JPS62198045A - Electron beam radiating device - Google Patents
Electron beam radiating deviceInfo
- Publication number
- JPS62198045A JPS62198045A JP61039848A JP3984886A JPS62198045A JP S62198045 A JPS62198045 A JP S62198045A JP 61039848 A JP61039848 A JP 61039848A JP 3984886 A JP3984886 A JP 3984886A JP S62198045 A JPS62198045 A JP S62198045A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- central conductor
- heat
- center conductor
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 27
- 239000004020 conductor Substances 0.000 claims abstract description 42
- 239000012212 insulator Substances 0.000 claims abstract description 24
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 4
- 239000010935 stainless steel Substances 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） この発明は電子線照射装置に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to an electron beam irradiation device.
（従来の技術）
電子線照射装置において、電子線源を長尺状とし帯状に
電子線を発生するようにしたものは既によく知られてい
る。ところで従来のこの種装置は絶縁碍子に支持されで
ある中心導体に電子線源を固定して支持するようにして
いた。(Prior Art) Among electron beam irradiation devices, one in which an electron beam source is elongated and generates an electron beam in a band shape is already well known. By the way, in conventional devices of this type, the electron beam source is fixed and supported on a central conductor supported by an insulator.
第２図は従来のこの種装置の断面図を示し、１は真空容
器、２は絶縁ガスが充満されであるタンク、３は真空容
器１とタンク２とを連結するように取り付けである絶縁
碍子で、たとえばエポキシ樹脂などによって製作されで
ある。４は電子線源で、加熱されることによフて電子線
を発生するカソード５と、これを包囲するシールド電極
６と、電子引出用のスクリーン７とによって主として構
成されである。FIG. 2 shows a cross-sectional view of a conventional device of this kind, in which 1 is a vacuum container, 2 is a tank filled with insulating gas, and 3 is an insulator installed to connect vacuum container 1 and tank 2. For example, it is made of epoxy resin. Reference numeral 4 denotes an electron beam source, which is mainly composed of a cathode 5 which generates an electron beam when heated, a shield electrode 6 surrounding the cathode 5, and a screen 7 for extracting electrons.
シールド電極６は、絶縁碍子３を貫通するように固定さ
れである中心導体８の端部に、熱絶縁体９を介してナラ
１−などによって固定支持されである。中心導体８の他
方の端部は導入端子部１０によって気密に封止されであ
る。前記カソード５のリード線１１は前記導入端子部１
０に絶縁された状態でタンク２内に導出されてあり、そ
の先端において加熱用の電源１２に接続されである。１
３は電子線加速用の電源、１４は電界緩和用のフープで
、中心導体８に支持されである。The shield electrode 6 is fixedly supported on the end of the center conductor 8 which is fixed so as to penetrate through the insulator 3, with a heat insulator 9 interposed therebetween, by a nail 1- or the like. The other end of the center conductor 8 is hermetically sealed by an introduction terminal 10. The lead wire 11 of the cathode 5 is connected to the introduction terminal portion 1
It is led out into the tank 2 in an insulated state, and connected to a heating power source 12 at its tip. 1
3 is a power source for accelerating the electron beam, and 14 is a hoop for relaxing the electric field, which is supported by the center conductor 8.
カソード５が電源１２によって加熱されるとこれより電
子線が発射され、電源１３によって加速されて照射窓Ｉ
Ａより外部に照射される。ところで第２図に示す従来構
成では、電子線源４がアルミニュームのような熱伝導の
良い材料からなる中心導体８に支持されているため、如
何に熱絶縁体９が介在していても、カソード５を加熱し
たときにこれよりの熱が、シールド電極６より中心導体
８を介して絶縁碍子３に伝導されるようになる。When the cathode 5 is heated by the power source 12, an electron beam is emitted from the cathode 5, which is accelerated by the power source 13 and sent to the irradiation window I.
