JPS61207086A - Light-emitting element array - Google Patents
Light-emitting element arrayInfo
- Publication number
- JPS61207086A JPS61207086A JP60047852A JP4785285A JPS61207086A JP S61207086 A JPS61207086 A JP S61207086A JP 60047852 A JP60047852 A JP 60047852A JP 4785285 A JP4785285 A JP 4785285A JP S61207086 A JPS61207086 A JP S61207086A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light emitting
- emitting
- element array
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910005540 GaP Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 230000036244 malformation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Devices (AREA)
- Dot-Matrix Printers And Others (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Facsimile Heads (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は発光パワーのバラツキのない発光素子アレイ
に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a light emitting element array with no variation in light emitting power.
（従来の技術）
光プリンタ、ファクシミリ、複写機その他の光学系を用
いた機器等の光源として、発光素子アレイが使用されて
いる０例えば、文献（「日経エレクトロニクスＪ、５−
２５、（１９８１）、日経マグロヒル社刊、ｐｐＨ４〜
１２８）には、多数の発光ダイオードを一定のピッチで
横一列に並べてなる発光素子アレイを用いて電子写真方
式のプリンタを形成した例が開示されている。(Prior Art) Light-emitting element arrays are used as light sources for optical printers, facsimile machines, copiers, and other devices using optical systems.
25, (1981), Nikkei Maguro Hill Publishing, ppH4~
128) discloses an example in which an electrophotographic printer is formed using a light emitting element array in which a large number of light emitting diodes are arranged horizontally in a row at a constant pitch.
この文献にも示されているように、［■当り１０個前後
の発光部を有する発光素子アレイにおいては、個別電極
を配線導体に接続するためのワイヤポンディングを行う
スペースでのピッチが狭すぎるため、発光部からの個別
電極を発光部列の両側に一個毎に交互にすなわち千鳥状
に配置する構成が採られている。このような個別電極の
千鳥状配置の状態を第２図（Ａ）に示す。As shown in this document, [■] In a light emitting element array having around 10 light emitting parts per unit, the pitch in the space for wire bonding to connect individual electrodes to wiring conductors is too narrow. Therefore, a configuration is adopted in which the individual electrodes from the light emitting parts are arranged alternately, one by one, on both sides of the light emitting part row, that is, in a staggered manner. FIG. 2(A) shows such a staggered arrangement of individual electrodes.
第２図（Ａ）は従来の発光素子アレイの一部分を概略的
に示す平面図である。同図において、１は例えばガリウ
ムリンのような半導体基板であり、２１．２２．２３．
２４．・１１鳴２層はこの基板１に整列して設けた発光
領域の一部分でそれぞれ形成された発光部、３１．３１
．３２．３３．３４−・・３腸はそれぞれの発光部２１
〜２麿を形成する発光領域と結線するように基板１上に
設けた個別電極で、例えばアルミニウムような導電材料
で形成されている。FIG. 2(A) is a plan view schematically showing a portion of a conventional light emitting element array. In the same figure, 1 is a semiconductor substrate such as gallium phosphide, 21.22.23.
24.・The 2nd layer of 11 is a light emitting part formed by a part of the light emitting area provided in alignment on this substrate 1, 31.31
．． 32.33.34--3 intestines each have a light emitting part 21
These are individual electrodes provided on the substrate 1 so as to be connected to the light emitting regions forming the second electrode, and are made of a conductive material such as aluminum, for example.
（発明が解決しようとする問題点）
しかしながら、このような構造の発光素子アレイを製造
するに当り、発光領域上にこれと電気的に接触させて個
別電極を形成するので、この電極の先端の位置で発光部
の表面積が決る。ところが、図示のように、奇数番目及
び偶数番目の個別電極は互いに発光部の列に対して反対
側に配列されるので、個別電極の形成に使用するマスク
が配列方向と直交する方向にずれると、形成された電極
の先端位置もそのずれに対応していづれか一方の方向に
ずれてしまう、従って１発光部の面積にバラツキが生じ
てしまう欠点があった。(Problems to be Solved by the Invention) However, when manufacturing a light emitting element array having such a structure, individual electrodes are formed on the light emitting region in electrical contact with the light emitting region, so that the tips of the electrodes are The surface area of the light emitting part is determined by the position. However, as shown in the figure, the odd-numbered and even-numbered individual electrodes are arranged on opposite sides of the row of light emitting parts, so if the mask used to form the individual electrodes is shifted in the direction perpendicular to the arrangement direction, However, the position of the tip of the formed electrode also shifts in one direction in response to the shift, resulting in a disadvantage that the area of one light emitting section varies.
この状態を第２図（Ｂ）に示す、この図は発光部２１及
び２２と、これに関連する個別電極３１及び３２の部分
を代表して示した線図である。この発光部の配列方向と
直交する方向の当該発光部の所定の長さを文とし、マス
クのずれに起因して個別電極３１及び３２がａだけ図中
上側にずれたとすると、奇数番目の発光部２１の長さは
（ｆＬ＋ａ）となり、偶数番目の発光部２２の長さはＣ
ｆＬ−ａ）となるため。This state is shown in FIG. 2(B), which is a diagram representative of the light emitting parts 21 and 22 and the individual electrodes 31 and 32 related thereto. Assuming that the predetermined length of the light emitting section in the direction orthogonal to the arrangement direction of the light emitting section is taken as an expression, and that the individual electrodes 31 and 32 are shifted upward in the figure by a amount a due to mask misalignment, the odd-numbered light emitting The length of the portion 21 is (fL+a), and the length of the even numbered light emitting portion 22 is C.
fL-a).
発光面積にバラツキが生じる。Variations occur in the light emitting area.
このようなバラツキは、例えば１ｍｍ当り１０個前後の
発光部を有する発光素子アレイの場合には。Such variations occur, for example, in the case of a light emitting element array having around 10 light emitting parts per 1 mm.
発光部の長さは４０〜５０ＩＬ■であるので、±１０％
前後となる。その結果１発光パワーのバラツキも±１０
％前後となる。The length of the light emitting part is 40 to 50 IL■, so ±10%
Before and after. As a result, the variation in 1 emission power is ±10
It will be around %.
さらに、上述したようなマスクずれに起因して、発光部
の形状が奇形となってしまう場合もあり、その場合にも
各発光部の面積がバラツキ、その結果１発光パワーにも
バラツキが生じてしまうという欠点があった。Furthermore, due to the above-mentioned mask misalignment, the shape of the light-emitting part may become irregular, and in this case, the area of each light-emitting part also varies, resulting in variation in the power of one light emission. There was a drawback that it could be stored away.
この発明の目的は、上述したような個別電極を形成する
ためのマスクずれによる発光パワーのバラツキ、発光形
状の奇形及び発光形状の奇形に起因する発光パワーのバ
ラツキといった従来の問題点を解決ｌ１発光形状及び発
光パワーの均一化を図った発光素子アレイを提供するこ
とにある。The purpose of the present invention is to solve the conventional problems such as variations in light emission power due to misalignment of the mask for forming individual electrodes as described above, irregularities in the shape of light emission, and variations in light emission power due to irregularities in the shape of light emission. An object of the present invention is to provide a light emitting element array with uniform shape and uniform light emitting power.
（問題点を解決するための手段）
この目的の達成を図るため、この発明によれば、基板と
、該基板に整列して設けられた複数の発光領域と、この
発光領域と電気的に接続してそれぞれ設けられた個別電
極とを具え、この発光領域の一部分を発光部とした発光
素子アレイにおいて、
この発光領域及び個別電極上に設けられた透明絶縁層と
、
この透明絶縁層上に設けられ及びこの発光領域の表面積
よりも狭い窓面積で発光部の形状を規定する窓が形成さ
れた遮光部と
を具えることを特徴とする。(Means for Solving the Problems) In order to achieve this object, the present invention provides a substrate, a plurality of light emitting regions arranged in alignment on the substrate, and electrically connected to the light emitting regions. In the light emitting element array, the light emitting element array includes individual electrodes respectively provided on the light emitting region and a part of the light emitting region as a light emitting part, a transparent insulating layer provided on the light emitting region and the individual electrodes, and a transparent insulating layer provided on the transparent insulating layer. and a light-shielding part in which a window defining the shape of the light-emitting part is formed with a window area narrower than the surface area of the light-emitting region.
（作用）
このように構成すれば１発光部の形状及び面積は遮光部
の窓の形状及び面積によって決る。この窓は形状は通常
の半導体技術で設計通りに簡単かつ容易に形成出来、ま
た、その面積は発光領域の表面積よりも狭く形成しであ
るので、この窓が発光領域の上側でかつその表面領域の
内側に位置するように遮光部を基板上に設ければ、これ
により規定された各発光部の形状及び面積が均一化する
。これがため、発光パワーのバラツキや発光形状の奇形
化等は生じない。(Function) With this configuration, the shape and area of one light emitting section are determined by the shape and area of the window of the light shielding section. The shape of this window can be simply and easily formed as designed using normal semiconductor technology, and its area is narrower than the surface area of the light emitting region. If the light shielding part is provided on the substrate so as to be located inside the light emitting part, the shape and area of each defined light emitting part can be made uniform. Therefore, variations in light emission power and malformation of light emission shape do not occur.
（実施例）
以下、第１図（Ａ’）及び（Ｂ）を参照してこの発明の
発光素子アレイの一実施例につき説明する。(Example) An example of the light emitting element array of the present invention will be described below with reference to FIGS. 1(A') and 1(B).
尚、これら図において第２図（Ａ）及び（Ｂ）に示した
構成成分と同一の機能を有する成分については同一の符
合を付して示し、それらの詳細な説明は省略する。In these figures, components having the same functions as those shown in FIGS. 2(A) and 2(B) are indicated by the same reference numerals, and detailed explanation thereof will be omitted.
第１図（Ａ）はこの発明の発光素子アレイの一例を概略
的に示す部分的平面図、第１図（Ｂ）は（Ａ）図のｘ−
γ線上での断面図である。FIG. 1(A) is a partial plan view schematically showing an example of a light-emitting element array of the present invention, and FIG. 1(B) is an x-
It is a sectional view on the γ-ray.
この実施例では、半導体基板１に一列に整列してＰＭ接
合を持った複数の発光領域２を設け、個別電極３１〜３
層をこれう発光領域２の一部分とそれぞれ電気的に接続
すしかつ発光領域２の配列の両側に一つづ交互にすなわ
ち千鳥状に設ける。In this embodiment, a plurality of light emitting regions 2 having PM junctions are arranged in a line on a semiconductor substrate 1, and individual electrodes 31 to 3 are provided.
The layers are each electrically connected to a portion of the light-emitting regions 2 and are provided alternately or staggered, one on each side of the array of light-emitting regions 2.
これら発光領域２及び個別電極３１〜３ｍ上に透明絶縁
層４を設ける。この透明絶縁層４上に例えばアルミニウ
ム又はその他の好適な遮光材料からなる遮光部５を設け
る。この遮光部５は光透過用の窓６を具えていて、この
窓６は発光領域２の表面積よりも狭い窓面積で発光部２
１〜２層の形状を規定する形状を有している。この窓は
遮光部５に設けた貫通穴でも良いし或いは光を透過させ
る任意好適な材料で埋め込んで形成したものでも良い。A transparent insulating layer 4 is provided on the light emitting region 2 and the individual electrodes 31 to 3m. A light-shielding portion 5 made of, for example, aluminum or other suitable light-shielding material is provided on the transparent insulating layer 4 . This light shielding part 5 is provided with a window 6 for transmitting light, and this window 6 has a window area narrower than the surface area of the light emitting area 2.
It has a shape that defines the shape of one or two layers. This window may be a through hole provided in the light shielding part 5, or may be filled with any suitable material that transmits light.
この窓６は発光領域２の上側であって、この発光領域２
の基板面に面した領域の内側に納まり、しかも、窓６が
個別電極３１〜３１によって邪魔されないように窓外に
配置する。This window 6 is above the light emitting area 2, and the window 6 is located above the light emitting area 2.
The window 6 is arranged outside the window so that it is not obstructed by the individual electrodes 31 to 31.
このように、これら窓６によって発光素子アレイの各発
光部２１〜２層の形状及び発光面積が規定される。In this way, these windows 6 define the shape and light emitting area of each of the light emitting sections 21 to 2 layers of the light emitting element array.
