JPS62129927A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS62129927A JPS62129927A JP26948085A JP26948085A JPS62129927A JP S62129927 A JPS62129927 A JP S62129927A JP 26948085 A JP26948085 A JP 26948085A JP 26948085 A JP26948085 A JP 26948085A JP S62129927 A JPS62129927 A JP S62129927A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- gap
- soft magnetic
- sum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
- G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
- G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は、磁性薄膜を用いた薄膜磁気ヘッドに関する。[Detailed description of the invention] [Field of application of the invention] The present invention relates to a thin film magnetic head using a magnetic thin film.
ＶＴＲ等の記録密度の向上に伴い、隣接トラック間で磁
化方向を異ならせるアジマス記録方式が開発され、さら
に記録密度を向上させるため、パーマロイ、アモルファ
ス、センダスト等の軟磁性薄膜をヘッドコア材として用
い、ギャップ長が短かくトラック幅の狭い磁気ヘッドの
開発が要求されている。この種の薄膜磁気ヘッドの一例
としては、特開昭５７−１４１０１１号公報に記載のも
のがある。As the recording density of VTRs and other devices improved, an azimuth recording method was developed in which the magnetization direction differs between adjacent tracks.In order to further improve the recording density, soft magnetic thin films such as permalloy, amorphous, and sendust were used as the head core material. There is a need to develop a magnetic head with a short gap length and narrow track width. An example of this type of thin film magnetic head is the one described in Japanese Patent Application Laid-Open No. 141011/1983.
第５図は上記した従来技術による薄膜磁気ヘッドをその
テープ摺動面からみた正面図であって、１は非磁性基板
、２は第１の軟磁性薄膜、３はＶ字状溝、４はギャップ
スペーサ膜、５は第２の軟磁性薄膜、６は非磁性膜、７
は台形状溝、１３は保護膜である。FIG. 5 is a front view of the thin-film magnetic head according to the prior art described above, viewed from its tape sliding surface, in which 1 is a non-magnetic substrate, 2 is a first soft magnetic thin film, 3 is a V-shaped groove, and 4 is a Gap spacer film, 5 is a second soft magnetic thin film, 6 is a nonmagnetic film, 7
1 is a trapezoidal groove, and 13 is a protective film.
なお、θはアジマス角度、ＩＩはコア幅、１２は磁気ギ
ャップ面の長さである。Note that θ is the azimuth angle, II is the core width, and 12 is the length of the magnetic gap surface.
同図において、この種の薄膜磁気ヘッドにおいては、軟
磁性膜を磁気ギャップ部近傍で狭くするために形成した
台形溝７によりコアのしぼり効果を持たせている。この
様な構成により、さらに記録密度を上げるために狭トラ
ツク化すると、再生出力が低下する。再生出力を大きく
するためには記録波長を長くすればよいが、記録波長を
長くするためにはギャップ長を長（する必要がある。し
かしながら、ギャップ長を長くすると隣接トラック間の
クローストークが大きくなる（アジマスロスが増す）。In the figure, in this type of thin film magnetic head, a trapezoidal groove 7 formed to narrow the soft magnetic film near the magnetic gap portion has a core squeezing effect. With such a configuration, when the track is made narrower to further increase the recording density, the reproduction output decreases. In order to increase the reproduction output, it is possible to increase the recording wavelength, but in order to increase the recording wavelength, it is necessary to increase the gap length.However, increasing the gap length increases the crosstalk between adjacent tracks. (Azimuth loss increases).
このクロストークを低減するこためにはアジマス角度θ
を大きくすればよいが、アジマス角度θを太き（すると
、コア幅！、に対して実際の磁気ギャップ面の長さ１２
が長くなって有効なしぼり効果が得られなくなり、再生
出力が減少してしまう。In order to reduce this crosstalk, the azimuth angle θ is
However, if the azimuth angle θ is increased (then the actual magnetic gap surface length 12 with respect to the core width!)
becomes longer, making it impossible to obtain an effective throttling effect, and the reproduction output decreases.
第６図は第５図に示した薄膜磁気ヘッドのギャップ部近
傍の斜視図であって、８は第１の軟磁性薄膜２ （第５
図）から構成されろ第１のコア本体、９は第２の軟磁性
薄膜５ （第５図）から構成される第２のコア半休、４
はギャップスペーサ膜、１０はＳ線用窓穴、Ｔ、、はト
ラック幅、ｇイはギャップデプスである。6 is a perspective view of the vicinity of the gap portion of the thin film magnetic head shown in FIG.
