JPS6121796Y2 - - Google Patents
Info
- Publication number
- JPS6121796Y2 JPS6121796Y2 JP1975134923U JP13492375U JPS6121796Y2 JP S6121796 Y2 JPS6121796 Y2 JP S6121796Y2 JP 1975134923 U JP1975134923 U JP 1975134923U JP 13492375 U JP13492375 U JP 13492375U JP S6121796 Y2 JPS6121796 Y2 JP S6121796Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- ion
- lens
- slit
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004907 flux Effects 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 230000005404 monopole Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 32
- 230000000694 effects Effects 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
【考案の詳細な説明】
本考案は磁界型の質量分析装置に関する。本考
案は、偏向用磁界の形や大きさ位置などの設計上
の自由度を増大させることを第一の目的としてい
る。このようにすることによつて質量分析装置の
小型化、価格低減などの効果が得られる。本考案
の他の目的はイオン収束作用を良好にして感度を
高めることである。[Detailed Description of the Invention] The present invention relates to a magnetic field type mass spectrometer. The primary purpose of the present invention is to increase the degree of freedom in designing the shape, size, and position of the deflecting magnetic field. By doing so, effects such as miniaturization and cost reduction of the mass spectrometer can be obtained. Another purpose of the present invention is to improve the ion focusing effect and increase the sensitivity.
通常磁界型の質量分析装置では偏向用磁界によ
つてイオンの収束作用も兼ねているが、本考案で
はイオンの質量数による分散と収束の二作用を分
離し夫々専用の手段を用いイオンの収束に静電単
極レンズを用いるものである。磁界によつて質量
分散とイオン収束とを行う場合磁界の扇形の中心
とイオン源、イオン収束点の3点が一直線に並
ぶ。この関係があるため磁界の大きさ形、イオン
源、イオン収束点の配置が特定されて設計上の自
由度がないのである。磁界のみによつてイオンの
収束を行うと云う従来方式を改めれば、イオン
源、磁界、イオン収束点の三者の配置関係が自由
になり全体を直線化し質量分析装置全体を小型化
することができる。本考案は質量分析装置内で、
質量分散のための偏向作用は磁界に受け持たせ、
入射スリツトの像としてのスペクトル像は静電レ
ンズのみ、或は静電レンズと上記磁界の協同作用
で形成させるものである。つまり偏向用磁界その
ものは適当な条件で自ら入射スリツトの像を形成
する収束作用を呈するが、そのような磁界の固有
特性とは関係なく本考案ではイオン収束作用を磁
界ではなく静電レンズに負担させるものである。
以下実施例によつて本考案を説明する。 Normally, in a magnetic field type mass spectrometer, the deflection magnetic field also serves as an ion focusing effect, but in this invention, the two effects of dispersion and focusing due to the ion mass number are separated, and dedicated means are used for each to focus the ions. This uses an electrostatic single-pole lens. When performing mass dispersion and ion focusing using a magnetic field, three points, the center of the sector of the magnetic field, the ion source, and the ion focusing point, are aligned in a straight line. Because of this relationship, the size and shape of the magnetic field, the arrangement of the ion source, and the ion focus point are specified, and there is no degree of freedom in design. By changing the conventional method of focusing ions using only a magnetic field, the arrangement of the ion source, magnetic field, and ion focusing point can be freely arranged, making the entire system linear and downsizing the entire mass spectrometer. Can be done. This invention is carried out in a mass spectrometer.
The deflection effect for mass dispersion is taken care of by the magnetic field,
The spectral image as an image of the entrance slit is formed by the electrostatic lens alone or by the cooperation of the electrostatic lens and the magnetic field. In other words, the deflection magnetic field itself exhibits a convergence effect that forms an image of the incident slit under appropriate conditions, but regardless of the inherent characteristics of such a magnetic field, in this invention, the ion convergence effect is borne not by the magnetic field but by the electrostatic lens. It is something that makes you
The present invention will be explained below with reference to Examples.
