JPS613515A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS613515A JPS613515A JP12474284A JP12474284A JPS613515A JP S613515 A JPS613515 A JP S613515A JP 12474284 A JP12474284 A JP 12474284A JP 12474284 A JP12474284 A JP 12474284A JP S613515 A JPS613515 A JP S613515A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric vibrator
- piezoelectric vibrating
- vibrating part
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、厚みすべり振動を利用した圧電振動子に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric vibrator that utilizes thickness shear vibration.
(従来技術)
電子機器など種々の分野で使用されている圧電振動子は
、時計やコンピュータなどの小型化にともない、4その
小型化が要求されてきている。(Prior Art) Piezoelectric vibrators used in various fields such as electronic equipment are required to be made smaller as watches and computers become smaller.
第8図乃至第10図は従来の圧電振動子を示す図゛であ
る。・第8図乃至第1O図において、1は圧電振動子で
、圧電振動子lはATカット等の水晶片2の両面に電極
3a、3bを設けることにより形成されている。4a、
4bは電極3a、3bの一部より外方へ延びる電極引き
出し部で、電極引き出し部4a、4bは互いに反対方向
に延びている。なお、前記電極3a、3b及び電極引き
出し部4a 、4bは金、銀、アルミニウムなどの金属
を水晶片2の両面に蒸着することにより形成される。FIGS. 8 to 10 are diagrams showing conventional piezoelectric vibrators. - In FIGS. 8 to 1O, 1 is a piezoelectric vibrator, and the piezoelectric vibrator 1 is formed by providing electrodes 3a and 3b on both sides of a crystal piece 2 such as an AT cut. 4a,
Reference numeral 4b denotes an electrode extension portion extending outward from a portion of the electrodes 3a, 3b, and the electrode extension portions 4a, 4b extend in mutually opposite directions. The electrodes 3a, 3b and the electrode extensions 4a, 4b are formed by depositing metal such as gold, silver, or aluminum on both sides of the crystal piece 2.
そして、上記圧電振動子lは基台5に設けたワイヤーク
リップ6.6に挾持され、電極3a、3bは電極引き出
し部4a、4b、ワイヤークリップ6.6を介して、外
部導出ピン7.7に電気的(ご接続されるものである。The piezoelectric vibrator l is held between wire clips 6.6 provided on the base 5, and the electrodes 3a and 3b are connected to the external lead pins 7.7 via the electrode extension parts 4a and 4b and the wire clips 6.6. electrically (connected to).
8は圧電振動子1を保護するケースで、ケース8は圧電
振動子lを密封するよう基台5に固着される。圧電振動
子lの周囲の密封された空間は不活性ガス(窒素、アル
ゴン等)が封入されているかまたは真空となっている。A case 8 protects the piezoelectric vibrator 1, and the case 8 is fixed to the base 5 so as to seal the piezoelectric vibrator l. The sealed space around the piezoelectric vibrator 1 is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum.
そして、このような厚みすべり振動を利用した圧電振動
子において、その振動周波数は水晶片の厚みにより決定
される。即ち、その厚みを薄くすればそれに応じて振動
周波数が高くなるのである。In a piezoelectric vibrator that utilizes such thickness shear vibration, the vibration frequency is determined by the thickness of the crystal piece. That is, if the thickness is made thinner, the vibration frequency increases accordingly.
ところで、従来上記の水晶片2の厚みの加工は、圧電材
料からなる板の両面を金属等で作られた互いに逆回転す
る研磨板ですり合せることにより行なっていた。Incidentally, conventionally, the thickness of the crystal piece 2 has been processed by grinding both sides of a plate made of piezoelectric material with a polishing plate made of metal or the like and rotating in opposite directions.
(従来技術の問題点)
しかしながら、以上の従来例にあっては、〔1〕圧電振
動子の振動部以外の水晶片の部分も振動してしまう−こ
ととなるばかりか、その振動がワイヤークリップ6.6
を通じて外部に洩れるため、不要な振動エネルギーが必
要となり実効抵抗が増加することとなり、また〔2〕外
部からの衝撃に耐えるように剛性の高いワイヤークリッ
プ6.6で圧電振動子を強く固着すると、圧電振動子の
振動がワイヤークリップ6.6によって阻害され圧電振
動子のQが低下することとなるため、該ワイヤークリッ
プ6.6の剛性を高く出来ず耐衝撃特性を向上させるこ
とが出来ず、また〔3〕この構造の圧電振動子にあって
は、物理的にその小型化に限界があり、現今の非常に小
型化された電子機器等に要求される圧電振動子の大きさ
に対応するには困難であるなど種々の欠点を有していた
。(Problems with the prior art) However, in the above conventional example, not only [1] a portion of the crystal piece other than the vibrating part of the piezoelectric vibrator also vibrates, but the vibration is caused by the wire clipping. 6.6
[2] If the piezoelectric vibrator is strongly fixed with a highly rigid wire clip 6.6 to withstand external shocks, unnecessary vibration energy will be required and the effective resistance will increase. Since the vibration of the piezoelectric vibrator is inhibited by the wire clip 6.6 and the Q of the piezoelectric vibrator is reduced, the rigidity of the wire clip 6.6 cannot be increased and the impact resistance characteristics cannot be improved. [3] There is a physical limit to the miniaturization of piezoelectric vibrators with this structure, and it is difficult to accommodate the size of piezoelectric vibrators required for today's extremely miniaturized electronic devices. It had various drawbacks, such as being difficult to use.
さらに、上述の従来例にあっては、研磨によって水晶素
板の厚みを減少することに限界があり。Furthermore, in the conventional example described above, there is a limit to reducing the thickness of the crystal blank by polishing.
現状ではその厚みの限界は50JLm程度であった。ま
た、水晶素板の厚みが薄いと、第8図乃至第10図に示
す従来の圧電振動子にあっては、組立時に破損しやすく
、また、組立後にあっても外部からの応力による水晶片
の′そり等の原因により破損を生じやすく、この点から
も水晶片の厚みの減少には限界があった。そしてこれら
の理由により、圧電振動子の基本波による周波数は30
MH2付近が限界であり、それより高い周波数帯は三次
高調波、三次高調波等を利用することによってカバーさ
れていた。しかしながら、基本波による圧電振動子の方
が高調波利用の圧電振動子よりも一般にその緒特性は良
好である。At present, the limit of its thickness is about 50 JLm. In addition, if the thickness of the crystal base plate is thin, the conventional piezoelectric vibrator shown in Figs. It is easy to cause damage due to warpage, etc., and from this point of view, there is a limit to how much the thickness of the crystal blank can be reduced. For these reasons, the frequency of the fundamental wave of the piezoelectric vibrator is 30
The limit was around MH2, and higher frequency bands were covered by using third-order harmonics, third-order harmonics, etc. However, piezoelectric vibrators using fundamental waves generally have better characteristics than piezoelectric vibrators using harmonics.
(発明の目的)
本発明の目的は、圧電振動子の振動部分の厚みが50p
m程度以下のものが容易に作成できるとともに、組立時
や組立後に破損しにくい圧電振動子を提供するものであ
る。(Object of the invention) The object of the invention is to reduce the thickness of the vibrating part of the piezoelectric vibrator to 50p.
The present invention provides a piezoelectric vibrator that can be easily produced in a size of about m or less and is not easily damaged during or after assembly.
本発明の他の目的は、容易に小型化が図れる圧電振動子
を提供するものである。Another object of the present invention is to provide a piezoelectric vibrator that can be easily miniaturized.
本発明のさらに他の目的は、圧電振動子の振動部の振動
と外部の振動とを有効にしゃ断する圧電振動子を提供す
るものである。Still another object of the present invention is to provide a piezoelectric vibrator that effectively blocks vibrations of a vibrating part of the piezoelectric vibrator and external vibrations.
(発明の概要)
本願に係る第一の発明は、両面に励振用の電極部を形成
した圧電振動部と、圧電振動部より厚い厚みで該圧電振
動部の外周に圧電振動部と同一の材料で一体に形成し表
面に励振用電極の引き出し電極部を形成するとともに圧
電振動部を囲む部分に溝部を形成した外周部とを有する
圧電振動子に係るものであり、また、第二の発明は1両
面に励振用の電極部を形成した圧電振動部と、圧電振動
部より厚い厚みで該圧電振動部の外周全体に圧電振動部
と同一の材料で一体に形成し表面に励振用電極の引き出
し電極部を形成するとともに圧電振動部を囲む部分に溝
部を形成した外周部と、該外周部の両表面上に固着され
圧電振動部を密封するカバーとを有する圧電振動子に係
るものである。(Summary of the Invention) The first invention according to the present application includes a piezoelectric vibrating part in which electrode parts for excitation are formed on both sides, and a material that is thicker than the piezoelectric vibrating part and made of the same material as the piezoelectric vibrating part on the outer periphery of the piezoelectric vibrating part. A second aspect of the invention relates to a piezoelectric vibrator having an outer circumference formed integrally with the piezoelectric vibrator, having an extraction electrode part of an excitation electrode formed on the surface thereof, and a groove part formed in a part surrounding the piezoelectric vibrating part. A piezoelectric vibrating part with electrode parts for excitation formed on both sides, and a piezoelectric vibrating part that is thicker than the piezoelectric vibrating part and integrally formed with the same material as the piezoelectric vibrating part on the entire outer periphery of the piezoelectric vibrating part, and an excitation electrode drawn out on the surface. The present invention relates to a piezoelectric vibrator having an outer peripheral part that forms an electrode part and has a groove formed in a part surrounding the piezoelectric vibrating part, and a cover that is fixed to both surfaces of the outer peripheral part and seals the piezoelectric vibrating part.
(実施例)
次に本発明の一実施例を、図面を用いて詳細に説明する
。(Example) Next, an example of the present invention will be described in detail using the drawings.
第1図は本発明に係る圧電振動子の斜視図、第2図は第
1図に示す圧電振動子をC−0面で切断した断面図であ
る。第1図、第2図において、19は圧電振動部で、該
圧電振動部19の表面の一部の両面には該圧電振動部1
9を振動させるための電極13a、13bが被着されて
いる(この圧電振動部19の電極形成部を1電極部」と
いう)。18は圧電振動部19を囲むように形成された
圧電振動子の外周部であり、該外周部18の表面には図
に示すような電極13a、13bの引き出し電極14a
、14b (この外周部18の引き出し電極形成部を「
引き出し電極部Aという)が被着されている。17は外
周部18上であって圧電振動部19を囲む部分の一部に
形成された溝部で、該溝部17の深さは外周部18の厚
みの1/100以上の深さを有することが好ましい。FIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG. 2 is a cross-sectional view of the piezoelectric vibrator shown in FIG. 1 taken along the C-0 plane. In FIGS. 1 and 2, 19 is a piezoelectric vibrating section, and the piezoelectric vibrating section 1 is provided on both sides of a part of the surface of the piezoelectric vibrating section 19.
Electrodes 13a and 13b for vibrating the piezoelectric vibrating section 19 are attached thereto (the electrode forming section of the piezoelectric vibrating section 19 is referred to as "one electrode section"). Reference numeral 18 denotes an outer peripheral part of a piezoelectric vibrator formed to surround the piezoelectric vibrating part 19, and on the surface of the outer peripheral part 18, an extraction electrode 14a of electrodes 13a and 13b as shown in the figure is provided.
, 14b (the extraction electrode forming portion of this outer peripheral portion 18 is referred to as “
A lead-out electrode section (referred to as A) is attached. Reference numeral 17 denotes a groove portion formed in a part of the portion surrounding the piezoelectric vibrating portion 19 on the outer circumferential portion 18, and the depth of the groove portion 17 may be 1/100 or more of the thickness of the outer circumferential portion 18. preferable.
以上の本実施例に係る圧電振動子は以下の方法により作
成される。The piezoelectric vibrator according to the present example described above is produced by the following method.
即ち、ATカットなどの水晶からなる水晶素板をエツチ
ングすることにより圧電振動部19を所望の振動周波数
を得る厚みまで減少させるとともに溝部17もエツチン
グし、その後、電極13a、13bと引き出し電極14
a、14bを、金、銀、アルミニウム等の金属を真空蒸
着の方法またはスパッターなとの方法により該圧電振動
部19及び外周部18の両面に被着すれば、本発明に係
る圧電振動子が得られるのである。ここで、外周部18
の厚みは、外部からの種々の力から圧電振動部19を保
護するため、十分な厚みとすることが好ましく、特に圧
電振動部19の厚みの2倍以上の厚みを有することが好
ましい。That is, by etching a crystal plate made of AT-cut crystal or the like, the piezoelectric vibrating part 19 is reduced to a thickness that obtains a desired vibration frequency, and the groove part 17 is also etched.
If a and 14b are coated with metal such as gold, silver, or aluminum on both sides of the piezoelectric vibrating part 19 and the outer peripheral part 18 by a method such as vacuum deposition or sputtering, the piezoelectric vibrator according to the present invention can be obtained. You can get it. Here, the outer peripheral portion 18
In order to protect the piezoelectric vibrating part 19 from various external forces, it is preferable that the thickness of the piezoelectric vibrating part 19 be sufficiently thick, and in particular, it is preferably twice or more thicker than the thickness of the piezoelectric vibrating part 19.
第3図は第1図に示す圧電振動子の保持構造の一例を示
した図である。第3図において、15は基台、16.1
6は外部導出ピンであり、外部導出ピア16,16は引
き出し電極14a、14bに導電性接着材や半田などを
用いて固着される。FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. 1. In Figure 3, 15 is a base, 16.1
Reference numeral 6 denotes an external lead-out pin, and the external lead-out piers 16, 16 are fixed to the extraction electrodes 14a, 14b using a conductive adhesive, solder, or the like.
そして、この保持された圧電振動子はケース(図示せず
)により密封され、その内部は不活性ガス(窒素、アル
ゴン等)が封入されているかまたは真空となっている。The held piezoelectric vibrator is sealed by a case (not shown), and the inside thereof is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum.
このように圧電振動子を弾性の少ない外部導出ピンで直
接保持すれば、第7図に示す従来例に比較し弾性を有す
るワイヤークリップが不要となるため、圧電振動子を確
実に保持できることとなる。If the piezoelectric vibrator is held directly by the external lead-out pin with low elasticity in this way, the piezoelectric vibrator can be held reliably since a wire clip with elasticity is not required compared to the conventional example shown in Fig. 7. .
第4図乃至第6図は本発明に係る他の圧電振動子を示し
た図であり、第4図は第1図、第2図に示す圧電振動子
にカバーを取付けた圧電振動子を示す斜視図、第5図は
第4図に示す圧電振動子をE−E面で切断した断面図、
第6図は第4図に示す圧電振動子の電子機器等のプリン
ト基板への固着構造を示した図である。ここで20はそ
の内部を密封、保護するためのカバーであり、外周部1
8の両表面に圧電振動部19を密封、保護するように固
着される。カバー20は水晶、コバール。4 to 6 are diagrams showing other piezoelectric vibrators according to the present invention, and FIG. 4 shows a piezoelectric vibrator in which a cover is attached to the piezoelectric vibrator shown in FIGS. 1 and 2. A perspective view, FIG. 5 is a sectional view taken along the E-E plane of the piezoelectric vibrator shown in FIG. 4,
FIG. 6 is a diagram showing a structure for fixing the piezoelectric vibrator shown in FIG. 4 to a printed circuit board of an electronic device or the like. Here, 20 is a cover for sealing and protecting the inside, and the outer peripheral part 1
The piezoelectric vibrating portion 19 is fixed to both surfaces of the piezoelectric vibrating portion 8 so as to be sealed and protected. Cover 20 is crystal and Kovar.
ガラスなどの材料によって形成されている。その固着は
エポキシ樹脂などの接着剤を用いて行なわれる。なお、
外周部18のカバー20と固着される両表面上には引き
出し電極14a、14bの一部が形成されているが、そ
の厚みは数100オングストロームから数1000オン
グストロームと非常に薄いので、カバー20及び接着剤
で圧電振動部19を密封する。障害とはならない。そし
て、密封された圧電振動部19の周りの空隙部分21に
は圧電振動部19を物理的に安定な状態に維持するため
、不活性ガス(窒素、アルゴン等)を封入するかまたは
真空とする。第6図に示す25はプリント基板、24a
、24bはプリント基板25上に形成された導体層であ
る。23は半田等の導電性固着剤であり、これによって
第4図、第5図に示す圧電振動子はプリント基板上に固
着され、かつ圧電振動子の引き出し電極14a、14b
と導電性固着材23を介して圧電振動部19上の電極1
3a、13bと導体層24a、24bが各々導通される
。圧電振動子をこのように保持すれば、第7図乃至第9
図に示す基台、ワイヤークリップ、外部導出ピンは不要
となり、第3図に示す保持構造に比較してもその構造が
簡単になり、圧電振動子の保持構造が小型化される。な
お、この構造で圧電振動子を保持する場合、圧電振動部
19の電極を形成していない部分の一部に貫通穴を設け
れば、圧電振動部19の上下の空隙部分21.21が導
通され、ガスの密度が一定となる。It is made of a material such as glass. The fixation is performed using an adhesive such as epoxy resin. In addition,
Parts of the extraction electrodes 14a and 14b are formed on both surfaces of the outer peripheral portion 18 that are fixed to the cover 20, but the thickness thereof is very thin, ranging from several hundred angstroms to several thousand angstroms, so that the cover 20 and the adhesive are very thin. The piezoelectric vibrating section 19 is sealed with an adhesive. It is not an obstacle. Then, in order to maintain the piezoelectric vibrating part 19 in a physically stable state, the air gap 21 around the sealed piezoelectric vibrating part 19 is filled with an inert gas (nitrogen, argon, etc.) or is evacuated. . 25 shown in FIG. 6 is a printed circuit board, 24a
, 24b are conductor layers formed on the printed circuit board 25. Reference numeral 23 denotes a conductive adhesive such as solder, which fixes the piezoelectric vibrator shown in FIGS.
and the electrode 1 on the piezoelectric vibrating part 19 via the conductive fixing material 23.
3a, 13b and conductor layers 24a, 24b are electrically connected to each other. If the piezoelectric vibrator is held in this way, the results shown in FIGS.
The base, wire clip, and external lead-out pin shown in the figure are no longer necessary, and the structure is simpler than the holding structure shown in FIG. 3, and the piezoelectric vibrator holding structure is miniaturized. Note that when holding a piezoelectric vibrator with this structure, if a through hole is provided in a part of the piezoelectric vibrating part 19 where no electrode is formed, the upper and lower void parts 21 and 21 of the piezoelectric vibrating part 19 are electrically connected. and the density of the gas becomes constant.
第7図は、第4図、第5図に示す圧電振動子の他の実施
例を示す断面図で、第4図、第5図に示す圧電振動子の
カバー20には、外周部18の溝部の内側の部分の表面
に接触しないように、凹部が設けられて−いるのに対し
、第7図に示す圧電振動子は、そのカバー20に該凹部
を設けず、外周部184)9部の内側の部分の厚みを外
側の部分の厚みより薄く構成している。FIG. 7 is a sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5. The cover 20 of the piezoelectric vibrator shown in FIGS. In contrast, the piezoelectric vibrator shown in FIG. 7 does not have such a recess in its cover 20, and the outer peripheral part 184) is provided with a recess so as not to contact the surface of the inner part of the groove. The inner part is thinner than the outer part.
以上、本発明を実施例に従って詳細に説明したが、本発
明に係る圧電振動子は上記実施例に限定されるものでは
なく、圧電振動部、外周部の形状を円形、六角形等の他
の形状としてもよく、又、外周部上の溝部は外周部の全
周又は他の一部に形成してもよく、又、振動子は水晶で
なく他の圧電材料であってもよい、又、圧電振動子を第
3図に示すように保持させる場合は、外周部を圧電振動
部の全周に亘って形成する必要はなく、外部導出ピンと
接続する部分のみに外周部を設けてもよい。Although the present invention has been described in detail according to the embodiments above, the piezoelectric vibrator according to the present invention is not limited to the above embodiments, and the shape of the piezoelectric vibrating portion and the outer peripheral portion may be circular, hexagonal, etc. In addition, the groove on the outer periphery may be formed on the entire periphery or another part of the outer periphery, and the vibrator may be made of other piezoelectric material instead of crystal. When the piezoelectric vibrator is held as shown in FIG. 3, it is not necessary to form the outer circumferential part over the entire circumference of the piezoelectric vibrating part, and the outer circumferential part may be provided only at the part connected to the external lead-out pin.
(発明の効果)
以上のように圧電振動子を構成したので、〔1〕圧電振
動子の圧電振動部の振動が外周部上の溝部によって遮断
されこれによって該振動が外部に伝わりに〈〈、また逆
に〔2部外部の振動が圧電振動子に伝わったとしても圧
電振動子の外周部上の溝部によってその、振動は圧電振
動部にまでは伝わりにくく、さらにまた〔3部本発明に
係る圧電振動子の保持はその構造上、ワイヤークリップ
のような弾性のある材料を使用する必要はなく、圧電振
動子を確実に固定できる剛性率の高い材料を使用できる
ため、たとえ圧電振動子を小型化しても圧電振動子の周
りを保護するケースに圧電振動子が衝突することはなく
、該圧電振動子を破損する恐れがなくなる。(Effects of the Invention) Since the piezoelectric vibrator is configured as described above, [1] the vibration of the piezoelectric vibrating part of the piezoelectric vibrator is blocked by the groove on the outer circumferential part, and thereby the vibration is transmitted to the outside. Conversely, [Part 2] Even if external vibrations are transmitted to the piezoelectric vibrator, the grooves on the outer periphery of the piezoelectric vibrator make it difficult for the vibrations to be transmitted to the piezoelectric vibrating part. Due to its structure, it is not necessary to use elastic materials such as wire clips to hold the piezoelectric vibrator, and it is possible to use materials with high rigidity that can securely fix the piezoelectric vibrator. The piezoelectric vibrator will not collide with the case that protects the area around the piezoelectric vibrator, even if the piezoelectric vibrator is exposed to air, and there is no risk of damaging the piezoelectric vibrator.
また1本発明によれば、圧電振動部の厚みが薄くなって
も(例えば50km程度以下)、外周部により保護され
ることにより1組立時に破損しにくく、また、組立後に
あっても外部からの応力による圧電振動部のそり等がな
く破損を生じにくく、これによって従来の圧電振動子よ
りも高い周波数を得られる圧電振動子を容易に作成でき
る。Furthermore, according to the present invention, even if the thickness of the piezoelectric vibrating part becomes thin (for example, about 50 km or less), it is protected by the outer periphery so that it is less likely to be damaged during one assembly, and even after assembly, it can be prevented from being damaged from the outside. The piezoelectric vibrating part does not warp or the like due to stress and is less likely to be damaged, making it possible to easily create a piezoelectric vibrator that can obtain a higher frequency than conventional piezoelectric vibrators.
さらに、゛本発明に係る圧電振動子を第4図、第5図に
示すようにカバーで覆う構成とすれば、従来の圧電振動
子に比べ、非常に小型化が図れるため、現今の非常に小
型化された電子機器等に要求される圧電振動子の大きさ
に対応できるという効果をも有する。 ′Furthermore, if the piezoelectric vibrator according to the present invention is covered with a cover as shown in FIGS. 4 and 5, it can be made much smaller than the conventional piezoelectric vibrator, so It also has the effect of being able to accommodate the size of piezoelectric vibrators required for miniaturized electronic devices and the like. ′
第1図は本発明に係る圧電振動子の斜視図、第2図は8
81図に示す圧電振動子をC−0面で切断した断面図で
ある。第3図は第1図に示す圧電振動子の保持構造の一
例を示した図である。第4図乃至第6図は本発明に係る
他の圧電振動子を示した図であり、第4図は第1図、第
2図に示す圧電振動子にカバーを取付けた圧電振動子を
示す斜視図、第5図は第4図に示す圧電振動子をE−E
面で切断した断面図、第6図は第4図に示す圧電振動子
の電子機器等のプリント基板、への固着構造を示した図
である。第7図は第4図、第5図に示す圧電振動子の他
の実施例を示す断面図である。第8図は従来の圧電振動
子の保持方法を示した一部切欠斜視図、第9図は従来の
圧電振動子の斜視図、第1O図は第9図に示す圧電振動
子をA−A面で切断した断面図である。
13a、t3bs電極
14a、14bΦ引き出し電極
17−溝部 18−外周部
19・圧電振動部 20・カバー
特許出願人 日木電波工業株式会社代 理
人 弁理士 辻 實(外1名)
第1図
第2図
第3図
1θ
第4図
γ′
第6図
第7図
第8図
第10図
4b 3bFIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG.
FIG. 82 is a cross-sectional view of the piezoelectric vibrator shown in FIG. 81 taken along the C-0 plane. FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. 1. 4 to 6 are diagrams showing other piezoelectric vibrators according to the present invention, and FIG. 4 shows a piezoelectric vibrator in which a cover is attached to the piezoelectric vibrator shown in FIGS. 1 and 2. The perspective view of FIG. 5 shows the piezoelectric vibrator shown in FIG.