9 is a second core half body consisting of a second soft magnetic thin film 5 (FIG. 5);
10 is the gap spacer film, 10 is the S-line window hole, T, , is the track width, and g is the gap depth.
同図において、この種の′ｆＪ膜Ｔｎ気ヘッドでは、ト
ラック幅Ｔ５とギャップデプスｇｄの関係が、Ｔ、≧ｇ
、であっても、またＴ８≦ｇ、であっても、その差がわ
ずかである場合には、記録媒体の磁化に有効に活用され
る磁気ギャップ表面の磁束Φｇ、と、磁気ギャップ側面
のもれ磁束Φ２との比は、せいぜい、Φ９ｓ／Φ、＝１
であり、石荘気ギャップ側面のもれ磁束による磁束の広
がり、いわゆるフリンジングくもれ磁界による隣接トラ
ックへの影響）はさほど問題でなかった。しかしながら
、狭トラツク化に伴ないトラック幅ＴＷを小さくした時
、ギャップデプスｇ、は、ヘッド寿命を考えると、これ
以上に小さくすることができないために、磁気ギャップ
表面の磁束Φ、Ｊｓと、磁気ギャップ側面のもれ磁束Φ
、との比がΦ９、／Φ、〈１となり、磁気ギャップ表面
以外のもれ磁束（側面のもれ磁束）φ２によるフリンジ
ングが無視できなくなる。このようなフリンジングによ
る記録効率の低下は、上記従来の薄膜磁気ヘッドにおけ
るコアしぼりでは増々大きくなるという問題があった。In the same figure, in this type of 'fJ film Tn air head, the relationship between the track width T5 and the gap depth gd is T, ≧g
, even if T8≦g, if the difference is small, the magnetic flux Φg on the surface of the magnetic gap, which is effectively used for magnetizing the recording medium, and the magnetic flux on the side surface of the magnetic gap The ratio of magnetic flux Φ2 to magnetic flux Φ2 is at most Φ9s/Φ, = 1
Therefore, the spread of magnetic flux due to leakage magnetic flux on the sides of the stone gap (the influence on adjacent tracks due to the so-called fringing leakage magnetic field) was not much of a problem. However, when the track width TW is reduced due to the narrowing of the track, the gap depth g cannot be made any smaller considering the head life. Leakage magnetic flux on the side of the gap Φ
, becomes Φ9, /Φ, <1, and fringing due to leakage magnetic flux other than the magnetic gap surface (leakage magnetic flux on the side surface) φ2 cannot be ignored. There is a problem in that the decrease in recording efficiency due to such fringing becomes even greater when the core is squeezed in the conventional thin film magnetic head.
本発明の目的は、上記従来技術の問題を解決し、狭トラ
ツク化に伴なうアジマス角度の増加によっても、コアし
ぼり効果を発揮でき、かつフリンジングによる記録効率
低下を防止して良好な記録特性を得ることを可能とした
薄膜磁気ヘッドを提供するにある。An object of the present invention is to solve the above-mentioned problems of the prior art, to achieve a core squeezing effect even by increasing the azimuth angle due to the narrowing of the track, and to prevent a decrease in recording efficiency due to fringing, thereby achieving good recording. An object of the present invention is to provide a thin-film magnetic head that makes it possible to obtain characteristics.
この目的を達成するために、本発明は、アジマス角度θ
が大きくなっても有効なコアしぼり効果を得るためには
第５図におけるコア幅β１が常に実際の磁気ギャップ面
の長さ１２よりも大きければよいことから、磁気ギャッ
プ面を挟んでいる２つのコア半休近傍に、該２つのコア
半休及び磁気ギャップ面を挟む形に対位して、非磁性膜
を配置し、かつ前記対位した非磁性膜とコア材となる磁
性膜により区切られろ２つの境界線と磁気ギャップ面に
よりなる２つの交点の角度とアジマス角度との関係をあ
る範囲に規定すると共に、前記非磁性膜を導電性の高い
金属膜とした点に特徴がある。To achieve this objective, the present invention provides an azimuth angle θ
In order to obtain an effective core squeezing effect even when A non-magnetic film is disposed in the vicinity of the core half-hole, facing each other across the two core half-holes and the magnetic gap surface, and is separated by the opposed non-magnetic film and the magnetic film serving as the core material. The present invention is characterized in that the relationship between the angle of two intersections between the boundary line and the magnetic gap plane and the azimuth angle is defined within a certain range, and the nonmagnetic film is a highly conductive metal film.
上記したフリンジングによる記録効率の低下防止は、い
わゆる表皮効果を利用するものであり、非磁性膜として
用いる金属膜の抵抗率をρ、周波数をｆ、透磁率をμ、
表皮の深さをδとしたとき、の関係がある。したがって
、抵抗率ρが小さい金属膜を磁気ギャップ部近傍に配置
すれば表皮の深さδは小、すなわちもれ磁束は小さくな
り、フリンジングを防止できることになる。The above-mentioned prevention of the decline in recording efficiency due to fringing utilizes the so-called skin effect, and the resistivity of the metal film used as the non-magnetic film is ρ, the frequency is f, the magnetic permeability is μ,
When the depth of the epidermis is δ, there is the following relationship. Therefore, if a metal film with a small resistivity ρ is placed near the magnetic gap, the skin depth δ will be small, that is, the leakage magnetic flux will be small, and fringing can be prevented.
以下、本発明の実施例を図面を用いて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明による薄膜磁気ヘッドの一実施例を示す
テープ摺動面の正面図であって、１は非磁性基板、２は
第１の軟磁性薄膜、４はギャップスペーサ膜、５は第２
の軟磁性薄膜、ＩＬ１１’は非磁性金属膜、１２は磁気
ギャップ面、１３は保護膜である。FIG. 1 is a front view of a tape sliding surface showing an embodiment of a thin film magnetic head according to the present invention, in which 1 is a nonmagnetic substrate, 2 is a first soft magnetic thin film, 4 is a gap spacer film, and 5 is a sliding surface of a tape. Second
IL11' is a non-magnetic metal film, 12 is a magnetic gap surface, and 13 is a protective film.
同図において、非磁性基板１上の磁気ギャップ面１２の
近傍、及び第１と第２の軟磁性薄膜２と５上の磁気ギャ
ップ面１２の近傍に非磁性で電気抵抗率が小さい、例え
ばＣｕ等の非磁性金属膜の層１１゜１１′が形成されて
いる。前記２つの非磁性金属膜１１．１１’と前記第１
と第２の軟磁性膜２と５との境界線と、磁気ギャップ面
１２とがなす角度Ａ、Ａ’、Ｂ、Ｂ’とアジマス角度θ
との関係式はＡ＋Ｂ≧１８０°十〇 （又は、もしくは
かつＡ’＋Ｂ’≧１８０°＋θ）としている。In the figure, a non-magnetic material having low electrical resistivity, for example Cu, is placed near the magnetic gap surface 12 on the non-magnetic substrate 1 and near the magnetic gap surface 12 on the first and second soft magnetic thin films 2 and 5. Layers 11° and 11' of non-magnetic metal films are formed. The two non-magnetic metal films 11 and 11' and the first
The angles A, A', B, and B' between the boundary line between the second soft magnetic films 2 and 5 and the magnetic gap surface 12 and the azimuth angle θ
The relational expression is A+B≧180°10 (or and A'+B'≧180°+θ).
このようにすることによって、磁気ギャップ面１２の長
さ１１は軟磁性膜２，５で形成されるコアの幅β２より
必ず小さくなるので、しぼり効果がアジマス角θの増加
で減殺されることはなくなる。By doing this, the length 11 of the magnetic gap surface 12 is always smaller than the width β2 of the core formed by the soft magnetic films 2 and 5, so the squeezing effect will not be reduced by increasing the azimuth angle θ. It disappears.
第２図は本発明による薄膜磁気ヘッドの製造方法の一実
施例を示す工程図である。FIG. 2 is a process diagram showing an embodiment of a method for manufacturing a thin film magnetic head according to the present invention.
