JPS62239125A - Production of electrode plate for color display device - Google Patents

Production of electrode plate for color display device

Info

Publication number
JPS62239125A
JPS62239125A JP61083878A JP8387886A JPS62239125A JP S62239125 A JPS62239125 A JP S62239125A JP 61083878 A JP61083878 A JP 61083878A JP 8387886 A JP8387886 A JP 8387886A JP S62239125 A JPS62239125 A JP S62239125A
Authority
JP
Japan
Prior art keywords
color filter
transparent electrode
oxygen
electrode plate
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61083878A
Other languages
Japanese (ja)
Other versions
JPH0453407B2 (en
Inventor
Kenzo Fukuyoshi
健蔵 福吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP61083878A priority Critical patent/JPS62239125A/en
Publication of JPS62239125A publication Critical patent/JPS62239125A/en
Publication of JPH0453407B2 publication Critical patent/JPH0453407B2/ja
Granted legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Abstract

PURPOSE:To prevent peeling and disconnection of a transparent electrode by forming the transparent electrode on a surface which is effected a reversed sputtering treatment on a color filter surface side of the transparent electrode in an atmosphere contg. oxygen. CONSTITUTION:An impurity and a moisture existing on the surface of the substrate is removed by a cleaning action of the reversed sputtering, and the surface of the color filter is oxidized with the plasma of oxygen whereby the substrate having a strong sticking property against the metal oxide film such as ITO, etc., is obtd. More over, in the film of a peptide resin such as gelatin, low mol.wt. gelatin, glue and casein, as a polymerization thereof advances by stimulation of the oxygen plasma, the film itself increases in strength, being resulted side effects such as an increase of the chemical resistant property and a decrease of the thermodeformation degree, etc. The introduction of oxygen gas is in a state mixing with an inactive gas such as argon gas, etc. The compounding ratio of the oxygen gas to the argon gas is preferably 0.1-1.5%.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、カラー液晶ディスプレイ等に用いられる有機
樹脂染色型のカラーフィルターを有するカラー表示装置
用電極板の製造方法に係り、特にカラーフィルターの上
部に透明電極を形成した電極板の製造方法に関するもの
である。
Detailed Description of the Invention <Industrial Application Field> The present invention relates to a method for manufacturing an electrode plate for a color display device having an organic resin-dyed color filter used in a color liquid crystal display, etc. The present invention relates to a method of manufacturing an electrode plate having a transparent electrode formed on the top thereof.

〈従来の技術〉 従来の技術を第3図と第4図の模式断面図にて説明する
<Prior Art> The conventional technology will be explained with reference to the schematic cross-sectional views of FIGS. 3 and 4.

第4図は厚さl MTA程度の透明基板(41)上に透
明電極(43とカラーフィルター(47Jを積層したカ
ラー表示装置用電極板の一従来例である。第3図は透明
基1C3i+の上にカラーフィルターC37Jを形成し
、その上に透明電極ωを形成したー第4図とはカラーフ
イルターと透明電極の位置が逆の構成の他の従来例であ
机        〇 透明電極は、通常工Tンとよばれる酸化インジニウム−
酸化スズの200〜3000λ程度の厚みの透明膜であ
り、カラーフィルターは1部分露光法にてパターン化し
た感光性樹脂のレリーフ像を染料液にて染色する方法(
以下レリーフ染料法という)、易染色性樹脂lの上に部
分露光法により染色したい部分のみを開孔部とした感光
性樹脂のマスク層を介して染料液にて染色する方法(以
下マスク染色法という)や、印刷法にて形成される厚さ
1〜3声 @後の有機樹脂の着色された膜である。これ
らカラー表示装置用電極板は液晶ディスプレイの片方の
電極板に用いられることが多い。
Figure 4 shows a conventional example of an electrode plate for a color display device in which a transparent electrode (43) and a color filter (47J) are laminated on a transparent substrate (41) with a thickness of approximately 1 MTA. A color filter C37J is formed on top of the C37J, and a transparent electrode ω is formed on top of it. Figure 4 is another conventional example in which the positions of the color filter and transparent electrode are reversed. Indinium oxide called T-ton
It is a transparent film of tin oxide with a thickness of about 200 to 3000 λ, and the color filter is made by dyeing a relief image of a photosensitive resin patterned using a partial exposure method with a dye solution (
(hereinafter referred to as "relief dye method"), a method in which dyeing is carried out using a dye liquid through a mask layer of a photosensitive resin with openings (hereinafter referred to as "mask dyeing method") in which only the areas desired to be dyed are dyed using a partial exposure method on an easily dyeable resin (hereinafter referred to as "relief dye method"). It is a colored film of organic resin with a thickness of 1 to 3 layers formed by a printing method. These electrode plates for color display devices are often used as one electrode plate of a liquid crystal display.

