JPS6138615A - Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room - Google Patents
Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean roomInfo
- Publication number
- JPS6138615A JPS6138615A JP15893584A JP15893584A JPS6138615A JP S6138615 A JPS6138615 A JP S6138615A JP 15893584 A JP15893584 A JP 15893584A JP 15893584 A JP15893584 A JP 15893584A JP S6138615 A JPS6138615 A JP S6138615A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- frame
- frame material
- clean air
- hollow part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野〉
本発明は全面層流型クリーンルームの天井吊設フィルタ
ーシステムに於いて、フィルターフレームを構成するフ
レーム枠材と、照明器具を取付ける照明器具取付枠材の
障害物を通してクリーンルームに清浄空気を流す＠置に
関するものである。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a ceiling-suspended filter system for a full laminar flow clean room, which includes a frame material constituting a filter frame, and a lighting fixture mounting frame to which a lighting fixture is attached. This relates to the flow of clean air into a clean room through wooden obstacles.
（従来の技術）
半導体の技術の進歩に伴いその製造に必要であるクリー
ンルームの清浄度も要求がかなり厳しくなってきており
、フィルター自体の効率アップもさることながら、フィ
ルター取付後のリーク防止等かなり精密になってきてお
り、部屋全体のクリーン度アップの条件として一定面積
の中でフィルターの占める割合（フィルター有効率）が
如何に多く取れるかが問題となり、現在ではそのフィル
ター有効率は８０〜８６％を占めるようになった。(Conventional technology) As semiconductor technology advances, the requirements for the cleanliness of the clean rooms necessary for semiconductor manufacturing have become considerably stricter.In addition to improving the efficiency of the filter itself, there are also significant requirements such as preventing leaks after the filter is installed. As they become more precise, the issue is how much of a given area the filter can occupy (filter effectiveness rate) as a condition for improving the cleanliness of the entire room.Currently, the filter effectiveness rate is 80-86. %.
すなわち、従来の全面層流型クリーンルームの天井吊設
フィルターシステムは第５図、第６図に示すように、中
空方形型材により形成されたフレーム枠材３１と照明器
具取付枠材３２とを夫々フィルター３３より稍小さい方
形空隙部３４を設けて接合固定して形成したフィルター
フレーム３５を、クリーンルームの周壁３６にほぼ接す
るようにして天井に吊設し、照明器具取付枠材３２の下
面に照明器具３７を固設すると共に、フィルターフレー
ム３５の各方形空隙部３４上にフィルター３３が載置固
定されている。That is, as shown in FIGS. 5 and 6, the conventional ceiling-suspended filter system for an all-over laminar flow clean room uses a frame material 31 formed of a hollow rectangular shape and a lighting fixture mounting frame material 32 as filters, respectively. A filter frame 35 formed by joining and fixing a rectangular gap 34 slightly smaller than 33 is suspended from the ceiling so as to be almost in contact with the surrounding wall 36 of the clean room, and a lighting fixture 37 is attached to the bottom surface of the lighting fixture mounting frame 32. are fixedly installed, and a filter 33 is mounted and fixed on each rectangular cavity 34 of the filter frame 35.
（発明が解決しようとする問題点）
しかしながら、上記従来の天井吊設フィルターシステム
には、フィルターフレーム３５を構成するフレーム枠材
３１及び照明器具取付枠材ａ２が機能上必要であり、そ
のため１００％のフィルター有効率はあり得ず、また照
度の関係、照明器具の形状等で制限があり、前記有効率
以上にアップすることができないという問題点があり、
また第６図のようにフィルターフレーム３５を構成する
フレーム枠材３１及び照明器具取付枠材３２の直下では
空気が循環しないデッドスペース３８が生ずるという問
題点があった。(Problems to be Solved by the Invention) However, in the above-mentioned conventional ceiling-suspended filter system, the frame frame material 31 and the lighting fixture mounting frame material a2 that constitute the filter frame 35 are functionally necessary, and therefore 100% There is a problem that it is impossible to achieve a filter effectiveness rate of
Further, as shown in FIG. 6, there is a problem in that a dead space 38 is created in which air does not circulate directly under the frame member 31 and the lighting fixture mounting frame member 32 that constitute the filter frame 35.
