JPS6187452U - - Google Patents

Info

Publication number
JPS6187452U
JPS6187452U JP17160384U JP17160384U JPS6187452U JP S6187452 U JPS6187452 U JP S6187452U JP 17160384 U JP17160384 U JP 17160384U JP 17160384 U JP17160384 U JP 17160384U JP S6187452 U JPS6187452 U JP S6187452U
Authority
JP
Japan
Prior art keywords
signal
storage device
magnetic field
screens
scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17160384U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17160384U priority Critical patent/JPS6187452U/ja
Publication of JPS6187452U publication Critical patent/JPS6187452U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例で走査型電子顕微鏡
に応用した説明図である。 １……電子銃、３……鏡筒、４……絞り、７…
…偏向コイル、８……対物レンズ、１０……試料
、１１……検出器、１３……デイスプレイ部、１
４……画像記憶装置、１５……励磁電源、１６…
…磁場発生コイル。 FIG. 1 is an explanatory diagram of an embodiment of the present invention applied to a scanning electron microscope. 1...electron gun, 3...lens barrel, 4...aperture, 7...
... Deflection coil, 8 ... Objective lens, 10 ... Sample, 11 ... Detector, 13 ... Display section, 1
4... Image storage device, 15... Excitation power supply, 16...
...Magnetic field generating coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 粒子線を用いて試料面を走査し、放射される信
号を記憶する記憶装置に於て所要回数の画面を記
憶完了したとき信号を発する手段を有し、該信号
により磁場の発生、もしくは遮断する手段を備え
たことを特徴とする画像記憶装置。 A particle beam is used to scan the sample surface, and a storage device that stores the emitted signal has means for emitting a signal when the required number of screens have been stored, and the signal generates or blocks a magnetic field. An image storage device comprising: means.
JP17160384U 1984-11-14 1984-11-14 Pending JPS6187452U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17160384U JPS6187452U (en) 1984-11-14 1984-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17160384U JPS6187452U (en) 1984-11-14 1984-11-14

Publications (1)

Publication Number Publication Date
JPS6187452U true JPS6187452U (en) 1986-06-07

Family

ID=30729279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17160384U Pending JPS6187452U (en) 1984-11-14 1984-11-14

Country Status (1)

Country Link
JP (1) JPS6187452U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0811999B1 (en) * 1996-06-07 2014-07-09 Hitachi, Ltd. Scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0811999B1 (en) * 1996-06-07 2014-07-09 Hitachi, Ltd. Scanning electron microscope

Similar Documents

Publication Publication Date Title
JPS6187452U (en)
JP3351647B2 (en) Scanning electron microscope
US3023343A (en) Information recording and display apparatus
JPS59103360U (en) compound microscope
JPS5891851U (en) Scanning backscattered electron diffraction microscope device
JPS60124853U (en) electron beam equipment
JPS59177164U (en) Scanning backscattered electron diffraction microscope device
JPS64259U (en)
JPS59134259U (en) scanning electron microscope
JPS59148062U (en) Scanning electron microscope sample moving device
JPS6312412Y2 (en)
JPS58135860U (en) scanning electron microscope
JPS6075954U (en) electronic microscope
JPS61118952A (en) Device for producing scanning images
JPS6033750U (en) Alignment device for electron microscope
JPS63182056U (en)
JPS633054U (en)
JPS61156230U (en)
JPS61162936U (en)
JPS59130365U (en) Sample energizing device in electron microscope
JPS60138252U (en) Sample image display device in particle beam equipment
JPS59150155U (en) scanning electron microscope
JPS5899763U (en) electronic microscope
JPS5920771U (en) cathode ray tube device
JPS59139947U (en) Charged particle beam application equipment