FIG. 6 is a cross-sectional view taken along a plane, showing a structure for fixing the piezoelectric vibrator shown in FIG. 4 to a printed circuit board of an electronic device or the like. FIG. 7 is a sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5. FIG. FIG. 8 is a partially cutaway perspective view showing a conventional method of holding a piezoelectric vibrator, FIG. 9 is a perspective view of a conventional piezoelectric vibrator, and FIG. FIG. 13a, t3bs Electrodes 14a, 14b Φ Extraction electrode 17 - Groove 18 - Outer periphery 19 / Piezoelectric vibrating part 20 / Cover Patent applicant Hiki Denpa Kogyo Co., Ltd. Agent
People Patent Attorney Minoru Tsuji (1 other person) Figure 1 Figure 2 Figure 3 1θ Figure 4 γ' Figure 6 Figure 7 Figure 8 Figure 10 Figure 4b 3b
Claims (3)
圧電振動部より厚い厚みで該圧電振動部の外周に圧電振
動部と同一の材料で一体に形成し表面に励振用電極の引
き出し電極部を形成するとともに圧電振動部を囲む部分
に溝部を形成した外周部とを有する圧電振動子。(1) A piezoelectric vibrating part with electrode parts for excitation formed on both sides,
The piezoelectric vibrating part is thicker than the piezoelectric vibrating part, and is integrally formed on the outer periphery of the piezoelectric vibrating part with the same material as the piezoelectric vibrating part, and the extraction electrode part of the excitation electrode is formed on the surface, and a groove part is formed in the part surrounding the piezoelectric vibrating part. A piezoelectric vibrator having an outer periphery.
0以上であることを特徴とする特許請求の範囲第(1)
項記載の圧電振動子。(2) The depth of the groove is at least 1/10 of the thickness of the outer periphery.
Claim No. (1) characterized in that the number is 0 or more.
Piezoelectric vibrator described in section.
圧電振動部より厚い厚みで該圧電振動部の外周全体に圧
電振動部と同一の材料で一体に形成し表面に励振用電極
の引き出し電極部を形成するとともに圧電振動部を囲む
部分に溝部を形成した外周部と、該外周部の両表面上に
固着され圧電振動部を密封するカバーとを有する圧電振
動子。(3) a piezoelectric vibrating part with electrode parts for excitation formed on both sides;
The piezoelectric vibrating part is thicker than the piezoelectric vibrating part, and is integrally formed with the same material as the piezoelectric vibrating part on the entire outer periphery, and the extraction electrode part of the excitation electrode is formed on the surface, and a groove part is formed in the part surrounding the piezoelectric vibrating part. A piezoelectric vibrator comprising: an outer circumferential portion; and a cover fixed to both surfaces of the outer circumferential portion to seal a piezoelectric vibrating portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59124742A JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59124742A JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS613515A true JPS613515A (en) | 1986-01-09 |
JPH0642617B2 JPH0642617B2 (en) | 1994-06-01 |
Family
ID=14892985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59124742A Expired - Fee Related JPH0642617B2 (en) | 1984-06-18 | 1984-06-18 | Piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0642617B2 (en) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3396287A (en) * | 1965-09-29 | 1968-08-06 | Piezo Technology Inc | Crystal structures and method of fabricating them |
US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
JPS4834497A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS4834494A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS5325245U (en) * | 1976-08-11 | 1978-03-03 | ||
JPS5327740U (en) * | 1976-08-18 | 1978-03-09 | ||
JPS54129994A (en) * | 1978-03-31 | 1979-10-08 | Matsushima Kogyo Co Ltd | Crystal vibrator |
JPS5550721A (en) * | 1978-10-09 | 1980-04-12 | France Etat | Piezooelectric twin resonator |
JPS58172008A (en) * | 1982-04-02 | 1983-10-08 | Toyo Commun Equip Co Ltd | Structure and manufacture of piezoelectric oscillator |
-
1984
- 1984-06-18 JP JP59124742A patent/JPH0642617B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3396287A (en) * | 1965-09-29 | 1968-08-06 | Piezo Technology Inc | Crystal structures and method of fabricating them |
US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
JPS4834497A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS4834494A (en) * | 1971-09-06 | 1973-05-18 | ||
JPS5325245U (en) * | 1976-08-11 | 1978-03-03 | ||
JPS5327740U (en) * | 1976-08-18 | 1978-03-09 | ||
JPS54129994A (en) * | 1978-03-31 | 1979-10-08 | Matsushima Kogyo Co Ltd | Crystal vibrator |
JPS5550721A (en) * | 1978-10-09 | 1980-04-12 | France Etat | Piezooelectric twin resonator |
JPS58172008A (en) * | 1982-04-02 | 1983-10-08 | Toyo Commun Equip Co Ltd | Structure and manufacture of piezoelectric oscillator |
Also Published As
Publication number | Publication date |
---|---|
JPH0642617B2 (en) | 1994-06-01 |
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