JPS62184342A - High-sensitivity dew condensation sensor - Google Patents
High-sensitivity dew condensation sensorInfo
- Publication number
- JPS62184342A JPS62184342A JP2618086A JP2618086A JPS62184342A JP S62184342 A JPS62184342 A JP S62184342A JP 2618086 A JP2618086 A JP 2618086A JP 2618086 A JP2618086 A JP 2618086A JP S62184342 A JPS62184342 A JP S62184342A
- Authority
- JP
- Japan
- Prior art keywords
- dew condensation
- condensation sensor
- comb
- sensitivity
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009833 condensation Methods 0.000 title claims abstract description 52
- 230000005494 condensation Effects 0.000 title claims abstract description 51
- 239000011521 glass Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000001681 protective effect Effects 0.000 claims abstract description 16
- 229920006267 polyester film Polymers 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 239000005357 flat glass Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 abstract description 20
- 230000035945 sensitivity Effects 0.000 abstract description 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 7
- 239000003990 capacitor Substances 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- CMSGUKVDXXTJDQ-UHFFFAOYSA-N 4-(2-naphthalen-1-ylethylamino)-4-oxobutanoic acid Chemical compound C1=CC=C2C(CCNC(=O)CCC(=O)O)=CC=CC2=C1 CMSGUKVDXXTJDQ-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は自動車のバックウィンドガラスに貼着されて使
用されるオートデフォツガ用静電容量検出型高感度結露
センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a capacitance detection type high-sensitivity dew condensation sensor for an auto defogger that is used by being attached to the back window glass of an automobile.
近年、自動車のバックウィンドガラス等において、曇り
が生じた時に、自動的に曇り（水分）を検知し、デフォ
ッガアや導電性被膜（ヒータ膜）に通電して曇りを除去
するオートデフォッガアが開発されている（例えば、実
開昭５３−５８９５６号）。In recent years, an auto defogger has been developed that automatically detects fogging (moisture) when it becomes foggy on the back windshield of a car, and removes the fog by applying electricity to the defogger or conductive film (heater film). (For example, Utility Model Application Publication No. 53-58956).
このオートデフォッガアには、曇りを検出する結露セン
サ（水分検出センサ）が用いられる。この結露センサに
は抵抗検出型、静電容量検出型等があり、一般的には抵
抗検出型結露センサを用いたものが公知である（例えば
、実公昭５５−４８４２８号）。この抵抗検出型結露セ
ンサは、ガラス板表面上に対向して電極を設けたもの、
あるいは更にこの電極間に跨がるように形成された親水
性被膜等の水分検出被膜を設けたものが知られており、
上記電極間あるいは水分検出被膜に水分が付着したとき
、センサ表面の電流の流れあるいは電流の流れによるイ
ンピーダンスの変化を検出し、所定の設定値に達した時
に抵抗加熱素子を通電加熱するよう構成されている。ま
た、静電容量検出型結露センサは、ガラス基板上に形成
されたくし歯形電極とこの電極を保護する絶縁保護膜と
からなり、対向電極に跨がって水分が付着したときの静
電容量の変化を検知して、この値が所定値を超えた時に
抵抗加熱素子に通電するものである。This auto defogger uses a dew condensation sensor (moisture detection sensor) that detects cloudy weather. This dew condensation sensor includes a resistance detection type, a capacitance detection type, etc., and a type using a resistance detection type dew condensation sensor is generally known (for example, Japanese Utility Model Publication No. 55-48428). This resistance detection type dew condensation sensor has electrodes facing each other on the surface of a glass plate.
Alternatively, it is known that a moisture detection coating such as a hydrophilic coating is further formed to span between the electrodes.
When moisture adheres between the electrodes or on the moisture detection coating, the sensor is configured to detect the flow of current on the sensor surface or a change in impedance due to the flow of current, and when a predetermined set value is reached, heats the resistance heating element by energizing it. ing. In addition, the capacitance detection type dew condensation sensor consists of a comb-shaped electrode formed on a glass substrate and an insulating protective film that protects this electrode. It detects a change and energizes the resistance heating element when this value exceeds a predetermined value.
ところで、上記静電容量検出型結露センサが検出しよう
とする結露粒子は初期においてその粒子が約５μｍ程度
と極めて小さいため、くし歯形透明電極のパターンを細
かくしても十分な検出能力が得られにくいという問題が
ある。結露センサのサイズを大きくすれば、検出能力の
増加を望めるものの、自動車のバックウィンドガラス等
に取り付けるという使用条件を考慮すると、自ずと結露
センサのサイズには限界がある。By the way, the dew condensation particles that the capacitance detection type dew condensation sensor attempts to detect are extremely small at the initial stage of about 5 μm, so it is difficult to obtain sufficient detection ability even if the pattern of the comb-shaped transparent electrode is made finer. There is a problem. Although it is possible to increase the detection ability by increasing the size of the dew condensation sensor, there is a limit to the size of the dew condensation sensor when considering the usage condition of attaching it to the back window glass of an automobile.
そこで、結露センサのサイズを大きくすることなく、結
露（水分）の検出感度を上げる工夫が求められていた。Therefore, there was a need for a way to increase the detection sensitivity of dew condensation (moisture) without increasing the size of the dew condensation sensor.
上記問題は、次に述べる本発明の高感度結露センサによ
って解決される。The above problem is solved by the highly sensitive dew condensation sensor of the present invention, which will be described below.
即ち、本発明のオートデフォツガ用高域度結露センサは
、ガラス基板と、このガラス基板上に形成されるくし歯
形透明電極と、このくし歯形透明電を覆う絶縁保護膜と
を有し、このガラス基板とくし歯形透明電極の間には、
低誘電率のアンダーコート層が設けられていることを特
徴としている。That is, the high-frequency dew condensation sensor for an auto defogger of the present invention has a glass substrate, a comb-shaped transparent electrode formed on the glass substrate, and an insulating protective film covering the comb-shaped transparent electrode. Between the glass substrate and the comb-shaped transparent electrode,
It is characterized by being provided with an undercoat layer with a low dielectric constant.
以下、本発明について更に詳細に説明する。The present invention will be explained in more detail below.
本発明において、結露センサは直接自動車のパックウィ
ンドガラス等のガラス基板に形成してもよく、また例え
ば縦横３０酊程度の小さなガラス基板上に形成してこの
ガラス基板をバンクウィンドガラスに貼着してもよい。In the present invention, the dew condensation sensor may be formed directly on a glass substrate such as an automobile's pack window glass, or it may be formed on a small glass substrate of about 30 mm in length and width, and this glass substrate is attached to the bank window glass. It's okay.
小さなガラス基板を用いる場合には、このガラス基板の
厚さは０．３■ｌ以下とすることが望ましい。これは、
可撓性を持たせるためと、見栄えを良くするためである
。When a small glass substrate is used, it is desirable that the thickness of this glass substrate be 0.3 μl or less. this is,
This is to provide flexibility and to improve appearance.
このガラス基板上には、低誘電率のアンダーコート層が
接着等により形成される。このアンダーコート層として
は誘電率の低いプラスチックフィルム、例えば誘電率ε
が３．２のポリエステルフィルム等を用いることができ
る。On this glass substrate, a low dielectric constant undercoat layer is formed by adhesion or the like. As this undercoat layer, a plastic film with a low dielectric constant, such as a dielectric constant ε
A polyester film having a diameter of 3.2 or the like can be used.
また、このアンダーコート層の上には、くし歯形透明電
極が形成される。このくし歯形透明電極としては、例え
ば酸化インジウム（Ｉ ｎ、０．）と酸化錫（Ｓ ｎ
Ｏｘ ）とを主成分とするＩＴＯ膜または酸化錫（Ｓｎ
Ｏ□）からなるＮＥＳＡ膜等を用いることができる。こ
のくし歯形透明電極の電極幅は０．００５ｗ〜０．１
ｔｍ、ギャップ幅は０．００５ｗ〜Ｑ、ｌ ｗ程度とす
ることができる。このくし歯形透明電極は通常真空蒸着
法、スパッタリング法、イオンブレーティング法等の真
空成膜法により形成され、厚さは数ゴ〜数千人とされる
。Moreover, a comb-shaped transparent electrode is formed on this undercoat layer. As this comb-shaped transparent electrode, for example, indium oxide (I n, 0.) and tin oxide (S n
ITO film or tin oxide (Sn
A NESA film made of O□) or the like can be used. The electrode width of this comb-shaped transparent electrode is 0.005w~0.1
tm and the gap width can be about 0.005w to Q.lw. This comb-shaped transparent electrode is usually formed by a vacuum film forming method such as a vacuum evaporation method, a sputtering method, or an ion blating method, and has a thickness of several to several thousand.
くし歯形透明電極の上には、絶縁保護膜が形成される。An insulating protective film is formed on the comb-shaped transparent electrode.
この絶縁保護膜材料としては、酸化アルミニウム（Ａｆ
ｆｉ！０３） 、二酸化珪素（Ｓｔｏｗ）、酸化ジルコ
ニウム（ＺｒＯ，）等を用いることができる。また、絶
縁保護膜の膜厚は１．０μｍ程度とすることができる。The material for this insulating protective film is aluminum oxide (Af
Fi! 03), silicon dioxide (Stow), zirconium oxide (ZrO, ), etc. can be used. Furthermore, the thickness of the insulating protective film can be approximately 1.0 μm.
この絶縁保護膜も、くし歯形透明電極と同様に真空蒸着
法、スパッタリング法等の真空成膜法により形成するこ
とができる。This insulating protective film can also be formed by a vacuum film forming method such as a vacuum evaporation method or a sputtering method, similarly to the comb-shaped transparent electrode.
ナオ、絶縁保護膜の誘電率は酸化ジルコニウムが１２．
５、酸化アルミニウムが９．５〜１１．５、二酸化珪素
が４．５であるため、結露センサの検出感度を上げるた
めには、誘電率が低い二酸化珪素を用いることが望まし
い。Nao, the dielectric constant of the insulating protective film is 12.
5. Since aluminum oxide has a value of 9.5 to 11.5 and silicon dioxide has a value of 4.5, it is desirable to use silicon dioxide, which has a low dielectric constant, in order to increase the detection sensitivity of the dew condensation sensor.
本発明の高感度結露センサは、一種のコンデンサであり
、コンデンサに置き換えて考えることができる。一般に
、平行平板コンデンサの静電容量ＣはＣ＝ε０ ・ε・
Ｓ／ｄ （ここで、ε０ は真空中の誘電率、εは比誘
電率（以下誘電率と略す）、Ｓは電極の面積、ｄは電極
間の距離）で表される。The high-sensitivity dew condensation sensor of the present invention is a type of capacitor, and can be considered in place of a capacitor. Generally, the capacitance C of a parallel plate capacitor is C=ε0 ・ε・
It is expressed as S/d (here, ε0 is the dielectric constant in vacuum, ε is the relative dielectric constant (hereinafter abbreviated as dielectric constant), S is the area of the electrode, and d is the distance between the electrodes).
このとき、εは電極を取り巻く物質によって異なる。即
ち、誘電率は空気が１、ガラスが約５、酸化アルミニウ
ムからなる絶縁保護膜が約１０、二酸化珪素からなる絶
縁保護膜が約４．５、水が約８０である。従って、結露
センサ（コンデンサ）の初期容量は電極の面積および電
極間距離を一定とすると、電極を取り巻く物質の平均誘
電率が低い程、変化率が大きくなって感度が上がること
になる。At this time, ε differs depending on the material surrounding the electrode. That is, the dielectric constant is 1 for air, about 5 for glass, about 10 for an insulating protective film made of aluminum oxide, about 4.5 for an insulating protective film made of silicon dioxide, and about 80 for water. Therefore, assuming that the area of the electrodes and the distance between the electrodes are constant, the lower the average permittivity of the material surrounding the electrodes, the larger the rate of change in the initial capacitance of the dew condensation sensor (capacitor) and the higher the sensitivity.
しかるに、本発明の結露センサによれば、ガラス基板と
くし歯形透明電極の間にアンダーコート層を設けたため
、従来のガラス基板の一部がガラス基板より誘電率の低
いアンダーコート層で置き代わったことになる。この結
果、εが全体的に小さくなり、コンデンサ、即ち、結露
センサの感度が向上する。However, according to the dew condensation sensor of the present invention, since an undercoat layer is provided between the glass substrate and the comb-shaped transparent electrode, a part of the conventional glass substrate is replaced with an undercoat layer having a lower dielectric constant than the glass substrate. become. As a result, ε becomes smaller overall, and the sensitivity of the capacitor, ie, the dew condensation sensor, improves.
また、絶縁保護膜として誘電率の低い二酸化珪素膜を用
いると、他の酸化アルミニウムや酸化ジルコニウムを用
いる場合よりも結露センサの感度を上げることができ、
結露センサの性能が向上する。In addition, when a silicon dioxide film with a low dielectric constant is used as an insulating protective film, the sensitivity of the dew condensation sensor can be increased compared to using other aluminum oxide or zirconium oxide.
Improves the performance of the condensation sensor.
次に、本発明の実施例を図面を参考にして説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
ここで、第１図は本発明の実施例に係る高感度結露セン
サの製造方法の各工程を示す概略工程図、第２図は本発
明の実施例に係る高感度結露センサの概略平面図である
。Here, FIG. 1 is a schematic process diagram showing each step of a method for manufacturing a high-sensitivity dew condensation sensor according to an embodiment of the present invention, and FIG. 2 is a schematic plan view of a high-sensitivity condensation sensor according to an embodiment of the present invention. be.
まず、第１図（ａ）に示すように、透明電極を形成する
ガラス基板として縦４０ｍｍ、横２５ｓｎ、厚さ０、２
ｍのガラス基板ｌを準備する。このガラス基板１上に
低誘電率のアンダーコート層として厚さ２０μｍのポリ
エステルフィルム２を接着する（第１図（ｂ））。続い
て、このポリエステルフィルム２上にスパッタリング法
により、第１図（Ｃ）に示すように、ＩＴＯからなるく
し歯形の透明電極３を約０．１μｍの厚さに形成する。First, as shown in FIG. 1(a), a glass substrate for forming a transparent electrode is 40 mm long, 25 sn wide, and 0.2 mm thick.
Prepare m glass substrates l. A polyester film 2 having a thickness of 20 μm is adhered onto this glass substrate 1 as an undercoat layer having a low dielectric constant (FIG. 1(b)). Subsequently, a comb-shaped transparent electrode 3 made of ITO and having a thickness of about 0.1 μm is formed on the polyester film 2 by sputtering, as shown in FIG. 1(C).
次いで、このくし歯形透明電極３およびポリエステルフ
ィルム２の上に、スパッタリングにより酸化アルミニウ
ムからなる絶縁保護膜４を約１．０μｍの厚さに形成し
た。この結果、第１図（ｄｌおよび第２図に示す結露セ
ンサ５が得られた。なお、くし歯形透明電極３の電極幅
Ｔとギャップ幅ｔは共に５μｍとし、くし歯部の長さｌ
は２０鶴、くし歯部の数は２０００本とした。Next, on the comb-shaped transparent electrode 3 and the polyester film 2, an insulating protective film 4 made of aluminum oxide was formed to a thickness of about 1.0 μm by sputtering. As a result, the dew condensation sensor 5 shown in FIG. 1 (dl) and FIG.
The number of comb teeth was 20, and the number of comb teeth was 2000.
この結果得られた結露センサを用いて、結露の検出感度
を調べた。即ち、この結露センサの初期容量ｃｏを測定
したところ５１０ｐＦであり、結露後の静電容量ＣＩは
１１７０ｐＦであった。この結果、変化率Ｐは（（Ｃ，
−Ｃｏ） ／ｃｏ） Ｘ１００＝１２９％であった。Using the dew condensation sensor obtained as a result, the detection sensitivity of dew condensation was investigated. That is, when the initial capacitance co of this dew condensation sensor was measured, it was 510 pF, and the capacitance CI after dew condensation was 1170 pF. As a result, the rate of change P is ((C,
-Co)/co)X100=129%.
（比較例）
アンダーコート層を設けなかったことを除き、他は実質
的に実施例と同様な方法で結露センサを製造した。(Comparative Example) A dew condensation sensor was manufactured in substantially the same manner as in the example except that no undercoat layer was provided.
この結果得られた結露センサを用いて、実施例と同様に
結露の検出感度を調べた。即ち、この結露センサの初期
容量ｃｏを測定したところ６４５ｐＦであり、結露後の
静電容量Ｃ１は１３００ｐＦであった。この結果、変化
率Ｐは（（ｃＩ−Ｃｏ）／ｃｏ）ｘｉ ０Ｏ＝１０２％
であった。Using the resulting dew condensation sensor, the dew condensation detection sensitivity was investigated in the same manner as in the example. That is, when the initial capacitance co of this dew condensation sensor was measured, it was 645 pF, and the capacitance C1 after dew condensation was 1300 pF. As a result, the rate of change P is ((cI-Co)/co)xi 0O=102%
Met.
上記実施例と比較例の結果より、本発明の実施例に係る
結露センサは、比較例（従来）の結露センサより結露の
検出感度が約２６％向上していることが判る。From the results of the above examples and comparative examples, it can be seen that the dew condensation sensor according to the example of the present invention has a dew condensation detection sensitivity that is approximately 26% higher than that of the comparative example (conventional) dew condensation sensor.
