JPS618710A - Manufacture of magnetic head - Google Patents
Manufacture of magnetic headInfo
- Publication number
- JPS618710A JPS618710A JP12733984A JP12733984A JPS618710A JP S618710 A JPS618710 A JP S618710A JP 12733984 A JP12733984 A JP 12733984A JP 12733984 A JP12733984 A JP 12733984A JP S618710 A JPS618710 A JP S618710A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- laminate
- magnetic film
- substrate
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
- G11B5/1475—Assembling or shaping of elements
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
この発明は、磁気ヘッドの製造方法、特に非磁性基板と
磁性膜とを積層してなる積層ブロックを切断して複数の
磁気ヘッドチップを得るようにした磁気ヘッドの製造方
法に関する。[Detailed Description of the Invention] [Technical Field] The present invention relates to a method for manufacturing a magnetic head, and in particular to a method for manufacturing a magnetic head, in particular a multilayer block formed by laminating a non-magnetic substrate and a magnetic film is cut to obtain a plurality of magnetic head chips. The present invention relates to a method of manufacturing a magnetic head.
近年、高抗磁力の記録媒体に記録する磁気ヘッドとして
高い飽和磁束密度を有するセンダストやアモルファス等
の軟磁性材を備えた磁気ヘッドが用いられる様になって
きた。また、このセンダストやアモルファス等は初透磁
率が高いが固有抵抗が小さく、高周波になる程渦電流損
失が増大するため、磁気へラドコアとして用いる場合に
はこの磁性材の厚みを薄くする必要がある。しかも、こ
のセンダストやアモルファス等の軟磁性材は、例えばフ
ェライト等に比し耐摩耗性の点で劣り、磁気テープとの
摺接により摩耗し易いため、センダストの両側を非磁性
体である結晶化ガラス等により補強する必要があった。In recent years, magnetic heads made of soft magnetic materials such as sendust and amorphous having high saturation magnetic flux density have come to be used as magnetic heads for recording on recording media with high coercive force. In addition, materials such as sendust and amorphous have high initial magnetic permeability but low specific resistance, and the higher the frequency, the greater the eddy current loss, so it is necessary to reduce the thickness of this magnetic material when used as a magnetic rad core. . Moreover, soft magnetic materials such as sendust and amorphous have inferior wear resistance compared to, for example, ferrite, and are easily worn out due to sliding contact with magnetic tape. It was necessary to reinforce it with glass, etc.
このため、ガラス基板等に前記アモルファスやセンダス
ト等の軟磁性材より成る薄い磁性膜を、蒸着あるいはス
パッタリング等の手段で形成し、このような磁性膜をコ
ア材とするヘッドが提案されている。For this reason, a head has been proposed in which a thin magnetic film made of a soft magnetic material such as amorphous or Sendust is formed on a glass substrate or the like by means such as vapor deposition or sputtering, and such a magnetic film is used as a core material.
第１図ないし第９図は従来のこの種の磁気ヘッド製造方
法を示す図である。1 to 9 are diagrams showing a conventional method of manufacturing this type of magnetic head.
まず、第１図に示す結晶化ガラス等の非磁性体から成る
基板１上に、第２図に示すようにセンダストやアモルフ
ァス等より我る薄い磁性膜２をスパッタリング等により
形成する。First, as shown in FIG. 2, on a substrate 1 made of a non-magnetic material such as crystallized glass shown in FIG. 1, a thin magnetic film 2 made of sendust, amorphous or the like is formed by sputtering or the like.
次に、磁性膜２上に、磁性膜２を形成していない他の基
板３を第３図に示すように重合し、低融点ガラスまたは
有機接着剤等により接着する。この後、この２枚のガラ
ス基板１，３と磁性膜２の３層より成る積層板４をＡ−
Ａｌｌ！およびＢ−Ｂ線に沿って切断し、複数個（図で
は６個）のブロック５を得る。Next, another substrate 3 on which the magnetic film 2 is not formed is superposed on the magnetic film 2 as shown in FIG. 3, and bonded with low melting point glass, an organic adhesive, or the like. After that, the laminate 4 consisting of the three layers of the two glass substrates 1 and 3 and the magnetic film 2 is attached to the A-
All! Then, a plurality of (six in the figure) blocks 5 are obtained by cutting along the line B-B.
