JPS613515A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPS613515A
JPS613515A JP12474284A JP12474284A JPS613515A JP S613515 A JPS613515 A JP S613515A JP 12474284 A JP12474284 A JP 12474284A JP 12474284 A JP12474284 A JP 12474284A JP S613515 A JPS613515 A JP S613515A
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric vibrator
piezoelectric vibrating
vibrating part
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12474284A
Other languages
Japanese (ja)
Other versions
JPH0642617B2 (en
Inventor
Hozumi Nakada
穂積 中田
Shiyuusuke Matsudo
秀亮 松戸
Masaaki Miura
正明 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP59124742A priority Critical patent/JPH0642617B2/en
Publication of JPS613515A publication Critical patent/JPS613515A/en
Publication of JPH0642617B2 publication Critical patent/JPH0642617B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To devise the vibration of a piezoelectric vibrator hardly delivered externally by providing an outer peripheral part thicker than the outer peripheral of said vibrator and providing a slot to a part surrounding the piezoelectric vibrator. CONSTITUTION:Electrodes 13a, 13b are adhered to both faces of a part of the surface of the piezoelectric vibrating part 19. Further, the outer peripheral part 18 formed with the same material as that of the piezoelectric vibrator is thicker than said piezoelectric vibrating part 19 and lead electrodes 14a, 14b of the electrodes 13a, 13b are adhered to the surface. A slot 17 is formed to a part surrounding said piezoelectric vibrating part 19 and its depth has a depth being >=1/100 of the thickness of the outer peripheral part. On the other hand, the external lead pin 16 is fixed to the lead electrodes 14a, 14b for the support of the vibrator, sealed by a case and the inside is sealed by an inactive gas or vacuumed.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、厚みすべり振動を利用した圧電振動子に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric vibrator that utilizes thickness shear vibration.

（従来技術） 電子機器など種々の分野で使用されている圧電振動子は
、時計やコンピュータなどの小型化にともない、４その
小型化が要求されてきている。(Prior Art) Piezoelectric vibrators used in various fields such as electronic equipment are required to be made smaller as watches and computers become smaller.

第８図乃至第１０図は従来の圧電振動子を示す図゛であ
る。・第８図乃至第１Ｏ図において、１は圧電振動子で
、圧電振動子ｌはＡＴカット等の水晶片２の両面に電極
３ａ、３ｂを設けることにより形成されている。４ａ、
４ｂは電極３ａ、３ｂの一部より外方へ延びる電極引き
出し部で、電極引き出し部４ａ、４ｂは互いに反対方向
に延びている。なお、前記電極３ａ、３ｂ及び電極引き
出し部４ａ　、４ｂは金、銀、アルミニウムなどの金属
を水晶片２の両面に蒸着することにより形成される。FIGS. 8 to 10 are diagrams showing conventional piezoelectric vibrators. - In FIGS. 8 to 1O, 1 is a piezoelectric vibrator, and the piezoelectric vibrator 1 is formed by providing electrodes 3a and 3b on both sides of a crystal piece 2 such as an AT cut. 4a,
Reference numeral 4b denotes an electrode extension portion extending outward from a portion of the electrodes 3a, 3b, and the electrode extension portions 4a, 4b extend in mutually opposite directions. The electrodes 3a, 3b and the electrode extensions 4a, 4b are formed by depositing metal such as gold, silver, or aluminum on both sides of the crystal piece 2.

そして、上記圧電振動子ｌは基台５に設けたワイヤーク
リップ６．６に挾持され、電極３ａ、３ｂは電極引き出
し部４ａ、４ｂ、ワイヤークリップ６．６を介して、外
部導出ピン７．７に電気的（ご接続されるものである。The piezoelectric vibrator l is held between wire clips 6.6 provided on the base 5, and the electrodes 3a and 3b are connected to the external lead pins 7.7 via the electrode extension parts 4a and 4b and the wire clips 6.6. electrically (connected to).

８は圧電振動子１を保護するケースで、ケース８は圧電
振動子ｌを密封するよう基台５に固着される。圧電振動
子ｌの周囲の密封された空間は不活性ガス（窒素、アル
ゴン等）が封入されているかまたは真空となっている。A case 8 protects the piezoelectric vibrator 1, and the case 8 is fixed to the base 5 so as to seal the piezoelectric vibrator l. The sealed space around the piezoelectric vibrator 1 is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum.

