JPS62128420A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS62128420A JPS62128420A JP26900585A JP26900585A JPS62128420A JP S62128420 A JPS62128420 A JP S62128420A JP 26900585 A JP26900585 A JP 26900585A JP 26900585 A JP26900585 A JP 26900585A JP S62128420 A JPS62128420 A JP S62128420A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- sample
- signal
- analysis point
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野Ｊ
本発明は走査電子顕微鏡に関し、試料上の分析点と表示
装置に輝点表示された分析点とのずれを無くした装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application J] The present invention relates to a scanning electron microscope, and relates to an apparatus that eliminates the misalignment between an analysis point on a sample and an analysis point displayed as a bright spot on a display device.
［従来技術］
走査電子顕微鏡等においては、試料面を電子線で走査し
、この電子線の走査に伴って得られた信号を陰極線管等
に導いて試料像を表示すると共に、この試料像に試料上
の分析点を示す輝点等を重畳させて表示することが行な
われている。[Prior Art] In a scanning electron microscope or the like, a sample surface is scanned with an electron beam, and the signals obtained as a result of the scanning of the electron beam are guided to a cathode ray tube or the like to display a sample image. Bright spots indicating analysis points on a sample are displayed in a superimposed manner.
このような従来装置を第４図に示す。第４図において、
１は走査信号Ｘ及び走査信号Ｙを発生する走査信号発生
回路で、該走査信号発生回路１よりの走査信号Ｘ及びＹ
は、切り換えスイッチ２゜３及び増幅器４，５を介して
電子線６を偏向するためのＸ軸走査コイル７、Ｙ軸走査
コイル８にそれぞれ供給されている。９は電子線６が照
射される試料である。１０は陰極線管で、陰極線管１゜
のＸ軸偏向コイル１１．Ｙ軸偏向コイル１２には、走査
信号発生回路１よりの走査信号Ｘ及びＹが増幅器１３，
１４を介して供給されている。１５は水平分析点設定回
路、１６は垂直分析点設定回路で、該設定回路１５．１
６よりの設定信号Ｘ＋。Such a conventional device is shown in FIG. In Figure 4,
1 is a scanning signal generation circuit that generates a scanning signal X and a scanning signal Y;
are supplied to an X-axis scanning coil 7 and a Y-axis scanning coil 8 for deflecting the electron beam 6 via a changeover switch 2.3 and amplifiers 4 and 5, respectively. 9 is a sample to which the electron beam 6 is irradiated. 10 is a cathode ray tube, and the cathode ray tube has a 1° X-axis deflection coil 11. The Y-axis deflection coil 12 receives scanning signals X and Y from the scanning signal generation circuit 1 through an amplifier 13,
14. 15 is a horizontal analysis point setting circuit, 16 is a vertical analysis point setting circuit, and the setting circuit 15.1
Setting signal X+ from 6.
Ｙｌは、切り換えスイッチ２．３を介して前記Ｘ軸走査
コイル７、Ｙ軸走査コイル８及びＸ軸偏向コイル１１．
Ｙ軸偏向コイル１２にそれぞれ供給される。１７は走査
信号発生回路１よりの走査信号Ｘと、水平分析点設定回
路１５よりの設定信号×１を仕較するための比較器、１
８は走査信号Ｙと垂直分析点設定回路１６よりの設定信
号Ｙ１を比較する比較器である。１９は比較器１７と１
８よりの信号によって分析点を示す例えば輝点Ｍを発生
する輝点発生回路である。２０は輝点発生回路１９より
の輝点信号と図示しない検出器よりの検出信号Ｓを加算
して増幅する映像信号増幅器で、該映像信号増幅器２ｏ
よりの映像信号は陰極線管１０のグリッドＧに供給され
る。Yl is connected to the X-axis scanning coil 7, Y-axis scanning coil 8 and X-axis deflection coil 11.3 via the changeover switch 2.3.
They are respectively supplied to the Y-axis deflection coils 12 . 17 is a comparator for comparing the scanning signal X from the scanning signal generation circuit 1 and the setting signal x 1 from the horizontal analysis point setting circuit 15;
A comparator 8 compares the scanning signal Y and the setting signal Y1 from the vertical analysis point setting circuit 16. 19 is comparator 17 and 1
This is a bright spot generating circuit that generates, for example, a bright spot M indicating an analysis point by a signal from 8. 20 is a video signal amplifier that adds and amplifies the bright spot signal from the bright spot generating circuit 19 and the detection signal S from a detector (not shown);
These video signals are supplied to the grid G of the cathode ray tube 10.