次に、このブロック５を第４図に示すように積み重ね、
互いに接着剤で接合して積層体６を形成し、さらにこの
積層体６をＣ−Ｃ＠に沿って切断して第５図に示す積層
ブロック７ａ ｌ ７ｂを得る。Next, the blocks 5 are stacked as shown in FIG.
They are bonded together with an adhesive to form a laminate 6, and further this laminate 6 is cut along C-C@ to obtain laminate blocks 7a l 7b shown in FIG.
次に、２個の積層ブロック７ａ 、７ｂのうち少なくと
も一方の積層ブロックＴに、第６図に示すように長溝状
の巻線窓８を研削等で形成する。さらに、磁気ギャップ
を形成する突き合わせ面としてのギ・ヤツブ面９および
突き合わせ面を研磨して平滑（（仕上げる。Next, as shown in FIG. 6, a long groove-shaped winding window 8 is formed in at least one of the two stacked blocks 7a and 7b by grinding or the like. Furthermore, the gear surface 9 and the abutting surfaces that form the magnetic gap are polished to make them smooth.
次に、第７図に示すようにギャップ面９上に５ＩＯ１等
の非磁性材層１０をスパッタリング等で形成する。Next, as shown in FIG. 7, a nonmagnetic material layer 10 such as 5IO1 is formed on the gap surface 9 by sputtering or the like.
一方、第４図に示した他方の積層ブロック７ｂの突き合
わせ面を研磨して仕上げ、その突き合わす面と、積層ブ
ロック７ａの非磁性材層１０を形成したギャップ面９お
よび突き合わせ面とを、互いの磁性膜２が一致するよう
に位置合わせして突き合わせ、接着剤等により接着して
第８図に示すコア積層体ブロック１１を得る。On the other hand, the abutting surfaces of the other laminated block 7b shown in FIG. The core laminate block 11 shown in FIG. 8 is obtained by aligning and abutting each other so that the magnetic films 2 of the two are aligned, and bonding with an adhesive or the like.
このコア積層体ブロック１１を積層面と平行に基板１の
部分で所定の厚み寸法を切断した後、研磨で仕上げ、第
９図に示す磁気ヘッドチップ１２が完成する。この場合
、磁気ヘッドチップ１２０半体であるチップ半休１２ａ
、 １２ｂのそれぞれの磁性膜２のギャップ面９での
突合わせの端面の間に非磁性材層１０を介して磁気ギャ
ップ１２ｇが形成される。This core laminate block 11 is cut to a predetermined thickness parallel to the laminate surface on the substrate 1, and then polished to complete the magnetic head chip 12 shown in FIG. In this case, the chip half 12a which is the half of the magnetic head chip 120 is
, 12b, a magnetic gap 12g is formed between the abutting end faces of the magnetic films 2 at the gap surfaces 9 with the nonmagnetic material layer 10 interposed therebetween.
以上の製造方法によれば、２枚のガラス基板１゜３の間
にコア材としての磁性膜２を形成した磁気ヘッドを得る
ことができる。According to the above manufacturing method, it is possible to obtain a magnetic head in which the magnetic film 2 as a core material is formed between two glass substrates 1.3.
しかしながら、上記製造方法にあっては、第３図に示す
ように、積層板４を例えばＡ−ＡＩＪＩおよびＢ−Ｂ線
等に沿って、ダイヤモンドカッター等で切断する場合、
第１０図に示すようにガラス基板１，３の切断部よりク
ラックが生じるという問題点があった。この原因として
は、磁性材を蒸着あるいはスパッタリングする際の温度
上昇と切断時の冷却に伴ない、熱膨張係数の異なるガラ
ス基板１，３と磁性膜２との間で応力が生じ、切断時の
衝撃が加わることにより、前記応力がガラス基板、３を
歪ませクラックを生じさせたものと考えられる。However, in the above manufacturing method, as shown in FIG.