The light is irradiated from A to the outside. By the way, in the conventional configuration shown in FIG. 2, since the electron beam source 4 is supported by the center conductor 8 made of a material with good thermal conductivity such as aluminum, no matter how much the thermal insulator 9 is interposed, When the cathode 5 is heated, heat from the cathode 5 is conducted from the shield electrode 6 to the insulator 3 via the center conductor 8.
このような熱伝導により絶縁碍子３自体の温度が上昇す
る。一般にエポキシ樹脂等の絶縁体は。Due to such heat conduction, the temperature of the insulator 3 itself increases. Generally, insulators such as epoxy resin.
その物質中の吸着ガス量が多く、がっ加熱により分解ガ
スも多く発生するため、発生したガスがイオン化し、そ
のものが部分放電のトリガーとなり。The amount of adsorbed gas in the substance is large, and a large amount of decomposed gas is generated when the material is heated, so the generated gas becomes ionized, which itself triggers partial discharge.
全体の耐電圧の劣化を生じるようになる。これでは電子
線源４を長期にわたって電気的な絶縁を維持することが
できないようになる。This causes deterioration of the overall withstand voltage. This makes it impossible to maintain electrical insulation of the electron beam source 4 for a long period of time.
（発明が解決しようとする問題点）
この発明は電子線源の発熱に基づく熱伝導により、絶縁
碍子の温度が上昇してその耐電圧が劣化するのを確実に
防止することを目的とする。(Problems to be Solved by the Invention) An object of the present invention is to reliably prevent the temperature of an insulator from increasing and its withstand voltage from deteriorating due to heat conduction based on heat generated by an electron beam source.
（問題点を解決するための手段）
この発明は電子線源のシールド電極を従来のように中心
導体に直接支持するのを止めて、中心導体の内部に低熱
伝導性の固定管を設け、この固定管の端部にシールド電
極を固定するとともに、固定管の他方の端部を、絶縁碍
子に貫通支持されてあってかつ導入端子部によって封止
されている中心導体の端部に熱絶縁体を介して固定した
ことを特徴とする。(Means for Solving the Problems) This invention does not directly support the shield electrode of an electron beam source on the center conductor as in the past, but instead provides a fixed tube with low thermal conductivity inside the center conductor. A shield electrode is fixed to the end of the fixed tube, and a thermal insulator is attached to the other end of the fixed tube at the end of the center conductor, which is supported through the insulator and sealed by the lead-in terminal. It is characterized by being fixed through.
（作用）
中心導体の端部にはシールド電極が連結されておらず、
その端部は真空容器内で開口しているので、中心導体の
内部は真空であるため、固定管に電子線源から熱が伝導
されてきても、その熱は中心導体に輻射されにくくなる
。また固定管に熱が伝導されてきても、固定管はステン
レスのような低熱伝導率の材料によって構成されである
ことと、固定管と中心導体とは熱絶縁体を介して連結さ
れであることとにより、従来構成に比較して中心導体へ
の熱伝導は著しく低減されるようになる。(Function) No shield electrode is connected to the end of the center conductor.
Since its end is open in the vacuum container, the inside of the center conductor is in a vacuum, so even if heat is conducted from the electron beam source to the fixed tube, the heat is less likely to be radiated to the center conductor. Also, even if heat is conducted to the fixed tube, the fixed tube must be made of a material with low thermal conductivity such as stainless steel, and the fixed tube and center conductor must be connected via a thermal insulator. As a result, heat conduction to the center conductor is significantly reduced compared to the conventional configuration.
（実施例）
この発明を第１図によって説明する。なお第２図と同じ
符号を附した部分は同一または対応する部分を示す。こ
の発明にしたがいステンレス、モリブデン、ニッケルな
どのように、アルミニューム、鉄などに比較して低熱伝
導率の材料からなる固定管１５を用意し、これを中心導
体８の内部に挿通するとともに、その一方の端部にシー
ルド電極６の端部をボルトなどによって固定する。(Example) This invention will be explained with reference to FIG. Note that parts given the same reference numerals as in FIG. 2 indicate the same or corresponding parts. According to this invention, a fixed tube 15 made of a material such as stainless steel, molybdenum, or nickel, which has a lower thermal conductivity than aluminum or iron, is prepared, and is inserted into the center conductor 8. An end of the shield electrode 6 is fixed to one end with a bolt or the like.
固定管１５の他方の端部は導入端子部１０に中心導体８
とともにボルトなどによって固定される。The other end of the fixed tube 15 connects the center conductor 8 to the introduction terminal section 10.
It is fixed with bolts etc.
このとき固定管１５と中心導体８との間に、セラミック
、結晶化ガラスなどからなる熱絶縁体１６を介在させ、
固定管１５からの熱伝導を極力遮断するようにする。ま
たフープ１４はシールド電極６に支持せしめである。At this time, a thermal insulator 16 made of ceramic, crystallized glass, etc. is interposed between the fixed tube 15 and the center conductor 8,
Heat conduction from the fixed tube 15 is cut off as much as possible. Further, the hoop 14 is supported by the shield electrode 6.
電子線発射のためにカソード５が電源１２によって加熱
されると、その熱は従来と同様にシールド電極６を介し
て中心導体８側に伝導されようとする。しかしシールド
電極６は従来と異なって、中心導体８の端部には連結さ
れておらず、固定管１５に固定支持されており、固定管
１５の端部は真空容器１内で開口しているので、中心導
体８の内部は真空であるため、固定管１５に熱が伝導さ
れてきても、その熱は中心導体８に輻射されにくくなる
。When the cathode 5 is heated by the power source 12 for electron beam emission, the heat tends to be conducted to the center conductor 8 side via the shield electrode 6 as in the conventional case. However, unlike the conventional case, the shield electrode 6 is not connected to the end of the center conductor 8, but is fixedly supported by a fixed tube 15, and the end of the fixed tube 15 is opened inside the vacuum vessel 1. Therefore, since the inside of the center conductor 8 is a vacuum, even if heat is conducted to the fixed tube 15, the heat is hardly radiated to the center conductor 8.
また固定管１５に熱が伝導されてきても、固定管１５は
ステンレスのような低熱伝導率の材料によって構成され
であることと、固定管１５と中心導体８とは熱絶縁体１
６を介して連結されであることとにより、従来構成に比
較して中心導体８への熱伝導は著しく低減されるように
なる。Furthermore, even if heat is conducted to the fixed tube 15, the fixed tube 15 is made of a material with low thermal conductivity such as stainless steel, and the fixed tube 15 and the center conductor 8 are made of a thermal insulator 1.
6, the heat conduction to the center conductor 8 is significantly reduced compared to the conventional configuration.
以上のようにして電子線源４がらの熱によって中心導体
８は加熱されるようなことはなく、したがってこの中心
導体８を支持している絶縁碍子３が温度上昇するような
ことはこれをもって確実に防止することができるように
なるのである。As described above, the center conductor 8 will not be heated by the heat from the electron beam source 4, and therefore it is certain that the temperature of the insulator 3 supporting the center conductor 8 will not rise. This makes it possible to prevent this from happening.
なお図のようにフープ１４をシールド電極６に固定支持
するようにしておくと、これに電子がトラップしてもこ
れによる熱が中心導体８に直ちに伝達されるようなこと
はなく、シかもフープ１４によって直接絶縁碍子３に与
えられるカソード５よりの輻射熱成分の少なくとも一部
が遮られ、都合がよい。If the hoop 14 is fixedly supported on the shield electrode 6 as shown in the figure, even if electrons are trapped in the hoop 14, the resulting heat will not be immediately transferred to the center conductor 8, and the hoop 14 may 14 blocks at least a portion of the radiant heat component from the cathode 5 directly applied to the insulator 3, which is convenient.