カラーフィルターの上に透明電極を形成するにはイオン
ブレーティングやスパッタリングといりたプラズマアシ
ストの手法が用いられる。
Plasma-assisted techniques such as ion blasting and sputtering are used to form transparent electrodes on color filters.

〈発明が解決しようとする問題点〉 第4図に示した従来例ではカラーフィルター(421が
透明電極(4′3の上に積層されるため、例えば液晶に
かかる実効電圧が30%前後低下し、応答性やコントラ
ストの大幅な減少を生じる。第3図の例では透明電極(
至)がカラーフィルターc33の上に在るためこの欠点
がないが、従来の直接透明電極■をカラーフィルター国
の上に積層する方法では、欠点として ■透明電極とカラーフィルターとの間に十分な密着力が
得られず、液晶封入の際や、また、ラビング処理のとき
に透明電極が剥れてしまう。
<Problems to be solved by the invention> In the conventional example shown in FIG. , a significant decrease in responsiveness and contrast occurs.In the example in Figure 3, the transparent electrode (
) is on top of the color filter C33, so there is no such drawback. However, in the conventional method of directly stacking the transparent electrode on top of the color filter, there is a drawback that there is no sufficient space between the transparent electrode and the color filter. Adhesion cannot be obtained, and the transparent electrode peels off during liquid crystal encapsulation or rubbing treatment.

■レリーフ染色法で形成したカラーフィルターでは、該
カラーフィルター上にアクリル系樹脂のオーバーコート
を設ければ接着力が多少改善できるが、この材料は透明
電極の膜付は後の熱処理でシワやフクレを発生しやすい
■For color filters formed using the relief dyeing method, the adhesion can be improved to some extent by providing an acrylic resin overcoat on the color filter, but this material does not wrinkle or blister due to subsequent heat treatment. is likely to occur.

■透明電極の膜付けの後、通常フォトレジストを用いた
エツチングにて透明電極をパタニングするが、レリーフ
染色法で形成したカラーフィルターではこのときに脱色
やクラックを生じやす一′0 ということがあった。
■After attaching the transparent electrode film, the transparent electrode is usually patterned by etching using photoresist, but color filters formed by the relief dyeing method are prone to decolorization and cracking during this process. Ta.

く問題点を解決するための手段〉 本発明は、有機樹脂層を色料(染料、顔料)で着色して
なるカラーフィルターを少なくとも有する透明基板のカ
ラーフィルター面側を酸素を含む雰囲気で逆スパッタリ
ング処理面の上に透明電極を形成することを特徴とする
カラー表示装置用電極板の製造法であり、さらに言えば
、逆スパッタリング処理面は、カラーフィルター表面そ
のものである場合と、カラーフィルター上のオーバーコ
ート面である場合がある。とりわけ、逆スパッタリング
処理されるカラーフィルターまたはオーバーコートの材
質が、ゼラチン、低分子量ゼラチン、グリュー、カゼイ
ン等のペプチド樹脂であることが好ましい。
Means for Solving the Problems> The present invention provides reverse sputtering in an oxygen-containing atmosphere on the color filter surface side of a transparent substrate having at least a color filter formed by coloring an organic resin layer with a colorant (dye, pigment). This is a method of manufacturing an electrode plate for a color display device, which is characterized by forming a transparent electrode on a treated surface. Furthermore, the reverse sputtering treated surface may be the color filter surface itself, or a layer on the color filter. May be an overcoated surface. In particular, the material of the color filter or overcoat to be reverse sputtered is preferably gelatin, low molecular weight gelatin, glue, casein or other peptide resin.