そして、このような厚みすべり振動を利用した圧電振動
子において、その振動周波数は水晶片の厚みにより決定
される。即ち、その厚みを薄くすればそれに応じて振動
周波数が高くなるのである。In a piezoelectric vibrator that utilizes such thickness shear vibration, the vibration frequency is determined by the thickness of the crystal piece. That is, if the thickness is made thinner, the vibration frequency increases accordingly.

ところで、従来上記の水晶片２の厚みの加工は、圧電材
料からなる板の両面を金属等で作られた互いに逆回転す
る研磨板ですり合せることにより行なっていた。Incidentally, conventionally, the thickness of the crystal piece 2 has been processed by grinding both sides of a plate made of piezoelectric material with a polishing plate made of metal or the like and rotating in opposite directions.

（従来技術の問題点） しかしながら、以上の従来例にあっては、〔１〕圧電振
動子の振動部以外の水晶片の部分も振動してしまう−こ
ととなるばかりか、その振動がワイヤークリップ６．６
を通じて外部に洩れるため、不要な振動エネルギーが必
要となり実効抵抗が増加することとなり、また〔２〕外
部からの衝撃に耐えるように剛性の高いワイヤークリッ
プ６．６で圧電振動子を強く固着すると、圧電振動子の
振動がワイヤークリップ６．６によって阻害され圧電振
動子のＱが低下することとなるため、該ワイヤークリッ
プ６．６の剛性を高く出来ず耐衝撃特性を向上させるこ
とが出来ず、また〔３〕この構造の圧電振動子にあって
は、物理的にその小型化に限界があり、現今の非常に小
型化された電子機器等に要求される圧電振動子の大きさ
に対応するには困難であるなど種々の欠点を有していた
。(Problems with the prior art) However, in the above conventional example, not only [1] a portion of the crystal piece other than the vibrating part of the piezoelectric vibrator also vibrates, but the vibration is caused by the wire clipping. 6.6
[2] If the piezoelectric vibrator is strongly fixed with a highly rigid wire clip 6.6 to withstand external shocks, unnecessary vibration energy will be required and the effective resistance will increase. Since the vibration of the piezoelectric vibrator is inhibited by the wire clip 6.6 and the Q of the piezoelectric vibrator is reduced, the rigidity of the wire clip 6.6 cannot be increased and the impact resistance characteristics cannot be improved. [3] There is a physical limit to the miniaturization of piezoelectric vibrators with this structure, and it is difficult to accommodate the size of piezoelectric vibrators required for today's extremely miniaturized electronic devices. It had various drawbacks, such as being difficult to use.

さらに、上述の従来例にあっては、研磨によって水晶素
板の厚みを減少することに限界があり。Furthermore, in the conventional example described above, there is a limit to reducing the thickness of the crystal blank by polishing.

現状ではその厚みの限界は５０ＪＬｍ程度であった。ま
た、水晶素板の厚みが薄いと、第８図乃至第１０図に示
す従来の圧電振動子にあっては、組立時に破損しやすく
、また、組立後にあっても外部からの応力による水晶片
の′そり等の原因により破損を生じやすく、この点から
も水晶片の厚みの減少には限界があった。そしてこれら
の理由により、圧電振動子の基本波による周波数は３０
ＭＨ２付近が限界であり、それより高い周波数帯は三次
高調波、三次高調波等を利用することによってカバーさ
れていた。しかしながら、基本波による圧電振動子の方
が高調波利用の圧電振動子よりも一般にその緒特性は良
好である。At present, the limit of its thickness is about 50 JLm. In addition, if the thickness of the crystal base plate is thin, the conventional piezoelectric vibrator shown in Figs. It is easy to cause damage due to warpage, etc., and from this point of view, there is a limit to how much the thickness of the crystal blank can be reduced. For these reasons, the frequency of the fundamental wave of the piezoelectric vibrator is 30
The limit was around MH2, and higher frequency bands were covered by using third-order harmonics, third-order harmonics, etc. However, piezoelectric vibrators using fundamental waves generally have better characteristics than piezoelectric vibrators using harmonics.

