JPH0664711B2 - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0664711B2 JPH0664711B2 JP60269480A JP26948085A JPH0664711B2 JP H0664711 B2 JPH0664711 B2 JP H0664711B2 JP 60269480 A JP60269480 A JP 60269480A JP 26948085 A JP26948085 A JP 26948085A JP H0664711 B2 JPH0664711 B2 JP H0664711B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- gear
- soft magnetic
- soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
- G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
- G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は、磁性薄膜を用いた薄膜磁気ヘツドに関する。TECHNICAL FIELD The present invention relates to a thin film magnetic head using a magnetic thin film.
VTR等の記録密度の向上に伴い、隣接トラツク間で磁化
方向を異ならせるアジマス記録方式が開発され、さらに
記録密度を向上させるため、パーマロイ，アモルフア
ス，センダスト，等の軟磁性薄膜をヘツドコア材として
用い、ギヤツプ長が短かくトラツク幅の狭い磁気ヘツド
の開発が要求されている。この種の薄膜磁気ヘツドの一
例としては、特開昭57−141011号公報に記載のものがあ
る。With the improvement of recording density of VTR etc., an azimuth recording method was developed in which the magnetization direction was changed between adjacent tracks. To further improve the recording density, soft magnetic thin films such as permalloy, amorphous, sendust, etc. were used as a head core material. It is required to develop a magnetic head with a short gear length and a narrow track width. An example of this type of thin film magnetic head is disclosed in Japanese Patent Application Laid-Open No. 57-141011.
第４図は上記した従来技術による薄膜磁気ヘツドをその
テープ摺動面からみた正面図であつて、１は非磁性基
板、２は第１の軟磁性薄膜、３はＶ字状溝、４はギヤツ
プスペーサ膜、５は第２の軟磁性薄膜、６は非磁性膜、
７は台形状溝、13は保護膜である。FIG. 4 is a front view of the above-mentioned conventional thin film magnetic head as seen from the sliding surface of the tape. 1 is a non-magnetic substrate, 2 is the first soft magnetic thin film, 3 is a V-shaped groove, and 4 is Gear spacer film, 5 is a second soft magnetic thin film, 6 is a non-magnetic film,
Reference numeral 7 is a trapezoidal groove, and 13 is a protective film.
なお、θはアジマス角度、ｌ１はコア幅、ｌ２は磁気ギ
ヤツプ面の長さである。Here, θ is the azimuth angle, l 1 is the core width, and l 2 is the length of the magnetic gear surface.
同図において、この種の薄膜磁気ヘツドにおいては、軟
磁性膜を磁気ギヤツプ部近傍で狭くするために形成した
台形溝７によりコアのしぼり効果を持たせている。この
様な構成により、さらに記録密度を上げるために狭トラ
ツク化すると、再生出力が低下する。再生出力を大きく
するためには記録波長を長くすればよいが、記録波長を
長くするためにはギヤツプ長を長くする必要がある。し
かしながら、ギヤツプ長を長くすると隣接トラツク間の
クローストークが大きくなる（アジマスロスが増す）。
このクロストークを低減するこためにはアジマス角θを
大きくすればよいが、アジマス角度θを大きくすると、
コア幅ｌ１に対して実際の磁気ギヤツプ面の長さｌ２が
長くなつて有効なしぼり効果が得られなくなり、再生出
力が減少してしまう。In this figure, in this type of thin film magnetic head, a trapezoidal groove 7 is formed to narrow the soft magnetic film in the vicinity of the magnetic gear portion, thereby providing a core squeezing effect. With such a configuration, if the track is narrowed to further increase the recording density, the reproduction output will decrease. The recording wavelength may be lengthened in order to increase the reproduction output, but it is necessary to lengthen the gear length in order to lengthen the recording wavelength. However, if the gear length is increased, the crosstalk between adjacent tracks increases (the azimuth loss increases).
In order to reduce this crosstalk, the azimuth angle θ should be increased, but if the azimuth angle θ is increased,
Since the actual length l 2 of the magnetic gear cap surface becomes longer than the core width l 1 , the effective squeezing effect cannot be obtained and the reproduction output is reduced.
第５図は第４図に示した薄膜磁気ヘツドのギヤツプ部近
傍の斜視図であつて、８は第１の軟磁性薄膜２（第４
図）から構成される第１のコア半体、９は第２の軟磁性
薄膜５（第４図）から構成される第２のコア半体、４は
ギヤツプスペーサ膜、10は巻線用窓穴、Ｔｗはトラツク
幅、ｇｄはギヤツプデプスである。FIG. 5 is a perspective view of the vicinity of the gear portion of the thin film magnetic head shown in FIG. 4, in which 8 is the first soft magnetic thin film 2 (fourth soft magnetic thin film).
The first core half composed of (FIG.), 9 the second core half composed of the second soft magnetic thin film 5 (FIG. 4), 4 the gap spacer film, 10 the winding window hole , T w is the track width, and g d is the gear depth.
同図において、この種の薄膜磁気ヘツドでは、トラツク
幅Ｔｗとギヤツプデプスｇｄの関係が、ＴＷｇｄであ
つても、またＴｗｇｄであつても、その差がわずかで
ある場合には、記録媒体の磁化に有効に活用される磁気
ギヤツプ表面の磁束Φgsと、磁気ギヤツプ側面のもれ磁
束Φｌとの比は、せいぜい、Φgs／Φｌ＝１であり、磁
気ギヤツプ側面のもれ磁束による磁束の広がり、いわゆ
るフリンジング（もれ磁界による隣接トラツクへの影
響）はさほど問題でなかつた。しかしながら、狭トラツ
ク化に伴ないトラツク幅Ｔｗを小さくした時、ギヤツプ
デプスｇｄは、ヘツド寿命を考えると、これ以上に小さ
くすることができないために、磁気ギヤツプ表面の磁束
Φgsと、磁気ギヤツプ側面のもれ磁束Φｌとの比がΦgs
／Φｌ＜１となり、磁気ギヤツプ表面以外のもれ磁束
（側面のもれ磁束）Φｌによるフリンジングが無視でき
なくなる。このようなフリンジングによる記録効率の低
下は、上記従来の薄膜磁気ヘツドにおけるコアしぼりで
は増々大きくなるという問題があつた。In this figure, in this type of thin-film magnetic head, when the relationship between the track width T w and the gear depth g d is T W g d or T w g d , the difference is small. The ratio of the magnetic flux Φ gs on the surface of the magnetic gear cup, which is effectively used for the magnetization of the recording medium, to the leakage magnetic flux Φ l on the side surface of the magnetic gear is Φ gs / Φ l = 1 at most. The spread of the magnetic flux due to the leakage magnetic flux on the side surface, so-called fringing (the influence of the leakage magnetic field on the adjacent track) was not a serious problem. However, when the track width T w is narrowed due to the narrowing of the track, the gear cup depth g d cannot be further reduced considering the head life, so the magnetic flux Φ gs on the surface of the magnetic gear trap and the magnetic gear cup are reduced. The ratio to the side leakage flux Φ l is Φ gs
/ Φ l <1, and fringing due to the leakage magnetic flux (leakage magnetic flux on the side surface) Φ l other than the surface of the magnetic gear cannot be ignored. There has been a problem that such a decrease in recording efficiency due to fringing is further increased by the core squeezing in the conventional thin film magnetic head described above.
本発明の目的は、上記従来技術の問題を解決し、狭トラ
ツク化に伴なうアジマス角度の増加によつても、コアし
ぼり効果を発揮でき、かつフリンジングによる記録効率
低下を防止して良好な記録特性を得ることを可能とした
薄膜磁気ヘツドを提供するにある。The object of the present invention is to solve the above-mentioned problems of the prior art, and even by increasing the azimuth angle accompanying the narrowing of the track, it is possible to exert the core squeezing effect, and to prevent the recording efficiency from decreasing due to fringing. Another object is to provide a thin film magnetic head capable of obtaining excellent recording characteristics.
この目的を達成するために、本発明は、非磁性基板上
に、第１の軟磁性薄膜と、第１の軟磁性薄膜との間にギ
ヤツプスペーサを介在させた第２の軟磁性薄膜とを被着
し、前記第１の軟磁性薄膜と第２の軟磁性薄膜とで前記
ギヤツプスペーサを介して磁気ギヤツプを形成する薄膜
磁気ヘツドにおいて、少なくとも前記磁気ギヤツプの両
端近傍に、前記第１の軟磁性薄膜と第２の軟磁性薄膜を
挾んで対位して抵抗率の小さい２つの非磁性金属膜を配
設し、前記対位した非磁性金属膜の各々と前記第１の軟
磁性薄膜との境界線と前記磁気ギヤツプの面とのつくる
角度をA,Bとし、前記対位した非磁性金属膜の各々と前
記第２の軟磁性薄膜との境界線と前記磁気ギヤツプの面
とのつくる角度をＡ′,B′とし、前記磁気ギヤツプのア
ジマス角度をθとしたとき、 Ａ＋Ｂ＞180゜＋θ かつＡ′＋Ｂ′＞180゜＋θ かつA,A′,B,B′いずれも90゜以上 とし、かつ前記両非磁性金属膜を前記磁気ギヤツプの両
端近傍に配設したことにより前記磁気ギヤツプの長さを
前記軟磁性薄膜の幅より短く構成させた構成にしてあ
る。In order to achieve this object, the present invention provides a non-magnetic substrate with a first soft magnetic thin film and a second soft magnetic thin film having a gap spacer interposed between the first soft magnetic thin film and the first soft magnetic thin film. In the thin film magnetic head, the first soft magnetic thin film and the second soft magnetic thin film form a magnetic gear via the gear spacer, and the first soft magnetic thin film is provided at least near both ends of the magnetic gear. And a second soft magnetic thin film sandwiched between the two non-magnetic metal films having a small resistivity, and the two soft magnetic thin films are bounded by a boundary between each of the paired non-magnetic metal films and the first soft magnetic thin film. The angles between the line and the surface of the magnetic gearup are defined as A and B, and the angle between the boundary line between each of the opposing non-magnetic metal films and the second soft magnetic thin film and the surface of the magnetic gearup is defined. A ', B', and the azimuth angle of the magnetic gear is θ. A + B> 180 ° + θ and A '+ B'> 180 ° + θ and A, A ', B, B' are all 90 ° or more, and both non-magnetic metal films are arranged near both ends of the magnetic gear. Thus, the length of the magnetic gear is shorter than the width of the soft magnetic thin film.
上記したフリンジングによる記録効率の低下防止は、い
わゆる表皮効果を利用するものであり、非磁性膜として
用いる金属膜の抵抗率をρ、周波数をｆ、透磁率をμ、
表皮の深さをδとしたとき、 の関係がある。したがつて、抵抗率ρが小さい金属膜を
磁気ギヤツプ部近傍に配置すれば表皮の深さδは小、す
なわちもれ磁束は小さくなり、フリンジングを防止でき
ることになる。In order to prevent the deterioration of the recording efficiency due to the above-mentioned fringing, the so-called skin effect is utilized. The resistivity of the metal film used as the non-magnetic film is ρ, the frequency is f, the permeability is μ,
When the skin depth is δ, Have a relationship. Therefore, if a metal film having a low resistivity ρ is arranged in the vicinity of the magnetic gap portion, the skin depth δ is small, that is, the leakage magnetic flux is small, and fringing can be prevented.
以下、本発明の実施例を図面を用いて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明による薄膜磁気ヘツドの一実施例を示す
テープ摺動面の正面図であつて、１は非磁性基板、２は
第１の軟磁性薄膜、４はギヤツプスペーサ膜、５は第２
の軟磁性薄膜、11,11′は非磁性金属膜、12は磁気ギヤ
ツプ面、13は保護膜である。FIG. 1 is a front view of a tape sliding surface showing an embodiment of a thin film magnetic head according to the present invention. 1 is a non-magnetic substrate, 2 is a first soft magnetic thin film, 4 is a gap spacer film, and 5 is a first spacer. Two
Is a soft magnetic thin film, 11, 11 'are non-magnetic metal films, 12 is a magnetic gap surface, and 13 is a protective film.
