JPS62212267A - Manufacture of aluminum nitride sintered body - Google Patents
Manufacture of aluminum nitride sintered bodyInfo
- Publication number
- JPS62212267A JPS62212267A JP61055056A JP5505686A JPS62212267A JP S62212267 A JPS62212267 A JP S62212267A JP 61055056 A JP61055056 A JP 61055056A JP 5505686 A JP5505686 A JP 5505686A JP S62212267 A JPS62212267 A JP S62212267A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- aluminum nitride
- nitride sintered
- manufacture
- sintering aid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 6
- 238000005245 sintering Methods 0.000 claims description 12
- 150000004703 alkoxides Chemical class 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011812 mixed powder Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000012752 auxiliary agent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は熱伝導性に優れた窒化アルミニウム（ＡｆＩＮ
）焼結体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is directed to aluminum nitride (AfIN), which has excellent thermal conductivity.
) Regarding a method for producing a sintered body.
従来の技術
Ａｌ１Ｎ焼結体は耐熱性、耐食性１強度をどの優れた特
性の他に、理論値では３２０Ｗ／ｍＫと極めて高い熱伝
導性を有する絶縁体でＩＣ基板用等に広範な利用が基体
されている。Conventional technologyAl1N sintered bodies have excellent properties such as heat resistance, corrosion resistance, and strength, and are an insulator with an extremely high thermal conductivity of 320 W/mK in theory, and are widely used for IC substrates etc. has been done.
しかしながら現実には高々４０Ｗ／ｍＫ程度の熱伝導度
を有するものしか得られていない。その理由はＡ皇Ｎ粒
子の表面を覆う酸化層や不純物として含まれるＡｌｑ
Ｏ３が焼結体の粒界にへｌ−〇−Ｎ相として残ったり、
酸素がＡＩＮ粒子中に固溶してフ、オノンの散乱の原因
となるためζされる。 −
このため、特開昭６０−１８０９６４で提案しているよ
うに、各種の硝Ｍ場を用いる方法が用いられる。こうす
ることで焼結工程中に原料中の酸素を助剤がトラップし
てＹＡＧ相を形成し、熱伝導度が向上するといわれる。However, in reality, only those having a thermal conductivity of about 40 W/mK have been obtained. The reason for this is the oxide layer covering the surface of the A-N particles and the Alq contained as an impurity.
O3 remains at the grain boundaries of the sintered body as an l-〇-N phase,
Oxygen is dissolved in the AIN particles and causes scattering of fluorophores and onones, so it is ζ. - For this reason, methods using various types of nitrile M fields are used, as proposed in JP-A-60-180964. It is said that by doing this, the auxiliary agent traps oxygen in the raw material during the sintering process to form a YAG phase, improving thermal conductivity.
発表されたデータによると１４０Ｗ／ｍＫまで向上する
。According to published data, it can be improved to 140W/mK.
発明が解決しようとする問題点
しかしながら、硝１％ａｍを用いることは、゛■昇渇過
程中に極めて腐食性の高いガスが発生するため一度に大
量の焼結が困難なこと、■硝酸塩が供給する酸素が高熱
伝導性を阻害すること等の欠点を右づる。Problems to be Solved by the Invention However, the use of 1% nitric am is difficult to sinter in large quantities at one time because highly corrosive gas is generated during the heating process; The disadvantages include that the oxygen supplied inhibits high thermal conductivity.
本発明の目的は、高熱伝導性を有するＡＩＮ焼結体のｖ
Ｊ造方法を提供することである。The object of the present invention is to provide a v
The objective is to provide a J-building method.
問題点を解決するための手段
本発明は周期律表Ｉ［ａ／＃ｉ又はｉｌａ族の金属アル
コキシドを焼結助剤として用いた高熱伝ＩＦＡＩＩＮ焼
結体の製造方法である。Means for Solving the Problems The present invention is a method for producing a high heat conductivity IFAIIN sintered body using a metal alkoxide of group I [a/#i or ila of the periodic table] as a sintering aid.
本発明においてアルコキシドは加水分解によって酸化物
を生成するが、副産物は主としてアルコールであるため
、容易にかつ安全に除去が可能である。また、副産物と
して発生するアルコールは比較的低温で揮升するため酸
素の供給源とはなり得ない。またＡＩＮの表面にごく薄
く焼結助剤を付着させることが可能となるため、焼結後
熱伝３等性を阻害するＹＡＧ相の絶対はを減少させるこ
とが可能である。結果として従来にない高熱伝導性を有
するＡｕＮ焼結体を安価に製造することが可能になる。In the present invention, an alkoxide is hydrolyzed to produce an oxide, but since the by-product is mainly alcohol, it can be easily and safely removed. In addition, the alcohol generated as a by-product volatilizes at a relatively low temperature, so it cannot serve as a source of oxygen. Furthermore, since it is possible to attach a very thin layer of sintering aid to the surface of AIN, it is possible to reduce the absolute strength of the YAG phase which inhibits heat transfer after sintering. As a result, it becomes possible to manufacture an AuN sintered body having unprecedented high thermal conductivity at low cost.
実施例
第１図に示す流動層式噴霧乾燥機を用いてＡＩＮと各種
焼結助剤の混合粉末を得た。すなわち図において１は水
と金属アルコキシドの混合溶液、２はノズルへの搬送シ
ステム、３は噴霧ノズル、４は導入ガス、５はガスの加
熱ヒーター、６はＡｆＮ粉末、７はフィルター、８は反
応容器を示す。Example A mixed powder of AIN and various sintering aids was obtained using a fluidized bed spray dryer shown in FIG. That is, in the figure, 1 is a mixed solution of water and metal alkoxide, 2 is a conveyance system to the nozzle, 3 is a spray nozzle, 4 is an introduction gas, 5 is a gas heater, 6 is an AfN powder, 7 is a filter, and 8 is a reaction Indicates the container.
圧縮された尋人ガス４は加熱ヒーター５で所定の温度に
加熱され、フィルター７の細穴を通過してＡｊｌＮ粉末
６を反応容１ａ８内にまい上らせる。The compressed gas 4 is heated to a predetermined temperature by the heater 5, passes through the pores of the filter 7, and causes the AjIN powder 6 to rise into the reaction volume 1a8.
−力水と金属アルコールを所定比に混合した溶液１は搬
送システム２および噴射ノズル３を通じて一定速度で容
器８内に供給される。ここでＡＩＮ粉末６の表面上でア
ルコキシドは加水分解され、ＡｉＮの表面に数１００オ
ングストローム以下の酸化物焼結助剤が付着する。この
ようにして得られた混合粉末をプレス成形後１８００℃
、１気圧のＮ２ガス中で１時間保存して焼結体を得た。- A solution 1 in which water and metal alcohol are mixed in a predetermined ratio is fed into a container 8 at a constant rate through a conveying system 2 and an injection nozzle 3. Here, the alkoxide is hydrolyzed on the surface of the AIN powder 6, and an oxide sintering aid of several hundred angstroms or less is attached to the surface of the AiN. The thus obtained mixed powder was press-molded at 1800°C.
A sintered body was obtained by storing it for 1 hour in N2 gas at 1 atm.
第１表に用いた金属アルコキシドと焼結体の熱伝導度お
よび密度比を示す。Table 1 shows the thermal conductivity and density ratio of the metal alkoxide and sintered body used.
第１表
このようにＩ［ａ族、［［ａ族のアルコキシドを用いて
製造したＡｉＮ焼結体は高い熱伝導度を示した。Table 1 As shown in Table 1, the AiN sintered bodies produced using the I[a group and [[a group] alkoxides exhibited high thermal conductivity.
発明の効果
本発明によれば極めて高い熱伝導性を有するＡｊｌＮ焼
結体の製造が可能となる。Effects of the Invention According to the present invention, it is possible to manufacture an AjIN sintered body having extremely high thermal conductivity.
第１図は、ＡｆＬＮと焼結助剤の混合粉末を得るために
用いた実施例に係る装置図である。
１・・・水／アルコキシド混合液、２・・・搬送システ
ム、３・・・噴射ノズル、４・・・導入ガス、５・・・
ヒーター、６・・・△ｉＮ粉末、７・・・フィルター、
８・・・反応容器。FIG. 1 is a diagram of an apparatus according to an example used to obtain a mixed powder of AfLN and a sintering aid. DESCRIPTION OF SYMBOLS 1... Water/alkoxide mixed liquid, 2... Conveyance system, 3... Injection nozzle, 4... Introduced gas, 5...
Heater, 6...△iN powder, 7... Filter,
8...Reaction container.
Claims (3)
る混合物を焼結する窒化アルミニウム焼結体の製造方法
において、焼結助剤として金属のアルコキシドを用いる
ことを特徴とする窒化アルミニウム焼結体の製造方法。(1) A method for producing an aluminum nitride sintered body by sintering a mixture mainly composed of aluminum nitride powder and a sintering aid, characterized in that a metal alkoxide is used as the sintering aid. Method for producing solids.
キシドを用いる特許請求の範囲第１項記載の窒化アルミ
ニウム焼結体の製造方法。(2) The method for producing an aluminum nitride sintered body according to claim 1, wherein an alkoxide of a group IIa metal of the periodic table is used as the sintering aid.
コキシドを用いる特許請求の範囲第１項記載の窒化アル
ミニウム焼結体の製造方法。(3) The method for producing an aluminum nitride sintered body according to claim 1, wherein an alkoxide of a group IIIa metal of the periodic table is used as the sintering aid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61055056A JPS62212267A (en) | 1986-03-14 | 1986-03-14 | Manufacture of aluminum nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61055056A JPS62212267A (en) | 1986-03-14 | 1986-03-14 | Manufacture of aluminum nitride sintered body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62212267A true JPS62212267A (en) | 1987-09-18 |
Family
ID=12988023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61055056A Pending JPS62212267A (en) | 1986-03-14 | 1986-03-14 | Manufacture of aluminum nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62212267A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235262A (en) * | 1986-04-07 | 1987-10-15 | 住友電気工業株式会社 | Manufacture of aluminum nitride sintered body |
| JPS632860A (en) * | 1986-06-20 | 1988-01-07 | ティーディーケイ株式会社 | Aluminum nitride sintered body |
| JPS63242972A (en) * | 1987-03-31 | 1988-10-07 | 株式会社東芝 | Manufacture of aluminum nitride sintered body |
-
1986
- 1986-03-14 JP JP61055056A patent/JPS62212267A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62235262A (en) * | 1986-04-07 | 1987-10-15 | 住友電気工業株式会社 | Manufacture of aluminum nitride sintered body |
| JPS632860A (en) * | 1986-06-20 | 1988-01-07 | ティーディーケイ株式会社 | Aluminum nitride sintered body |
| JPS63242972A (en) * | 1987-03-31 | 1988-10-07 | 株式会社東芝 | Manufacture of aluminum nitride sintered body |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE327852T1 (en) | METHOD FOR PRODUCING METAL POWDER BY THERMAL DECOMPOSITION | |
| JPS62212267A (en) | Manufacture of aluminum nitride sintered body | |
| CN109205579B (en) | Preparation method of aluminum nitride | |
| JPS60151281A (en) | Aluminum nitride sintered body | |
| JPH02111663A (en) | Porous conductive material | |
| JPS62256767A (en) | Manufacture of composite sintered body comprising carbonitride and oxide | |
| JPH02279568A (en) | Aluminum nitride-based sintered body and its production | |
| JP2683704B2 (en) | Manufacturing method of aluminum nitride | |
| JPH01126276A (en) | Production of ceramic sintered body | |
| JPS5921577A (en) | Method of sintering silicon carbide powder molded body | |
| JPS63210003A (en) | Production of aluminum nitride powder | |
| JPS62265106A (en) | Aluminum nitride powder and its production | |
| JPS6321254A (en) | Manufacture of silicon nitride ceramics | |
| JP2008044846A (en) | Aluminum nitride sintered compact and electrostatic chuck using the same | |
| JP3839514B2 (en) | Silicon nitride sintered body and method for producing the same | |
| JPS62100477A (en) | Silicon carbide base parts for dry etching equipment | |
| JPS63206360A (en) | Manufacture of aluminum nitride sintered body | |
| JPS6317219A (en) | Production of ceramic powder | |
| JPH0345034B2 (en) | ||
| JPS63277568A (en) | Production of sintered aluminum nitride having high thermal conductivity | |
| JPS5891060A (en) | Manufacture of silicon carbide sintered body | |
| JPS60166264A (en) | Method of sintering silicon carbide | |
| JPS63139005A (en) | Production of powdery starting material for ceramic | |
| JPH0234566A (en) | Aluminum nitride-based powder and production thereof | |
| JPH01201087A (en) | Production of porous silicon carbide material |