JPS62180077A - Coating method for inside surface of pipe - Google Patents
Coating method for inside surface of pipeInfo
- Publication number
- JPS62180077A JPS62180077A JP2202186A JP2202186A JPS62180077A JP S62180077 A JPS62180077 A JP S62180077A JP 2202186 A JP2202186 A JP 2202186A JP 2202186 A JP2202186 A JP 2202186A JP S62180077 A JPS62180077 A JP S62180077A
- Authority
- JP
- Japan
- Prior art keywords
- cladding tube
- coating
- pipe
- electrode
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims abstract description 27
- 239000004020 conductor Substances 0.000 claims abstract description 5
- 238000005253 cladding Methods 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 abstract description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
一７λりｋＩｆｆ１Ｍ＋〒イゴｎｈ鵬＝ＭＩＴＩ＋［産
業上の利用分野］
この発明は管内面の被覆方法に関し、各種パイプ内面の
耐食、耐摩耗性等の改善、ダイス等各種工具の耐摩耗性
の改善、更にはマイクロ波導波管として用いられる各種
キャビティーの電磁シールドの形成の際に利用される。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for coating the inner surface of a pipe, improving the corrosion resistance, abrasion resistance, etc. of the inner surface of various pipes, and coating various types of dies, etc. It is used to improve the wear resistance of tools and to form electromagnetic shields for various cavities used as microwave waveguides.
［従来の技術］
従来、管の内面を被覆する方法として、第１に、メッキ
溶液を電気化学的に管の内面に被覆する電気化学メッキ
法が知られている。[Prior Art] Conventionally, as a method for coating the inner surface of a tube, firstly, an electrochemical plating method is known in which the inner surface of the tube is electrochemically coated with a plating solution.
然し乍ら電気化学メッキ法においては廃液処理や有害ガ
ス対策などが必要であり、また、ピンホールのない均質
で一様な厚みの皮膜が得られないという欠点がある。However, the electrochemical plating method requires measures such as waste liquid treatment and harmful gas countermeasures, and also has the drawback that a homogeneous film with no pinholes and a uniform thickness cannot be obtained.
一方、気相成長法（ＣＶＤ法）が知られている。ＣＶＤ
法は、ガス状物質を化学反応で固体物質にし基盤上に堆
積せしめる方法である。ＣＶＤ法の１つとしてプラズマ
ＣＶＤ法がある。プラズマＣＶＤ法は、作ろうとする被
膜の元素を含んだ分解しやすい気体を反応空間に送り込
み、そこでプラズマにより活性化し被膜を作成する方法
である。この方法は他のＣＶＤ法とは異なり被皮膜材の
低温化（３００〜４００”Ｏ）が図られるので被皮膜材
の劣化を防止することができる。とともにプロセスが簡
単であるという長所を看している。On the other hand, a vapor phase growth method (CVD method) is known. CVD
This method is a method in which a gaseous substance is turned into a solid substance through a chemical reaction and deposited on a substrate. One of the CVD methods is the plasma CVD method. The plasma CVD method is a method in which an easily decomposed gas containing the elements of the film to be formed is sent into a reaction space, where it is activated by plasma to form a film. This method differs from other CVD methods in that it lowers the temperature of the coating material (300 to 400" O), so it can prevent deterioration of the coating material. It also has the advantage of being a simple process. ing.
このプラズマＣＶＤ法の代表的なものとしては第６図に
示す誘導型方式と第７図に示す容量型方式が知られてい
る。As typical plasma CVD methods, an inductive type method shown in FIG. 6 and a capacitive type method shown in FIG. 7 are known.
第６図に示す誘導型方式は、被被膜材である被覆管９内
を排気口８から排気し、ガス導入管９から所要の元素を
含む気体を被覆管ｌ内に導入し。In the induction type method shown in FIG. 6, the inside of the cladding tube 9, which is the material to be coated, is evacuated from the exhaust port 8, and a gas containing the required elements is introduced into the cladding tube l from the gas introduction tube 9.
該気体が導入された状態で被覆管ｌの外部に被覆管１を
巻回するように配置されたＲＦコイルに高圧電圧を印加
することにより被覆管１内に導入された気体をグロー放
電せしめて被覆管ｌの内面を被覆するものである。With the gas introduced, the gas introduced into the cladding tube 1 is caused to glow discharge by applying a high voltage to an RF coil arranged around the cladding tube 1 outside the cladding tube 1. This coats the inner surface of the cladding tube l.