このように構成された装置では、走査信号発生回路１よ
りの走査信号Ｘ、ＹをＸ軸走査コイル７゜Ｙ軸走査コイ
ル８にそれぞれ供給して、試料表面を照射する電子線６
を二次元的に走査する。又、前記した走査信号Ｘ、Ｙを
陰極線管１０のＸ軸偏向コイル１１．Ｙ軸偏向コイル１
２にも供給して、試料９よりの検出信号Ｓを映像信号増
幅器２０を介して陰極線管１０のグリッドＧに供給する
ことにより陰極線管１０に第５図に示す試料像Ａを表示
することができる。In the apparatus configured in this way, the scanning signals X and Y from the scanning signal generation circuit 1 are supplied to the X-axis scanning coil 7 and the Y-axis scanning coil 8, respectively, and the electron beam 6 irradiates the sample surface.
scan in two dimensions. Further, the above-mentioned scanning signals X and Y are transmitted to the X-axis deflection coil 11 . of the cathode ray tube 10 . Y-axis deflection coil 1
By supplying the detection signal S from the sample 9 to the grid G of the cathode ray tube 10 via the video signal amplifier 20, the sample image A shown in FIG. 5 can be displayed on the cathode ray tube 10. can.
ここで、陰極線管１０に表示された試料ａＡを観察しな
がら分析点を決定するには、水平分析点設定回路１５及
び垂直分析点設定回路１６を適宜操作し、水平分析点設
定回路１５及び垂直分析点設定回路１６よりの設定電圧
Ｘ＋ 、Ｙｔを変化させる。この操作により、設定電圧
Ｘ＋ 、Ｙｔと、走査信号Ｘ、Ｙとがそれぞれ比較回路
１７．１８で比較され、設定電圧Ｘ＋ 、Ｙｔと走査信
号Ｘ。Here, in order to determine the analysis point while observing the sample aA displayed on the cathode ray tube 10, operate the horizontal analysis point setting circuit 15 and the vertical analysis point setting circuit 16 as appropriate. The set voltages X+ and Yt from the analysis point setting circuit 16 are changed. By this operation, the set voltages X+, Yt and the scanning signals X, Y are compared in the comparison circuits 17 and 18, respectively, and the set voltages X+, Yt and the scanning signal X are compared.
Ｙがそれぞれ一致すると輝点発生回路１９より輝度増加
信号が発生して映像信号増幅器２０に出力される。この
輝度信号と検出信号Ｓは、映像信号増幅器２０により加
算増幅されてグリッドＧに供給されるため、陰極線管１
０には第５図に示すように試料像Ａと共に試料上の分析
点を示す輝点Ｍが表示される。When the Y's match each other, a brightness increase signal is generated from the bright spot generating circuit 19 and output to the video signal amplifier 20. The luminance signal and the detection signal S are summed and amplified by the video signal amplifier 20 and supplied to the grid G.
0, as shown in FIG. 5, a bright spot M indicating an analysis point on the sample is displayed together with the sample image A.
このような操作によって輝点Ｍを移動して分析点を決定
した後、切り換えスイッチ２及び３を点線で示すように
切り換えると、設定電圧Ｘｌ 、 Ｙｌは増幅器４．５
及び１３．１４を介して、それぞれＸ軸走査コイル７、
Ｙ軸走査コイル８及びＸ軸偏向コイル１１．Ｙ＠偏向コ
イル１２に供給される。従って、電子線６は試料上の分
析点に停止してスポット照射され、陰極線管１０の対応
した位置に分析点を示す輝点Ｐが表示される。After moving the luminescent point M and determining the analysis point by such an operation, when the changeover switches 2 and 3 are switched as shown by the dotted lines, the set voltages Xl and Yl are changed to the amplifier 4.5.
and 13.14 respectively, the X-axis scanning coil 7,
Y-axis scanning coil 8 and X-axis deflection coil 11. Y@ is supplied to the deflection coil 12. Therefore, the electron beam 6 stops at the analysis point on the sample and is irradiated with a spot, and a bright spot P indicating the analysis point is displayed at the corresponding position on the cathode ray tube 10.