（問題点を解決するための手段）
本発明は上記問題点に着目してなされたものでフィルタ
ーフレームからも清浄空気が流れるようにしてフィルタ
ー有効率を高め、デッドスペース部分を少なくして上記
問題点を解決しようとすることを目的とする。(Means for Solving the Problems) The present invention has been made by paying attention to the above problems, and improves the efficiency of the filter by allowing clean air to flow from the filter frame as well, thereby reducing the dead space. The purpose is to try to resolve the points.
上記目的を達成するため、本発明は中空部１ａを有する
フレーム枠材１と下面に開口部２を有する照明器具取付
枠材３とを全面層流型フィルター４を装−ｉする方形空
隙部５を設けて接合固定してフィルターフレーム６を形
成する一方、フレーム枠材１の底板７に多数の小孔８を
穿設し、更に照明器具取付枠材３の開口部２に多数の小
孔１０を穿設した取付板１１を固定して中空部３ａ＠設
け、且該中空部３ａとフレーム枠材１の中空部１ａとを
夫々連通して、該各中空部１ａ、３ａを清浄空気の流路
とすると共に、取付板１１の上下面に夫々安定器１２と
照明器具１３を固着する一方、清浄空気を送風する送風
手段２３とフィルターフレーム６とを接続したことを特
徴としている。In order to achieve the above object, the present invention combines a frame member 1 having a hollow portion 1a and a lighting fixture mounting frame member 3 having an opening 2 on the lower surface into a rectangular void portion 5 in which a laminar flow filter 4 is mounted on the entire surface. are provided and bonded and fixed to form the filter frame 6. On the other hand, a large number of small holes 8 are bored in the bottom plate 7 of the frame frame material 1, and a large number of small holes 10 are also formed in the opening 2 of the lighting equipment mounting frame material 3. A mounting plate 11 having a hole therein is fixed to provide a hollow part 3a@, and the hollow part 3a and the hollow part 1a of the frame material 1 are communicated with each other, so that a flow of clean air can flow through each hollow part 1a, 3a. A ballast 12 and a lighting fixture 13 are fixed to the upper and lower surfaces of the mounting plate 11, respectively, and a blowing means 23 for blowing clean air is connected to the filter frame 6.
（作用）
上記のように構成された本発明の作用は次の通りである
。(Operation) The operation of the present invention configured as described above is as follows.
方形空隙部５上に装置されたフィルター４より清浄空気
がクリーンルーム内に流れ、それと同時に送風手段２３
からの清浄空気がフィルターフレーム６の中空部１ａ、
３ａを経て小孔８．１０を通してクリーンルーム内に流
れ、これによってデッドスペース部分が少なくなり、フ
ィルター有効率が高められる。Clean air flows into the clean room from the filter 4 installed on the rectangular cavity 5, and at the same time, the air blowing means 23
The clean air from the hollow part 1a of the filter frame 6,
3a and into the clean room through small holes 8.10, thereby reducing dead space and increasing filter efficiency.