（発明の目的） 本発明の目的は、圧電振動子の振動部分の厚みが５０ｐ
ｍ程度以下のものが容易に作成できるとともに、組立時
や組立後に破損しにくい圧電振動子を提供するものであ
る。(Object of the invention) The object of the invention is to reduce the thickness of the vibrating part of the piezoelectric vibrator to 50p.
The present invention provides a piezoelectric vibrator that can be easily produced in a size of about m or less and is not easily damaged during or after assembly.

本発明の他の目的は、容易に小型化が図れる圧電振動子
を提供するものである。Another object of the present invention is to provide a piezoelectric vibrator that can be easily miniaturized.

本発明のさらに他の目的は、圧電振動子の振動部の振動
と外部の振動とを有効にしゃ断する圧電振動子を提供す
るものである。Still another object of the present invention is to provide a piezoelectric vibrator that effectively blocks vibrations of a vibrating part of the piezoelectric vibrator and external vibrations.

（発明の概要） 本願に係る第一の発明は、両面に励振用の電極部を形成
した圧電振動部と、圧電振動部より厚い厚みで該圧電振
動部の外周に圧電振動部と同一の材料で一体に形成し表
面に励振用電極の引き出し電極部を形成するとともに圧
電振動部を囲む部分に溝部を形成した外周部とを有する
圧電振動子に係るものであり、また、第二の発明は１両
面に励振用の電極部を形成した圧電振動部と、圧電振動
部より厚い厚みで該圧電振動部の外周全体に圧電振動部
と同一の材料で一体に形成し表面に励振用電極の引き出
し電極部を形成するとともに圧電振動部を囲む部分に溝
部を形成した外周部と、該外周部の両表面上に固着され
圧電振動部を密封するカバーとを有する圧電振動子に係
るものである。(Summary of the Invention) The first invention according to the present application includes a piezoelectric vibrating part in which electrode parts for excitation are formed on both sides, and a material that is thicker than the piezoelectric vibrating part and made of the same material as the piezoelectric vibrating part on the outer periphery of the piezoelectric vibrating part. A second aspect of the invention relates to a piezoelectric vibrator having an outer circumference formed integrally with the piezoelectric vibrator, having an extraction electrode part of an excitation electrode formed on the surface thereof, and a groove part formed in a part surrounding the piezoelectric vibrating part. A piezoelectric vibrating part with electrode parts for excitation formed on both sides, and a piezoelectric vibrating part that is thicker than the piezoelectric vibrating part and integrally formed with the same material as the piezoelectric vibrating part on the entire outer periphery of the piezoelectric vibrating part, and an excitation electrode drawn out on the surface. The present invention relates to a piezoelectric vibrator having an outer peripheral part that forms an electrode part and has a groove formed in a part surrounding the piezoelectric vibrating part, and a cover that is fixed to both surfaces of the outer peripheral part and seals the piezoelectric vibrating part.

（実施例） 次に本発明の一実施例を、図面を用いて詳細に説明する
。(Example) Next, an example of the present invention will be described in detail using the drawings.

第１図は本発明に係る圧電振動子の斜視図、第２図は第
１図に示す圧電振動子をＣ−０面で切断した断面図であ
る。第１図、第２図において、１９は圧電振動部で、該
圧電振動部１９の表面の一部の両面には該圧電振動部１
９を振動させるための電極１３ａ、１３ｂが被着されて
いる（この圧電振動部１９の電極形成部を１電極部」と
いう）。１８は圧電振動部１９を囲むように形成された
圧電振動子の外周部であり、該外周部１８の表面には図
に示すような電極１３ａ、１３ｂの引き出し電極１４ａ
、１４ｂ　（この外周部１８の引き出し電極形成部を「
引き出し電極部Ａという）が被着されている。１７は外
周部１８上であって圧電振動部１９を囲む部分の一部に
形成された溝部で、該溝部１７の深さは外周部１８の厚
みの１／１００以上の深さを有することが好ましい。FIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG. 2 is a cross-sectional view of the piezoelectric vibrator shown in FIG. 1 taken along the C-0 plane. In FIGS. 1 and 2, 19 is a piezoelectric vibrating section, and the piezoelectric vibrating section 1 is provided on both sides of a part of the surface of the piezoelectric vibrating section 19.
Electrodes 13a and 13b for vibrating the piezoelectric vibrating section 19 are attached thereto (the electrode forming section of the piezoelectric vibrating section 19 is referred to as "one electrode section"). Reference numeral 18 denotes an outer peripheral part of a piezoelectric vibrator formed to surround the piezoelectric vibrating part 19, and on the surface of the outer peripheral part 18, an extraction electrode 14a of electrodes 13a and 13b as shown in the figure is provided.
, 14b (the extraction electrode forming portion of this outer peripheral portion 18 is referred to as “
A lead-out electrode section (referred to as A) is attached. Reference numeral 17 denotes a groove portion formed in a part of the portion surrounding the piezoelectric vibrating portion 19 on the outer circumferential portion 18, and the depth of the groove portion 17 may be 1/100 or more of the thickness of the outer circumferential portion 18. preferable.

以上の本実施例に係る圧電振動子は以下の方法により作
成される。The piezoelectric vibrator according to the present example described above is produced by the following method.

即ち、ＡＴカットなどの水晶からなる水晶素板をエツチ
ングすることにより圧電振動部１９を所望の振動周波数
を得る厚みまで減少させるとともに溝部１７もエツチン
グし、その後、電極１３ａ、１３ｂと引き出し電極１４
ａ、１４ｂを、金、銀、アルミニウム等の金属を真空蒸
着の方法またはスパッターなとの方法により該圧電振動
部１９及び外周部１８の両面に被着すれば、本発明に係
る圧電振動子が得られるのである。ここで、外周部１８
の厚みは、外部からの種々の力から圧電振動部１９を保
護するため、十分な厚みとすることが好ましく、特に圧
電振動部１９の厚みの２倍以上の厚みを有することが好
ましい。That is, by etching a crystal plate made of AT-cut crystal or the like, the piezoelectric vibrating part 19 is reduced to a thickness that obtains a desired vibration frequency, and the groove part 17 is also etched.
If a and 14b are coated with metal such as gold, silver, or aluminum on both sides of the piezoelectric vibrating part 19 and the outer peripheral part 18 by a method such as vacuum deposition or sputtering, the piezoelectric vibrator according to the present invention can be obtained. You can get it. Here, the outer peripheral portion 18
In order to protect the piezoelectric vibrating part 19 from various external forces, it is preferable that the thickness of the piezoelectric vibrating part 19 be sufficiently thick, and in particular, it is preferably twice or more thicker than the thickness of the piezoelectric vibrating part 19.

第３図は第１図に示す圧電振動子の保持構造の一例を示
した図である。第３図において、１５は基台、１６．１
６は外部導出ピンであり、外部導出ピア１６，１６は引
き出し電極１４ａ、１４ｂに導電性接着材や半田などを
用いて固着される。FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. 1. In Figure 3, 15 is a base, 16.1
Reference numeral 6 denotes an external lead-out pin, and the external lead-out piers 16, 16 are fixed to the extraction electrodes 14a, 14b using a conductive adhesive, solder, or the like.

そして、この保持された圧電振動子はケース（図示せず
）により密封され、その内部は不活性ガス（窒素、アル
ゴン等）が封入されているかまたは真空となっている。The held piezoelectric vibrator is sealed by a case (not shown), and the inside thereof is filled with an inert gas (nitrogen, argon, etc.) or is in a vacuum.

このように圧電振動子を弾性の少ない外部導出ピンで直
接保持すれば、第７図に示す従来例に比較し弾性を有す
るワイヤークリップが不要となるため、圧電振動子を確
実に保持できることとなる。If the piezoelectric vibrator is held directly by the external lead-out pin with low elasticity in this way, the piezoelectric vibrator can be held reliably since a wire clip with elasticity is not required compared to the conventional example shown in Fig. 7. .

第４図乃至第６図は本発明に係る他の圧電振動子を示し
た図であり、第４図は第１図、第２図に示す圧電振動子
にカバーを取付けた圧電振動子を示す斜視図、第５図は
第４図に示す圧電振動子をＥ−Ｅ面で切断した断面図、
第６図は第４図に示す圧電振動子の電子機器等のプリン
ト基板への固着構造を示した図である。ここで２０はそ
の内部を密封、保護するためのカバーであり、外周部１
８の両表面に圧電振動部１９を密封、保護するように固
着される。カバー２０は水晶、コバール。4 to 6 are diagrams showing other piezoelectric vibrators according to the present invention, and FIG. 4 shows a piezoelectric vibrator in which a cover is attached to the piezoelectric vibrator shown in FIGS. 1 and 2. A perspective view, FIG. 5 is a sectional view taken along the E-E plane of the piezoelectric vibrator shown in FIG. 4,
FIG. 6 is a diagram showing a structure for fixing the piezoelectric vibrator shown in FIG. 4 to a printed circuit board of an electronic device or the like. Here, 20 is a cover for sealing and protecting the inside, and the outer peripheral part 1
The piezoelectric vibrating portion 19 is fixed to both surfaces of the piezoelectric vibrating portion 8 so as to be sealed and protected. Cover 20 is crystal and Kovar.

ガラスなどの材料によって形成されている。その固着は
エポキシ樹脂などの接着剤を用いて行なわれる。なお、
外周部１８のカバー２０と固着される両表面上には引き
出し電極１４ａ、１４ｂの一部が形成されているが、そ
の厚みは数１００オングストロームから数１０００オン
グストロームと非常に薄いので、カバー２０及び接着剤
で圧電振動部１９を密封する。障害とはならない。そし
て、密封された圧電振動部１９の周りの空隙部分２１に
は圧電振動部１９を物理的に安定な状態に維持するため
、不活性ガス（窒素、アルゴン等）を封入するかまたは
真空とする。第６図に示す２５はプリント基板、２４ａ
、２４ｂはプリント基板２５上に形成された導体層であ
る。２３は半田等の導電性固着剤であり、これによって
第４図、第５図に示す圧電振動子はプリント基板上に固
着され、かつ圧電振動子の引き出し電極１４ａ、１４ｂ
と導電性固着材２３を介して圧電振動部１９上の電極１
３ａ、１３ｂと導体層２４ａ、２４ｂが各々導通される
。圧電振動子をこのように保持すれば、第７図乃至第９
図に示す基台、ワイヤークリップ、外部導出ピンは不要
となり、第３図に示す保持構造に比較してもその構造が
簡単になり、圧電振動子の保持構造が小型化される。な
お、この構造で圧電振動子を保持する場合、圧電振動部
１９の電極を形成していない部分の一部に貫通穴を設け
れば、圧電振動部１９の上下の空隙部分２１．２１が導
通され、ガスの密度が一定となる。It is made of a material such as glass. The fixation is performed using an adhesive such as epoxy resin. In addition,
Parts of the extraction electrodes 14a and 14b are formed on both surfaces of the outer peripheral portion 18 that are fixed to the cover 20, but the thickness thereof is very thin, ranging from several hundred angstroms to several thousand angstroms, so that the cover 20 and the adhesive are very thin. The piezoelectric vibrating section 19 is sealed with an adhesive. It is not an obstacle. Then, in order to maintain the piezoelectric vibrating part 19 in a physically stable state, the air gap 21 around the sealed piezoelectric vibrating part 19 is filled with an inert gas (nitrogen, argon, etc.) or is evacuated. . 25 shown in FIG. 6 is a printed circuit board, 24a
, 24b are conductor layers formed on the printed circuit board 25. Reference numeral 23 denotes a conductive adhesive such as solder, which fixes the piezoelectric vibrator shown in FIGS.
and the electrode 1 on the piezoelectric vibrating part 19 via the conductive fixing material 23.
3a, 13b and conductor layers 24a, 24b are electrically connected to each other. If the piezoelectric vibrator is held in this way, the results shown in FIGS.
The base, wire clip, and external lead-out pin shown in the figure are no longer necessary, and the structure is simpler than the holding structure shown in FIG. 3, and the piezoelectric vibrator holding structure is miniaturized. Note that when holding a piezoelectric vibrator with this structure, if a through hole is provided in a part of the piezoelectric vibrating part 19 where no electrode is formed, the upper and lower void parts 21 and 21 of the piezoelectric vibrating part 19 are electrically connected. and the density of the gas becomes constant.

第７図は、第４図、第５図に示す圧電振動子の他の実施
例を示す断面図で、第４図、第５図に示す圧電振動子の
カバー２０には、外周部１８の溝部の内側の部分の表面
に接触しないように、凹部が設けられて−いるのに対し
、第７図に示す圧電振動子は、そのカバー２０に該凹部
を設けず、外周部１８４）９部の内側の部分の厚みを外
側の部分の厚みより薄く構成している。FIG. 7 is a sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5. The cover 20 of the piezoelectric vibrator shown in FIGS. In contrast, the piezoelectric vibrator shown in FIG. 7 does not have such a recess in its cover 20, and the outer peripheral part 184) is provided with a recess so as not to contact the surface of the inner part of the groove. The inner part is thinner than the outer part.

以上、本発明を実施例に従って詳細に説明したが、本発
明に係る圧電振動子は上記実施例に限定されるものでは
なく、圧電振動部、外周部の形状を円形、六角形等の他
の形状としてもよく、又、外周部上の溝部は外周部の全
周又は他の一部に形成してもよく、又、振動子は水晶で
なく他の圧電材料であってもよい、又、圧電振動子を第
３図に示すように保持させる場合は、外周部を圧電振動
部の全周に亘って形成する必要はなく、外部導出ピンと
接続する部分のみに外周部を設けてもよい。Although the present invention has been described in detail according to the embodiments above, the piezoelectric vibrator according to the present invention is not limited to the above embodiments, and the shape of the piezoelectric vibrating portion and the outer peripheral portion may be circular, hexagonal, etc. In addition, the groove on the outer periphery may be formed on the entire periphery or another part of the outer periphery, and the vibrator may be made of other piezoelectric material instead of crystal. When the piezoelectric vibrator is held as shown in FIG. 3, it is not necessary to form the outer circumferential part over the entire circumference of the piezoelectric vibrating part, and the outer circumferential part may be provided only at the part connected to the external lead-out pin.

（発明の効果） 以上のように圧電振動子を構成したので、〔１〕圧電振
動子の圧電振動部の振動が外周部上の溝部によって遮断
されこれによって該振動が外部に伝わりに〈〈、また逆
に〔２部外部の振動が圧電振動子に伝わったとしても圧
電振動子の外周部上の溝部によってその、振動は圧電振
動部にまでは伝わりにくく、さらにまた〔３部本発明に
係る圧電振動子の保持はその構造上、ワイヤークリップ
のような弾性のある材料を使用する必要はなく、圧電振
動子を確実に固定できる剛性率の高い材料を使用できる
ため、たとえ圧電振動子を小型化しても圧電振動子の周
りを保護するケースに圧電振動子が衝突することはなく
、該圧電振動子を破損する恐れがなくなる。(Effects of the Invention) Since the piezoelectric vibrator is configured as described above, [1] the vibration of the piezoelectric vibrating part of the piezoelectric vibrator is blocked by the groove on the outer circumferential part, and thereby the vibration is transmitted to the outside. Conversely, [Part 2] Even if external vibrations are transmitted to the piezoelectric vibrator, the grooves on the outer periphery of the piezoelectric vibrator make it difficult for the vibrations to be transmitted to the piezoelectric vibrating part. Due to its structure, it is not necessary to use elastic materials such as wire clips to hold the piezoelectric vibrator, and it is possible to use materials with high rigidity that can securely fix the piezoelectric vibrator. The piezoelectric vibrator will not collide with the case that protects the area around the piezoelectric vibrator, even if the piezoelectric vibrator is exposed to air, and there is no risk of damaging the piezoelectric vibrator.

また１本発明によれば、圧電振動部の厚みが薄くなって
も（例えば５０ｋｍ程度以下）、外周部により保護され
ることにより１組立時に破損しにくく、また、組立後に
あっても外部からの応力による圧電振動部のそり等がな
く破損を生じにくく、これによって従来の圧電振動子よ
りも高い周波数を得られる圧電振動子を容易に作成でき
る。Furthermore, according to the present invention, even if the thickness of the piezoelectric vibrating part becomes thin (for example, about 50 km or less), it is protected by the outer periphery so that it is less likely to be damaged during one assembly, and even after assembly, it can be prevented from being damaged from the outside. The piezoelectric vibrating part does not warp or the like due to stress and is less likely to be damaged, making it possible to easily create a piezoelectric vibrator that can obtain a higher frequency than conventional piezoelectric vibrators.

さらに、゛本発明に係る圧電振動子を第４図、第５図に
示すようにカバーで覆う構成とすれば、従来の圧電振動
子に比べ、非常に小型化が図れるため、現今の非常に小
型化された電子機器等に要求される圧電振動子の大きさ
に対応できるという効果をも有する。　　　　′Furthermore, if the piezoelectric vibrator according to the present invention is covered with a cover as shown in FIGS. 4 and 5, it can be made much smaller than the conventional piezoelectric vibrator, so It also has the effect of being able to accommodate the size of piezoelectric vibrators required for miniaturized electronic devices and the like. ′

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明に係る圧電振動子の斜視図、第２図は８
８１図に示す圧電振動子をＣ−０面で切断した断面図で
ある。第３図は第１図に示す圧電振動子の保持構造の一
例を示した図である。第４図乃至第６図は本発明に係る
他の圧電振動子を示した図であり、第４図は第１図、第
２図に示す圧電振動子にカバーを取付けた圧電振動子を
示す斜視図、第５図は第４図に示す圧電振動子をＥ−Ｅ
面で切断した断面図、第６図は第４図に示す圧電振動子
の電子機器等のプリント基板、への固着構造を示した図
である。第７図は第４図、第５図に示す圧電振動子の他
の実施例を示す断面図である。第８図は従来の圧電振動
子の保持方法を示した一部切欠斜視図、第９図は従来の
圧電振動子の斜視図、第１Ｏ図は第９図に示す圧電振動
子をＡ−Ａ面で切断した断面図である。 １３ａ、ｔ３ｂｓ電極 １４ａ、１４ｂΦ引き出し電極 １７−溝部　１８−外周部 １９・圧電振動部　２０・カバー 特許出願人　　　　日木電波工業株式会社代　　理　　
人　　　　　　弁理士　　辻　　　　　　實（外１名） 第１図 第２図 第３図 １θ 第４図 γ′ 第６図 第７図 第８図 第１０図 ４ｂ　　　　３ｂFIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, and FIG.
FIG. 82 is a cross-sectional view of the piezoelectric vibrator shown in FIG. 81 taken along the C-0 plane. FIG. 3 is a diagram showing an example of a holding structure for the piezoelectric vibrator shown in FIG. 1. 4 to 6 are diagrams showing other piezoelectric vibrators according to the present invention, and FIG. 4 shows a piezoelectric vibrator in which a cover is attached to the piezoelectric vibrator shown in FIGS. 1 and 2. The perspective view of FIG. 5 shows the piezoelectric vibrator shown in FIG.
FIG. 6 is a cross-sectional view taken along a plane, showing a structure for fixing the piezoelectric vibrator shown in FIG. 4 to a printed circuit board of an electronic device or the like. FIG. 7 is a sectional view showing another embodiment of the piezoelectric vibrator shown in FIGS. 4 and 5. FIG. FIG. 8 is a partially cutaway perspective view showing a conventional method of holding a piezoelectric vibrator, FIG. 9 is a perspective view of a conventional piezoelectric vibrator, and FIG. FIG. 13a, t3bs Electrodes 14a, 14b Φ Extraction electrode 17 - Groove 18 - Outer periphery 19 / Piezoelectric vibrating part 20 / Cover Patent applicant Hiki Denpa Kogyo Co., Ltd. Agent
People Patent Attorney Minoru Tsuji (1 other person) Figure 1 Figure 2 Figure 3 1θ Figure 4 γ' Figure 6 Figure 7 Figure 8 Figure 10 Figure 4b 3b

Claims (3)

【特許請求の範囲】[Claims] （１）両面に励振用の電極部を形成した圧電振動部と、
圧電振動部より厚い厚みで該圧電振動部の外周に圧電振
動部と同一の材料で一体に形成し表面に励振用電極の引
き出し電極部を形成するとともに圧電振動部を囲む部分
に溝部を形成した外周部とを有する圧電振動子。(1) A piezoelectric vibrating part with electrode parts for excitation formed on both sides,
The piezoelectric vibrating part is thicker than the piezoelectric vibrating part, and is integrally formed on the outer periphery of the piezoelectric vibrating part with the same material as the piezoelectric vibrating part, and the extraction electrode part of the excitation electrode is formed on the surface, and a groove part is formed in the part surrounding the piezoelectric vibrating part. A piezoelectric vibrator having an outer periphery. （２）溝部の深さは外周部の厚みの少なくとも１／１０
０以上であることを特徴とする特許請求の範囲第（１）
項記載の圧電振動子。(2) The depth of the groove is at least 1/10 of the thickness of the outer periphery.
Claim No. (1) characterized in that the number is 0 or more.
Piezoelectric vibrator described in section. （３）両面に励振用の電極部を形成した圧電振動部と、
圧電振動部より厚い厚みで該圧電振動部の外周全体に圧
電振動部と同一の材料で一体に形成し表面に励振用電極
の引き出し電極部を形成するとともに圧電振動部を囲む
部分に溝部を形成した外周部と、該外周部の両表面上に
固着され圧電振動部を密封するカバーとを有する圧電振
動子。(3) a piezoelectric vibrating part with electrode parts for excitation formed on both sides;
The piezoelectric vibrating part is thicker than the piezoelectric vibrating part, and is integrally formed with the same material as the piezoelectric vibrating part on the entire outer periphery, and the extraction electrode part of the excitation electrode is formed on the surface, and a groove part is formed in the part surrounding the piezoelectric vibrating part. A piezoelectric vibrator comprising: an outer circumferential portion; and a cover fixed to both surfaces of the outer circumferential portion to seal a piezoelectric vibrating portion.
JP59124742A 1984-06-18 1984-06-18 Piezoelectric vibrator Expired - Fee Related JPH0642617B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59124742A JPH0642617B2 (en) 1984-06-18 1984-06-18 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59124742A JPH0642617B2 (en) 1984-06-18 1984-06-18 Piezoelectric vibrator

Publications (2)

Publication Number Publication Date
JPS613515A true JPS613515A (en) 1986-01-09
JPH0642617B2 JPH0642617B2 (en) 1994-06-01

Family

ID=14892985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59124742A Expired - Fee Related JPH0642617B2 (en) 1984-06-18 1984-06-18 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH0642617B2 (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3396287A (en) * 1965-09-29 1968-08-06 Piezo Technology Inc Crystal structures and method of fabricating them
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
JPS4834497A (en) * 1971-09-06 1973-05-18
JPS4834494A (en) * 1971-09-06 1973-05-18
JPS5325245U (en) * 1976-08-11 1978-03-03
JPS5327740U (en) * 1976-08-18 1978-03-09
JPS54129994A (en) * 1978-03-31 1979-10-08 Matsushima Kogyo Co Ltd Crystal vibrator
JPS5550721A (en) * 1978-10-09 1980-04-12 France Etat Piezooelectric twin resonator
JPS58172008A (en) * 1982-04-02 1983-10-08 Toyo Commun Equip Co Ltd Structure and manufacture of piezoelectric oscillator

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3396287A (en) * 1965-09-29 1968-08-06 Piezo Technology Inc Crystal structures and method of fabricating them
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
JPS4834497A (en) * 1971-09-06 1973-05-18
JPS4834494A (en) * 1971-09-06 1973-05-18
JPS5325245U (en) * 1976-08-11 1978-03-03
JPS5327740U (en) * 1976-08-18 1978-03-09
JPS54129994A (en) * 1978-03-31 1979-10-08 Matsushima Kogyo Co Ltd Crystal vibrator
JPS5550721A (en) * 1978-10-09 1980-04-12 France Etat Piezooelectric twin resonator
JPS58172008A (en) * 1982-04-02 1983-10-08 Toyo Commun Equip Co Ltd Structure and manufacture of piezoelectric oscillator

Also Published As

Publication number Publication date
JPH0642617B2 (en) 1994-06-01

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