同図において、この工程は（ａ）〜（ｆ）から成り、ま
ず（δ）に示すように、ガラス等の非磁性基板１を用意
する。この非磁性基板１上の最終的に磁気ギャップが形
成される位置にｆｂｌに示すようにマスク１４を位置さ
せ、マスクスパッタによりＣｕ等の非磁性金属膜１１を
被着形成する。次に（Ｃ）に示すように、非磁性金属膜
の層１１上の中心に左右いずれか一方側にマスク１４′
を位置させ、第１の軟磁性薄膜２をマスクスパッタによ
り被着形成する。被着形成した第１の軟磁性薄膜２をダ
イヤモンドバイト等の高精度加工が容易なバイトにより
切削し、（ｄｉに示すように、第１の軟磁性薄膜２の段
差傾斜部の一部を少（とも非磁性金属膜の層１１に達す
るまで除去して磁気ギャップ面１２を形成する。次に、
（Ｑ）に示すように、第１の軟磁性薄膜２と、前記切削
により形成した非磁性金属膜の層の溝３を覆ってギャッ
プスペーサ膜４をスパッタリング等により被着し、この
上にマスク１４″を図示位置に置いて第２の軟磁性薄膜
５を溝部１５と磁気ギャップ面１２の上面のみに被着形
成する。In the figure, this step consists of steps (a) to (f), and first, as shown in (δ), a nonmagnetic substrate 1 made of glass or the like is prepared. A mask 14 is positioned on the nonmagnetic substrate 1 at a position where a magnetic gap will finally be formed, as shown by fbl, and a nonmagnetic metal film 11 such as Cu is deposited by mask sputtering. Next, as shown in FIG.
, and the first soft magnetic thin film 2 is deposited by mask sputtering. The deposited first soft magnetic thin film 2 is cut with a cutting tool such as a diamond cutting tool that is easy to process with high precision, and a part of the stepped inclined portion of the first soft magnetic thin film 2 is reduced (as shown in di). (Both are removed until reaching the layer 11 of the nonmagnetic metal film to form the magnetic gap surface 12. Next,
As shown in (Q), a gap spacer film 4 is deposited by sputtering or the like to cover the first soft magnetic thin film 2 and the groove 3 of the non-magnetic metal film layer formed by the cutting, and a mask is applied thereon. 14'' is placed in the illustrated position, and the second soft magnetic thin film 5 is deposited only on the groove portion 15 and the upper surface of the magnetic gap surface 12.
被着形成した第１と第２の軟磁性薄膜２と５の磁気ギャ
ップ面１２の上部のみをｉｆ）に示すように、■字状ハ
イド等により切削除去し、その上に非磁性金属膜の層１
１′をマスクスパッタにより被着形成した後、非磁性金
属膜の層１１′の上面をラップ等で除去する。その後、
（ｇｌに示すように、露出した第１の軟磁性薄膜２の上
面と、非磁性金属膜の層１１′の上面及び第２の軟磁性
薄膜５の上面とを保護するため、これらの上を覆ってガ
ラス等の保護膜１３を被着形成する。As shown in if), only the upper part of the magnetic gap surface 12 of the first and second soft magnetic thin films 2 and 5 that has been deposited is removed by cutting with a ■-shaped hide or the like, and a non-magnetic metal film is placed on top of it. layer 1
After forming the layer 11' by mask sputtering, the upper surface of the nonmagnetic metal film layer 11' is removed by lapping or the like. after that,
(As shown in gl, in order to protect the exposed upper surface of the first soft magnetic thin film 2, the upper surface of the non-magnetic metal film layer 11', and the upper surface of the second soft magnetic thin film 5, A protective film 13 made of glass or the like is then formed to cover it.
以上の工程を経て、薄膜磁気ヘッドが製造される。Through the above steps, a thin film magnetic head is manufactured.
上記説明した工程では、軟磁性薄膜と非磁性金属膜の形
成にマスクスパッタ法を採用しているが、これに限らず
、イオンミリング法、レジスト法でもよい。また、ギャ
ップ形成Ｖ字状の溝の加工にダイヤモンドバイトによる
切削除去法を採用しているが、これに限ることなく、例
えばイオンミリング法などでもこれらを形成することが
できる。In the process described above, the mask sputtering method is used to form the soft magnetic thin film and the nonmagnetic metal film, but the method is not limited to this, and ion milling method or resist method may also be used. Further, although a cutting/removing method using a diamond cutting tool is employed to process the gap-forming V-shaped groove, the method is not limited to this, and these may be formed by, for example, an ion milling method.
なお、上記実施例では、非磁性金属膜をギャップ面近傍
にのみ配置しているが、これに限ることなく、コア全面
に配置してもよい。In the above embodiment, the non-magnetic metal film is placed only near the gap plane, but the non-magnetic metal film is not limited to this, and may be placed over the entire core.
