JPS6199772A - Composite seal material for vacuum devices - Google Patents
Composite seal material for vacuum devicesInfo
- Publication number
- JPS6199772A JPS6199772A JP59218521A JP21852184A JPS6199772A JP S6199772 A JPS6199772 A JP S6199772A JP 59218521 A JP59218521 A JP 59218521A JP 21852184 A JP21852184 A JP 21852184A JP S6199772 A JPS6199772 A JP S6199772A
- Authority
- JP
- Japan
- Prior art keywords
- annular
- sealing material
- seal material
- composite
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は広い弾性領域を有しかつ弾性材料からガスを
放出しない真空用複合シール材に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a vacuum composite sealing material that has a wide elastic range and does not release gas from the elastic material.
従来、パルプまたは継手等のシール材としては、パイト
ン、テフロン、ネオプレン等の樹脂材からなる０リング
シール材やシート状、リング状のメタルシール材が一般
的に用いられている。Conventionally, O-ring sealing materials made of resin materials such as Python, Teflon, and neoprene, and sheet-shaped and ring-shaped metal sealing materials are generally used as sealing materials for pulp or joints.
また真空用７−ル材としては、低真空から高真空用とし
て、ゴム０リングが広く用いられ、超高真空（約１０Ｔ
ｏｒｒ以下）においては、金属シール材が用いられてい
る。第７図は従来の金属シール材の一例を示すものであ
って、つる巻きばねからなる鋼製環状スプリング２０に
アルミニウムからなる金属被覆材２１を被着している。Rubber O-rings are widely used as vacuum 7-ring materials for low to high vacuums, and ultra-high vacuums (approximately 10T
orr), a metal sealing material is used. FIG. 7 shows an example of a conventional metal sealing material, in which a steel annular spring 20 made of a helical spring is coated with a metal covering material 21 made of aluminum.
しかし。but.
この金属シール材の場合は、ゴムシール材のような広い
弾性領域を持九ないので、加熱ベーキング処理等による
熱歪が発生したとき、その熱歪に起因するリークが発生
するという問題がある。In the case of this metal sealing material, since it does not have a wide elastic region like a rubber sealing material, there is a problem in that when thermal distortion occurs due to heating baking treatment or the like, leakage occurs due to the thermal distortion.
またゴムシール材を使用し九場合は、ゴムシール材から
多量のガスが放出し、その放出ガス量は金属シール材に
比べて約１００倍にも達するので、真空機器用シール材
としては不適当である。Furthermore, when rubber sealing material is used, a large amount of gas is released from the rubber sealing material, and the amount of released gas is about 100 times that of metal sealing material, making it unsuitable as a sealing material for vacuum equipment. .
この発明は前述の問題を有利に解決できる真空 ゛用複
合シール材を提供することを目的とするものでおって、
この発明の要旨とするところは１弾性材料からなる環状
弾性シール材１の全周がアルミニウムまたはアルミニウ
ム合金等の軟質金属からなる中空環状金属ゾール材２に
より密封被覆されていることを特徴とする真空用複合シ
ール材にある。The object of this invention is to provide a composite sealing material for vacuum that can advantageously solve the above-mentioned problems.
The gist of the present invention is that the entire circumference of an annular elastic sealing material 1 made of an elastic material is hermetically covered with a hollow annular metal sol material 2 made of a soft metal such as aluminum or an aluminum alloy. Composite sealant for use.
次にこの発明を図示の例によって詳細に説明する。 Next, the present invention will be explained in detail using illustrated examples.
第１図および第２図はこの発明の第１実施例を示すもの
であって、パイトン、テフロン、ネオプレンゴム等の弾
性材料からなる断面円形の環状弾性シール材１に、断面
半円形の薄肉環状部分３とその薄肉環状部分６０両側の
縁部に連設された厚肉環状フランジ４とからなる一対の
アルミニウムまたはアルミニウム合金属製環状金属シ一
層材構成用ユニットが被せられ、各ユニットにおける厚
肉環状フランジ４は相互に接合されて溶接により気密状
態で一体に結合され、相互に結合された一対のユニット
により中空環状金属シール材２が構成されている。その
中空環状金属シール材２により環状弾性シール材１の全
周が密封被覆され、かつ中空環状金属シール材２の外面
における少なくともシール面には鏡面仕上げが施されて
いる。1 and 2 show a first embodiment of the present invention, in which an annular elastic sealing material 1 with a circular cross section made of an elastic material such as Python, Teflon, or neoprene rubber is attached to a thin annular sealing material with a semicircular cross section. A pair of aluminum or aluminum alloy annular metal sheets consisting of the part 3 and the thick annular flanges 4 connected to the edges on both sides of the thin annular part 60 are covered, and the thick annular part 60 of each unit is The annular flanges 4 are joined to each other and integrally connected in an airtight state by welding, and the hollow annular metal sealing material 2 is constituted by a pair of mutually connected units. The entire circumference of the annular elastic sealing material 1 is hermetically covered by the hollow annular metal sealing material 2, and at least the sealing surface on the outer surface of the hollow annular metal sealing material 2 is mirror-finished.