［発明が解決しようとしている問題点］ところでこのよ
うに構成された装置では、切り換えスイッチ２及び３を
点線で示すように切り換えると、試料上の電子線６の走
査が停止されると同時に陰極線管１０の走査も停止され
るため、陰極線管１０上には第６図に示すように残像と
しての試料像Ａ′が表示されるが、この試料像Ａ′に重
畳していた輝点Ｍ′の位置が、偏向コイルの磁束変化の
遅れによって停止した分析点Ｐよりずれてしまう。この
ずれ量は走査速度によっても異なり、従って、操作者は
分析点Ｐの誤設定のように錯覚してしまう。又、陰極線
管１０の走査を停止するため、管面上の一点を電子線が
照射することとなり、蛍光体の焼付けを起しやすく陰極
線管の寿命を短かくするためこの改善が望まれていた。[Problems to be Solved by the Invention] In the apparatus configured as described above, when the changeover switches 2 and 3 are switched as shown by the dotted lines, the scanning of the electron beam 6 on the sample is stopped and at the same time the cathode ray tube is switched off. Since the scanning of No. 10 is also stopped, a specimen image A' is displayed as an afterimage on the cathode ray tube 10 as shown in FIG. The position shifts from the stopped analysis point P due to a delay in the change in magnetic flux of the deflection coil. The amount of deviation also differs depending on the scanning speed, and therefore the operator is under the illusion that the analysis point P has been set incorrectly. Furthermore, in order to stop the scanning of the cathode ray tube 10, the electron beam irradiates one point on the tube surface, which tends to cause burn-in of the phosphor and shorten the life of the cathode ray tube, so this improvement has been desired. .
本発明は以上の点に鑑みなされたもので、陰極線管上に
停止した分析点と、試料像に重畳して表示される試料上
の分析点を示す輝点Ｍとの位置ずれを無くして操作性を
向上させると共に、蛍光体の焼付けを防止して陰極線管
の寿命を長くした装置を提供することを目的としている
。The present invention has been made in view of the above points, and is operated by eliminating the positional deviation between the analysis point stopped on the cathode ray tube and the bright spot M indicating the analysis point on the sample, which is displayed superimposed on the sample image. The purpose of the present invention is to provide a device that improves the performance of the cathode ray tube, prevents phosphor burn-in, and extends the life of the cathode ray tube.
［問題点を解決するための手段］
本問題点を解決するための本発明の構成は、走査信号発
生回路よりの走査信号と分析点設定回路よりの設定信号
とを、切換え回路によって電子線を試料上で走査させる
電子線走査コイル及び表示手段の電子線偏向コイルに選
択的に供給するように構成し、該切換え回路により走査
信号が選択された場合には、該表示手段に試料から発生
する情報を検出して試￥′４＠を表示すると共に、表示
された試料像に試料上の分析点を示す輝点を重畳させて
表示し、該設定信号が選択された場合には、該電子線走
査コイルに設定信号を供給し電子線を試料上で停止した
状態で照射して分析する装置において、前記分析点設定
回路よりの設定信号が選択されて試料を分析する際には
少なくとも表示装置の水平偏向コイルに走査信号を供給
するように構成したことを特徴としている。[Means for Solving the Problem] The configuration of the present invention for solving the problem is to switch between the scanning signal from the scanning signal generation circuit and the setting signal from the analysis point setting circuit using an electron beam. It is configured to selectively supply an electron beam to an electron beam scanning coil for scanning on a sample and an electron beam deflection coil of a display means, and when a scanning signal is selected by the switching circuit, an electron beam generated from the sample is sent to the display means. The information is detected and ¥'4@ is displayed, and a bright spot indicating the analysis point on the sample is superimposed on the displayed sample image, and when the setting signal is selected, the electronic In an apparatus that supplies a setting signal to a line scanning coil and irradiates the sample with an electron beam in a stopped state for analysis, when the setting signal from the analysis point setting circuit is selected and the sample is analyzed, at least the display device The present invention is characterized in that it is configured to supply a scanning signal to the horizontal deflection coil.
［実施例］ 以下本発明の実施例を図面に基づき詳述する。[Example] Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明の一実施例の構成図であり、第４図に示
す従来装置と同一構成部分には同一番号を付してその説
明を省略する。第１図の実施例装置で、切換えスイッチ
２，３が実線で示す状態、つまり分析点Ｐを決定するた
めの観察状態では、走査信号発生回路１よりの走査信号
Ｘ、ＹはＸ軸走査コイル７、Ｙ軸走査コイル８にそれぞ
れ供給され、電子線６が試料表面を二次元的に走査する
と共に、陰極線管１０のＸ軸偏向コイル１１．Ｙ軸偏向
コイル１２にも前記した走査信号Ｘ、Ｙが供給される。FIG. 1 is a block diagram of an embodiment of the present invention, and the same components as those of the conventional device shown in FIG. 4 are given the same numbers and their explanations will be omitted. In the embodiment device shown in FIG. 1, when the changeover switches 2 and 3 are in the state shown by the solid line, that is, in the observation state for determining the analysis point P, the scanning signals X and Y from the scanning signal generation circuit 1 are transmitted to the X-axis scanning coil. 7, Y-axis scanning coil 8, and the electron beam 6 scans the sample surface two-dimensionally, and the X-axis deflection coil 11.7 of the cathode ray tube 10. The above-mentioned scanning signals X and Y are also supplied to the Y-axis deflection coil 12.
そのため、輝点発生回路１つよりの輝点信号と試料９よ
りの検出信号Ｓが映像信号増幅器２０を介して陰極線管
１０のグリッドＧに供給されるため陰極線管１０には第
２図に示すような試料＠Ａと分析点を示す輝点Ｍが表示
される。Therefore, the bright spot signal from one bright spot generating circuit and the detection signal S from the sample 9 are supplied to the grid G of the cathode ray tube 10 via the video signal amplifier 20, so that the bright spot signal from one bright spot generating circuit and the detection signal S from the sample 9 are supplied to the grid G of the cathode ray tube 10 as shown in FIG. A sample @A like this and a bright spot M indicating the analysis point are displayed.
ここで前述した分析点設定操作により、試料上の分析点
を決定した後、切換え回路２．３を点線で示すように切
換えると共にスイッチ２１をオフ状態にする。この操作
によって、走査信号発生回路１よりの走査信号Ｘ、Ｙは
走査コイル７．８には供給されず、陰極線管１０のＸ軸
偏向コイル１１のみに走査信号Ｘが供給される。そのた
め、電子線６は試料上の分析点で停止した状態となり、
又、スイッチ２１はオフ状態となっているためグリッド
Ｇには検出信号Ｓは供給されず、輝点発生回路１９より
の輝点信号のみがグリッドＧに供給される。従って、陰
極線管１０には第３図に示すように、走査線ｍは表示さ
れず試料像Ａ′と輝点Ｍ′及び分析点Ｐが表示されるが
、走査信号ＸがＸ軸偏向コイルに常に供給されているた
め試料像Ａ′の輝点Ｍと分析点Ｐとの位置ずれはなく、
又走査速度を変化させてもその位置は変化しない。After determining the analysis point on the sample by the analysis point setting operation described above, the switching circuit 2.3 is switched as shown by the dotted line, and the switch 21 is turned off. By this operation, the scanning signals X and Y from the scanning signal generation circuit 1 are not supplied to the scanning coil 7.8, but the scanning signal X is supplied only to the X-axis deflection coil 11 of the cathode ray tube 10. Therefore, the electron beam 6 is stopped at the analysis point on the sample,
Further, since the switch 21 is in the off state, the detection signal S is not supplied to the grid G, and only the bright spot signal from the bright spot generating circuit 19 is supplied to the grid G. Therefore, as shown in FIG. 3, the cathode ray tube 10 does not display the scanning line m, but instead displays the sample image A', the bright spot M', and the analysis point P. However, the scanning signal X is transmitted to the X-axis deflection coil. Since it is constantly supplied, there is no positional deviation between the bright spot M of the sample image A' and the analysis point P.
Further, even if the scanning speed is changed, the position does not change.
そのため、従来装置のように操作者に分析点Ｐの誤設定
のように錯覚させることはなく、又、陰極線管の電子線
の走査は停止していないため、管面上には走査線ｍが表
示され蛍光体の焼付けは防止される。Therefore, unlike conventional devices, the operator is not given the illusion that the analysis point P has been set incorrectly, and since the scanning of the electron beam of the cathode ray tube is not stopped, there is no scanning line m on the tube surface. displayed and phosphor burn-in is prevented.
尚、上記実施例は例示である。上記実施例では、電子線
６が停止した状態では陰極線管のＸ軸偏向コイルのみに
走査信号Ｘを供給するようにしたが、Ｙ軸偏向コイルに
も走査信号Ｙを供給して表示しても良い。この場合に、
走査信号Ｙは走査信号Ｘに比較して十分遅いため位置ず
れはほとんど無視できる。又、走査信号Ｙの走査速度が
遅い場合には、輝点Ｍは間欠的に表示されるが、このよ
うな場合には、Ｙ軸の走査幅を狭くして分析点近傍のみ
を走査するようにすれば良い。Note that the above embodiments are merely illustrative. In the above embodiment, when the electron beam 6 is stopped, the scanning signal X is supplied only to the X-axis deflection coil of the cathode ray tube. good. In this case,
Since the scanning signal Y is sufficiently slow compared to the scanning signal X, the positional deviation can be almost ignored. In addition, if the scanning speed of the scanning signal Y is slow, the bright spot M will be displayed intermittently, but in such a case, the scanning width of the Y axis may be narrowed to scan only the vicinity of the analysis point. You should do it.
［発明の効果］
以上詳述したように本発明によれば、分析時に陰極線管
上に表示される分析点と観察時に試料像に重畳して表示
される輝点Ｍとの位置のずれを無くして操作性を向上さ
せると共に、蛍光体の焼付けを防止して陰極線管の寿命
を長くした装置が提供される。[Effects of the Invention] As detailed above, according to the present invention, it is possible to eliminate the positional deviation between the analysis point displayed on the cathode ray tube during analysis and the bright spot M displayed superimposed on the sample image during observation. The present invention provides a device that improves operability, prevents phosphor burn-in, and extends the life of a cathode ray tube.
第１図は本発明の一実施例の構成図、第２図は及び第３
図は本発明を説明するための図、第４図は従来装置の構
成図、第５図及び第６図は従来装置を説明するための図
である。
１：走査信号発生回路、２，３：切換えスイッチ、４，
５：増幅器、６：電子線、７：Ｘ＠走査コイル、８：Ｙ
軸走査コイル、９：試料、１０：陰極線管、１１：Ｘ軸
偏向コイル、１２：Ｙ軸偏向コイル、１３．１４：増幅
器、１５：水平分析点設定回路、１６：垂直分析点設定
回路、１７゜１８：比較回路、１９：輝点発生回路、２
０：映像信号増幅器、２１：スイッチ。
第１図Figure 1 is a configuration diagram of one embodiment of the present invention, Figures 2 and 3 are
The figures are diagrams for explaining the present invention, FIG. 4 is a configuration diagram of a conventional device, and FIGS. 5 and 6 are diagrams for explaining the conventional device. 1: Scanning signal generation circuit, 2, 3: Changeover switch, 4,
5: Amplifier, 6: Electron beam, 7: X@scanning coil, 8: Y
Axis scanning coil, 9: Sample, 10: Cathode ray tube, 11: X-axis deflection coil, 12: Y-axis deflection coil, 13.14: Amplifier, 15: Horizontal analysis point setting circuit, 16: Vertical analysis point setting circuit, 17゜18: Comparison circuit, 19: Bright spot generation circuit, 2
0: Video signal amplifier, 21: Switch. Figure 1
Claims (1)
の設定信号とを、切換え回路によって電子線を試料上で
走査させる電子線走査コイル及び表示手段の電子線偏向
コイルに選択的に供給するように構成し、該切換え回路
により走査信号が選択された場合には、該表示手段に試
料から発生する情報を検出して試料像を表示すると共に
、表示された試料像に試料上の分析点を示す輝点を重畳
させて表示し、該設定信号が選択された場合には、該電
子線走査コイルに設定信号を供給し電子線を試料上で停
止した状態で照射して分析する装置において、前記分析
点設定回路よりの設定信号が選択されて試料を分析する
際には少なくとも表示装置の水平偏向コイルに走査信号
を供給するように構成したことを特徴とする走査電子顕
微鏡。The scanning signal from the scanning signal generation circuit and the setting signal from the analysis point setting circuit are selectively supplied to the electron beam scanning coil for scanning the sample with the electron beam and the electron beam deflection coil of the display means by the switching circuit. When the scanning signal is selected by the switching circuit, the display means detects the information generated from the sample and displays the sample image, and also displays the analysis points on the sample on the displayed sample image. In an apparatus that displays bright spots in a superimposed manner and, when the setting signal is selected, supplies a setting signal to the electron beam scanning coil and performs analysis by irradiating the electron beam with the electron beam stopped on the sample, A scanning electron microscope characterized in that, when a setting signal from the analysis point setting circuit is selected and a sample is analyzed, a scanning signal is supplied to at least a horizontal deflection coil of a display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26900585A JPS62128420A (en) | 1985-11-29 | 1985-11-29 | Scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26900585A JPS62128420A (en) | 1985-11-29 | 1985-11-29 | Scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128420A true JPS62128420A (en) | 1987-06-10 |
| JPH0578898B2 JPH0578898B2 (en) | 1993-10-29 |
Family
ID=17466338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26900585A Granted JPS62128420A (en) | 1985-11-29 | 1985-11-29 | Scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128420A (en) |
-
1985
- 1985-11-29 JP JP26900585A patent/JPS62128420A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0578898B2 (en) | 1993-10-29 |
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