（発明の効果）
以上詳述したようにこの発明によれば、電子線源を固定
支持する中心導体が電子線源からの熱によって加熱され
るのが回避され、したがって中心導体を支持している絶
縁碍子の温度上昇による耐電圧の劣化を確実に防止する
ことができるといった効果を奏する。(Effects of the Invention) As detailed above, according to the present invention, the center conductor that fixedly supports the electron beam source is prevented from being heated by the heat from the electron beam source, and therefore supports the center conductor. This has the effect of reliably preventing deterioration of withstand voltage due to temperature rise of the insulator.
第１図はこの発明の実施例を示す断面図、第２図は従来
例の断面図である。
１・・・真空容器、ＩＡ・・・照射窓、２・・・タンク
、３・・・絶縁碍子、４・・・電子線源、訃・・カソー
ド、６・・・シールド電極、８・・・中心導体、１０・
・・導入端子部、・・・固定管、１６・・・熱絶縁体、FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 1... Vacuum container, IA... Irradiation window, 2... Tank, 3... Insulator, 4... Electron beam source, Death... Cathode, 6... Shield electrode, 8...・Center conductor, 10・
...Introduction terminal part, ...fixed tube, 16 ...thermal insulator,
Claims (1)
器を、内部に絶縁ガスが収納してあるタンクに絶縁碍子
を介して連結し、前記絶縁碍子に中心導体を貫通支持し
てなる電子線照射装置において、前記中心導体の内部に
低熱伝導性の固定管を設け、前記電子線源を構成してい
るシールド電極を、前記中心導体の一方の端部が前記真
空容器内で開口している状態で、前記固定管の一方の端
部に固定するとともに、前記固定管の他方の端部を、導
入端子によって封止されている前記中心導体の他方の端
部に熱絶縁体を介して固定してなる電子線照射装置。An electron beam is provided in which an electron beam source is installed in a vacuum container, the vacuum container is connected to a tank containing an insulating gas through an insulator, and a center conductor is passed through and supported by the insulator. In the irradiation device, a fixed tube with low thermal conductivity is provided inside the center conductor, and a shield electrode constituting the electron beam source is opened at one end of the center conductor within the vacuum container. and fixing the other end of the fixed tube to the other end of the center conductor sealed by the introduction terminal via a thermal insulator. Electron beam irradiation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61039848A JPS62198045A (en) | 1986-02-24 | 1986-02-24 | Electron beam radiating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61039848A JPS62198045A (en) | 1986-02-24 | 1986-02-24 | Electron beam radiating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62198045A true JPS62198045A (en) | 1987-09-01 |
| JPH0565970B2 JPH0565970B2 (en) | 1993-09-20 |
Family
ID=12564380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61039848A Granted JPS62198045A (en) | 1986-02-24 | 1986-02-24 | Electron beam radiating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198045A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004243513A (en) * | 2003-01-22 | 2004-09-02 | Nippei Toyama Corp | Machine tool |
| JP2008209410A (en) * | 1997-01-02 | 2008-09-11 | Advanced Electron Beams Inc | Electron beam accelerator |
-
1986
- 1986-02-24 JP JP61039848A patent/JPS62198045A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008209410A (en) * | 1997-01-02 | 2008-09-11 | Advanced Electron Beams Inc | Electron beam accelerator |
| JP2009259848A (en) * | 1997-01-02 | 2009-11-05 | Advanced Electron Beams Inc | Electron beam accelerator |
| JP2010164582A (en) * | 1997-01-02 | 2010-07-29 | Advanced Electron Beams Inc | Electron beam accelerator |
| JP4684342B2 (en) * | 1997-01-02 | 2011-05-18 | アドバンスト・エレクトロン・ビームズ・インコーポレーテッド | Electron acceleration method |
| JP2004243513A (en) * | 2003-01-22 | 2004-09-02 | Nippei Toyama Corp | Machine tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0565970B2 (en) | 1993-09-20 |
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