（実施例）
本発明の実施の一例を図に就いて詳細に説明するに、中
空部１ａを有する方形型材により形成されたフレーム枠
材１と、下面側に開口部２を有する方形型材により形成
された照明器具取付枠材３゛とを夫々フィルター４より
稍小さい方形空隙部５を設けて接合固定してフィルター
フレーム６を形成する。そして、フィルターフレーム６
を構成するフレーム枠材１の底板７の全面に亘って多数
の小孔８を穿設し、且照明器具取付枠材３の開口部２に
対向して突設された鍔突条９に多数の小孔１０を全面に
亘り穿設した取付板１１を固定して中空部３ａを設け、
且照明器具取付枠材３の中空部３ａとフレーム枠材１の
中空部１ａとを夫々連通させて、該各中空部１ａ、３ａ
とを清浄空気の流路とすると共に、該取付板１１の上下
面に夫々安定器１２と照明器具１３とを固定する。(Example) An example of the implementation of the present invention will be described in detail with reference to the drawings. A frame member 1 formed of a rectangular member having a hollow portion 1a, and a rectangular member having an opening 2 on the lower surface side. A filter frame 6 is formed by joining and fixing the lighting equipment mounting frame members 3' with a rectangular gap 5 slightly smaller than the filter 4. And filter frame 6
A large number of small holes 8 are bored across the entire surface of the bottom plate 7 of the frame material 1 constituting the frame material 1, and a large number of small holes 8 are formed in the flange strip 9 that protrudes from the opening 2 of the lighting equipment mounting frame material 3. A hollow part 3a is provided by fixing a mounting plate 11 having small holes 10 formed therein over the entire surface.
Further, the hollow portion 3a of the lighting fixture mounting frame material 3 and the hollow portion 1a of the frame frame material 1 are communicated with each other, and the hollow portions 1a, 3a are connected to each other.
are used as flow paths for clean air, and a ballast 12 and a lighting fixture 13 are fixed to the upper and lower surfaces of the mounting plate 11, respectively.
そして、−側面に開口部１４を有するケーシング１５内
に送風機１６を設置し、且該送風機１６と仕切板１７に
設けられた通気口１８とを連結すべくキャンパス１９を
接続固定し、更に通気口１８前方に適宜間隔を置いてフ
ィルター取付板２０を固設して、該フィルター取付板２
０にフィルター２１を取付け、且該フィルター２１の前
方のケーシング１４の他側面に送風口２２を穿設して送
風手段２３を形成し、且該送風手段２３の送風口２２と
フィルターフレーム６の一端面とをダクト２４を介して
接続して形成されていて、送風機１６よりフィルター２
１を通してフィルターフレーム６に送風された清浄空気
は、フィルターフレーム６の小孔８．１０を経てクリー
ンルーム内に送気される。- A blower 16 is installed in the casing 15 having an opening 14 on the side surface, and a canvas 19 is connected and fixed to connect the blower 16 and a vent 18 provided in the partition plate 17, and further the vent 18 A filter mounting plate 20 is fixed at an appropriate interval in front of the filter mounting plate 2.
A filter 21 is attached to the filter frame 6, and an air outlet 22 is formed in the other side of the casing 14 in front of the filter 21 to form an air blowing means 23. The filter 2 is connected to the end face via a duct 24, and the air blower 16 is connected to the filter 2.
The clean air blown to the filter frame 6 through the filter frame 6 is blown into the clean room through the small holes 8.10 of the filter frame 6.
（発明の効果）
本発明は上述のようであるから、フィルターの他に従来
清浄空気送風機能を有しないフィルターフレーム部分か
ら送風手段により清浄空気をクリーンルーム内に送気す
ることができ、これにより従来フィルターフレームの下
方部分は空気が循環しないデッドスペースと考えられて
いたちのが、本発明により空気の循環可能となり、フィ
ルター有効率が高くなるのである。(Effects of the Invention) Since the present invention is as described above, clean air can be blown into the clean room by the blowing means from the filter frame part which conventionally does not have a clean air blowing function in addition to the filter. The lower part of the filter frame was considered to be a dead space where air does not circulate, but the present invention allows air to circulate, increasing the efficiency of the filter.
図は本発明の実施の一例を示すものにして、第１図は天
井吊設フィルターシステムの平面図、第２図は第１図Ａ
−Ａ線拡大断面図、第３図は第１図Ｂ−Ｂ線拡大断面図
、第４図は送風手段の一部切欠拡大斜視図、第５図は従
来の天井吊設フィルターシステムの底面図、第６図は同
縦断面図である。
図中、１はフレーム枠材、１ａは中空部、２は開口部、
３は照明器具取付枠、３ａは中空部、４はフィルター、
５は方形空隙部、６はフィルターフレーム、７は底板、
８は、１０は小孔、１１は取付板、１２は安定器、１３
は照明器具、２３は送風手段である。
昭和５９年７月３１日
出 願 人 近藤工業 株式会社外１名
第１図
囚
第３図
第４図
第５図
第６図The figures show an example of the implementation of the present invention, and FIG. 1 is a plan view of a ceiling-suspended filter system, and FIG.
