JPS619614A

JPS619614A - Microscope

Info

Publication number: JPS619614A
Application number: JP12920484A
Authority: JP
Inventors: Makoto Yoshinaga; 吉永　允
Original assignee: Olympus Corp; Olympus Optical Co Ltd
Current assignee: Olympus Corp
Priority date: 1984-06-25
Filing date: 1984-06-25
Publication date: 1986-01-17
Anticipated expiration: 2011-05-29
Also published as: JP2501098B2

Abstract

PURPOSE:To obtain a microscopically inspecting position over a wide range of a sample in the stage of inspecting microscopically said sample by fixing the eyepiece system of an observation optical system and making an objective optical system movable in parallel with a field plane so that part of the optical path length of the observation optical system can be freely extended or contracted. CONSTITUTION:The light from an illuminating light source 7 transmits through a half-mirror 4, is reflected by a mirror 3 and illuminates the sample 1 by an objective lens 2. The light emitted from the sample 1 is made into afocal light by the lens 2, is reflected by the mirror 3 and the mirror 4 and is imaged to the position P by an imaging lens 5. Said light is observed by an eyepiece lens 6. An afocal system is constituted between the lens 2 and the lens 5. The imaging state in the position P does not change even if the optical path length between the mirror 3 and the mirror 4 is changed by moving forward and backward the lens 2 and the mirror 3 in an arrow direction and therefore the sample 1 is observed in an optional position.

Description

【発明の詳細な説明】技術分野本発明は、大きな試料を検鏡し得るようにした小型の構
成の顕微鏡に関する。DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD The present invention relates to a microscope with a compact configuration that is capable of examining large samples.

従来技術一般に顕微鏡は基本的には対物レンズ、接眼レンズ及び
試料を保持するための載物台等から構成されておシ、試
料の検鏡位置を変える場合には載物台上に保持された試
料または載物台自体を光軸に対して垂直な方向に移動さ
せていた。しかしな試料が多くなってきているので、こ
れらの大きな試料を観察する場合には該試料を載置した
載物台を広い範囲即ち第２図において観察すべき範囲Ａ
の四倍の範囲Ｂに亘って移動しなければならず、そのた
め載物台を含む顕微鏡全体の強度が要求され且つ載物台
の移動機構も大きなものとなり、而も例えば観察すべき
試料の大きさが二倍になると載物台の移動範囲は四倍に
なることから、顕微鏡全体がますます大型になってしま
い、載物台自体の慣性も大きくなるため位置精度の制御
が一層困難になる。Prior Art In general, a microscope basically consists of an objective lens, an eyepiece lens, a stage for holding a sample, etc., and when changing the position of the specimen, the microscope is held on the stage. The sample or the stage itself was moved in a direction perpendicular to the optical axis. However, as the number of large samples is increasing, when observing these large samples, the stage on which the sample is placed is moved over a wide area, that is, the area A that should be observed in Figure 2.
Therefore, the entire microscope including the stage must be strong, and the movement mechanism of the stage must be large, and for example, due to the size of the sample to be observed. When the height doubles, the moving range of the stage increases four times, which means that the entire microscope becomes larger and the inertia of the stage itself increases, making it even more difficult to control positional accuracy. .

これに対して、特開昭５９−８６０２０号公報によれば
、第一対物レンズ及び第二対物レンズを設け、該第一対
物レンズのみを光軸に対して垂直な方向に移動させるこ
とにより試料の検鏡位置を変える方法が提案されている
が、この方法により大きな試料の検鏡位置を広い範囲に
亘って変えるためには非常に大きな対物レンズが必要に
なり、而も対物レンズの倍率により観察可能な範囲が変
化してしまい、さらに接眼レンズの視野数によりあまり
大きな観察範囲が得られないという欠点があった。On the other hand, according to Japanese Patent Application Laid-Open No. 59-86020, a first objective lens and a second objective lens are provided, and by moving only the first objective lens in a direction perpendicular to the optical axis, A method of changing the position of the microscope has been proposed, but this method requires a very large objective lens in order to change the position of the microscope over a wide range, and the magnification of the objective lens This method has the disadvantage that the observable range changes, and that a very large observation range cannot be obtained depending on the number of fields of view of the eyepiece.