同図において、非磁性基板１上の磁気ギヤツプ面12の近
傍、及び第１と第２の軟磁性薄膜２と５上の磁気ギヤツ
プ面12の近傍に非磁性で電気抵抗率が小さい、例えばCu
等の非磁性金属膜の層11,11′が形成されている。前記
２つの非磁性金属膜11,11′と前記第１と第２の軟磁性
膜２と５との境界線と、磁気ギヤツプ面12とがなす角度
A,A′、B,B′とアジマス角度θとの関係式は Ａ＋Ｂ＞180゜＋θかつＡ′＋Ｂ′＞180゜＋θ A,A′,B,B′いずれも90゜以上 としている。In the figure, a non-magnetic material having a small electric resistivity, for example, Cu, is provided near the magnetic gear surface 12 on the non-magnetic substrate 1 and near the magnetic gear surface 12 on the first and second soft magnetic thin films 2 and 5.
Nonmagnetic metal layers 11 and 11 'are formed. The angle formed by the boundary line between the two non-magnetic metal films 11 and 11 'and the first and second soft magnetic films 2 and 5 and the magnetic gap surface 12
The relational expressions between A, A ', B, B'and the azimuth angle .theta. Are A + B> 180.degree. +. Theta. And A' + B '> 180.degree. +. Theta.
さらに、上記関係式を満足させるとともに、両非磁性金
属膜11,11′を磁気ギヤツプ面12の両端近傍に配設し
て、磁気ギヤツプ面12の長さｌ１を軟磁性膜2,5で形成
されるコアの幅ｌ２より小さく設定してあるので、しぼ
り効果（磁気ヘツドの記録時、磁束の流れを見たとき、
磁気ギヤツプ位置の断面積（又は長さｌ１）がコア内部
位置での磁束の流れに直交する断面積（又は長さ）より
小さいとき有する）がアジマス角θの増加で減殺される
ことはなくなる。Furthermore, while satisfying the above relational expression, both non-magnetic metal films 11 and 11 'are disposed near both ends of the magnetic gear cap surface 12, and the length l 1 of the magnetic gear cap surface 12 is made of the soft magnetic films 2 and 5. Since the width is set smaller than the width l 2 of the formed core, the squeezing effect (when recording the magnetic head, when observing the flow of the magnetic flux,
The cross-sectional area (or length l 1 ) at the magnetic gear position is smaller than the cross-sectional area (or length) orthogonal to the flow of magnetic flux at the core internal position) is not reduced by the increase in azimuth angle θ. .
第２図は本発明による薄膜磁気ヘツドの製造方法の一実
施例を示す工程図である。FIG. 2 is a process drawing showing an embodiment of a method of manufacturing a thin film magnetic head according to the present invention.
同図において、この工程は（ａ）〜（ｆ）から成り、ま
ず（ａ）に示すように、ガラス等の非磁性基板１を用意
する。この非磁性基板１上の最終的に磁気ギヤツプが形
成される位置に（ｂ）に示すようにマスク14を位置さ
せ、マスクスパツタによりCu等の非磁性金属膜11を被着
形成する。次に（ｃ）に示すように、非磁性金属膜の層
11上の中心に左右いずれか一方側にマスク14′を位置さ
せ、第１の軟磁性薄膜２をマスクスパツタにより被着形
成する。被着形成した第１の軟磁性薄膜２をダイヤモン
ドバイト等の高精度加工が容易なバイトにより切削し、
（ｄ）に示すように、第１の軟磁性薄膜２の段差傾斜部
の一部を少くとも非磁性金属膜の層11に達するまで除去
して磁気ギヤツプ面12を形成する。次に、（ｅ）に示す
ように、第１の軟磁性薄膜２と、前記切削により形成し
た非磁性金属膜の層の溝３を覆つてギヤツプスペーサ膜
４をスパツタリング等により被着し、この上にマスク1
4″を図示位置に置いて第２の軟磁性薄膜５を溝部15と
磁気ギヤツプ面12の上面のみに被着形成する。In this figure, this step comprises steps (a) to (f). First, as shown in (a), a non-magnetic substrate 1 such as glass is prepared. A mask 14 is positioned on the non-magnetic substrate 1 at a position where a magnetic gap is finally formed, as shown in FIG. 7B, and a non-magnetic metal film 11 such as Cu is deposited by mask sputtering. Next, as shown in (c), a layer of non-magnetic metal film
A mask 14 'is positioned on the left or right side of the center of the upper part of the upper surface 11, and the first soft magnetic thin film 2 is deposited by a mask spatter. The first soft magnetic thin film 2 formed by deposition is cut with a tool such as a diamond tool that can be easily processed with high precision.
As shown in (d), a part of the step sloping portion of the first soft magnetic thin film 2 is removed until it reaches at least the layer 11 of the non-magnetic metal film to form the magnetic gap surface 12. Next, as shown in (e), the first soft magnetic thin film 2 and the groove 3 of the non-magnetic metal film layer formed by the cutting are covered, and the gear spacer film 4 is deposited by sputtering or the like. Mask on 1
The second soft magnetic thin film 5 is deposited and formed only on the groove 15 and the upper surface of the magnetic gap surface 12 with 4 "placed at the illustrated position.
被着形成した第１と第２の軟磁性薄膜２と５の磁気ギヤ
ツプ面12の上部のみを（ｆ）に示すように、Ｖ字状バイ
ト等により切削除去し、その上に非磁性金属膜の層11′
をマスクスパツタにより被着形成した後、非磁性金属膜
の層11′の上面をラツプ等で除去する。その後、（ｇ）
に示すように、露出した第１の軟磁性薄膜２の上面と、
非磁性金属膜の層11′の上面及び第２の軟磁性薄膜５の
上面とを保護するため、これらの上を覆つてガラス等の
保護膜13を被着形成する。As shown in (f), only the upper part of the magnetic gear surface 12 of the deposited first and second soft magnetic thin films 2 and 5 is cut and removed by a V-shaped cutting tool as shown in (f), and a non-magnetic metal film is formed thereon. Layer 11 ′
Is deposited by mask sputtering, and then the upper surface of the nonmagnetic metal film layer 11 'is removed by lap or the like. After that, (g)
And the exposed upper surface of the first soft magnetic thin film 2,
In order to protect the upper surface of the layer 11 ′ of the non-magnetic metal film and the upper surface of the second soft magnetic thin film 5, a protective film 13 made of glass or the like is formed to cover them so as to cover them.
以上の工程を経て、薄膜磁気ヘツドが製造される。Through the above steps, the thin film magnetic head is manufactured.
上記説明した工程では、軟磁性薄膜と非磁性金属膜の形
成にマスクスパツタ法を採用しているが、これに限ら
ず、イオンミリング法，レジスト法でもよい。また、ギ
ヤツプ形成Ｖ字状の溝の加工にダイヤモンドバイトによ
る切削除去法を採用しているが、これに限ることなく、
例えばイオンミリング法などでもこれらを形成すること
ができる。In the steps described above, the mask sputtering method is used for forming the soft magnetic thin film and the nonmagnetic metal film, but the present invention is not limited to this, and an ion milling method or a resist method may be used. Further, a cutting removal method using a diamond cutting tool is adopted for processing the V-shaped groove for forming the gear, but the present invention is not limited to this.
These can be formed by, for example, an ion milling method.
なお、上記実施例では、非磁性金属膜をギヤツプ面近傍
にのみ配置しているが、これに限ることなく、コア全面
に配置してもよい。Although the non-magnetic metal film is arranged only in the vicinity of the gear surface in the above-mentioned embodiment, the present invention is not limited to this and may be arranged on the entire surface of the core.
第３図は、本発明による薄膜磁気ヘツドの他の実施例を
示すテープ摺動面の正面図であつて、第１図と同一符号
は同一部分を示す。FIG. 3 is a front view of a tape sliding surface showing another embodiment of the thin film magnetic head according to the present invention, and the same reference numerals as those in FIG. 1 denote the same parts.
第３図は非磁性金属膜をコア全体に亘つて配置したもの
を示し、非磁性金属膜11,11′はコアを形成する軟磁性
薄膜2,5に対し、磁気ギヤツプ面12に関して両側に配置
されている。FIG. 3 shows a non-magnetic metal film arranged over the entire core. The non-magnetic metal films 11, 11 'are arranged on both sides of the magnetic gap surface 12 with respect to the soft magnetic thin films 2, 5 forming the core. Has been done.