第３図、第４図は、それぞれ本発明による薄膜磁気ヘッ
ドの他の実施例を示すテープ摺動面の正面図であって、
第１図と同一符号は同一部分を示す。3 and 4 are front views of tape sliding surfaces showing other embodiments of the thin film magnetic head according to the present invention, respectively,
The same reference numerals as in FIG. 1 indicate the same parts.
第３図は非磁性金属膜をコア全体に亘って配置したもの
を示し、非磁性金属膜ＩＬＩＩ’はコアを形成する軟磁
性薄膜２．５に対し、磁気ギャップ面１２に関して両側
に配置されている。FIG. 3 shows a non-magnetic metal film arranged over the entire core, and the non-magnetic metal film ILII' is arranged on both sides of the magnetic gap surface 12 with respect to the soft magnetic thin film 2.5 forming the core. There is.
第４図は磁気ギャップ面１２に関し、コアを形成する軟
磁性薄膜２，５のそれぞれの側に非磁性金属膜１１，１
１’が配置されている。FIG. 4 shows non-magnetic metal films 11 and 1 on each side of soft magnetic thin films 2 and 5 forming the core with respect to the magnetic gap surface 12.
1' is placed.
以上説明したように、本発明によれば、磁気ギャップ面
を挟む軟磁性薄膜から成る２つのコア半休近傍に、前記
コア半休及び磁気ギャップ面を挟む形に対位して導電性
の良い非磁性金属膜を配置し、かつ前記対位、した非磁
性金属膜とコア材となる軟磁性薄膜により区切られる２
つの境界線とギヤツブ面とが交わるときに生ずる４つの
内角のうち、それぞれ磁気ギャップ面を境にし、同一コ
ア半体側の２つの内角の和が、アジマス角度と１８０
’との和より大きくなる様に前記非磁性金属膜を配置す
ることにより、アジマス角度に関係なく常にコアしぼり
効果を実現できると共に、テープ摺動面に対して垂直な
コア側面のもれ磁束によるフリンジングを抑えることが
でき、狭トラツク化に伴なう上記従来技術の欠点を除い
て優れた機能の薄膜磁気ヘッドを提供することができる
。As explained above, according to the present invention, in the vicinity of two core half-holes made of soft magnetic thin films sandwiching a magnetic gap surface, a non-magnetic film with good conductivity is placed opposite to the two core half-holes and sandwiching the core half-holes and the magnetic gap surface. 2, in which a metal film is arranged and separated by the opposed non-magnetic metal film and a soft magnetic thin film serving as a core material;
Of the four internal angles that occur when two boundary lines intersect with the gear surface, the sum of the two internal angles on the same core half side, each bordering on the magnetic gap surface, is the azimuth angle and 180
By arranging the non-magnetic metal film so that it is larger than the sum of It is possible to suppress fringing, and to provide a thin film magnetic head with excellent functionality by eliminating the above-mentioned drawbacks of the prior art associated with narrow tracks.
第１図は本発明による薄膜磁気ヘッドの一実施例を示す
テープ摺動面の正面図、第２図は本発明による薄膜磁気
ヘッドの製造方法の一実施例を示す工程図、第３図及び
第４図はそれぞれ本発明による薄膜磁気ヘッドの他の実
施例を示すテープ摺動面の正面図、第５図は従来技術に
よる薄膜磁気ヘッドのテープ摺動面の正面図、第６図は
第５図に示した薄膜磁気ヘッドの磁気ギャップ部近傍の
斜視図である。
１・・・非磁性基板、２・・・第１の軟磁性薄膜、４・
・・ギャップスペーサ膜、５・・・第２の軟磁性薄膜、
１１゜１１′・・・非磁性金属膜、１２・・・磁気ギャ
ップ面、１３・・・保護膜。
代理人 弁理士 武 顕次部 （外１名）第１図
第２図
第３図
第４図
第５図
第６図FIG. 1 is a front view of a tape sliding surface showing an embodiment of a thin film magnetic head according to the present invention, FIG. 2 is a process diagram showing an embodiment of a method for manufacturing a thin film magnetic head according to the present invention, and FIGS. 4 is a front view of a tape sliding surface showing another embodiment of a thin film magnetic head according to the present invention, FIG. 5 is a front view of a tape sliding surface of a thin film magnetic head according to the prior art, and FIG. FIG. 6 is a perspective view of the vicinity of the magnetic gap portion of the thin film magnetic head shown in FIG. 5; DESCRIPTION OF SYMBOLS 1... Nonmagnetic substrate, 2... First soft magnetic thin film, 4...
