JPS62133530U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の実施例を示す正面図、第２
図は、第１図の平面図、第３図は、第１図の装置
のプツシヤーが基板を搬送している状態を示した
拡大図、第４図は、第１図の装置のプツシヤーが
待機位置にあるときの状態を示した拡大図、第５
図は、第３図の左側面図、第６図は、従来の位置
決め装置の一例を示す正面図である。 １４……搬送面、１５……ピストンロツド、１
６……シリンダ（アクチユエータ）、１９……プ
ツシヤ、２１……ばね、２５……ローラ（規制部
材）。 Figure 1 is a front view showing an embodiment of the present invention, Figure 2 is a front view showing an embodiment of the present invention;
The figure is a plan view of Figure 1, Figure 3 is an enlarged view showing the state in which the pusher of the apparatus shown in Figure 1 is transporting a substrate, and Figure 4 is a standby view of the pusher of the apparatus shown in Figure 1. Enlarged view showing the state when in position, No. 5
The figure is a left side view of FIG. 3, and FIG. 6 is a front view showing an example of a conventional positioning device. 14... Conveyance surface, 15... Piston rod, 1
6... Cylinder (actuator), 19... Pusher, 21... Spring, 25... Roller (regulating member).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 搬送面の搬送方向沿いに進退自在なロツドを備
えた往復動式アクチユエータを設け、該ロツドに
プツシヤーを回動自在に取付け、さらに該プツシ
ヤーの先端部が前記搬送面を越えてその一方の側
から他方の側へ突出するように該プツシヤを付勢
するばねを設けるとともに、プツシヤの待機位置
において該プツシヤを前記搬送面から他方の側へ
突出しない位置に傾倒させる規制部材を設けてな
る搬送装置。 A reciprocating actuator is provided with a rod that can move forward and backward along the conveying direction of the conveying surface, a pusher is rotatably attached to the rod, and the tip of the pusher extends beyond the conveying surface from one side thereof. A conveyance device comprising a spring that urges the pusher to protrude to the other side, and a regulating member that tilts the pusher to a position where the pusher does not protrude from the conveyance surface to the other side when the pusher is in a standby position.