-12-17 | 1997-02-26 | Thomson-Csf | Optical polarization beam splitter and its application for a display system |
| JP2004139074A (en) * | 1996-07-04 | 2004-05-13 | Sanyo Electric Co Ltd | Color liquid crystal display and color filter |
| WO2005017620A3 (en) * | 2003-08-14 | 2005-07-28 | Zeiss Carl Smt Ag | Illumination device and polariser for a microlithographic projection exposure installation |
-
1986
- 1986-04-22 JP JP9314586A patent/JPS62249107A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0547949B1 (en) * | 1991-12-17 | 1997-02-26 | Thomson-Csf | Optical polarization beam splitter and its application for a display system |
| JP2004139074A (en) * | 1996-07-04 | 2004-05-13 | Sanyo Electric Co Ltd | Color liquid crystal display and color filter |
| WO2005017620A3 (en) * | 2003-08-14 | 2005-07-28 | Zeiss Carl Smt Ag | Illumination device and polariser for a microlithographic projection exposure installation |
| US7408622B2 (en) | 2003-08-14 | 2008-08-05 | Carl Zeiss Smt Ag | Illumination system and polarizer for a microlithographic projection exposure apparatus |
| US7847920B2 (en) | 2003-08-14 | 2010-12-07 | Carl Zeiss Smt Ag | Illumination system and polarizer for a microlithographic projection exposure apparatus |
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