以上、本発明の特定の実施例について説明したが、本発
明は上記実施例に限定されるものではなく、特許請求の
範囲内において種々の実施態様を包含するものである。Although specific embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, but includes various embodiments within the scope of the claims.
例えば、実施例では絶縁保護膜材料として酸化アルミニ
ウムを用いる例を示したが、二酸化珪素を用いることに
より更に結露検出感度を上げることもできる。For example, although the example uses aluminum oxide as the insulating protective film material, it is also possible to further increase the dew condensation detection sensitivity by using silicon dioxide.
以上より、本発明の高感度結露センサによれば、結露セ
ンサのサイスを大きくすることなく、結露の検出感度を
大幅に向上させることができるという優れた効果を奏す
る。As described above, the high-sensitivity dew condensation sensor of the present invention has the excellent effect of significantly improving the dew condensation detection sensitivity without increasing the size of the dew condensation sensor.
第１図は本発明の実施例に係る高感度結露センサの製造
方法の各工程を示す概略工程図、第２図は本発明の実施
例に係る高感度結露センサの概略平面図である。
１−・・・ガラス基板
２−・・−・・−ポリエステルフィルム（アンダーコー
ト層）
３−−−−−・−透明電極
４・・−−−−一絶縁保護膜
５・−・・・・−結露センサFIG. 1 is a schematic process diagram showing each step of a method for manufacturing a high-sensitivity dew condensation sensor according to an embodiment of the present invention, and FIG. 2 is a schematic plan view of the high-sensitivity dew condensation sensor according to an embodiment of the present invention. 1--Glass substrate 2--Polyester film (undercoat layer) 3--Transparent electrode 4--Insulating protective film 5-- -Condensation sensor
Claims (3)
られて使用されるオートデフォッガ用高感度結露センサ
であって、 ガラス基板と、このガラス基板上に形成されるくし歯形
透明電極と、このくし歯形透明電を覆う絶縁保護膜とを
有し、このガラス基板とくし歯形透明電極の間には、低
誘電率のアンダーコート層が設けられていることを特徴
とするオートデフォッガ用高感度結露センサ。(1) A high-sensitivity dew condensation sensor for an auto defogger that is used by being attached to the inside of a back window glass of an automobile, which includes a glass substrate, a comb-shaped transparent electrode formed on the glass substrate, and the comb-shaped transparent electrode. 1. A high-sensitivity dew condensation sensor for an auto defogger, characterized in that the glass substrate has an insulating protective film covering the electrode, and an undercoat layer with a low dielectric constant is provided between the glass substrate and the comb-shaped transparent electrode.
ート層としてポリエステルフィルムが用いられているこ
とを特徴とするオートデフォッガ用高感度結露センサ。(2) The high-sensitivity dew condensation sensor for an auto defogger according to claim 1, wherein a polyester film is used as the undercoat layer.
として二酸化珪素膜が用いられていることを特徴とする
オートデフォッガ用高感度結露センサ。(3) The high-sensitivity dew condensation sensor for an auto defogger according to claim 1, wherein a silicon dioxide film is used as the insulating protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2618086A JPS62184342A (en) | 1986-02-07 | 1986-02-07 | High-sensitivity dew condensation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2618086A JPS62184342A (en) | 1986-02-07 | 1986-02-07 | High-sensitivity dew condensation sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184342A true JPS62184342A (en) | 1987-08-12 |
Family
ID=12186324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2618086A Pending JPS62184342A (en) | 1986-02-07 | 1986-02-07 | High-sensitivity dew condensation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184342A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01209349A (en) * | 1987-12-28 | 1989-08-23 | Ppg Ind Inc | Moisture detection sensor |
| US4898476A (en) * | 1987-12-01 | 1990-02-06 | Endress U. Hauser Gmbh U. Co. | Arrangement for measuring the water vapor dew point in gases |
| WO2021241628A1 (en) * | 2020-05-29 | 2021-12-02 | 日本碍子株式会社 | Capacitive sensor |
-
1986
- 1986-02-07 JP JP2618086A patent/JPS62184342A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4898476A (en) * | 1987-12-01 | 1990-02-06 | Endress U. Hauser Gmbh U. Co. | Arrangement for measuring the water vapor dew point in gases |
| JPH01209349A (en) * | 1987-12-28 | 1989-08-23 | Ppg Ind Inc | Moisture detection sensor |
| WO2021241628A1 (en) * | 2020-05-29 | 2021-12-02 | 日本碍子株式会社 | Capacitive sensor |
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