JPS6188121A - Pressure transducer - Google Patents
Pressure transducerInfo
- Publication number
- JPS6188121A JPS6188121A JP20999884A JP20999884A JPS6188121A JP S6188121 A JPS6188121 A JP S6188121A JP 20999884 A JP20999884 A JP 20999884A JP 20999884 A JP20999884 A JP 20999884A JP S6188121 A JPS6188121 A JP S6188121A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- cantilever
- supporting member
- pressure
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
- G01L9/0064—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、被測定媒体に直接歪ゲージを接触させずに圧
力を検出できるようにした圧力変換器に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a pressure transducer that is capable of detecting pressure without directly contacting a strain gauge with a medium to be measured.
（従来の技術）
従来より、被測定媒体が直接歪ゲージ素子に触れない構
造のものは化学プラント等で多く使用されるシールダイ
ヤフラム構造のもの、また、例えば特公昭４６−２３４
号公報中第１図に記載されている受圧ダイヤフラム面の
反対面に歪ゲージを貼着したものがある。(Prior art) Conventionally, strain gauge elements with a structure in which the medium to be measured does not come into direct contact with the strain gauge element include seal diaphragm structures often used in chemical plants, etc.
There is one in which a strain gauge is attached to the opposite surface of the pressure-receiving diaphragm surface shown in FIG. 1 in the publication.
（発明が解決しようとする問題点）
この歪ゲージ貼着方式では次のような欠点があった。（
１）ダイヤフラム面の歪ゲージ貼着位置が性能に影響す
るため小型化が困難であ。（２）歪ゲージが接着剤の影
響を受ける。（３）接着剤を使用するため接着剤のクリ
ープにより出力安定性をそこなう。(Problems to be Solved by the Invention) This strain gauge attachment method has the following drawbacks. (
1) Miniaturization is difficult because the position of the strain gauge on the diaphragm surface affects performance. (2) Strain gauges are affected by adhesive. (3) Since adhesive is used, output stability is impaired due to adhesive creep.
本発明は、上記不具合を解消できる圧力変換器の提供を
目的とする。An object of the present invention is to provide a pressure transducer that can eliminate the above-mentioned problems.
（問題点を解決するための手段）
本発明は、被測定圧力を受けて変位するダイヤフラムと
、このダイヤフラムを取囲む肉厚の支持部より成り、前
記ダイヤフラムはこの支持部を設けた側より圧力を受け
るように構成された圧力変換器において、前記ダイヤフ
ラムの受圧面と反対の面に、前記支持部の領域で、−線
固定され、他端が前記ダイヤフラム面に位置するように
歪ゲージを含むカンチレバーが配置され、前記ダイヤフ
ラムの変位に応じてこのカンチレバーを変位させ、電気
信号に変換する構造としたことを特徴とする。(Means for Solving the Problems) The present invention comprises a diaphragm that is displaced in response to a pressure to be measured, and a thick supporting portion surrounding the diaphragm, and the diaphragm is exposed to pressure from the side where the supporting portion is provided. A pressure transducer configured to receive a pressure transducer includes a strain gauge fixed to a surface of the diaphragm opposite to a pressure receiving surface in a region of the support portion, the other end of which is located on the diaphragm surface. The device is characterized in that a cantilever is disposed, and the cantilever is displaced in accordance with the displacement of the diaphragm, and the cantilever is converted into an electric signal.
（実施例） 以下本発明の一実施例について説明する。(Example) An embodiment of the present invention will be described below.
第１，２図は圧力変換器の正面図および断面図である。1 and 2 are a front view and a sectional view of the pressure transducer.
■はシリコン単結晶よりなるカンチレバーで、その一部
に拡散抵抗等からなる歪ゲージが形成されている。その
ゲージ形成場所は応力集中部分（例えば薄肉部８の上面
）に形成するのが、好しい。２は受圧ダイヤフラム、３
は支持部で、ダイヤフラム２と支持部３はこの場合ガラ
ス、セラミック又は金属等により一体的に形成しである
。3 is a cantilever made of silicon single crystal, and a strain gauge made of a diffused resistor is formed in a part of the cantilever. It is preferable that the gauge be formed in a stress concentration area (for example, on the upper surface of the thin wall portion 8). 2 is a pressure receiving diaphragm, 3
is a support portion, and in this case, the diaphragm 2 and the support portion 3 are integrally formed of glass, ceramic, metal, or the like.