目的本発明は、以上の点に鑑み、大きな試料を検鏡する際に
試料の広い範囲に亘って検鏡位置を変え得るようにした
小型の構成の顕微鏡を提供することを目的としている。OBJECTS In view of the above points, it is an object of the present invention to provide a microscope with a compact structure that allows the position of the microscope to be changed over a wide range of the sample when examining a large sample.

概要この目的は、観察光学系の一部がアフォーカル系として
構成されておシ、該アフォーカル系の一部が対物レンズ
の光軸に対して垂直に配設されていて且つその光路長が
伸縮可能であるようにして、対物レンズがその光軸に対
して垂直方向に移動可能に配設されていることを特徴と
する、顕微鏡ニより解決される。Overview This purpose is to configure a part of the observation optical system as an afocal system, and the part of the afocal system is disposed perpendicular to the optical axis of the objective lens, and its optical path length is The present invention is solved by a microscope characterized in that the objective lens is arranged to be extendable and retractable so as to be movable in a direction perpendicular to its optical axis.

実施例以下図面に示した実施例に基づき本発明を説明すれば、
第１図において、１は顕微鏡の図示しない載物台上に載
置された観察すべき試料、２は無限遠対物レンズ、３は
ミラー、４はハーフミラ−１５は結像レンズ、６は接眼
レンズ、７は照明光源、８はコレクターレンズであって
、対物レンズ２及びミラー３は、ミラー３とハーフミラ
−４との間の光軸に沿って進退可能に配設されている。EXAMPLES The present invention will be explained based on examples shown in the drawings below.
In FIG. 1, 1 is a sample to be observed placed on a stage (not shown) of a microscope, 2 is an infinity objective lens, 3 is a mirror, 4 is a half mirror, 15 is an imaging lens, and 6 is an eyepiece lens. , 7 is an illumination light source, 8 is a collector lens, and the objective lens 2 and mirror 3 are disposed so as to be movable along the optical axis between the mirror 3 and the half mirror 4.

本案実施例は以上のように構成されているから、照明光
源から出た光は、コレクターレンズ８を介してハーフミ
ラ−４を透過し且つミラー３で反射されて対物レンズ２
によシ試料１を照明し、かくして照明された試料１から
出た光は対物レンズ２によりアフォーカルな光となりミ
ラー３．ハーフミラ−４で反射され結像レンズ５により
位置Ｐに結像し、この像が接眼レンズ６によって観察さ
れる。ここで、対物レンズ２．ミラー３．ハーフミラ−
４，結像レンズ５及び接眼レンズ６から成る観察光学系
は、対物レンズ２と結像レンズ５との間がアフォーカル
系になっており、対物レンズ２及びミラー３をミラー３
とハーフミラ−４との間の光軸に沿って進退させること
によシ、ミラー３とハーフミラ−４との間の光路長全変
更しても、位置Ｘにおける結像状態は変化せず、従って
試料１の任意の位置の観察を行なうことができる。この
場合対物レンズ２の移動範囲Ｃは第３図に示されている
ように観察すべき範囲Ａと同じでよい。Since the present embodiment is constructed as described above, the light emitted from the illumination light source passes through the half mirror 4 via the collector lens 8, is reflected by the mirror 3, and is transmitted to the objective lens 2.
The sample 1 is then illuminated, and the light emitted from the thus illuminated sample 1 is turned into afocal light by the objective lens 2 and is reflected by the mirror 3. It is reflected by the half mirror 4 and formed into an image at a position P by the imaging lens 5, and this image is observed by the eyepiece lens 6. Here, objective lens 2. Mirror 3. half mirror
4. The observation optical system consisting of the imaging lens 5 and the eyepiece lens 6 is an afocal system between the objective lens 2 and the imaging lens 5, and the objective lens 2 and the mirror 3 are connected to the mirror 3.
Even if the entire optical path length between the mirror 3 and the half mirror 4 is changed by moving it forward and backward along the optical axis between the mirror 3 and the half mirror 4, the image formation state at the position X does not change. Observation of any position on the sample 1 can be performed. In this case, the movement range C of the objective lens 2 may be the same as the range A to be observed, as shown in FIG.