第1図は本考案で用いる静電単極レンズである
(正イオンに対し収束作用を示す)。aは側面を示
しbは正面を示す。レンズ孔Hは通常円形である
が今の場合長孔にしてある。このようにするとx
方向とy方向とでレンズの強さが異なり、点状の
イオン源の像は非点収差を持ちレンズに近い側で
はy方向に長く遠い側ではx方向に長い形にな
る。この実施例ではy方向に長い形の像を利用す
る。 FIG. 1 shows an electrostatic monopole lens used in the present invention (shows a focusing effect on positive ions). a indicates the side and b indicates the front. The lens hole H is usually circular, but in this case it is an elongated hole. If you do it like this x
The strength of the lens differs in the y-direction and the y-direction, and the image of the point-like ion source has astigmatism and is long in the y-direction on the side close to the lens and long in the x-direction on the far side. This embodiment uses an image that is elongated in the y direction.
第2図は上記した静電レンズと偏向磁界との配
置関係を例示する。図では静電レンズ1,1′は
光学レンズの形で示してある。2が偏向磁界で、
イオン入射端面とイオン出射端面が互いに平行で
ある。第2図aはイオン源側のスリツトS1と磁
界2との間にコンデンサレンズ1を入れて磁界2
には平行イオン線束を入射させる。磁界2は入射
側と出射側とが平行であるから偏向後のイオン線
束も平行なまゝであり、これをレンズ1′でスリ
ツトS2上に収束する。スリツトS2の背後にイ
オン検出器が置かれる。第2図bは一個のレンズ
1でイオン源S1の像をスリツトS2上に作り、
レンズ1の背後に偏向磁界を配置した構成で、こ
の場合、磁界に入射するイオン束は収束性である
ので、磁界2の作用により、その収束点は磁界が
ないときより幾分レンズ1に近くなり、レンズ1
と磁界2との協同作用でスリツトS2上にスリツ
トS1の特定質量のイオンによる像が形成される
ものである。同図cは反対に偏向磁界2の背後に
レンズ1′を配置した構成を示す。この場合磁界
2に入射するイオン束は発散性なので、磁界2の
作用で、レンズ1′から見たスリツトS1の位置
は実際の位置より磁界2から遠くなつており、こ
のためレンズ1′とスリツトS2との距離は、磁
界の作用がないときより短くなつている。 FIG. 2 exemplifies the arrangement relationship between the electrostatic lens described above and the deflection magnetic field. In the figures, the electrostatic lenses 1, 1' are shown in the form of optical lenses. 2 is the deflection magnetic field,
The ion input end face and the ion exit end face are parallel to each other. Figure 2a shows a condenser lens 1 inserted between the slit S1 on the ion source side and the magnetic field 2.
A parallel ion beam is incident on the ion beam. Since the incident side and the exit side of the magnetic field 2 are parallel, the ion beam flux after deflection also remains parallel, and is focused onto the slit S2 by the lens 1'. An ion detector is placed behind the slit S2. In Fig. 2b, an image of the ion source S1 is formed on the slit S2 using a single lens 1.
This configuration has a deflection magnetic field placed behind the lens 1. In this case, the ion flux incident on the magnetic field is convergent, so due to the action of the magnetic field 2, the convergence point is somewhat closer to the lens 1 than when there is no magnetic field. Now, lens 1
An image of ions of a specific mass in the slit S1 is formed on the slit S2 by the cooperative action of the ions and the magnetic field 2. Figure c shows a configuration in which the lens 1' is placed behind the deflection magnetic field 2. In this case, the ion flux incident on the magnetic field 2 is divergent, so due to the action of the magnetic field 2, the position of the slit S1 seen from the lens 1' is farther from the magnetic field 2 than the actual position, and therefore the lens 1' and the slit The distance to S2 is shorter than when no magnetic field is acting.