４は樹脂製のリングで、一体成型された外部取出用の金
属型リード５を有し、このリング４の一端は前記支持部
３に装着されている。６はカンチレバー１とリード５と
を電気的に接続するための金又はアルミ等からなるボン
ディングワイヤである。Reference numeral 4 denotes a resin ring, which has an integrally molded metal lead 5 for external extraction, and one end of this ring 4 is attached to the support portion 3 . 6 is a bonding wire made of gold, aluminum, etc. for electrically connecting the cantilever 1 and the lead 5.
このカンチレバー１はその一端が支持部３上面に樹脂、
ガラス、半田等の接着剤等により固定されている。その
他端はダイヤフラム２の中の中心部をおおうように配置
されている。第１図の例ではダイヤフラム２の上面とカ
ンチレバー１の下部面は圧力が印加されない状態で接触
させている。This cantilever 1 has one end covered with resin on the upper surface of the support part 3.
It is fixed with adhesive such as glass and solder. The other end is arranged to cover the center of the diaphragm 2. In the example shown in FIG. 1, the upper surface of the diaphragm 2 and the lower surface of the cantilever 1 are brought into contact with each other in a state where no pressure is applied.
また、ダイヤフラム２とカンチレバー２との間に所定の
間隔を設け、被測定圧力が低い側ではダイヤフラム２が
若干変位してカンチレバー１が変位しないよう不感帯を
設けるようにしてもよい。Alternatively, a predetermined interval may be provided between the diaphragm 2 and the cantilever 2, and a dead zone may be provided so that the diaphragm 2 is slightly displaced and the cantilever 1 is not displaced on the side where the pressure to be measured is low.
それによって、検出圧力のノイズ対策や設定圧力などに
有用となる。This makes it useful for noise countermeasures for detected pressure, set pressure, etc.
そこで、圧力（これは荷重の意味を含む）が、第２図に
記載した矢印のようにダイヤフラム２に加わると、ダイ
ヤフラム２は、周辺支持部３を固定端として中央部が上
に凸に膨らむように変位する。カンチレバー１はダイヤ
フラム２の固定端である支持部３の領域内で一端が固定
されており、ダイヤフラム中央部に接しているカンチレ
バ一端部分が、上記ダイヤフラム２の変位に従って変位
する。このカンチレバー１の変位により生じた歪をカン
チレバー１に形成した歪ゲージにより電気信号に変換し
、ワイヤ６、リード５を介して外部に取り出す。なお、
前記カンチレバーは、例えば特公昭５２−３６３９６号
公報により開示されている公知のものでよく、説明は省
略する。Therefore, when pressure (this includes the meaning of load) is applied to the diaphragm 2 as shown by the arrow shown in Fig. 2, the diaphragm 2 bulges upward at the center with the peripheral support 3 as the fixed end. Displaced like this. One end of the cantilever 1 is fixed within the region of the support portion 3, which is the fixed end of the diaphragm 2, and the one end portion of the cantilever that is in contact with the center of the diaphragm is displaced in accordance with the displacement of the diaphragm 2. The strain caused by the displacement of the cantilever 1 is converted into an electrical signal by a strain gauge formed on the cantilever 1, and is taken out to the outside via the wire 6 and lead 5. In addition,
The cantilever may be a known cantilever disclosed, for example, in Japanese Patent Publication No. 52-36396, and its explanation will be omitted.
カンチレバー１に設けた薄肉部８は機能上必ずしも必要
ではないが、固定部７を接着剤を用いて接合する場合、
接着剤の流れ防止ができ、カンチレバー１の固定端位置
を的確にできる。また、カンチレバー１の一端が変位す
ることにより発生ずる歪応力をこの部分に集中させる効
果があり、この薄肉部８に歪ゲージを形成すれば一層効
果的である。Although the thin part 8 provided on the cantilever 1 is not necessarily functionally necessary, when the fixing part 7 is joined using an adhesive,
The adhesive can be prevented from flowing and the fixed end position of the cantilever 1 can be accurately positioned. Further, it is effective to concentrate the strain stress generated by the displacement of one end of the cantilever 1 on this portion, and it is even more effective if a strain gauge is formed in this thin portion 8.