As shown in FIG. 10, there was a problem in that cracks were generated at the cut portions of the glass substrates 1 and 3. The reason for this is that stress is generated between the glass substrates 1 and 3 and the magnetic film 2, which have different coefficients of thermal expansion, due to the temperature rise during vapor deposition or sputtering of the magnetic material and the cooling during cutting. It is believed that the stress caused by the application of impact distorted the glass substrate 3 and caused cracks.
この発明は、上述の問題点に鑑みてなされたものであり
、切断時にガラス基板にクランクが生じることのないか
つ量産性の高い磁気ヘッドの製造方法を提供することを
目的とする。The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a method for manufacturing a magnetic head that does not cause cranking of the glass substrate during cutting and is highly mass-producible.
以下、この発明の一実施例を第１１図ないし第１４図に
基づいて説明する。なお、上記従来例と同一もしくは相
当部分には同一符号を付し、その説明の詳細は省く。An embodiment of the present invention will be described below with reference to FIGS. 11 to 14. Note that the same or equivalent parts as in the above conventional example are given the same reference numerals, and detailed explanation thereof will be omitted.
まず、第１図に示した非磁性の結晶化ガラスより成る基
板１に、所望の切断個所に沿って第１１図に示すような
溝１４を形成する。この実施例においては、ガラス基板
１の上面１ａに縦溝１４ａおよび横溝１４ｂを格子状に
形成し、前記上面１ａを磁気へッドファ１２の大きさに
区割しである。First, grooves 14 as shown in FIG. 11 are formed in the substrate 1 made of non-magnetic crystallized glass shown in FIG. 1 along desired cutting locations. In this embodiment, vertical grooves 14a and lateral grooves 14b are formed in a grid pattern on the upper surface 1a of the glass substrate 1, and the upper surface 1a is divided into the sizes of the magnetic headers 12.
また、溝１４の深さは、次の工程においてガラス基板１
上に形成するセンダスト等の磁性膜の厚さよりやや深く
形成する。さらに、溝１４の幅はダイヤモンドカッター
等による切断加工幅よりやや大きめに形成する。In addition, the depth of the groove 14 will be determined on the glass substrate 1 in the next step.
It is formed slightly deeper than the thickness of the magnetic film, such as sendust, formed above. Further, the width of the groove 14 is formed to be slightly larger than the cutting width using a diamond cutter or the like.
この後、上記溝加工を行なったガラス基板１に、センダ
ストあるいはアモルファス等の軟磁性材を蒸着あるいは
スパッタリング等することにより磁性＠１５を形成する
。この磁性膜１５は、第１３図に示すように溝１４ａ、
１４ｂにより複数個（図では６個）に区画形成されたガ
ラス基板１の上面１ａおよび溝１４の底面にそれぞれ同
一の厚さで形成される。また、溝１４の深さは先にも述
べたように磁性膜１５の厚さよりやや深く形成されてい
るため、前記溝１４に形成される磁性膜１５−ａと上面
１ａに形成される磁性膜１５ｂは、上下に分離して形成
される。Thereafter, a soft magnetic material such as sendust or amorphous is deposited or sputtered on the glass substrate 1 which has been subjected to the groove processing to form the magnetic @15. As shown in FIG. 13, this magnetic film 15 has grooves 14a,
They are formed with the same thickness on the upper surface 1a of the glass substrate 1 and the bottom surface of the grooves 14, which are divided into a plurality of sections (six in the figure) by the grooves 14b. In addition, since the depth of the groove 14 is formed slightly deeper than the thickness of the magnetic film 15 as described above, the magnetic film 15-a formed in the groove 14 and the magnetic film formed on the upper surface 1a 15b is formed to be vertically separated.
次に、第１３図に示すように溝加工を施さない他のガラ
ス基板３を上面１ａに形成された磁性膜１５ａ上に重合
させ、結晶化ガラスまたは接着剤等により接着する。こ
の後、このガラス基板１゜３および磁性膜１５０３層よ
り成る積層板１６を、前記溝１４ａ、１４ｂに沿って切
断し、複数個（この場合６個）のブロック１７を得る。Next, as shown in FIG. 13, another glass substrate 3 without grooves is superposed on the magnetic film 15a formed on the upper surface 1a and bonded with crystallized glass or an adhesive. Thereafter, the laminated plate 16 consisting of the glass substrate 1.3 and the magnetic film 1503 is cut along the grooves 14a and 14b to obtain a plurality of blocks 17 (six in this case).