静電レンズとしてはカドラポール型のものがあ
るが、この型のレンズは比較的強力であるが光軸
を含む一つの面内でのみ線束を収束させこの面と
直交する面では線束を発散させるので線束はイオ
ン検出器前面のスリツト上で細長く収束するがス
リツトの高さ以上に長く収束するためイオンの利
用率が低下する。これに対して本考案のように単
極レンズを用いると線束は各方向略々均等に収束
するからイオン利用率が良く、質量分析装置を小
型にする効果を得ながら感度も向上できるのであ
る。 There is a quadrupole type electrostatic lens, and although this type of lens is relatively strong, it converges the ray bundle only in one plane that includes the optical axis, and diverges in the plane perpendicular to this plane. The ray flux converges into a long and thin strip on the slit in front of the ion detector, but because it converges for a length longer than the height of the slit, the ion utilization rate decreases. On the other hand, when a monopole lens is used as in the present invention, the ray flux converges almost equally in each direction, resulting in a good ion utilization rate, and the sensitivity can be improved while making the mass spectrometer smaller.
上述したように本考案は静電レンズの利用によ
り磁界の役割をイオン収束作用から開放したもの
で、磁界中心位置から見た検出器前面のスリツト
S2或いわイオン源側スリツトS1までの距離を
静電レンズの使用により、従来の磁界だけを用い
た質量分析装置に比し短縮でき、従来装置の扇形
磁界の扇形中心とイオン入出射スリツトとが一直
線に並ぶと云う制約がなくなつて装置全体として
小型化されると云う効果が得られるのである。 As mentioned above, the present invention uses an electrostatic lens to release the role of the magnetic field from the ion focusing effect, and the distance from the center position of the magnetic field to the slit S2 on the front side of the detector or the slit S1 on the ion source side is fixed. By using an electric lens, it can be shortened compared to a conventional mass spectrometer that uses only a magnetic field, and the restriction that the fan center of the fan-shaped magnetic field and the ion input/exit slit are aligned in a straight line in the conventional device is eliminated, and the overall device The effect of miniaturization can be obtained.
第1図は本考案で用いる単極静電レンズの一例
を示し、第2図は静電レンズと偏向磁界との配置
関係を例示する平面図である。
1,1′……静電レンズ、2……偏向磁界、S
1……イオン源側スリツト、S2……イオン検出
器前面スリツト。
FIG. 1 shows an example of a monopolar electrostatic lens used in the present invention, and FIG. 2 is a plan view illustrating the arrangement relationship between the electrostatic lens and a deflection magnetic field. 1, 1'... Electrostatic lens, 2... Deflection magnetic field, S
1... Ion source side slit, S2... Ion detector front slit.
Claims (1)
界のイオン線束入射端面に斜めにイオン線束を入
射させるようにすると共に、上記イオン線束の上
記磁界への入射側空間及び出射側空間の両方或は
何れか一方において上記イオン線束上に収束性の
静電単極レンズを配置した質量分析装置。 The ion beam flux is made obliquely incident on the ion beam incidence end face of a magnetic field in which the entrance end face and the exit end face of the ion beam flux are parallel to each other, and both the entrance side space and the exit side space of the ion beam flux to the magnetic field, or A mass spectrometer in which a convergent electrostatic monopole lens is arranged on either one of the ion beams.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975134923U JPS6121796Y2 (en) | 1975-09-30 | 1975-09-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1975134923U JPS6121796Y2 (en) | 1975-09-30 | 1975-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5248479U JPS5248479U (en) | 1977-04-06 |
JPS6121796Y2 true JPS6121796Y2 (en) | 1986-06-30 |
Family
ID=28614965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1975134923U Expired JPS6121796Y2 (en) | 1975-09-30 | 1975-09-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6121796Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3745343A (en) * | 1969-11-07 | 1973-07-10 | Ass Elect Ind | Ion lens system for mass spectrometers and method of operation |
-
1975
- 1975-09-30 JP JP1975134923U patent/JPS6121796Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3745343A (en) * | 1969-11-07 | 1973-07-10 | Ass Elect Ind | Ion lens system for mass spectrometers and method of operation |
Also Published As
Publication number | Publication date |
---|---|
JPS5248479U (en) | 1977-04-06 |
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