本構造の第１の効果は、カンチレバー１が一端固定のた
め熱膨張の影響を受けないことである。The first effect of this structure is that since the cantilever 1 is fixed at one end, it is not affected by thermal expansion.
即ち、ダイヤフラム２が横方向へ膨張した場合、カンチ
レバー１はダイヤフラムと一体になり横方向にすべりを
生ずるだけであり、熱膨張により熱歪を受けることはな
い。また縦方向の熱膨張についてもカンチレバー１はダ
イヤフラムと一体に上下方向に変位するだけで熱膨張に
よる熱応力を受けることはない。このように熱膨張の影
響を受けない構造であるため、ダイヤフラム２及び支持
部３を構成する部品の材料が幅広く選定出来るため、量
産性のよい低いコストの材料を使用することが可能とな
る。That is, when the diaphragm 2 expands in the lateral direction, the cantilever 1 becomes integrated with the diaphragm and only slides in the lateral direction, and is not subjected to thermal strain due to thermal expansion. Also, regarding thermal expansion in the longitudinal direction, the cantilever 1 is only displaced in the vertical direction together with the diaphragm, and is not subjected to thermal stress due to thermal expansion. Since the structure is unaffected by thermal expansion, a wide range of materials can be selected for the parts constituting the diaphragm 2 and the support part 3, making it possible to use low-cost materials that are mass-producible.
また、固定部７に使用する接着剤の熱膨張の影響も受け
ない（カンチレバー１に熱応力を発生させない）ためシ
リコンカンチレバー１と熱膨張係数の大きく違う低融点
ガラス等が使用でき強固な接合が簡単に実現できる。以
上の様にカンチレバーが熱応力を受けない構造であり、
広い温度範囲でカンチレバーの特性をそこなわずに使用
できるとともに、熱応力による部品及び接合部の疲労等
も少ないため信頼性が向上できる
以上を総合すると、本実施例によれば、（１）歪ゲージ
としては、カンチレバー１と一体に組付けるだけで、そ
の取扱いも簡単で小型化、量産性に向＜ 、（２１カン
チレバー１は一端固定のためダイヤフラム邪の熱膨張の
影響を受けない。また固定部の接着剤の影響もカンチレ
バー１に肉薄部８を設けることにより無視できる。（３
）カンチレバー１の肉薄部８を設けることによりダイヤ
フラム２の変位によるカンチレバー上の応力が肉薄部８
に集中し、固定部７へ伝わる応力が小さくなるため接着
剤のクリープが低減し特性の長期安定化ができる。In addition, since it is not affected by the thermal expansion of the adhesive used for the fixing part 7 (it does not generate thermal stress on the cantilever 1), it is possible to use low-melting glass, etc., which has a significantly different thermal expansion coefficient from the silicon cantilever 1, and a strong bond can be achieved. It can be easily achieved. As mentioned above, the cantilever has a structure that does not receive thermal stress,
The cantilever can be used in a wide temperature range without deteriorating its characteristics, and there is less fatigue of parts and joints due to thermal stress, which improves reliability.To summarize, according to this example, (1) strain As a gauge, it can be simply assembled with cantilever 1, making it easy to handle, downsized, and suitable for mass production. The influence of the adhesive on the part can be ignored by providing the thin part 8 on the cantilever 1. (3
) By providing the thin wall portion 8 of the cantilever 1, the stress on the cantilever due to the displacement of the diaphragm 2 is reduced to the thin wall portion 8.
Since the stress transmitted to the fixing portion 7 is reduced, creep of the adhesive is reduced, and the properties can be stabilized over a long period of time.
（発明の効果）
以上述べた如く本発明によれば、歪ゲージを含むカンチ
レバーの一端をダイヤフラムの支持部に固定し、ダイヤ
フラムの変位に応じてカンチレバーを変位させるように
しているから、その取扱いも簡単で小型化、量産性に向
いており、また、カンチレバーの一端のみ固定し、ブイ
ヤフラム側においては固定していないため、熱応力や接
着剤のクリープ等の影響を低減できる。(Effects of the Invention) As described above, according to the present invention, one end of the cantilever including the strain gauge is fixed to the supporting portion of the diaphragm, and the cantilever is displaced in accordance with the displacement of the diaphragm, so that its handling is easy. It is simple and suitable for miniaturization and mass production, and since only one end of the cantilever is fixed, and the bouillon side is not fixed, the effects of thermal stress and adhesive creep can be reduced.
第１，２図は本発明の一実施例を示すもので、第１図は
平面図、第２図は断面図である。
１・・・カンチレバー、２・・・ダイヤフラム、３・・
・支持部、４・・・リング、５・・・リード、８・・・
薄肉部。1 and 2 show an embodiment of the present invention, with FIG. 1 being a plan view and FIG. 2 being a sectional view. 1...Cantilever, 2...Diaphragm, 3...
・Support part, 4...Ring, 5...Lead, 8...
Thin part.
Claims (3)
のダイヤフラムを取囲む肉厚の支持部より成り、前記ダ
イヤフラムは、この支持部を設けた側より圧力を受ける
ように構成された圧力変換器において、前記ダイヤフラ
ムの受圧面と反対の面に、前記支持部の領域で一端が固
定され、他端が前記ダイヤフラム面に位置するように歪
ゲージを含むカンチレバーが配置され、前記ダイヤフラ
ムの変位に応じてこのカンチレバーを変位させ、前記歪
ゲージを用いて電気信号に変換する構造としたことを特
徴とする圧力変換器。(1) A pressure transducer consisting of a diaphragm that is displaced in response to the pressure to be measured, and a thick support portion surrounding the diaphragm, and the diaphragm is configured to receive pressure from the side where the support portion is provided. A cantilever including a strain gauge is disposed on the surface of the diaphragm opposite to the pressure-receiving surface, one end of which is fixed in the region of the support portion, and the other end of which is located on the diaphragm surface, and the cantilever is arranged so as to respond to the displacement of the diaphragm. A pressure transducer characterized by having a structure in which a cantilever of a lever is displaced and the strain gauge is used to convert the signal into an electric signal.
設け、その薄肉部に前記歪ゲージを形成したことを特徴
とする特許請求の範囲第１項記載の圧力変換器。(2) The pressure transducer according to claim 1, wherein a thin wall portion is provided in a portion of the cantilever near the fixed portion, and the strain gauge is formed in the thin wall portion.
ラムの上面に接するように配置されていることを特徴と
する特許請求の範囲第１項記載の圧力変換器。(3) The pressure transducer according to claim 1, wherein the cantilever is arranged so that its non-fixed end is in contact with the upper surface of the diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20999884A JPS6188121A (en) | 1984-10-05 | 1984-10-05 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20999884A JPS6188121A (en) | 1984-10-05 | 1984-10-05 | Pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188121A true JPS6188121A (en) | 1986-05-06 |
Family
ID=16582159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20999884A Pending JPS6188121A (en) | 1984-10-05 | 1984-10-05 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188121A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997039320A1 (en) * | 1996-04-13 | 1997-10-23 | Robert Bosch Gmbh | Pressure sensor |
| US5872315A (en) * | 1996-02-26 | 1999-02-16 | Denso Corporation | Pressure detecting apparatus |
| WO2003031926A1 (en) * | 2001-10-04 | 2003-04-17 | Robert Bosch Gmbh | Micromechanical component (on pressure sensor membrane) comprising a bellows-type structure for temperature shifts |
| JP2014044180A (en) * | 2012-08-29 | 2014-03-13 | Hitachi Automotive Systems Ltd | Strain sensor module |
-
1984
- 1984-10-05 JP JP20999884A patent/JPS6188121A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5872315A (en) * | 1996-02-26 | 1999-02-16 | Denso Corporation | Pressure detecting apparatus |
| WO1997039320A1 (en) * | 1996-04-13 | 1997-10-23 | Robert Bosch Gmbh | Pressure sensor |
| US6062088A (en) * | 1996-04-13 | 2000-05-16 | Robert Bosch Gmbh | Pressure sensor |
| WO2003031926A1 (en) * | 2001-10-04 | 2003-04-17 | Robert Bosch Gmbh | Micromechanical component (on pressure sensor membrane) comprising a bellows-type structure for temperature shifts |
| US6840111B2 (en) | 2001-10-04 | 2005-01-11 | Robert Bosch Gmbh | Micromechanical component and pressure sensor having a component of this type |
| JP2014044180A (en) * | 2012-08-29 | 2014-03-13 | Hitachi Automotive Systems Ltd | Strain sensor module |
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