以上説明したように、本発明によれば、少なくとも前記
磁気ギヤツプの両端近傍に、前記第１の軟磁性薄膜と第
２の軟磁性薄膜を挾んで対位して抵抗率の小さい２つの
非磁性金属膜を配設し、前記対位した非磁性金属膜の各
々と前記第１の軟磁性薄膜との境界線と前記磁気ギヤツ
プの面とのつくる角度A,Bとし、前記対立した非磁性金
属膜の各々と前記第２の軟磁性薄膜との境界線と前記磁
気ギヤツプの面とのつくる角度をＡ′,B′とし、前記磁
気ギヤツプのアジマス角度をθとしたとき、 Ａ＋Ｂ＞180゜＋θ かつＡ′＋Ｂ′＞180゜＋θ かつA,A′,B,B′いずれも90゜以上 とし、かつ前記両非磁性金属膜を前記磁気ギヤツプの両
端近傍に配設したことにより前記磁気ギヤツプの長さを
前記軟磁性薄膜の幅より短く構成させたので、テープ摺
動面に対して垂直なコア側面のもれ磁束によるフリンジ
ングを抑えることができ、かつアジマス角度に関係なく
常にコアしぼり効果をも実現できるようになり、狭トラ
ツク化を図ることができるという優れた機能の薄膜磁気
ヘツドを提供できる。As described above, according to the present invention, at least near both ends of the magnetic gear, two non-magnetic materials having a small resistivity by sandwiching the first soft magnetic thin film and the second soft magnetic thin film to oppose each other. A metal film is provided, and the angles A and B formed between the boundary line between each of the opposed non-magnetic metal films and the first soft magnetic thin film and the surface of the magnetic gap are set to the opposite non-magnetic metal. A + B> 180 ° + θ, where A ′ and B ′ are angles formed by the boundaries between each of the films and the second soft magnetic thin film and the surface of the magnetic gear, and the azimuth angle of the magnetic gear is θ. And A '+ B'> 180 ° + θ and A, A ', B, B' are all 90 ° or more, and both non-magnetic metal films are arranged near both ends of the magnetic gear cup. Since the length was made shorter than the width of the soft magnetic thin film, Fringing due to the leakage magnetic flux on the vertical side surface of the core can be suppressed, and the core squeezing effect can always be achieved regardless of the azimuth angle. Heads can be provided.
第１図は本発明による薄膜磁気ヘツドの一実施例を示す
テープ摺動面の正面図、第２図は本発明による薄膜磁気
ヘツドの製造方法の一実施例を示す工程図、第３図はそ
れぞれ本発明による薄膜磁気ヘツドの他の実施例を示す
テープ摺動面の正面図、第４図は従来技術による薄膜磁
気ヘツドのテープ摺動面の正面図、第５図は第４図に示
した薄膜磁気ヘツドの磁気ギヤツプ部近傍の斜視図であ
る。 １……非磁性基板、２……第１の軟磁性薄膜、４……ギ
ヤツプスペーサ膜、５……第２の軟磁性薄膜、11,11′
……非磁性金属膜、12……磁気ギヤツプ面、13……保護
膜。1 is a front view of a tape sliding surface showing an embodiment of a thin film magnetic head according to the present invention, FIG. 2 is a process diagram showing an embodiment of a method for manufacturing a thin film magnetic head according to the present invention, and FIG. FIG. 4 is a front view of the tape sliding surface of a thin film magnetic head according to the present invention, FIG. 4 is a front view of the tape sliding surface of a conventional thin film magnetic head, and FIG. FIG. 3 is a perspective view of the vicinity of a magnetic gear part of the thin film magnetic head. 1 ... Non-magnetic substrate, 2 ... First soft magnetic thin film, 4 ... Gear spacer film, 5 ... Second soft magnetic thin film, 11, 11 '
…… Non-magnetic metal film, 12 …… Magnetic gear surface, 13 …… Protective film.
Claims (1)
１の軟磁性薄膜との間にギヤツプスペーサを介在させた
第２の軟磁性薄膜とを被着し、前記第１の軟磁性薄膜と
第２の軟磁性薄膜とで前記ギヤツプスペーサを介して磁
気ギヤツプを形成する薄膜磁気ヘツドにおいて、少なく
とも前記磁気ギヤツプの両端近傍に、前記第１の軟磁性
薄膜と第２の軟磁性薄膜を挾んで対位して抵抗率の小さ
い２つの非磁性金属膜を配設し、前記対位した非磁性金
属膜の各々と前記第１の軟磁性薄膜との境界線と前記磁
気ギヤツプの面とのつくる角度をA,Bとし、前記対位し
た非磁性金属膜の各々と前記第２の軟磁性薄膜との境界
線と前記磁気ギヤツプの面とのつくる角度をＡ′,B′と
し、前記磁気ギヤツプのアジマス角度をθとしたとき、 Ａ＋Ｂ＞180゜＋θ かつＡ′＋Ｂ′＞180゜＋θ かつA,A′,B,B′いずれも90゜以上 とし、かつ前記両非磁性金属膜を前記磁気ギヤツプの両
端近傍に配設したことにより前記磁気ギヤツプの長さを
前記軟磁性薄膜の幅より短く構成させたことを特徴とす
る薄膜磁気ヘツド。1. A first soft magnetic thin film and a second soft magnetic thin film having a gap spacer interposed between the first soft magnetic thin film and a first soft magnetic thin film are adhered on a non-magnetic substrate to form the first soft magnetic thin film. In a thin-film magnetic head in which a soft magnetic thin film and a second soft magnetic thin film form a magnetic gear via the gear spacer, the first soft magnetic thin film and the second soft magnetic thin film are provided at least near both ends of the magnetic gear. Two non-magnetic metal films having a low resistivity are provided so as to face each other with respect to each other, the boundary line between each of the counter-facing non-magnetic metal films and the first soft magnetic thin film, and the surface of the magnetic gear tape. And A and B, and A ′ and B ′ are angles formed by the boundary line between each of the opposed nonmagnetic metal films and the second soft magnetic thin film and the surface of the magnetic gear. When the azimuth angle of the magnetic gear is θ, A + B> 180 ° + θ A '+ B'> 180 ° + θ and A, A ', B, B' are all 90 ° or more, and both non-magnetic metal films are arranged near both ends of the magnetic gear, so that the length of the magnetic gear is longer. The thin film magnetic head is characterized in that the thickness is made shorter than the width of the soft magnetic thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60269480A JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60269480A JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129927A JPS62129927A (en) | 1987-06-12 |
| JPH0664711B2 true JPH0664711B2 (en) | 1994-08-22 |
Family
ID=17473027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60269480A Expired - Lifetime JPH0664711B2 (en) | 1985-12-02 | 1985-12-02 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0664711B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6851564B2 (en) | 2003-05-28 | 2005-02-08 | Kelvin Kin-Chung Ng | Multi-plane compound folding frame |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593716A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Thin film magnetic head |
-
1985
- 1985-12-02 JP JP60269480A patent/JPH0664711B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593716A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Thin film magnetic head |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62129927A (en) | 1987-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR910007861B1 (en) | Magnetic head and method of fabricating same | |
| US4774616A (en) | Magnetic head having an integrated recording and playback head and an erasure head | |
| JP2613906B2 (en) | Thin film magnetic head and method of manufacturing the same | |
| US4811146A (en) | Composite magnetic head | |
| JPH0785289B2 (en) | Method of manufacturing magnetic head | |
| US5043842A (en) | Magnetic head core with special gap structure | |
| JPH0664711B2 (en) | Thin film magnetic head | |
| JPH0118495B2 (en) | ||
| KR100229243B1 (en) | Magnetic head | |
| KR900007487B1 (en) | Double azimuth thin film magnetic head and the method of producing the same | |
| JPH053646B2 (en) | ||
| JPS62217416A (en) | Manufacture of thin film magnetic head | |
| JPS62200508A (en) | Magnetic head | |
| JPH0546009B2 (en) | ||
| JPS5965918A (en) | Thin film magnetic head | |
| JPH0527164B2 (en) | ||
| KR0134173B1 (en) | Laminated magnetic head and method for manufacturing | |
| JPH05282619A (en) | Magnetic head | |
| JPH0524563B2 (en) | ||
| JPS61145716A (en) | Thin film magnetic head | |
| JPH0540910A (en) | Manufacture of narrow track magnetic head | |
| JPH0785288B2 (en) | Magnetic head manufacturing method | |
| JPS61211808A (en) | Thin film magnetic head | |
| JPH0520636A (en) | Thin-film magnetic head | |
| JPH0214413A (en) | Magnetic head and manufacture thereof |