JPS618905B2 - - Google Patents

Info

Publication number
JPS618905B2
JPS618905B2 JP14301979A JP14301979A JPS618905B2 JP S618905 B2 JPS618905 B2 JP S618905B2 JP 14301979 A JP14301979 A JP 14301979A JP 14301979 A JP14301979 A JP 14301979A JP S618905 B2 JPS618905 B2 JP S618905B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14301979A
Other languages
Japanese (ja)
Other versions
JPS5666634A (en
Inventor
Keisuke Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mayekawa Manufacturing Co
Original Assignee
Mayekawa Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mayekawa Manufacturing Co filed Critical Mayekawa Manufacturing Co
Priority to JP14301979A priority Critical patent/JPS5666634A/en
Publication of JPS5666634A publication Critical patent/JPS5666634A/en
Publication of JPS618905B2 publication Critical patent/JPS618905B2/ja
Granted legal-status Critical Current

Links

JP14301979A 1979-11-05 1979-11-05 Cooling and heating method utilizing cyclic heat-accumulation type heat pump Granted JPS5666634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14301979A JPS5666634A (en) 1979-11-05 1979-11-05 Cooling and heating method utilizing cyclic heat-accumulation type heat pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14301979A JPS5666634A (en) 1979-11-05 1979-11-05 Cooling and heating method utilizing cyclic heat-accumulation type heat pump

Publications (2)

Publication Number Publication Date
JPS5666634A JPS5666634A (en) 1981-06-05
JPS618905B2 true JPS618905B2 (en) 1986-03-18

Family

ID=15329031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14301979A Granted JPS5666634A (en) 1979-11-05 1979-11-05 Cooling and heating method utilizing cyclic heat-accumulation type heat pump

Country Status (1)

Country Link
JP (1) JPS5666634A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60144567A (en) * 1984-01-06 1985-07-30 サンデン株式会社 Water heat-source heat pump
EP0166549A2 (en) * 1984-06-21 1986-01-02 Varian Associates, Inc. Method for proximity effect correction in electron beam lithography systems
JPS61116253A (en) * 1984-11-13 1986-06-03 株式会社 前川製作所 Heat pump or cooling device
JPH0715876B2 (en) * 1985-07-03 1995-02-22 株式会社ニコン Exposure method and photolithography apparatus
JPS6152176U (en) * 1985-08-27 1986-04-08
JPS61138971U (en) * 1985-09-25 1986-08-28
CN106352603B (en) * 2016-08-30 2020-04-10 南京酷朗电子有限公司 Ground source heat exchanger subregion hierarchical management system

Also Published As

Publication number Publication date
JPS5666634A (en) 1981-06-05

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