次に、第１４図に示すように前記ブロック１７を複数個
積層した後、接着剤等により接着して積層体１８を形成
する。そして、この積層体１８の両端に形成されている
溝１４および磁性膜１５ｂ等の不要部をＣ−Ｃ線に沿っ
て切断または研削によって除去する。この後、この積層
体１８をＤ−り線に沿って切断し、２個の積層ブロック
７ａ。Next, as shown in FIG. 14, a plurality of blocks 17 are laminated and then bonded together with an adhesive or the like to form a laminate 18. Then, unnecessary parts such as the groove 14 and the magnetic film 15b formed at both ends of the stacked body 18 are removed by cutting or grinding along the line C--C. Thereafter, this laminate 18 is cut along the D-line to form two laminate blocks 7a.
７ｂを得る。Get 7b.
以上の工程以後は、第５図ないし第９図に示した工程と
同様であるので、その説明は省略する。Since the steps after the above steps are the same as those shown in FIGS. 5 to 9, the explanation thereof will be omitted.
上記のように、この実施例においてはガラス基板１に溝
１４を形成した後、磁性膜１５を形成するようにしたた
め、磁性膜１５はガラス基板１の上面１ａおよび溝１４
の底面上に分断して形成される。これにより、磁性Ｍ１
５の形成による温度上昇および切断時における冷却に伴
なって、異なる熱膨張係数を有する各磁性膜１５ａ、１
５ｂとガラス基板、３との間に生じる応力は極めて減少
し、切断加工における衝撃が加わったとしても、ガラス
基板１，３にはクラック１３が生じることはなく、歩留
りよく磁気ヘッドを得ることができる。As described above, in this embodiment, the magnetic film 15 is formed after the groove 14 is formed on the glass substrate 1, so that the magnetic film 15 is formed on the upper surface 1a of the glass substrate 1 and on the groove 14.
It is divided and formed on the bottom surface of. As a result, magnetic M1
As the temperature rises due to the formation of the magnetic films 15a and 1 and cooling during cutting, each magnetic film 15a, 1 has a different coefficient of thermal expansion.
The stress generated between the glass substrates 5b and the glass substrates 3 is extremely reduced, and even if an impact is applied during the cutting process, no cracks 13 will occur in the glass substrates 1 and 3, making it possible to obtain magnetic heads with a high yield. can.
以上説明したとおり、磁性膜を形成する非磁性基板上に
予じめ、切断個所に沿って溝を形成する工程を備えたこ
とにより、切断加工時に非磁性基板にクラックが生じる
のを防止することができるようになり、磁気ヘッドを歩
留りよくかつ高い量産性で製造することができるという
効果がある。As explained above, by providing the process of forming grooves in advance along the cut points on the non-magnetic substrate on which the magnetic film is to be formed, it is possible to prevent cracks from occurring in the non-magnetic substrate during the cutting process. This has the effect that magnetic heads can be manufactured with high yield and high mass productivity.