一方、第７図に示す容量型方式においては被覆管ｌ内に
ＲＦ電極２．２を配置し、このＲＦ電極２．２間に電圧
を印加することにより被覆管１内においてグロー放電を
生じせしめることにより被覆を行なうものである。On the other hand, in the capacitive type system shown in FIG. 7, an RF electrode 2.2 is placed inside the cladding tube 1, and a glow discharge is generated within the cladding tube 1 by applying a voltage between the RF electrodes 2.2. The coating is carried out by this method.
［発明が解決しようとする問題点］
しかし、第６図及び第７図に示した方式には次のような
問題点がある。[Problems to be Solved by the Invention] However, the systems shown in FIGS. 6 and 7 have the following problems.
すなわち、■被覆管が絶縁材料に限定される、■蒸着速
度（成膜速度）が遅い、■この為、被膜形成時に雰囲気
からの不純物の取り込みによる汚染が起り易い等の！７
！Ｉ題点である。Namely, ■ The cladding tube is limited to insulating materials, ■ The vapor deposition rate (film formation rate) is slow, and ■ Therefore, contamination due to the introduction of impurities from the atmosphere during film formation is likely to occur. 7
! This is the first issue.
［問題点を解決する為の手段］
本発明は、導電性材料よりなる被覆管自体を第１電極と
し、該被覆管内に気体を導入し電圧を印加したときにグ
ロー放電を生じるように第２電極を配設し、該被覆管内
を真空に排気した後、該被覆管内に、被覆しようとする
被膜の元素を含んだ気体を送り込み、該第１電極と該第
２電極との間に高圧電源を印加することにより該被Ｗ１
管内にグロー放電を発生させて該被覆管の内面を被覆す
ることを特徴とする管内面の被覆方法である。[Means for Solving the Problems] The present invention uses a cladding tube itself made of a conductive material as a first electrode, and a second electrode so as to generate a glow discharge when a gas is introduced into the cladding tube and a voltage is applied. After arranging the electrodes and evacuating the inside of the cladding tube, a gas containing the elements of the coating to be coated is fed into the cladding tube, and a high voltage power source is connected between the first electrode and the second electrode. By applying W1
This method of coating the inner surface of a tube is characterized in that the inner surface of the cladding tube is coated by generating a glow discharge within the tube.
本発明の対象とする被覆管は導電性材料よりなる被覆管
である。The cladding tube targeted by the present invention is a cladding tube made of a conductive material.
本発明においては被覆管自体を第１電極とする。そのた
め高圧電源の一端を被覆管に電気的に接続する。接続位
置は特に限定されない、たとえば、被覆管の管端に設け
たガス導入口に接続すればよい。In the present invention, the cladding tube itself is used as the first electrode. Therefore, one end of the high-voltage power source is electrically connected to the cladding tube. The connection position is not particularly limited; for example, it may be connected to a gas inlet provided at the end of the cladding tube.
一方、第２電極は、被覆管内に導入された気体にグロー
放電を生じるような位置に配設する。On the other hand, the second electrode is disposed at a position where a glow discharge is generated in the gas introduced into the cladding tube.
なお、高圧電源としてはＲＦ主電源もよいし。Note that an RF main power source may be used as the high voltage power source.
直流電源でもよく、その陰極の端子を被Ｙａ管に電気的
に接続する。A DC power source may be used, and its cathode terminal is electrically connected to the Ya tube.
本発明においては被覆管内を真空に排気する。In the present invention, the inside of the cladding tube is evacuated to a vacuum.
真空度としてはｌＸ１０１Ｔｏｒｒ（）−ル）以上が好
ましい。The degree of vacuum is preferably 1×101 Torr () or more.
また、真空に排気する場合、被覆管を真空槽内に収納し
た状態で行なってもよい。Furthermore, when evacuation is performed, the cladding tube may be housed in a vacuum chamber.
被覆管内が真空に排気された後、被覆管内に、被覆しよ
うとする被膜の元素を含んだ気体を送り込む、かかる気
体としてはたとえば、全屈水素化愉 小１７Ｉｌｌ ＆
龜侘山召葎か積置ｍい治ｌギヒい被覆管内に気体が導入
された状態で第１電極と第２電極との間に高圧の電圧を
印加する。高圧の電圧が印加されると、第１電極と第２
電極との間にグロー放電が生じ、被覆管内の気体がイオ
ン化し、イオン化したガスは被覆管の内面に堆積し、被
覆が行なわれる。After the inside of the cladding tube is evacuated, a gas containing the elements of the coating to be coated is fed into the cladding tube.
A high voltage is applied between the first electrode and the second electrode while gas is introduced into the cladding tube. When a high voltage is applied, the first electrode and the second
A glow discharge occurs between the tube and the electrode, the gas inside the cladding tube is ionized, and the ionized gas is deposited on the inner surface of the cladding tube, thereby forming a coating.
［発明の実施例］ 以下に本発明の実施例を図面に基づいて説明する。[Embodiments of the invention] Embodiments of the present invention will be described below based on the drawings.
（第１実施例）
第１図は第１実施例を示し、ｌは被覆管、４は絶縁材、
５は真空槽、６は高圧電源、７は加熱ヒータ、１８は排
気口、９はガス導入管である。(First embodiment) Figure 1 shows the first embodiment, l is a cladding tube, 4 is an insulating material,
5 is a vacuum chamber, 6 is a high-voltage power source, 7 is a heater, 18 is an exhaust port, and 9 is a gas introduction pipe.
すなわち、本例では、被覆管ｌの管端部にガス導入管９
が接続されており、このガス導入管９には高圧゛−［源
６が電気的に接続されている。したがって被覆管ｌ自体
が第１電極となっている。That is, in this example, the gas introduction tube 9 is connected to the tube end of the cladding tube l.
A high pressure source 6 is electrically connected to the gas introduction pipe 9. Therefore, the cladding tube l itself serves as the first electrode.
また、本例では高圧電源６としてＲＦ主電源使用してい
る。高圧電源６の他の端子はアースされている。Further, in this example, an RF main power source is used as the high voltage power source 6. The other terminals of the high voltage power supply 6 are grounded.
また、本例では被覆管１は真空槽５に収納されており、
真空槽５とガス導入間９とは絶縁材４により電気的に絶
縁されている。In addition, in this example, the cladding tube 1 is housed in a vacuum chamber 5,
The vacuum chamber 5 and the gas introduction space 9 are electrically insulated by an insulating material 4.
真空槽５はアースされており、したがって真空槽５が第
２電極となっている。また、真空槽の一端には排気口８
が設けられており、この排気口８から真空に排気される
。The vacuum chamber 5 is grounded, so the vacuum chamber 5 serves as the second electrode. In addition, there is an exhaust port 8 at one end of the vacuum chamber.
is provided, and the air is evacuated to a vacuum through this exhaust port 8.
なお、真空槽８の外部には加熱ヒータ７が設けられてい
る。Note that a heater 7 is provided outside the vacuum chamber 8 .
以下に本実施例をより詳細に説明する。This example will be explained in more detail below.
真空槽５内に６０φの被覆管１を配置した。一方、加熱
ヒータ７により被覆管ｌを３００℃に加熱した。加熱後
、排気口８から排気し真空槽内を真空にした１次いで、
ガス導入管９からガス（ＳｉＨ４２０ｃｃ／ｍｉ ｎ、
Ａｒ１６０ｃｃ／ｍ１ｎ）を真空槽５内（したがって被
覆管ｌ内）に導入した。被覆管１内の圧力を０．５Ｔｏ
ｒｒとし、第１電極（ガス導入管９）と第２電極（真空
槽５）との間に高圧電源６によりｉｏｏｗの電力を投入
し、第１ＴＴｉ、ｇｉと第２電極との間にグロー放’１
ｉ、が生じさせた。その結果、被覆管１内面にはＳｉＣ
膜が被覆された。その際の成膜速度は４〜１０ルｍ／ｈ
と速かった。被覆された膜の硬度はビッカース硬度ＨＶ
＝２０００と高硬度であった。A 60φ cladding tube 1 was placed in a vacuum chamber 5. Meanwhile, the cladding tube 1 was heated to 300° C. by the heater 7. After heating, the inside of the vacuum chamber was evacuated by exhausting from the exhaust port 8.
Gas (SiH420cc/min,
Ar 160cc/m1n) was introduced into the vacuum chamber 5 (therefore, into the cladding tube l). The pressure inside the cladding tube 1 is 0.5To
rr, power of ioow is applied between the first electrode (gas introduction tube 9) and second electrode (vacuum chamber 5) from the high voltage power supply 6, and glow discharge is applied between the first TTi, gi and the second electrode. '1
i, caused. As a result, the inner surface of the cladding tube 1 has SiC
The membrane was coated. The film formation speed at that time is 4 to 10 m/h.
It was fast. The hardness of the coated film is Vickers hardness HV
It had a high hardness of =2000.
なお、本例においては真空槽５と被覆管１との間隔は１
〜５ｍｍであり、真空槽５が放電シールドとなり管の外
面においては放電は起こらず、したがって被覆管１の外
面には被覆は生じなかった。In this example, the distance between the vacuum chamber 5 and the cladding tube 1 is 1.
5 mm, the vacuum chamber 5 served as a discharge shield and no discharge occurred on the outer surface of the tube, so no coating was formed on the outer surface of the cladding tube 1.
（第２実施例） 第２図に第２実施例を示す。(Second example) FIG. 2 shows a second embodiment.
本例において第１実施例と異なる点は、次の点である。This example differs from the first example in the following points.
第１点は、高圧電源６として直流電源６′を用い、直流
電源６′の陰極側の端子を被覆管１に接続している点で
ある。The first point is that a DC power supply 6' is used as the high voltage power supply 6, and the cathode terminal of the DC power supply 6' is connected to the cladding tube 1.
第２点は被覆管１のガス導入管９が接続されている管端
と反対側の管端近傍に第２電極３を設け、第２電極は直
流電源６′の陽極側端子にｖｃ続されている点である。The second point is that a second electrode 3 is provided near the end of the cladding tube 1 opposite to the end to which the gas introduction tube 9 is connected, and the second electrode is connected to the anode side terminal of the DC power source 6'. The point is that
本例では、被覆する膜が導電性をもつものに限定される
が、高周波における整合回路が不要で、電源が簡単な構
成となる。他の点は第１実施例と同様である。In this example, the covering film is limited to one having conductivity, but a matching circuit at high frequencies is not required, and the power supply has a simple configuration. Other points are similar to the first embodiment.
（第３実施例） 第３図に第３実施例を示す。(Third example) FIG. 3 shows a third embodiment.
本例において第１実施例と異なる点は、被覆管１が真空
槽に収納されていない点であり、また、被覆管１のガス
導入管９が接続されている管端と反対側の管端に絶縁材
４を介して排気口８が設けられている点である。This example is different from the first example in that the cladding tube 1 is not housed in a vacuum chamber, and the tube end of the cladding tube 1 is opposite to the tube end to which the gas introduction tube 9 is connected. The point is that an exhaust port 8 is provided through an insulating material 4.
したがって、本例によれば、より簡単な構成により被覆
管ｌの内面に被覆することができる。Therefore, according to this example, the inner surface of the cladding tube I can be coated with a simpler structure.
（第４実施例） 第４図に第４実施例を示す。(Fourth example) FIG. 4 shows a fourth embodiment.
本例において第２実施例と異なる点は、被覆管１が真空
槽に収納されていない点である。This example differs from the second example in that the cladding tube 1 is not housed in a vacuum chamber.
（第５実施例）
本例においては、第１実施例〜第４実施例に対応して、
第２電極３を被覆管ｌ内に延長させて配設しである。こ
の場合、膜厚分布が一層良好となる。(Fifth Example) In this example, corresponding to the first to fourth examples,
The second electrode 3 is arranged to extend into the cladding tube l. In this case, the film thickness distribution becomes even better.
［発明の効果］
以上述べたように、本発明によれば、被覆管を低温に保
ちながら、速い成膜速度により被覆管の内面を被覆する
ことができる。[Effects of the Invention] As described above, according to the present invention, the inner surface of the cladding tube can be coated at a high film formation rate while keeping the cladding tube at a low temperature.
