JPS6175935U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図はこの考案の構成を模式的
に示した側面図、第３図はこの考案の実施例の平
面図、第４図は第３図の正面図、第５図は第３図
の側面図、第６図は第１従来例、第７図は第２従
来例、第８図は第３従来例、第９図は第４従来例
をそれぞれ示す概要構成図である。 図中、Ｔ_１はＺ軸テーブル、Ｔ_２は基台、Ｂ_１
は第１ガイドブロツク、Ｂ_２は第２ガイドブロツ
ク、１は第１基準面、２は第１傾斜面、３は第２
基準面、４は第２傾斜面、ｇ_１は第１ガイド、ｇ
_２，ｇ_３は第２ガイド、Ｍ_１は駆動装置である。 Figures 1 and 2 are side views schematically showing the configuration of this invention, Figure 3 is a plan view of an embodiment of this invention, Figure 4 is a front view of Figure 3, and Figure 5 is a side view schematically showing the configuration of this invention. 3 is a side view, FIG. 6 is a schematic diagram showing a first conventional example, FIG. 7 is a second conventional example, FIG. 8 is a third conventional example, and FIG. 9 is a schematic diagram showing a fourth conventional example. In the figure, T ₁ is the Z-axis table, T ₂ is the base, and B ₁
is the first guide block, _B2 is the second guide block, 1 is the first reference surface, 2 is the first inclined surface, 3 is the second guide block.
Reference plane, 4 is second inclined plane, g ₁ is first guide, g
₂ and _g3 are second guides, and _M1 is a drive device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] Ｚ軸テーブルと、このＺ軸テーブルをＺ軸方向
へ案内するガイド装置と、このガイド装置を装着
した基台とより成り、かつ、前記ガイド装置は、
Ｚ軸テーブルを取り付ける第１基準面に対して一
定の角度をもつて傾斜した第１傾斜面を有する第
１ガイドブロツクと、基台に取り付ける第２基準
面に対し前記一定の角度をもつて傾斜した第２傾
斜面を有する第２ガイドブロツクと、第１傾斜面
と第２傾斜面との間に介装した第１ガイドと、第
２基準面と基台との間および第２ガイドブロツク
と基台との間のうち、少なくとも、前者に介装し
た第２ガイドと、第２ガイドブロツクをＸまたは
Ｙ軸方向であつて第２傾斜面の傾斜方向へ駆動す
る駆動装置とより構成したことを特徴とするＺ軸
テーブル装置。 It consists of a Z-axis table, a guide device for guiding the Z-axis table in the Z-axis direction, and a base on which this guide device is mounted, and the guide device includes:
a first guide block having a first slope inclined at a constant angle with respect to a first reference plane to which the Z-axis table is attached; and a first guide block having a first inclined plane inclined at a constant angle with respect to a second reference plane attached to the base; a second guide block having a second sloped surface; a first guide interposed between the first sloped surface and the second sloped surface; a second guide block between the second reference surface and the base; Between the block and the base, at least a second guide interposed in the former, and a drive device that drives the second guide block in the X or Y axis direction and in the direction of inclination of the second inclined surface. A Z-axis table device featuring: