JP2537247B2 - Clean room - Google Patents
Clean roomInfo
- Publication number
- JP2537247B2 JP2537247B2 JP62248875A JP24887587A JP2537247B2 JP 2537247 B2 JP2537247 B2 JP 2537247B2 JP 62248875 A JP62248875 A JP 62248875A JP 24887587 A JP24887587 A JP 24887587A JP 2537247 B2 JP2537247 B2 JP 2537247B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- duct
- clean room
- ceiling
- curved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、フィルタダクト方式のクリーンルームに関
する。The present invention relates to a filter duct type clean room.
例えば半導体ウエハーの製造を行なうクリーンルーム
は、室内空気に対して高度の清浄度が要求される。For example, a clean room for manufacturing semiconductor wafers is required to have a high degree of cleanliness with respect to room air.
従来、この種のクリーンルームとしては、例えば第13
図に示す全面ラミナーフロー方式（全面天井吹出し）や
第14図に示すコンベンショナル方式が用いられている。Conventionally, as this type of clean room, for example, the 13th
The full-surface laminar flow method shown in the figure (full-surface ceiling blowing) and the conventional method shown in Fig. 14 are used.
全面ラミナーフロー方式では、第13図に示す如く、ク
リーンルームＲの上部一杯に天井チャンバTcを設け、こ
の天井チャンバTcの下面全体にフィルタＨとしてHEPA
（High Efficiency Particulate Airfilter）が敷設さ
れると共に、多数の吸出孔Yaを有する床Ｙが張られ、ク
リーンルームＲ外に設置された送風ファンＦから送気ダ
クトDs→天井チャンバTc→フィルタＨ→室内Rn→吸気孔
Ya→床下チャンバYc→排気ダクトDe→送風ファンＦの経
路により、清浄空気ａを循環させている。In the full-surface laminar flow system, as shown in FIG. 13, a ceiling chamber Tc is provided in the upper part of the clean room R, and a HEPA as a filter H is provided on the entire lower surface of the ceiling chamber Tc.
(High Efficiency Particulate Airfilter) is laid, a floor Y having a large number of suction holes Ya is stretched, and a ventilation fan F installed outside the clean room R blows air from an air duct Ds → ceiling chamber Tc → filter H → room Rn → Intake hole
The clean air a is circulated by the path of Ya → underfloor chamber Yc → exhaust duct De → blower fan F.
又、コンベンショナル方式では、第14図に示す如く、
クリーンルームＲの上部に張設した天井板Tbの所要箇所
に、フィルタＨを下面に設けたフィルタチャンバHcを複
数個配設し、それぞれに分岐した送気ダクトDsを導き、
送気ファンＦから送気ダクトDs→フィルタチャンバHc→
（フィルタＨ）→室内Rn→室側壁Rs下部に開口した吸入
穴Ra→排気ダクトDe→送風ファンＦの経路により清浄空
気ａを循環させ、室内Rnの空気清浄度を高めている。In the conventional system, as shown in FIG.
A plurality of filter chambers Hc provided with a filter H on the lower surface are provided at required locations on a ceiling plate Tb stretched above the clean room R, and air supply ducts Ds branched to the filter chambers Hc are led to the filter chambers Hc.
Air supply fan F to air supply duct Ds → filter chamber Hc →
The clean air a is circulated through the route of (filter H) → room Rn → intake hole Ra opened at the lower part of the room side wall Rs → exhaust duct De → blower F to enhance the air cleanliness of the room Rn.
従来のクリーンルームは上記のように構成されている
ので、全面ラミナーフロー方式のものにあっては、清浄
空気流は、整斉とした層流となるが、天井チャンバを必
要とし、フィルタも全面敷設となるため、室内天井が低
くなるばかりか、材料費や施設工事費が高価になるとい
う不都合がある。Since the conventional clean room is configured as described above, in the case of the full-layer laminar flow type, the clean air flow is a uniform laminar flow, but it requires a ceiling chamber and a filter is also laid on the entire surface. Therefore, not only the ceiling of the room is lowered, but also material costs and facility construction costs are high.
一方、コンベンショナル方式のものでは、フィルタチ
ャンバのフィルタ部分が天井板下面に突出しており、而
も清浄空気の吹出しが下方の一方向だけであるため、フ
ィルタ側方に渦流が停滞して循環しないので、清浄する
ことができないという欠点がある。On the other hand, in the conventional type, the filter portion of the filter chamber projects to the lower surface of the ceiling plate, and since the clean air is blown out only in one direction downward, the vortex flow stagnates to the side of the filter and does not circulate. However, there is a drawback that it cannot be cleaned.
本発明は斯かる従来の問題点を解決するために為され
たもので、その目的は、天井チャンバやフィルタチャン
バを必要とせず、室内天井を高くすることができるばか
りか、低コスト化を図ることが可能であり、又、室内上
部に渦流を停滞させることなく、整斉とした上記空気の
層流が得られるフィルタダクト方式のクリーンルームを
提供することにある。The present invention has been made to solve such conventional problems, and an object thereof is not only to increase a ceiling chamber and a filter chamber but also to increase an indoor ceiling, and also to reduce cost. It is also possible to provide a filter duct type clean room in which a uniform laminar flow of the air can be obtained without stagnation of the vortex in the upper part of the room.
本発明に係るクリーンルームは、支持部材と、フィル
タと、少なくとも一側に湾曲部を有する接続用の枠体と
を有し、フィルタの長手方向の少なくとも一側部を湾曲
させて支持部材に取り付けると共に、支持部材の長手方
向両端部に接続用の枠体を取り付け、枠体内にフィルタ
を架設して成るフィルタダクトユニットを、複数台一列
に連結して構成したフィルタダクトを室内上部に所要の
間隔をもって併設すると共に、フィルタダクトの各列中
間に整流部材を設置したものである。The clean room according to the present invention includes a support member, a filter, and a connecting frame body having a curved portion on at least one side, and at least one side portion in the longitudinal direction of the filter is curved and attached to the support member. A filter duct unit, which is formed by connecting a plurality of filter duct units in which a frame for connection is attached to both ends of the support member in the longitudinal direction and a filter is erected in the frame, is arranged in the upper part of the room at a required interval. Along with being installed side by side, a rectifying member is installed in the middle of each row of filter ducts.
本発明に於ては、90度方向、又は180度方向へ清浄空
気を吹き出すフィルタダクトを室内天井に所要の間隔を
もって併設するとともに、該フィルタダクトの中間に整
流部材を設置して構成したものであるから、フィルタか
ら吹き出される清浄空気の横方向へ進むものは、整流部
材によって円滑に進路を下方向へ案内され、斜め方向へ
進むものは、両方から合流して下方へ向かい、下方へ進
むものは、そのまま床へ向かい、これらが総合されて層
流となる。In the present invention, a filter duct that blows out clean air in a 90-degree direction or a 180-degree direction is provided side by side with a required space on the indoor ceiling, and a rectifying member is installed in the middle of the filter duct. Therefore, the clean air blown out from the filter in the lateral direction is smoothly guided downward in the course by the flow regulating member, and in the diagonal direction, the clean air is merged from both sides to move downward and move downward. The things go to the floor as they are, and they are combined into a laminar flow.
以下、本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図乃至第５図は本発明の第一実施例を示すもので
ある。尚、従来例と同一、又は相当部分は同一符号を用
い、その説明は省く。1 to 5 show a first embodiment of the present invention. The same reference numerals are used for the same or corresponding parts as in the conventional example, and the description thereof is omitted.
第１図に於て、１はクリーンルームを示し、２はこの
クリーンルーム１の天井1t及び側壁1sに取り付けた天井
隅用フィルタダクト、３はこの天井隅用フィルタダクト
２に対し所要の間隔をもって併設された天井用フィルタ
ダクト、４は両フィルタダクト2,3のほぼ中央に併設さ
れた照明器具５の保持を兼ねた整流部材である。そし
て、側壁1s,1sそれぞれの下部両隅付近は開口した吸出
孔1aから室内1nの清浄空気ａは、排気ダクトDeにより前
記クリーンルーム１の外部に設置された送風ファンＦに
導かれ、更に送気ダクトDsを通り、それぞれの分岐ダク
トDbを介して天井隅用フィルタダクト２及び天井用フィ
ルタダクト３へ送られるようになっている。In FIG. 1, 1 is a clean room, 2 is a filter duct for ceiling corners attached to the ceiling 1t and side wall 1s of this clean room 1, and 3 is affixed to the filter duct 2 for ceiling corners with a required space. The ceiling filter ducts 4 are rectifying members that also hold the luminaire 5 provided in the center of both filter ducts 2 and 3. Then, the clean air a in the room 1n is introduced from the suction holes 1a opened near both lower corners of the side walls 1s, 1s to the blower fan F installed outside the clean room 1 by the exhaust duct De, and further the air is sent. It passes through the duct Ds and is sent to the ceiling corner filter duct 2 and the ceiling filter duct 3 via the respective branch ducts Db.
ところで、天井隅用フィルタダクト２及び天井用フィ
ルタダクト３は、それぞれ天井隅用フィルタダクトユニ
ット21及び天井用フィルタダクトユニット31が複数台一
列に連結されて構成されたものであり、一方、整流部材
４も１本又は複数本の蛍光灯等の照明器具５を有する整
流ユニット41を複数個一列に連結したものである。By the way, the ceiling corner filter duct 2 and the ceiling filter duct 3 are each configured by connecting a plurality of ceiling corner filter duct units 21 and a plurality of ceiling filter duct units 31 in a line, while the rectifying member 4 is also a plurality of rectifying units 41 having one or a plurality of lighting fixtures 5 such as fluorescent lamps connected in a line.
天井隅用フィルタダクトユニット21は、第２図に示す
如く、方形の平板を横断面ほぼＬ形に形成した支持部材
22の長手方向両端辺に、湾曲部23wを形成した板枠23一
対を突設し、前記湾曲部23w内に湾曲したフィルタ24を
パッキン25を介して架設し、内枠26により固定したもの
である。As shown in FIG. 2, the ceiling-corner filter duct unit 21 is a support member in which a rectangular flat plate is formed into a substantially L-shaped cross section.
A pair of plate frames 23 each having a curved portion 23w formed in a projecting manner on both ends in the longitudinal direction of 22. A curved filter 24 is installed in the curved portion 23w via a packing 25 and fixed by an inner frame 26. is there.
板枠23の支持部材22に接するＬ形部23lの面には、天
井隅用フイルタダクトユニット21の連結に際し気密にす
るための管型パッキン27を挾持するパッキン溝23mが形
成されており、又、湾曲部28wの面には連結用の皿ビス2
8を取り付ける皿ビス用孔23aが適当な間隔をもって複数
個穿設されている。On the surface of the L-shaped portion 23l in contact with the support member 22 of the plate frame 23, a packing groove 23m for holding a tubular packing 27 for making airtight when connecting the ceiling corner filter duct unit 21 is formed. , The plate screw 2 for connection on the surface of the curved portion 28w
A plurality of countersunk screw holes 23a for attaching 8 are formed at appropriate intervals.
又、支持部材22の横方向の両端辺部22hには、クリー
ンルーム１の側壁1s及び天井1tにそれぞれ皿ビス止めす
るための取付孔22aが複数個穿設されている。In addition, a plurality of mounting holes 22a for fixing the countersunk screws to the side wall 1s and the ceiling 1t of the clean room 1 are formed on both lateral sides 22h of the support member 22.
一方、天井用フィルタダクトユニット31は、第３図に
示す如く、長方形の平板をもって支持部材32として、長
手方向の両端辺に180度方向に湾曲部33wを形成する平面
Ｄ形の板枠33一対を突設し、湾曲部33w内に湾曲したフ
ィルタ34をパッキン35を介して架設して、内枠36により
固定したものである。On the other hand, as shown in FIG. 3, the ceiling filter duct unit 31 has a pair of flat D-shaped plate frames 33 each having a rectangular flat plate as a supporting member 32 and forming curved portions 33w in the 180-degree direction on both sides in the longitudinal direction. And a curved filter 34 is installed in the curved portion 33w via a packing 35 and fixed by an inner frame 36.
その他の構成は、前述の天井隅用フィルタダクトユニ
ット21と略同様で、天井1tへの取付孔32a,板枠33のパッ
キン溝33m（管型パッキン37用），連結用の皿ビス用孔3
3aがそれぞれ設けられている。Other configurations are substantially the same as those of the above-described ceiling-corner filter duct unit 21, and the mounting hole 32a to the ceiling 1t, the packing groove 33m of the plate frame 33 (for the tubular packing 37), the hole for the countersunk screw 3 for connection
3a are provided respectively.
尚、第４図に示すように、支持部材と板枠とを一体に
平板から打ち抜き、破線に沿い折曲げ加工して形成すれ
ば、天井隅用フィルタダクト21（同図（ａ）参照），天
井用フィルタダクト31（同部（ｂ）参照）とも外形を極
めて簡単に作成することができる。又、要部だけを部分
的に打抜き形成しても良い。As shown in FIG. 4, if the support member and the plate frame are integrally punched from a flat plate and bent along a broken line to form a ceiling corner filter duct 21 (see FIG. 4A), The outer shape of the ceiling filter duct 31 (see the same portion (b)) can be created very easily. Alternatively, only the main part may be partially punched.
前記両フィルタダクトユニット21,31は、叙上の構成
となっているので、それぞれ所要の個数を連結して天井
隅用フィルタダクト２及び天井用フィルタダクト３を組
み立て、それぞれの両端に位置する板枠23,23及び33,33
を第１図に見られるように送気ダクトDsの分岐ダクトDb
を接続した蓋板29,39で塞ぎ、クリーンルーム１の所定
位置に取り付けると共に、照明器具５を装備した整流部
材４を設置する。そして、清浄空気ａを送風ファンＦ→
送気ダクトDs→分ダクトDb→天井隅用フィルタダクト２
又は天井用フィルタダクト３→室内1n→吸出孔1a→排気
ダクトDe→送風ファンＦの経路で循環させると、第５図
に示すように室内1nに於ては、フィルタ24,34から吹き
出される清浄空気ａが横方向へ吹き出すものは整流部材
４によって進む方向を下方へ案内され、斜下方へ吹き出
すものは両方から合流して下方へ向かい、下方へ吹き出
すものはそのまま床へ向かって進み、これらが総合され
て層流となり、天井1t近くに停滞する渦流を発生するこ
とはない。Since both of the filter duct units 21 and 31 have the above-mentioned configuration, a required number of them are connected to each other to assemble the ceiling corner filter duct 2 and the ceiling filter duct 3, and the plates located at both ends of each. Boxes 23,23 and 33,33
As shown in Fig. 1, branch duct Db of air supply duct Ds
Is closed with the lid plates 29 and 39 connected thereto, and is installed at a predetermined position in the clean room 1, and the rectifying member 4 equipped with the lighting fixture 5 is installed. Then, the clean air a is blown by the fan F →
Air supply duct Ds → minute duct Db → ceiling corner filter duct 2
Alternatively, when the air is circulated in the route of the ceiling filter duct 3 → the room 1n → the suction hole 1a → the exhaust duct De → the blower fan F, the air is blown from the filters 24 and 34 in the room 1n as shown in FIG. Those that blow out the clean air a in the lateral direction are guided downward by the flow straightening member 4, those that blow obliquely downward merge from both sides and go downward, and those that blow downward go to the floor as they are. Is integrated into a laminar flow, and a vortex that stagnates near the ceiling of 1t is not generated.
尚、室内1nに一点鎖線で示すように、吸出孔Yaを有す
る床Ｙを張って床下チャンバYcを設け、全面床吸込みと
した場合には、従来の全面ラミナーフロー方式と同等の
気流効果を得ることが可能となる。In addition, as shown by the alternate long and short dash line in the room 1n, if the underfloor chamber Yc is provided by stretching the floor Y having the suction holes Ya, and the entire floor suction is performed, an air flow effect equivalent to that of the conventional whole laminar flow method is obtained. It becomes possible.
又、本実施例では、天井用フィルタダクト３を１列だ
け設置してあるが、クリーンルーム１の大きさに応じて
複数列を配設することはいうまでもない。Further, in this embodiment, only one row of the ceiling filter ducts 3 is installed, but it goes without saying that a plurality of rows are provided according to the size of the clean room 1.
更に、板枠23,33に架設するフィルタ24,34は１枚の湾
曲形を用いたが、複数枚の平板型のフィルタを横断面が
多角形の一部を為す形に併設して、略湾曲型のフィルタ
としても良い。Further, although the filters 24 and 34 erected on the plate frames 23 and 33 have a single curved shape, a plurality of flat plate-shaped filters are arranged side by side so that the cross section forms a part of a polygon, It may be a curved filter.
又、天井用フィルタダクト３の代わりに、天井隅用フ
ィルタダクト２一対を背中合わせに結合して使用しても
良い。Further, instead of the ceiling filter duct 3, a pair of ceiling corner filter ducts 2 may be connected back to back and used.
又、上記実施例では、整流部材４に照明器具５を装備
したが、照明器具５は天井隅用フィルタダクト２と整流
部材４との間の天井、及び天井用フィルタダクト２と整
流部材４との間の天井に埋設しても良い。Further, in the above-described embodiment, the lighting fixture 5 is provided on the rectifying member 4, but the lighting fixture 5 includes the ceiling between the filter duct 2 for the ceiling corner and the rectifying member 4, and the ceiling filter duct 2 and the rectifying member 4. It may be buried in the ceiling between.
第６図は本発明の別の実施例に係るクリーンルーム
１′を示す。FIG. 6 shows a clean room 1'according to another embodiment of the present invention.
このクリーンルーム１′は、第１図に示しクリーンル
ームよりも長手方向が長くて風量が多いタイプのもので
ある。This clean room 1'is of a type having a longer longitudinal direction and a larger air volume than the clean room shown in FIG.
第７図乃至第９図は第６図に於ける天井隅用ユニット
51を示すものである。7 to 9 are units for a ceiling corner in FIG.
It shows 51.
天井隅用ユニット51は、長手方向両端辺にフランジ53
が取り付けてある断面コ字状のダクト52と、フィルタ54
と、一側に湾曲部56を有する接続用のフランジ55とを有
し、フィルタ54の長手方向の一側部を湾曲させてフラン
ジ56に取り付けてフランジ56内にパッキン60を介してフ
ィルタ54の端部を架設し、フィルタ54の湾曲部55と対向
する部位に板体57を配し、フィルタ54及び板体57の上部
に補強プレート58,59を載置し、補強プレート58,59上に
断面コ字状のダクト52を取り付けた後、補強プレート5
8,59の部位でビス61によって固着されるようになってい
る。The ceiling corner unit 51 has flanges 53 on both sides in the longitudinal direction.
, Which has a U-shaped cross section, and a filter 54
And a connecting flange 55 having a curved portion 56 on one side, and one side portion in the longitudinal direction of the filter 54 is curved and attached to the flange 56, and the filter 54 is inserted into the flange 56 via the packing 60. The end portion is erected, the plate 57 is arranged at a portion facing the curved portion 55 of the filter 54, the reinforcing plates 58 and 59 are placed on the filter 54 and the upper portion of the plate 57, and the reinforcing plates 58 and 59 are placed on the reinforcing plates 58 and 59. After attaching the duct 52 with a U-shaped cross section,
It is designed to be fixed by screws 61 at 8,59 parts.
又、フランジ53及び54には、連結用の皿ビス63を取り
付ける皿ビス用孔62が適当な間隔をもって複数個穿設さ
れている。Further, the flanges 53 and 54 are provided with a plurality of countersunk screw holes 62 for mounting the countersunk screws 63 at appropriate intervals.
斯くして構成された天井隅用ユニット51は、パッキン
を介して各フランジ53同士が接合されると共に、皿ビス
62によって連結されて、第６図に示す如き所定長さの天
井隅用ダクト２′形成することができる。In the ceiling corner unit 51 thus configured, the flanges 53 are joined together via the packing, and
They can be connected by 62 to form a ceiling corner duct 2'having a predetermined length as shown in FIG.
第10図乃至第12図は第６図に於ける天井用ユニット71
を示すものである。10 to 12 show the ceiling unit 71 in FIG.
Is shown.
天井用ユニット71は、長手方向両端辺にフランジ73が
取り付けてある断面コ字状のダクト72と、フィルタ74
と、両側に湾曲部76を有する接続用のフランジ75とを有
し、フィルタ74の長手方向の両側部を湾曲させてフラン
ジ77に取り付けてフランジ77内にパッキン80を介してフ
ィルタ74の端部を架設し、フィルタ74の上部に側部に適
当間隔で複数の皿ビス取付孔82を穿設した補強プレート
78,79を載置し、補プレート78,79上に断面コ字状のダク
ト72強を取り付けた後、補強プレート78,79の部でビス8
3によって固着されるようになっている。The ceiling unit 71 includes a duct 72 having a U-shaped cross section with flanges 73 attached to both ends in the longitudinal direction, and a filter 74.
And a connecting flange 75 having curved portions 76 on both sides, both side portions in the longitudinal direction of the filter 74 are curved and attached to the flange 77, and the end portion of the filter 74 is inserted into the flange 77 via the packing 80. Reinforcement plate in which a plurality of countersunk screw mounting holes 82 are formed on the upper side of the filter 74 at appropriate intervals on the side thereof.
After mounting the 78, 79 and attaching the duct 72 with a U-shaped cross section on the auxiliary plates 78, 79, screw 8 at the reinforcing plate 78, 79.
It is fixed by 3.
又、フランジ83及び87には、連結用の皿ビスを取り付
ける皿ビス用孔84が適当な間隔をもって複数個穿設され
ている。Further, the flanges 83 and 87 are provided with a plurality of dish screw holes 84 for attaching dish screws for connection at appropriate intervals.
斯くして構成された天井用ユニット71は、パッキンを
介して各フランジ73同士が接合されると共に、皿ビスに
よって連結されて、第６図に示す如き所定長さの天井隅
用ダクト３′を形成することができる。In the ceiling unit 71 thus configured, the flanges 73 are joined together through the packing, and are connected by the countersunk screws to form the ceiling corner duct 3'of a predetermined length as shown in FIG. Can be formed.
本実施例によれば、第１図のユニット21,31に比し、
本実施例ではダクト52,72が箱断面を為しているため、
断面積が大きくなり、所定の風量を補うことが可能とな
る。According to this embodiment, compared to the units 21 and 31 of FIG.
In this embodiment, since the ducts 52 and 72 have a box cross section,
The cross-sectional area becomes large, and it becomes possible to supplement a predetermined air volume.
又、本実施例によれば、天井下に垂下がるフィルタ部
分をできるだけ短くしたい場合に、ダクト52,72を天井
内に入れることによって形成することができる。Further, according to the present embodiment, when it is desired to make the filter portion that hangs under the ceiling as short as possible, it can be formed by inserting the ducts 52 and 72 into the ceiling.
以上説明したように本発明は、フィルタダクトを併設
するとともに、それらの中間に整流部材を設置して構成
したため、ほぼ曲面を形成するフィルタから側方、斜下
方及び下方へ清浄空気を吹き出すので、処理風量が多く
なるばかりか、整流部材によりフィルタ相互間の気流干
渉をなくして下方へ流れることにより、全面天井吹出し
と同等の平面気流分布が得られる。As described above, the present invention is provided with the filter duct side by side, and since the rectifying member is installed in the middle of them, the filter blows sideways, obliquely downward and downward from the filter forming a substantially curved surface. Not only does the amount of treated air increase, but the airflow interference between the filters is eliminated by the rectifying member and the air flows downward, so that a flat airflow distribution equivalent to that of the entire ceiling blowout is obtained.
又、フィルタダクト方式であり、フィルタダクトの端
面に送気ダクトの分岐管を接続するので、天井板上を長
い分岐管を這わせる空積や天井チャバを設ける必要がな
いため、室内の天井を高くすることができ、而も室内か
ら装着することが可能なので取付作業も簡単容易とな
り、全般的にコストの低減を図ることができるなど数々
の効果が得られる。In addition, since it is a filter duct type and the branch pipe of the air supply duct is connected to the end surface of the filter duct, it is not necessary to provide an empty space or a ceiling chabber for running a long branch pipe on the ceiling plate. Since the height can be increased and the device can be mounted from the room, the mounting work can be easily and easily performed, and various effects can be obtained such that the cost can be generally reduced.
1,1′……クリーンルーム 1n……案内 2,2′……天井隅用フィルタダクト 3,3′……天井用フィルタダクト ４……整流部材 ５……照明器具 21,51……天井隅用フィルタダクトユニット 22,32……支持部材 23,33……板枠 23w,33w……湾曲部 24,34……フィルタ 31,71……天井用フィルタダクトユニット。 1,1 ′ …… Clean room 1n …… Information 2,2 ′ …… Ceiling filter duct 3,3 ′ …… Ceiling filter duct 4 …… Rectifying member 5 …… Lighting equipment 21,51 …… Ceiling corner Filter duct unit 22,32 …… Supporting member 23,33 …… Plate frame 23w, 33w …… Curved part 24,34 …… Filter 31,71 …… Ceiling filter duct unit.
Claims (10)
に湾曲部を有する接続用の枠体とを有し、フィルタの長
手方向の少なくとも一側部を湾曲させて支持部材に取り
付けると共に、支持部材の長手方向両端部に接続用の枠
体を取り付け、枠体内にフィルタを架設して成るフィル
タダクトユニットを、複数台一列に連結して構成したフ
ィルタダクトを室内上部に所要の間隔をもって併設する
と共に、フィルタダクトの各列中間に整流部材を設置し
たことを特徴とするクリーンルーム。1. A support member, a filter, and a frame for connection having a curved portion on at least one side, wherein at least one side portion in the longitudinal direction of the filter is curved and attached to the support member. A frame for connection is attached to both ends of the member in the longitudinal direction, and a filter duct unit formed by connecting a plurality of filters in a line in the frame is installed side by side in the upper part of the room with a required space. In addition, a clean room is characterized in that a rectifying member is installed in the middle of each row of filter ducts.
を特徴とする特許請求の範囲第１項記載のクリーンルー
ム。2. The clean room according to claim 1, wherein the rectifying member has a lighting device holding portion.
手方向両端辺に、湾曲部を形成し、フィルタ保持を兼ね
る接続用の板枠一対を突設すると共に、枠体の湾曲部内
にフィルタを架設して構成されていることを特徴とする
特許請求の範囲第１項記載のクリーンルーム。3. A filter duct unit, wherein a curved portion is formed on both longitudinal sides of a supporting member, a pair of plate frames for connection which also functions as a filter holder are projected, and a filter is installed in the curved portion of the frame body. The clean room according to claim 1, wherein the clean room is configured as follows.
徴とする特許請求の範囲第１項記載のクリーンルーム。4. The clean room according to claim 1, wherein the support member is a rectangular flat plate.
に形成したものであることを特徴とする特許請求の範囲
第１項記載のクリーンルーム。5. The clean room according to claim 1, wherein the support member is formed by forming a rectangular flat plate into a substantially L-shaped cross section.
とを特徴とする特許請求の範囲第１項記載のクリーンル
ーム。6. The clean room according to claim 1, wherein the support member is a duct having a U-shaped cross section.
取り付けてあることを特徴とする特許請求の範囲第１項
記載のクリーンルーム。7. The clean room according to claim 1, wherein the support member has flanges attached to both ends in the longitudinal direction.
特許請求の範囲第１項記載のクリーンルーム。8. The clean room according to claim 1, wherein the frame body is a flange.
辺にフランジが取り付けてある断面コ字状のダクトと、
フィルタと、一側に湾曲部を有する接続用のフランジと
を有し、フィルタの長手方向の一側部を湾曲させてフラ
ンジを取り付けてフランジ内にフィルタの端部を架設
し、フィルタの湾曲部と対向する部位に板体を配し、フ
ィルタ及び板体の上部に補強プレートを載置し、補強プ
レート上に断面コ字状のダクトを取り付けて構成したこ
とを特徴とする特許請求の範囲第１項記載のクリーンル
ーム。9. A duct having a U-shaped cross section, wherein flanges are attached to both ends in the longitudinal direction of the filter duct unit,
It has a filter and a connecting flange having a curved portion on one side, one side portion in the longitudinal direction of the filter is curved, the flange is attached, and the end portion of the filter is installed inside the flange, and the curved portion of the filter A plate is arranged in a portion facing the plate, a reinforcing plate is placed on the filter and the upper part of the plate, and a duct having a U-shaped cross section is attached on the reinforcing plate. The clean room described in item 1.
端辺にフランジが取り付けてある断面コ字状のダクト
と、フィルタと、両側に湾曲部を有する接続用のフラン
ジとを有し、フイルタの長手方向の両側部を湾曲させて
フランジを取り付けてフランジ内にフィルタの端部を架
設し、フィルタの上部に補強プレートを載置し、補強プ
レート上に断面コ字状のダクトを取り付けて構成したこ
とを特徴とする特許請求の範囲第１項記載のクリーンル
ーム。10. A filter duct unit has a duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction, a filter, and a connecting flange having curved portions on both sides thereof, and the filter duct unit has a longitudinal direction of a filter. Both sides of the filter are curved and flanges are attached, the end of the filter is installed inside the flange, the reinforcing plate is placed on the upper part of the filter, and a duct with a U-shaped cross section is mounted on the reinforcing plate. The clean room according to claim 1, which is characterized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62248875A JP2537247B2 (en) | 1987-01-28 | 1987-10-01 | Clean room |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1616387 | 1987-01-28 | ||
| JP62-16163 | 1987-01-28 | ||
| JP62248875A JP2537247B2 (en) | 1987-01-28 | 1987-10-01 | Clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63294440A JPS63294440A (en) | 1988-12-01 |
| JP2537247B2 true JP2537247B2 (en) | 1996-09-25 |
Family
ID=26352428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62248875A Expired - Fee Related JP2537247B2 (en) | 1987-01-28 | 1987-10-01 | Clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2537247B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2004114378A1 (en) * | 2003-06-19 | 2006-07-27 | 北海道ティー・エル・オー株式会社 | CLEAN UNIT, CLEAN UNIT SYSTEM, FUNCTIONAL UNIT, FUNCTIONAL UNIT SYSTEM, MATERIAL PROCESSING METHOD, ELEMENT MANUFACTURING METHOD, CELL SYSTEM GROWING METHOD AND PLANT BODY GROWING METHOD |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252840A (en) * | 1986-04-24 | 1987-11-04 | Nitta Kk | Clean room utilizing cylindrical filter device |
-
1987
- 1987-10-01 JP JP62248875A patent/JP2537247B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63294440A (en) | 1988-12-01 |
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