第４図は本発明の第二の実際的な実施例を示しておシ、
１０は対物レンズ２と共に例えば蟻接ぎ等のＸ軸ガイド
１１に沿ってＸ軸方向に摺動可能に配設されている第一
のミラー、１２は対物レンズ２．第一のミラー１０及び
Ｘ軸ガイド１１と一体的に該Ｘ軸ガイド１１と同様に構
成されたＹ軸ガイド１３に沿ってＹ軸方向に摺動可能に
配設されている第二のミラーで、第１図に示された実施
例と同様に試料１から出た光は対物レンズ２によシアフ
ォーカルな光となり第一のミラー１０によりＸ軸方向に
反射し且つ第二のミラー１２によりＹ軸方向に反射して
さらにハーフミラ−４で反射した後結像レンズ５により
結像し、この像が接眼レンズ６によって観察される。従
って第一のミラー１０と第二のミラー１２との間の光路
長−４ｘ軸ガイド１１により、第二のミラー１２とハー
フミラ−４との間の光路長をＹ軸ガイド１３によシ適宜
に調整することによって、結像状態を変化させることな
く対物レンズ２はＸ軸方向及びＹ軸方向に移動され得、
試料１の任意の位置の観察を行なうことができる。FIG. 4 shows a second practical embodiment of the invention.
10 is a first mirror that is disposed so as to be slidable in the X-axis direction along an X-axis guide 11 such as a dovetail joint together with the objective lens 2; 12 is the objective lens 2. A second mirror is disposed integrally with the first mirror 10 and the X-axis guide 11 so as to be slidable in the Y-axis direction along a Y-axis guide 13 configured similarly to the X-axis guide 11. , as in the embodiment shown in FIG. After being reflected in the axial direction and further reflected by the half mirror 4, an image is formed by the imaging lens 5, and this image is observed by the eyepiece lens 6. Therefore, the optical path length between the first mirror 10 and the second mirror 12 can be set by the Y-axis guide 13 by the x-axis guide 11 and the Y-axis guide 13. By adjusting, the objective lens 2 can be moved in the X-axis direction and the Y-axis direction without changing the imaging state,
Observation of any position on the sample 1 can be performed.

発明の効果以上述べたように本発明によれば、観察光学系の一部を
アフォーカル系として構成し、該アフォーカル系の一部
を対物レンズの光軸に対して垂直に配設し且つその光路
長を伸縮可能にして、対物レンズをその光軸に対して垂
直方向に移動可能に配設したから、対物レンズの移動範
囲は試料の観察範囲と同じでよいので、脳切片、大径の
シリコンウェハ等の大きな試料を検鏡する際に試料の広
い範囲に亘って検鏡位置を変え得ると共に顕微鏡全体を
小型に構成することができ、従って顕微鏡自体の製造コ
ストも低く而も省スペースの点からも非常に好ましい等
、極めて効果的な顕微鏡が得られる。Effects of the Invention As described above, according to the present invention, a part of the observation optical system is configured as an afocal system, a part of the afocal system is disposed perpendicular to the optical axis of the objective lens, and Since the optical path length is made expandable and the objective lens is movable perpendicularly to the optical axis, the movement range of the objective lens can be the same as the observation range of the sample. When examining a large sample such as a silicon wafer, the position of the microscope can be changed over a wide range of the sample, and the entire microscope can be made compact, so the manufacturing cost of the microscope itself is low and space is saved. A very effective microscope can be obtained, which is very preferable from the viewpoint of.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明による顕微鏡の一実施例を示す概略図、
第２図は従来の載物台の移動範囲を示す図、第３図は本
発明による対物レンズの移動範囲を示す図、第４図は本
発明の第二の実施例を示す斜視図である。１・・・・試料、２・・・・対物レンズ、３・・・・ミ
ラー、４・・・・ハーフミラ−１５・・・・結像レンズ
、６・・・・接眼レンズ、７・・・・照明光源、８・・
・・コレクターレンズ、１０・・・・第一のミラー、１
１・・・・Ｘ軸ガイド、１２・°°°第二のミラー、１
３・・・・Ｙ軸ガイド。オｎ図第２図第４図手続補正書（自発）１．事件の表示　特願昭５９−１２９２０４号２、発明
の名称　顕　微　鏡４、代　　理　　人　　　〒１０５東京都港区新橋５の
１９電話　東京（４３２）　４５７６（６５８２）弁理士篠原泰司５、補正の対象明細書の特許請求の範囲の欄及び発明の詳細な説明の欄
。６、補正の対象（１）特許請求の範囲を別紙添付の通り訂正する。（２）明細書第１頁１３〜１４行目の「大きな試料を・
・・・構成の」を「試料を広い範囲に二って検鏡し得る
ようにした」と訂正する。（３）明細書筒３頁６〜８行目の「大きな試料を・・・
・構成の」を「試料を検鏡する際に試料の広い範囲に互
って検鏡位置を得るようにした」と訂正する。（４）明細書第３頁１１〜１６行目の「観察光学系の・
・・・配設されている」を「観察光学系のうち、対物光
学系を視野平面に対して平行に移動し、接眼光学系を固
定した顕微鏡において、観察光学系の一部の光路長を伸
縮自在にした」と訂正する。（５）明細書第６頁８〜１９行目の「観察光学系の・・
・・好ましい等、」を「観察光学系のうち、対物光学系
を視野平面に対して平行に移動し、接眼光学系を固定し
た顕微鏡において、観察光学系の一部の光路長を伸縮自
在に構成したから、脳切片、大径のシリコンウェハ等の
大きな試料を検鏡する際に試料の広い範囲に互って検鏡
位置を変え得る、Ｊと訂正する。特許請求の範囲観察光学系のうち、対物光学系を視野平面に対して平行
に移動し、接眼光学系を固定した顕微鏡において、観察
光学系の一部の光路長を伸縮自在にしたことを特徴とす
る、顕微鏡。FIG. 1 is a schematic diagram showing an embodiment of a microscope according to the present invention;
FIG. 2 is a diagram showing the moving range of a conventional stage, FIG. 3 is a diagram showing the moving range of an objective lens according to the present invention, and FIG. 4 is a perspective view showing a second embodiment of the present invention. . 1... Sample, 2... Objective lens, 3... Mirror, 4... Half mirror 15... Imaging lens, 6... Eyepiece, 7...・Lighting light source, 8...
...Collector lens, 10...First mirror, 1
1...X-axis guide, 12.°°°second mirror, 1
3...Y-axis guide. On Figure 2 Figure 4 Procedural amendment (voluntary) 1. Description of the case: Japanese Patent Application No. 59-129204 2, Title of the invention: Microscope 4, Agent: 19, 5-Shinbashi, Minato-ku, Tokyo 105 Telephone: Tokyo (432) 4576 (6582) Patent attorney Yasushi Shinohara 5, Amendment Claims section and Detailed Description of the Invention section of the subject specification. 6. Subject of amendment (1) The scope of claims is corrected as attached. (2) “Large sample” on page 1, lines 13-14 of the specification.
``...'' in the structure was corrected to ``It was designed to allow the specimen to be examined over a wide area.'' (3) On page 3 of the specification tube, lines 6-8, “Large sample...
・Corrected ``in the configuration'' to ``When examining a sample, the position of the microscope was obtained over a wide range of the sample.'' (4) On page 3 of the specification, lines 11 to 16, "The observation optical system...
``In a microscope in which the objective optical system of the observation optical system is moved parallel to the field of view plane and the eyepiece optical system is fixed, the optical path length of a part of the observation optical system is I made it expandable and retractable,” he corrected. (5) On page 6 of the specification, lines 8-19, “The observation optical system...
... preferable, etc.," was changed to "In a microscope in which the objective optical system of the observation optical system is moved parallel to the field of view plane and the eyepiece optical system is fixed, the optical path length of a part of the observation optical system can be expanded and contracted. Because of the structure, when examining a large sample such as a brain slice or a large-diameter silicon wafer, the position of the microscope can be changed over a wide range of the sample.This is corrected as J.Claims: Observation optical system A microscope characterized in that the objective optical system is moved parallel to the viewing plane and the eyepiece optical system is fixed, and the optical path length of a part of the observation optical system is made expandable and retractable.

Claims

【特許請求の範囲】[Claims]

観察光学系の一部がアフオーカル系として構成されてお
り、該アフオーカル系の一部が対物レンズの光軸に対し
て垂直に配設されていて且つその光路長が伸縮可能であ
るようにして、対物レンズがその光軸に対して垂直方向
に移動可能に配設されていることを特徴とする、顕微鏡
。A part of the observation optical system is configured as an afocal system, and the part of the afocal system is arranged perpendicularly to the optical axis of the objective lens, and the optical path length thereof can be expanded and contracted, A microscope, characterized in that an objective lens is disposed so as to be movable in a direction perpendicular to its optical axis.