JPS59150155U - scanning electron microscope - Google Patents

scanning electron microscope

Info

Publication number
JPS59150155U
JPS59150155U JP4507283U JP4507283U JPS59150155U JP S59150155 U JPS59150155 U JP S59150155U JP 4507283 U JP4507283 U JP 4507283U JP 4507283 U JP4507283 U JP 4507283U JP S59150155 U JPS59150155 U JP S59150155U
Authority
JP
Japan
Prior art keywords
sample
electron beam
scanning
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4507283U
Other languages
Japanese (ja)
Other versions
JPH0343650Y2 (en
Inventor
誠 石田
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP4507283U priority Critical patent/JPS59150155U/en
Publication of JPS59150155U publication Critical patent/JPS59150155U/en
Application granted granted Critical
Publication of JPH0343650Y2 publication Critical patent/JPH0343650Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例装置の構成概略図であり、第
２図及び第３図は本考案を説明するための図である。 １：電子銃、２：試料、３：電子線、４：集束レンズ、
５：二次電子、６：検出器、７：増幅器、８ニブラウン
管、９Ｘ−：水平偏向コイル、９Ｙ：垂直偏向コイル、
１０：走査信号発生回路、１１：縦横比設定回路、１２
：基準倍率回路、１３Ｘ、１３Ｙ：電子線偏向コイ゛ル
。FIG. 1 is a schematic diagram of the configuration of an apparatus according to an embodiment of the present invention, and FIGS. 2 and 3 are diagrams for explaining the present invention. 1: Electron gun, 2: Sample, 3: Electron beam, 4: Focusing lens,
5: Secondary electron, 6: Detector, 7: Amplifier, 8 Ni cathode ray tube, 9X-: Horizontal deflection coil, 9Y: Vertical deflection coil,
10: Scanning signal generation circuit, 11: Aspect ratio setting circuit, 12
: Reference magnification circuit, 13X, 13Y: Electron beam deflection coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子線を細く集束した状態で試料に照射し、試料上の電
子線照射位置を電子線偏向手段により二次元的に走査し
、電子線照射により生ずる試料からの情報信号を検出し
、該検出した信号を試料走査と同期した信号と共に像表
示手段に導入して走査試料像を表示する装置において、
試料上における水平方向と垂直方向における電子線走査
幅の比率を変化させる手段を設けたことを特徴とする走
゛査電子顕微鏡。A sample is irradiated with a narrowly focused electron beam, the electron beam irradiation position on the sample is two-dimensionally scanned by an electron beam deflection means, and an information signal from the sample generated by the electron beam irradiation is detected. In an apparatus for displaying a scanned sample image by introducing a signal into an image display means together with a signal synchronized with sample scanning,
A scanning electron microscope characterized by being provided with means for changing the ratio of the electron beam scanning width in the horizontal direction and the vertical direction on a sample.
JP4507283U 1983-03-29 1983-03-29 scanning electron microscope Granted JPS59150155U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4507283U JPS59150155U (en) 1983-03-29 1983-03-29 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4507283U JPS59150155U (en) 1983-03-29 1983-03-29 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS59150155U true JPS59150155U (en) 1984-10-06
JPH0343650Y2 JPH0343650Y2 (en) 1991-09-12

Family

ID=30175594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4507283U Granted JPS59150155U (en) 1983-03-29 1983-03-29 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS59150155U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (en) * 2001-08-29 2006-06-01 Hitachi Ltd Sample dimension measuring method and scanning electron microscope
JP2007003535A (en) * 2001-08-29 2007-01-11 Hitachi Ltd Sample dimension measuring method, and scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (en) * 2001-08-29 2006-06-01 Hitachi Ltd Sample dimension measuring method and scanning electron microscope
JP2007003535A (en) * 2001-08-29 2007-01-11 Hitachi Ltd Sample dimension measuring method, and scanning electron microscope

Also Published As

Publication number Publication date
JPH0343650Y2 (en) 1991-09-12

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