... gap spacer film, 5... second soft magnetic thin film,
11°11'...Nonmagnetic metal film, 12...Magnetic gap surface, 13...Protective film. Agent: Patent Attorney Kenjibe Take (1 other person) Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6
Claims (1)
膜との間にギャップスペーサを介在させた第２の軟磁性
薄膜とを被着し、前記第１の軟磁性薄膜と第２の軟磁性
薄膜とで前記ギャップスペーサを介して磁気ギャップを
形成する薄膜磁気ヘッドにおいて、少なくとも前記磁気
ギャップの近傍に、前記第１の軟磁性薄膜と第２の軟磁
性薄膜を挟んで対位して２つの非磁性金属膜を配置し、
前記対位した非磁性金属膜の各々と前記第１の軟磁性薄
膜との境界線と前記磁気ギャップの面とがつくる角度の
和と、前記対位した非磁性金属膜の各々と前記第２の軟
磁性薄膜との境界線と前記磁気ギャップの面とがつくる
角の和の少くとも一方がアジマス角度と１８０°との和
より大きくなる様に前記非磁性金属膜を配置したことを
特徴とする薄膜磁気ヘッド。A first soft magnetic thin film and a second soft magnetic thin film with a gap spacer interposed between the first soft magnetic thin film are deposited on a nonmagnetic substrate, and the first soft magnetic thin film In a thin film magnetic head that forms a magnetic gap with a second soft magnetic thin film via the gap spacer, the first soft magnetic thin film and the second soft magnetic thin film are paired at least in the vicinity of the magnetic gap with the first soft magnetic thin film and the second soft magnetic thin film sandwiched therebetween. two non-magnetic metal films are placed in position,
the sum of the angles formed by the boundary line between each of the opposed non-magnetic metal films and the first soft magnetic thin film and the surface of the magnetic gap; The non-magnetic metal film is arranged so that at least one of the sum of the angles formed by the boundary line with the soft magnetic thin film and the surface of the magnetic gap is larger than the sum of the azimuth angle and 180°. Thin film magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60269480A JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60269480A JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129927A true JPS62129927A (en) | 1987-06-12 |
| JPH0664711B2 JPH0664711B2 (en) | 1994-08-22 |
Family
ID=17473027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60269480A Expired - Lifetime JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0664711B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE41763E1 (en) | 2003-05-28 | 2010-09-28 | Oasis Concepts | Multi-plane compound folding frame |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593716A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Thin film magnetic head |
-
1985
- 1985-12-02 JP JP60269480A patent/JPH0664711B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593716A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Thin film magnetic head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE41763E1 (en) | 2003-05-28 | 2010-09-28 | Oasis Concepts | Multi-plane compound folding frame |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0664711B2 (en) | 1994-08-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2613906B2 (en) | Thin film magnetic head and method of manufacturing the same | |
| US4595964A (en) | Magnetic head and method of making the same | |
| US4602307A (en) | Compound type magnetic head | |
| JPS62129927A (en) | Thin film magnetic head | |
| US5014148A (en) | Perpendicular magnetic recording and reproducing head | |
| JP2991589B2 (en) | Thin-film magnetic head and magnetic disk drive | |
| JPS63247906A (en) | Thin film magnetic head | |
| JPH053646B2 (en) | ||
| JPS62217416A (en) | Manufacture of thin film magnetic head | |
| JP2801435B2 (en) | Magnetic head | |
| JPS62262209A (en) | Magnetic head | |
| KR0179517B1 (en) | Magnetic head | |
| JP3252583B2 (en) | Magnetic head and method of manufacturing the same | |
| JPH01189010A (en) | Thin film magnetic head for vertical magnetic recording | |
| JPH02132612A (en) | Manufacture of magnetic head | |
| JPS62298908A (en) | Magnetic head | |
| JPS63211112A (en) | Production of thin film magnetic head | |
| JPH0636221A (en) | Magnetic head and its manufacture | |
| JPS61211808A (en) | Thin film magnetic head | |
| JPS61175917A (en) | Thin film magnetic head | |
| JPS61294618A (en) | Production of magnetic head | |
| JPH0246511A (en) | Magnetic head | |
| JPH0461008A (en) | Magnetic head | |
| JPH031307A (en) | Production of magnetic head | |
| JPS5965918A (en) | Thin film magnetic head |