第１図ないし第９図は従来の磁気ヘッドの製造方法を示
す図で、第１図はガラス基板を示す斜視図、第２図は第
１図に示したものに磁性膜を形成した状態を示す斜視図
、第３図は第２図に示したものにさらに他のガラス基板
を積層して得られる積層板を示す斜視図、第４図は＃！
３図に示した積層板を切断して得られるブロックを複数
個積層して形成した積層体を示す斜視図、第５図は第４
図に示した積層体を２個に分割して得られる一方の積層
ブロックを示す斜視図、第６図は第５図に示した一方の
積層ブロックに巻線窓用溝を形成した状態を示す斜視図
、第７図は第６図に示したものにギャップ材を形成した
状態を示す斜視図、第８図は第′ＩＩ図に示した。もの
、と第５図に示したものとを接着して得られるコア積層
体プνツクを示す斜視図、第９図は磁気へラドチップの
完成品を示す斜視図、第１０図はブロックのガラス基板
にクラックが生じた状態を示す側面図、第１１図ないし
第１４図はこの発明の一実施例を示す図で、第１１図は
溝加工を施こしたガラス基板を示す斜視図、第１２図は
第１１図に示したものに磁性膜を形成した状態を示す斜
視図、第１３図は第１２図に示したものにさらに他のガ
ラス基板を積層して得られる積層板を示す斜視図、第１
４図は第１３図に示した積層板を切断して得られるブロ
ックを積層して形成した積層体を示す図である。
、３・・・・・・ガラス基板
１２・・・・・・・・・磁気へラドチップ１３・・・・
・・・・・クラック
１４・・・・・・・・・溝
１５・・・・−・・・・磁性膜
第９図 第７０図Figures 1 to 9 are diagrams showing a conventional method of manufacturing a magnetic head, with Figure 1 being a perspective view of a glass substrate, and Figure 2 showing the state shown in Figure 1 with a magnetic film formed thereon. 3 is a perspective view showing a laminate obtained by laminating another glass substrate on the one shown in FIG. 2, and FIG. 4 is a perspective view showing #!
A perspective view showing a laminate formed by laminating a plurality of blocks obtained by cutting the laminate shown in FIG. 3, and FIG.
A perspective view showing one of the laminated blocks obtained by dividing the laminated body shown in the figure into two pieces, and FIG. 6 shows a state in which winding window grooves are formed in one of the laminated blocks shown in FIG. 5. FIG. 7 is a perspective view showing the state shown in FIG. 6 with a gap material formed thereon, and FIG. 8 is shown in FIG. 'II. A perspective view showing a core laminate block obtained by adhering the material shown in FIG. FIGS. 11 to 14 are side views showing a state in which cracks have occurred in the substrate, and FIGS. 11 to 14 are views showing an embodiment of the present invention. FIG. The figure is a perspective view showing a state in which a magnetic film is formed on the material shown in FIG. 11, and FIG. 13 is a perspective view showing a laminate obtained by laminating another glass substrate on the material shown in FIG. 12. , 1st
FIG. 4 is a diagram showing a laminate formed by laminating blocks obtained by cutting the laminate shown in FIG. 13. , 3... Glass substrate 12... Magnetic Radchip 13...
......Crack 14...Groove 15...Magnetic film Fig. 9 Fig. 70
Claims (1)
ることにより複数の磁気ヘツドチツプを得るようにした
磁気ヘツドの製造方法において、非磁性基板に所望の切
断個所に沿つて溝加工を行なう工程と、該溝加工された
非磁性基板上に磁性膜を形成する工程と、その磁性膜を
形成したガラス基板を前記溝に沿つて切断する工程とを
備えたことを特徴とする磁気ヘツドの製造方法。In a method for manufacturing a magnetic head in which a plurality of magnetic head chips are obtained by cutting a block formed by laminating a non-magnetic substrate and a magnetic film, a step of forming grooves in a non-magnetic substrate along desired cutting locations. manufacturing a magnetic head, comprising the steps of: forming a magnetic film on the grooved nonmagnetic substrate; and cutting the glass substrate on which the magnetic film is formed along the grooves. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12733984A JPS618710A (en) | 1984-06-22 | 1984-06-22 | Manufacture of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12733984A JPS618710A (en) | 1984-06-22 | 1984-06-22 | Manufacture of magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS618710A true JPS618710A (en) | 1986-01-16 |
Family
ID=14957470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12733984A Pending JPS618710A (en) | 1984-06-22 | 1984-06-22 | Manufacture of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618710A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6425890A (en) * | 1987-03-13 | 1989-01-27 | Matsushita Electric Works Ltd | Reciprocating type electric razor |
-
1984
- 1984-06-22 JP JP12733984A patent/JPS618710A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6425890A (en) * | 1987-03-13 | 1989-01-27 | Matsushita Electric Works Ltd | Reciprocating type electric razor |
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