第６図および第４図はこの発明の第２実施例を示すもの
であって、前述のような環状弾性ンール材１に、断面一
部分断円形の環状部分５とその環状部分５における分断
縁部に屈折連設された一対の環状７ランジ６とからなる
アルミニウムまたはアルミニウム合金製中空環状金属７
−ル材２が被せられ、前記一対の環状フランジ６は相互
に接合されて溶接により気密状態で一体に結合され、か
つ中空環状金属シール材２の外面における少な、くとも
シール面には、ＪＩＳ、０．５Ｓ以下の鏡面仕上げが施
され、かつ前記環状フランジ６は中空環状金属シール材
２の外周に配置されている。6 and 4 show a second embodiment of the present invention, in which an annular elastic cord material 1 as described above is provided with an annular portion 5 having a partially cut circular cross section and a divided edge of the annular portion 5. A hollow annular metal 7 made of aluminum or aluminum alloy consisting of a pair of annular 7 flange 6 which are bent and connected to each other.
- The pair of annular flanges 6 are joined to each other and integrally joined in an airtight state by welding, and at least the sealing surface on the outer surface of the hollow annular metal sealing material 2 is covered with JIS , a mirror finish of 0.5S or less is applied, and the annular flange 6 is arranged on the outer periphery of the hollow annular metal sealing material 2.
第２実施例の複合シール材を製作する場合は、例えば外
周側が開放されている断面Ｕ溝形の金属製環状体を製作
し、次にその金属環状体内に環状弾性シール材を嵌入し
たのち、金属製環状体における溝開口部側に曲げ加工を
施して、断面一部分断円形の環状部分５とその分断縁部
に屈折連設された一対の環状フランジ６とからなる中空
環状金属シール材２を形成し、次に前記一対の環状７ラ
ンジ６ｆ：溶接により結合すればよい。When manufacturing the composite sealing material of the second embodiment, for example, a metal annular body with a U-groove cross section that is open on the outer circumferential side is manufactured, and then an annular elastic sealing material is fitted into the metal annular body. The groove opening side of the metal annular body is bent to form a hollow annular metal sealing material 2 consisting of an annular portion 5 with a partially circular cross section and a pair of annular flanges 6 bent and connected at the dividing edge. The pair of annular 7-flanges 6f may be joined together by welding.
第２実施例の複合シール材を真空雰囲気中で製作すれば
、中空環状金属７−ル材２における環状部分５および環
状フランジ６の境界付近と環状弾性シール材１との間に
生じる小さな閘隙７内を真空圧することができる。また
前記環状フランジ６は中空環状金属シール材２の内周に
配置されていてもよい。If the composite sealing material of the second embodiment is manufactured in a vacuum atmosphere, a small gap will be created between the annular elastic sealing material 1 and the vicinity of the boundary between the annular portion 5 and the annular flange 6 in the hollow annular metal 7-ru material 2. 7 can be vacuumed. Further, the annular flange 6 may be arranged on the inner periphery of the hollow annular metal sealing material 2.
第５図は第１実施例の複合シール材を真空配管のフラン
ジ継手に使用し比例を示すものであって、配管８の端部
に設けられたフランジ９の端面に鏡面仕上げを施した環
状溝１０が設けられ、各フランジ９の環状溝１０にわた
って複合ノール材１１が嵌入され、かつ各７ランジ９に
わたって挿通したボルト１２およびナツト１３により、
各フランジ９とそれらの間に介在された複合シール材１
１ ゛とが締付接合されている。FIG. 5 shows the proportionality of the composite sealing material of the first embodiment used in a flange joint of a vacuum pipe, showing an annular groove with a mirror finish on the end surface of a flange 9 provided at the end of a pipe 8. 10 is provided, a composite knoll material 11 is fitted across the annular groove 10 of each flange 9, and bolts 12 and nuts 13 are inserted across each of the seven flanges 9.
Each flange 9 and the composite sealing material 1 interposed between them
1 and are fastened together.
第６図は第２実施例の複合シール材を真空ゲー１４と雌
ねじ部材１５の回動により雄ねじ部材１６を介して移動
される弁体１７とシール用ベローズ１８とを備えている
真空ゲートパルプにおける弁箱１４に、弁体１７に対向
する位置において環状段部１９が設けられ、その環状段
部１９に複合ンール材１１が嵌設されている。FIG. 6 shows a vacuum gate pulp using the composite sealing material of the second embodiment, which is equipped with a valve body 17 and a sealing bellows 18 that are moved via a male threaded member 16 by the rotation of a vacuum gage 14 and a female threaded member 15. An annular stepped portion 19 is provided in the valve body 14 at a position facing the valve body 17, and the composite nozzle material 11 is fitted into the annular stepped portion 19.
この発明を実施する場合、中空環状金属シール材２を構
成する軟質金属としては、銅または鉛を使用してもよい
。−！几複合シール材の形状は円環状または楕円環状の
何れであってもよい。前記中空環状金属シール材２のシ
ール面の断面形状を円弧状にしないで平面にしてもよく
、また超高真空でない１０ 、Ｉ”ｏｒｒ程度の真空機
器に使用する複合シール材の場合は、中空環状金属シー
ル材２の表面の鏡面仕上げを省略してもよい。When carrying out this invention, copper or lead may be used as the soft metal constituting the hollow annular metal sealing material 2. -! The shape of the composite sealing material may be either circular or elliptical. The cross-sectional shape of the sealing surface of the hollow annular metal sealing material 2 may not be arcuate but flat, and in the case of a composite sealing material used for vacuum equipment of about 10,1"orr that is not an ultra-high vacuum, Mirror finishing of the surface of the annular metal sealing material 2 may be omitted.
この発明によれば弾性材料からなる環状弾性シール材１
の全周がアルミニウムまたはアルミニウム合金等の軟質
金属からなる中空環状金属シール材２により密封被覆さ
れているので、中空環状金属ンール材２内に充填されて
いる環状弾性シール材１の弾性により、複合シール材に
広い弾性領域を附与することができ、かつ加熱ベーキン
グ処理等により中空環状金属シール材２に熱歪が発生し
ても、複合シール材が広い弾性領域を有するので、その
熱歪によるリーク発生を防止することができ、かつ環状
弾性シール材１の全周が中空環状金属シール材２により
被覆されているので、環状弾性シール材１から多量のガ
スが複合／−ル材の外部に放出されるのを防止すること
ができ、したがって、弾性シール材の長所および金属シ
ール材の長所を兼ね備えている真空用複合シール材を提
供できる効果が得られる。According to this invention, an annular elastic sealing material 1 made of an elastic material
Since the entire circumference of the ring is hermetically sealed with a hollow annular metal sealing material 2 made of a soft metal such as aluminum or aluminum alloy, the elasticity of the annular elastic sealing material 1 filled in the hollow annular metal sealing material 2 allows the composite A wide elastic region can be imparted to the sealing material, and even if thermal distortion occurs in the hollow annular metal sealing material 2 due to heat baking treatment, etc., the composite sealing material has a wide elastic region, so that the thermal distortion will not be caused by the thermal distortion. Since the occurrence of leakage can be prevented and the entire circumference of the annular elastic sealing material 1 is covered with the hollow annular metal sealing material 2, a large amount of gas can be prevented from leaking from the annular elastic sealing material 1 to the outside of the composite/ru material. Therefore, it is possible to provide a vacuum composite sealing material that has both the advantages of an elastic sealing material and those of a metal sealing material.
第１図はこの発明の第１実施例に係る真空用複合シール
材の縦断側面図、第２図は第１図の一部を拡大して示す
縦断側面図である。第３図はこの発明の第２実施例に係
る真空用複合シール材の縦断側面図、第４図は第６図の
一部を拡大して示す縦断側面図である。第５図は第１実
施例の複合シール材を使用したフランジ継手の縦断側面
図、第６図は第２実施例の複合シール材を使用したゲー
トパルプの縦断側面図である。第７図は従来の金属シー
ル材の一例を示す縦断側面図である。
図において、１は環状弾性シール材、２は中空環状金属
シール材、６は薄肉環状部分、４は厚肉環状フランジ、
５は環状部分、６は環状フランジ、９はフランジ、１０
は環状溝、１１は複合シール材、１２はボルト、１６は
ナツト、１４は弁箱、１５は雌ねじ部材、１６は雄ねじ
部材、１７は弁体、１９は環状段部である。
第３図
第５図
第６図
手続補正書
昭和５９年１１月２−７日FIG. 1 is a longitudinal sectional side view of a vacuum composite sealing material according to a first embodiment of the present invention, and FIG. 2 is an enlarged longitudinal sectional side view of a part of FIG. 1. FIG. 3 is a longitudinal sectional side view of a vacuum composite sealing material according to a second embodiment of the present invention, and FIG. 4 is an enlarged longitudinal sectional side view of a part of FIG. 6. FIG. 5 is a longitudinal sectional side view of a flange joint using the composite sealing material of the first embodiment, and FIG. 6 is a longitudinal sectional side view of a gate pulp using the composite sealing material of the second embodiment. FIG. 7 is a longitudinal sectional side view showing an example of a conventional metal sealing material. In the figure, 1 is an annular elastic sealing material, 2 is a hollow annular metal sealing material, 6 is a thin annular portion, 4 is a thick annular flange,
5 is an annular portion, 6 is an annular flange, 9 is a flange, 10
11 is an annular groove, 11 is a composite sealing material, 12 is a bolt, 16 is a nut, 14 is a valve body, 15 is a female threaded member, 16 is a male threaded member, 17 is a valve body, and 19 is an annular step. Figure 3 Figure 5 Figure 6 Procedural Amendments November 2-7, 1982
Claims (1)
ウムまたはアルミニウム合金等の軟質金属からなる中空
環状金属シール材２により密封被覆されていることを特
徴とする真空用複合シール材。A composite sealing material for vacuum use, characterized in that the entire circumference of an annular elastic sealing material 1 made of an elastic material is hermetically covered with a hollow annular metal sealing material 2 made of a soft metal such as aluminum or an aluminum alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59218521A JPS6199772A (en) | 1984-10-19 | 1984-10-19 | Composite seal material for vacuum devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59218521A JPS6199772A (en) | 1984-10-19 | 1984-10-19 | Composite seal material for vacuum devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6199772A true JPS6199772A (en) | 1986-05-17 |
Family
ID=16721233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59218521A Pending JPS6199772A (en) | 1984-10-19 | 1984-10-19 | Composite seal material for vacuum devices |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6199772A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029374U (en) * | 1988-06-30 | 1990-01-22 | ||
| JPH05248578A (en) * | 1991-04-18 | 1993-09-24 | Anelva Corp | Vacuum sealing gasket |
| KR20020046533A (en) * | 2000-12-15 | 2002-06-21 | 이계안 | Structure of O-ring |
| CN100395473C (en) * | 2006-04-06 | 2008-06-18 | 马志刚 | Metal tube and ring rolled seal gasket and manufacturing method thereof |
| JP2008267603A (en) * | 2007-04-17 | 2008-11-06 | Air Products & Chemicals Inc | Composite seal |
| IT201900010176A1 (en) * | 2019-06-26 | 2020-12-26 | Comat Tech Srl | GASKET FOR THE INSULATION OF HIGH TEMPERATURE METAL TRANSFORMATION ENVIRONMENTS |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571864A (en) * | 1980-02-15 | 1982-01-07 | Reinz Dichtungs Gmbh | Seal member |
-
1984
- 1984-10-19 JP JP59218521A patent/JPS6199772A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571864A (en) * | 1980-02-15 | 1982-01-07 | Reinz Dichtungs Gmbh | Seal member |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029374U (en) * | 1988-06-30 | 1990-01-22 | ||
| JPH05248578A (en) * | 1991-04-18 | 1993-09-24 | Anelva Corp | Vacuum sealing gasket |
| KR20020046533A (en) * | 2000-12-15 | 2002-06-21 | 이계안 | Structure of O-ring |
| CN100395473C (en) * | 2006-04-06 | 2008-06-18 | 马志刚 | Metal tube and ring rolled seal gasket and manufacturing method thereof |
| JP2008267603A (en) * | 2007-04-17 | 2008-11-06 | Air Products & Chemicals Inc | Composite seal |
| IT201900010176A1 (en) * | 2019-06-26 | 2020-12-26 | Comat Tech Srl | GASKET FOR THE INSULATION OF HIGH TEMPERATURE METAL TRANSFORMATION ENVIRONMENTS |
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