- An enlarged cross-sectional view taken along line A, Figure 3 is an enlarged cross-sectional view taken along line B-B of Figure 1, Figure 4 is an enlarged partially cutaway perspective view of the ventilation means, and Figure 5 is a bottom view of a conventional ceiling-suspended filter system. , FIG. 6 is a longitudinal sectional view of the same. In the figure, 1 is a frame material, 1a is a hollow part, 2 is an opening,
3 is a lighting equipment mounting frame, 3a is a hollow part, 4 is a filter,
5 is a square cavity, 6 is a filter frame, 7 is a bottom plate,
8, 10 is a small hole, 11 is a mounting plate, 12 is a stabilizer, 13
2 is a lighting fixture, and 23 is a ventilation means. Filed on July 31, 1980 Person Kondo Kogyo Co., Ltd. and 1 other person Figure 1 Prisoner Figure 3 Figure 4 Figure 5 Figure 6
Claims (1)
明器具取付枠材とを全面層流型フィルター装置用の方形
空隙部を設けて接合固定してフィルターフレームを形成
する一方、フレーム枠材の底板に多数の小孔を穿設し、
更に照明器具取付枠材の開口部に多数の小孔を穿設した
取付板を固定して中空部を設け、且該中空部とフレーム
枠材の中空部とを夫々連通して、該各中空部を清浄空気
の流路とすると共に、取付板の上下面に夫々安定器と照
明器具を固着する一方、清浄空気を送風する送風手段と
フィルターフレームとを接続したことを特徴とする全面
層流型クリーンルームの天井吊設フィルターシステムに
於けるフィルターフレームから清浄空気を流す装置A filter frame is formed by joining and fixing a frame material having a hollow part and a lighting equipment mounting frame material having an opening on the lower surface with a rectangular void part for a full-surface laminar flow filter device. A large number of small holes are drilled in the bottom plate,
Furthermore, a mounting plate having a large number of small holes is fixed to the opening of the lighting equipment mounting frame material to form a hollow part, and the hollow part and the hollow part of the frame material are communicated with each other, so that each hollow part is connected to the hollow part of the frame material. The entire laminar airflow system is characterized in that a ballast and a lighting fixture are fixed to the upper and lower surfaces of the mounting plate, respectively, and a filter frame is connected to a blowing means for blowing clean air. A device that flows clean air from the filter frame in a ceiling-suspended filter system in a clean room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15893584A JPS6138615A (en) | 1984-07-31 | 1984-07-31 | Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15893584A JPS6138615A (en) | 1984-07-31 | 1984-07-31 | Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6138615A true JPS6138615A (en) | 1986-02-24 |
| JPH029254B2 JPH029254B2 (en) | 1990-03-01 |
Family
ID=15682551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15893584A Granted JPS6138615A (en) | 1984-07-31 | 1984-07-31 | Device for flowing clean air from filter frame in filter system suspended from ceiling of whole laminar flow type clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6138615A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6357448U (en) * | 1986-10-02 | 1988-04-16 | ||
| JPH01170762U (en) * | 1988-05-16 | 1989-12-04 | ||
| US6110244A (en) * | 1994-10-22 | 2000-08-29 | Howorth Airtech Limited | Clean air system |
-
1984
- 1984-07-31 JP JP15893584A patent/JPS6138615A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6357448U (en) * | 1986-10-02 | 1988-04-16 | ||
| JPH01170762U (en) * | 1988-05-16 | 1989-12-04 | ||
| US6110244A (en) * | 1994-10-22 | 2000-08-29 | Howorth Airtech Limited | Clean air system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029254B2 (en) | 1990-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |