JPS6188656U - - Google Patents
Info
- Publication number
- JPS6188656U JPS6188656U JP17312184U JP17312184U JPS6188656U JP S6188656 U JPS6188656 U JP S6188656U JP 17312184 U JP17312184 U JP 17312184U JP 17312184 U JP17312184 U JP 17312184U JP S6188656 U JPS6188656 U JP S6188656U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- conductor
- collecting electrode
- electron beam
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は通常の走査形電子顕微鏡装置の説明図
、第２図は従来形の収集電極の配置説明図、第３
図は本考案の一実施例図である。
５…対物レガズ、７…試料、９…検出器、１０
…増巾器、１５…電子ビーム、２０…収集電極、
２１…熱電子制御グリツド、２２…電子ビーム入
射孔。
Fig. 1 is an explanatory diagram of a conventional scanning electron microscope device, Fig. 2 is an explanatory diagram of the arrangement of a conventional collecting electrode, and Fig. 3 is an explanatory diagram of a conventional scanning electron microscope device.
The figure shows an embodiment of the present invention. 5...Objective regaz, 7...Sample, 9...Detector, 10
...amplifier, 15...electron beam, 20...collecting electrode,
21... Thermionic control grid, 22... Electron beam entrance hole.
Claims (1)
で試料を囲み、その頂部に電子線の入射孔を有す
ることを特徴とする収集電極をもつ走査形電子顕
微鏡。 A scanning electron microscope having a collecting electrode characterized by surrounding a sample with a conductor having minimum dimensions corresponding to the size of the sample and having an electron beam entrance hole at the top of the conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17312184U JPS6188656U (en) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17312184U JPS6188656U (en) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188656U true JPS6188656U (en) | 1986-06-10 |
Family
ID=30730781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17312184U Pending JPS6188656U (en) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188656U (en) |
-
1984
- 1984-11-16 JP JP17312184U patent/JPS6188656U/ja active Pending
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