く作用〉 まず、逆スパッタリングのクリーニング作用で表面の不
純物や水分が取り除かれることと、さらに酸素のプラズ
マでカラーフィルターの表面を酸化するためITO等の
金属酸化物膜との密着が強1:E  L  fp  @
  コ;+4h  −AC11k  7−  tk−1
)4;kX+−’L  シ、Iff  −)/  −y
  4−ン、低分子量ゼラチン、グリュー、カゼイン等
のペプチド樹脂の膜ではプラズマの刺激により重合が進
むため、膜自体が強固になり、耐薬品性の向上、熱変形
の度合の減少等の副次作用をもたらす。
First, the cleaning effect of reverse sputtering removes impurities and moisture from the surface, and the oxygen plasma oxidizes the surface of the color filter, which strengthens the adhesion with metal oxide films such as ITO. L fp @
+4h -AC11k 7-tk-1
)4;kX+-'L shi, Iff-)/-y
In the case of membranes made of peptide resins such as polyester, low molecular weight gelatin, glue, and casein, polymerization progresses due to plasma stimulation, which makes the membrane itself stronger and has secondary effects such as improved chemical resistance and reduced degree of thermal deformation. bring about action.

逆スパッタリングにおける酸素ガスの導入は、アルゴン
等の不活性元素と混合した状態で行なわれる。アルゴン
ガスαr)に対する酸素ガス(02)の分率は、0.1
〜15%好ましくは0.4〜3%の範囲が良い。スパッ
タ一時の圧力は10−4〜10−”Torr、スパッタ
ー電圧は0.5〜5KV程度が適当である。
Oxygen gas is introduced in reverse sputtering in a state mixed with an inert element such as argon. The fraction of oxygen gas (02) to argon gas αr) is 0.1
A good range is 15% to 15%, preferably 0.4 to 3%. Appropriate pressure during sputtering is 10-4 to 10-'' Torr and sputtering voltage is approximately 0.5 to 5 KV.

この条件で、処理時間は10秒程度から効果があられれ
、約10分間程度を上限とするのが適当である。
Under these conditions, the treatment time will be effective from about 10 seconds, and it is appropriate to set the upper limit to about 10 minutes.

本発明を実施例とともに詳細に説明する。The present invention will be explained in detail along with examples.

〔実施例]〕〔Example]〕

第1図は、本発明の一実施態様であるが透明基板(11
)上にエポキシ樹脂系のバインダーを用いた顔料インキ
にてカラーフィルター(121を印刷形成した(7〕′ 後、スパッタリング装置にて1%の酸素を含むアルゴン
ガス1lJ1[の圧力3 X In−”Torr で2
KW−2分間の逆スパッタリングを施した。この後、正
スパッタリングにて透明電極を1200尺膜付けした。
FIG. 1 shows a transparent substrate (11
) was printed with a color filter (121) using pigment ink using an epoxy resin binder. 2 at Torr
Reverse sputtering was performed for KW-2 minutes. Thereafter, a 1200-thick film of transparent electrode was attached by forward sputtering.

密着力はセロテープ剥離テスト及び液晶封入においても
十分なものでありた。
Adhesion was also sufficient in cellophane tape peeling tests and liquid crystal encapsulation.

〔実施例2〕 第2図は、本発明の一実施態様であるが、透明基板(2
1)上に公知のレリーフ染色法にてゼラチンを用いてR
(赤色)、G(緑色)、B(青色)のフィルターを約1
.4μm膜厚で設け、カラーフィルター 021とした
後同じゼラチンにて0.3μmのオーツ(−コート(2
滲を形成した。〔実施例1〕と同様に1%の酸A含むア
ルゴンガス雰囲気内で逆スノ(ツタリングを行った。こ
の後、正スノくツタリングにてITO膜を1200人膜
付けした。
[Example 2] Figure 2 shows one embodiment of the present invention, in which a transparent substrate (2
1) R on the top using gelatin using a known relief staining method.
Approximately 1 (red), G (green), and B (blue) filter
.. After forming a color filter 021 with a film thickness of 4 μm, a 0.3 μm layer of oats (-coat (2) was coated with the same gelatin.
A ooze formed. Similar to [Example 1], reverse sloping was performed in an argon gas atmosphere containing 1% acid A. Thereafter, 1,200 ITO films were deposited by normal sloping.

米国ンブレイ社のフォトレジストAZ1350を用いて
、マスクパターンを設けた後、塩酸10%水溶液にてエ
ツチングし透明電極(231とした。
A mask pattern was formed using a photoresist AZ1350 manufactured by U.S. Envray Co., Ltd., and then etched with a 10% aqueous solution of hydrochloric acid to form a transparent electrode (231).

エツチング時にもオーバーコー) C24)に異常はみ
られずカラーフィルター(2zの脱色も観察されなかり
た0 透明電極のの密着力はセロテープ剥離テスト、及び液晶
封入においても十分なものであった。
During etching, no abnormalities were observed in the overcoat (C24), and no decolorization of the color filter (2z) was observed.The adhesion of the transparent electrode was also sufficient in the cellophane tape peel test and in the liquid crystal encapsulation.

以上の実施例において、ITO等の透明電極に対する密
着力を中心に説明したが、5in2(二酸化硅素)等の
他の無機酸化物との密着力も向上する。
In the above embodiments, the adhesion to transparent electrodes such as ITO was mainly explained, but the adhesion to other inorganic oxides such as 5in2 (silicon dioxide) is also improved.

したがって、中間層や配向膜あるいは低反射膜としてS
in、等の無機酸化物膜をカラーフィルターの間隙や上
部に積層しても良い。さらに、電気的コンタクトをとる
ための金属膜を端子部に、同様にハンダ付けやワイヤー
ボンディングのためのメタライズ処理を加えても本発明
の眼目を左右するものでない。また、〔実施例2〕では
レリーフ染色法で示したが、マスク染色法であっても差
しつかえない。
Therefore, as an intermediate layer, alignment film, or low reflection film, S
An inorganic oxide film such as in, etc. may be laminated in the gaps or on top of the color filter. Furthermore, even if a metal film for making electrical contact is added to the terminal portion and a metallization process is similarly applied for soldering or wire bonding, the object of the present invention will not be affected. Further, although the relief staining method was used in [Example 2], a mask staining method may also be used.

〈発明の効果〉 本発明により、透明電極の密着力が向上したため、従来
みもれたカラーフィルターからの透明電極の剥離がなく
なり、断線等の欠陥が減少した。
<Effects of the Invention> According to the present invention, the adhesion of the transparent electrode has been improved, so that peeling of the transparent electrode from the color filter, which has conventionally occurred, has been eliminated, and defects such as wire breakage have been reduced.

液晶封入プロセス中の熱処理においても十分な耐熱性を
示した。もちろん、透明電極のノくタニングに必要な耐
薬品性も十分であった。
It also showed sufficient heat resistance during heat treatment during the liquid crystal encapsulation process. Of course, the chemical resistance required for tanning the transparent electrode was also sufficient.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の製造方法により得られるカラー表示
装置用電極板の一実施例を示す模式断面図であり、第2
図は、本発明の製造方法によって得られるカラー表示装
置用電極板の他の実施例を示す模式断面図であり、第3
図および第4図は、従来のカラー表示装量用電極板の一
例を示す模式断面図である。 (Ll) (211C31) (41)・・・ 透明基
板CI2 (221G32 (42−=−、・、  カ
ラーフィルター(131t231 C33(43・・・
 透明電極□□□・・ オーバーコート
FIG. 1 is a schematic cross-sectional view showing one embodiment of an electrode plate for a color display device obtained by the manufacturing method of the present invention, and FIG.
The figure is a schematic cross-sectional view showing another example of an electrode plate for a color display device obtained by the manufacturing method of the present invention.
FIG. 4 is a schematic cross-sectional view showing an example of a conventional color display electrode plate. (Ll) (211C31) (41)... Transparent substrate CI2 (221G32 (42-=-,...) Color filter (131t231 C33 (43...
Transparent electrode□□□・・Overcoat

Claims (5)

【特許請求の範囲】[Claims] (1)有機樹脂を色料で着色してなるカラーフィルター
を少なくとも有する透明基板のカラーフィルター面側を
酸素を含む雰囲気で逆スパッタリング処理し、しかる後
に前記逆スパッタリング処理面の上に透明電極を形成す
ることを特徴とするカラー表示装置用電極板の製造法。
(1) The color filter surface side of a transparent substrate having at least a color filter formed by coloring an organic resin with a colorant is subjected to reverse sputtering treatment in an atmosphere containing oxygen, and then a transparent electrode is formed on the reverse sputtering treated surface. A method for manufacturing an electrode plate for a color display device, characterized by:
(2)逆スパッタリング処理面が、カラーフィルター表
面そのものである特許請求の範囲第1項記載のカラー表
示装置用電極板の製造法。
(2) The method for manufacturing an electrode plate for a color display device according to claim 1, wherein the reverse sputtering treated surface is the color filter surface itself.
(3)逆スパッタリング処理面がカラーフィルター上の
オーバーコート面である特許請求の範囲第1項記載のカ
ラー表示装置用電極板の製造法。
(3) The method for manufacturing an electrode plate for a color display device according to claim 1, wherein the reverse sputtering treated surface is an overcoat surface on a color filter.
(4)カラーフィルターの材質が、ゼラチン、低分子量
ゼラチン、グリュー、カゼインから選択される一種であ
る特許請求の範囲第2項記載のカラー表示装置用電極板
の製造法。
(4) The method for manufacturing an electrode plate for a color display device according to claim 2, wherein the material of the color filter is one selected from gelatin, low molecular weight gelatin, glue, and casein.
(5)オーバーコートの材質がゼラチン、低分子量ゼラ
チン、グリュー、カゼインから選択される一種である特
許請求の範囲第3項記載のカラー表示装置用電極板の製
造法。
(5) The method for manufacturing an electrode plate for a color display device according to claim 3, wherein the material of the overcoat is one selected from gelatin, low molecular weight gelatin, glue, and casein.
JP61083878A 1986-04-11 1986-04-11 Production of electrode plate for color display device Granted JPS62239125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61083878A JPS62239125A (en) 1986-04-11 1986-04-11 Production of electrode plate for color display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61083878A JPS62239125A (en) 1986-04-11 1986-04-11 Production of electrode plate for color display device

Publications (2)

Publication Number Publication Date
JPS62239125A true JPS62239125A (en) 1987-10-20
JPH0453407B2 JPH0453407B2 (en) 1992-08-26

Family

ID=13814915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61083878A Granted JPS62239125A (en) 1986-04-11 1986-04-11 Production of electrode plate for color display device

Country Status (1)

Country Link
JP (1) JPS62239125A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168624A (en) * 1987-01-07 1988-07-12 Hitachi Ltd Color liquid crystal display element
US5045418A (en) * 1988-01-29 1991-09-03 Toppan Printing Co., Ltd. Electrode plate for display device and method for preparation thereof
JPH0627476A (en) * 1991-04-03 1994-02-04 Toyo Kohan Co Ltd Formation of liquid crystal panel electrode
JP2001337347A (en) * 2000-05-29 2001-12-07 Toshiba Corp Liquid crystal display device and method of manufacture thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168624A (en) * 1987-01-07 1988-07-12 Hitachi Ltd Color liquid crystal display element
US5045418A (en) * 1988-01-29 1991-09-03 Toppan Printing Co., Ltd. Electrode plate for display device and method for preparation thereof
JPH0627476A (en) * 1991-04-03 1994-02-04 Toyo Kohan Co Ltd Formation of liquid crystal panel electrode
JP2001337347A (en) * 2000-05-29 2001-12-07 Toshiba Corp Liquid crystal display device and method of manufacture thereof

Also Published As

Publication number Publication date
JPH0453407B2 (en) 1992-08-26

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