第１図は本発明の第１実施例を説明するだめの断面図で
ある。第２図は本発明の第２実施例を説明するための断
面図である。第３図は本発明の第３実施例を説明するた
めの断面図である。第４図は本発明の第４実施例を説明
するための断面図である。第５図（ａ）〜（与）は本発
明の第５実施例を説明するための断面図である。第６図
及び第７図は従来例を示す断面図である。
■・・被覆管、２．２′、 ・・電極、４・・絶縁材
、５・・真空槽、６・・高圧電源、６′・９・・ガス導
入管、１１・・グロー放電。
第 ５ 図
第 ５ 図
第６図 第７図
手続補正書
昭和６１年 ９月２５日FIG. 1 is a sectional view illustrating a first embodiment of the present invention. FIG. 2 is a sectional view for explaining a second embodiment of the present invention. FIG. 3 is a sectional view for explaining a third embodiment of the present invention. FIG. 4 is a sectional view for explaining a fourth embodiment of the present invention. FIGS. 5(a) to 5(d) are cross-sectional views for explaining a fifth embodiment of the present invention. FIGS. 6 and 7 are cross-sectional views showing conventional examples. ■...Claying tube, 2.2',...Electrode, 4...Insulating material, 5...Vacuum chamber, 6...High voltage power supply, 6', 9...Gas introduction tube, 11...Glow discharge. Figure 5 Figure 5 Figure 6 Figure 7 Procedural amendment September 25, 1986
Claims (3)
該被覆管内に気体を導入し電圧を印加したときにグロー
放電を生じるように第２電極を配設し、該被覆管内を真
空に排気した後、該被覆管内に、被覆しようとする被膜
の元素を含んだ気体を送り込み、該第１電極と該第２電
極との間に高圧電源を印加することにより該被覆管内に
グロー放電を発生させて該被覆管の内面を被覆すること
を特徴とする管内面の被覆方法。(1) The cladding tube itself made of a conductive material is used as the first electrode,
A second electrode is arranged so that a glow discharge occurs when a gas is introduced into the cladding tube and a voltage is applied, and after the inside of the cladding tube is evacuated, the elements of the coating to be coated are placed inside the cladding tube. The method is characterized in that a glow discharge is generated in the cladding tube by feeding a gas containing the cladding tube and applying a high voltage power source between the first electrode and the second electrode to coat the inner surface of the cladding tube. Method of coating the inner surface of the tube.
の端子を被覆管に電気的に接続する特許請求の範囲第１
項記載の管内面の被覆方法。(2) Claim 1, wherein the high voltage power source is a DC power source, and the cathode side terminal of the DC power source is electrically connected to the cladding tube.
Method for coating the inner surface of a tube as described in Section 1.
う特許請求の範囲第１項又は第２項記載の管内面の被覆
方法。(3) A method for coating the inner surface of a tube according to claim 1 or 2, wherein the tube is housed inside a vacuum layer and glow discharge is performed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2202186A JPS62180077A (en) | 1986-02-05 | 1986-02-05 | Coating method for inside surface of pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2202186A JPS62180077A (en) | 1986-02-05 | 1986-02-05 | Coating method for inside surface of pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180077A true JPS62180077A (en) | 1987-08-07 |
Family
ID=12071330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2202186A Pending JPS62180077A (en) | 1986-02-05 | 1986-02-05 | Coating method for inside surface of pipe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180077A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998007895A1 (en) * | 1996-08-19 | 1998-02-26 | Citizen Watch Co., Ltd. | Method of forming hard carbon film on inner circumferential surface of guide bush |
| JP2009506201A (en) * | 2005-08-24 | 2009-02-12 | ショット アクチエンゲゼルシャフト | Method and apparatus for plasma treatment inside hollow body |
| KR100899378B1 (en) * | 2007-05-16 | 2009-05-26 | (주)제이 앤 엘 테크 | Hollow body coating apparatus using the hollow cathode effect, inner wall coating method and coated cylinder or tube thereof |
-
1986
- 1986-02-05 JP JP2202186A patent/JPS62180077A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998007895A1 (en) * | 1996-08-19 | 1998-02-26 | Citizen Watch Co., Ltd. | Method of forming hard carbon film on inner circumferential surface of guide bush |
| US6020036A (en) * | 1996-08-19 | 2000-02-01 | Citizen Watch Co., Ltd. | Method of forming hard carbon film over the inner surface of guide bush |
| CN1111616C (en) * | 1996-08-19 | 2003-06-18 | 时至准钟表股份有限公司 | On inner circumferential surface of guide bush, form the method for hard carbon film |
| JP2009506201A (en) * | 2005-08-24 | 2009-02-12 | ショット アクチエンゲゼルシャフト | Method and apparatus for plasma treatment inside hollow body |
| US8747962B2 (en) | 2005-08-24 | 2014-06-10 | Schott Ag | Method and device for the internal plasma treatment of hollow bodies |
| KR100899378B1 (en) * | 2007-05-16 | 2009-05-26 | (주)제이 앤 엘 테크 | Hollow body coating apparatus using the hollow cathode effect, inner wall coating method and coated cylinder or tube thereof |
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