尚、この発明は上述した実施例にのみ限定されるもので
はない０例えば、発光素子アレイの配列は一直線状でな
い他の配列でも良く、また、個別電極を発光部配列の両
側に千鳥状に設けたが、これら電極を発光部配列の一方
側に偏在させても良い。Note that the present invention is not limited to the above-described embodiments. For example, the light emitting element array may be arranged in other ways than in a straight line, or the individual electrodes may be provided in a staggered manner on both sides of the light emitting element array. However, these electrodes may be unevenly distributed on one side of the light emitting section array.
さらに、窓の形状は図示例のような矩形形状に限定され
ず所要の目的に合致した任意好適な形状とすることが出
来る。Further, the shape of the window is not limited to the rectangular shape shown in the illustrated example, but can be any suitable shape that meets the desired purpose.
また、各構成成分の材料、寸法及び配置関係も所要に応
じて適当に設定出来る。Further, the materials, dimensions, and arrangement relationships of each component can be appropriately set as required.
（発明の効果）
上述した説明からも明らかなように、この発明の発光素
子アレイによれば、遮光部の窓の面積及び形状を正確に
形成しておけば１個別電極の形成時にマスクが所定の発
光部形成位置からずれたとしても、また、発光部となる
べき領域の形状が奇形となったとして、遮光部の窓によ
り発光部の発光面積、位置及び形状を規定することが出
来る。(Effects of the Invention) As is clear from the above description, according to the light emitting element array of the present invention, if the area and shape of the window of the light-shielding part are formed accurately, the mask can be placed in a predetermined position when forming one individual electrode. Even if the formation position of the light emitting part deviates from the position where the light emitting part is formed, or even if the shape of the region to be the light emitting part becomes irregular, the light emitting area, position, and shape of the light emitting part can be defined by the window of the light shielding part.
この窓の形成は簡単かつ容易であり、しかも、この窓を
受光領域の上側の個別電極から外れた位置に簡単容易に
かつ正確に配置出来る。従って、形成された発光素子ア
レイの各発光部の発光形状及び発光パワーをばらつかせ
ずに実質的に均一化することが出来る利点がある。Formation of this window is simple and easy, and moreover, this window can be simply and accurately placed at a position above the light-receiving area and away from the individual electrodes. Therefore, there is an advantage that the light emitting shape and light emitting power of each light emitting part of the formed light emitting element array can be made substantially uniform without variation.
第１図（Ａ）及び（Ｂ）はこの発明の発光素子アレイの
一実施例を概略的に示す部分的平面図、第１図（Ｂ）は
第１図（Ａ）のＸ−Ｙ線上の断面図、
第２図（Ａ）及び（Ｂ）は従来の発光素子アレイを概略
的に示す部分的平面図である。
１・・・基板、 ２・・・発光領域２１〜２
層・・・発光部、 ３１〜３層・・・個別電極４・
・・透明絶縁電極、 ５・・・遮光部６・・・遮光部
の窓。
特許出願人 沖電気工業株式会社第■図
ｔ、基板 ２１〜２ｍ：発ル沖４ ：Ｉ
Ｌ明’Ｍ！＃Ｍ Ｊｆ 〜１ｍ ： ４１１１
７グ（Ｊｆ５：ｉ＆光音Ｐ
６＃を耐電
２：発光領域
第２図
手続補正書
昭和６１年６月６日1(A) and 1(B) are partial plan views schematically showing one embodiment of the light emitting element array of the present invention, and FIG. 1(B) is on the X-Y line of FIG. 1(A). 2A and 2B are partial plan views schematically showing a conventional light emitting element array. 1... Substrate, 2... Light emitting regions 21-2
Layer...Light emitting part, 31-3 layer...Individual electrode 4.
... Transparent insulated electrode, 5... Light shielding part 6... Window of the light shielding part. Patent applicant: Oki Electric Industry Co., Ltd. Figure t, board 21-2m: Oki 4: I
L Ming'M! #M Jf ~1m: 4111
7g (Jf5: i & light sound P 6# electric resistance 2: light emitting area Figure 2 procedural amendment June 6, 1986
Claims (1)
領域と、該発光領域と電気的に接続してそれぞれ設けら
れた個別電極とを具え、該発光領域の一部分を発光部と
した発光素子アレイにおいて、 前記発光領域及び個別電極上に設けられた透明絶縁層と
、 該透明絶縁層上に設けられ及び前記発光領域の表面積よ
りも狭い窓面積で発光部の形状を規定する窓が形成され
た遮光部と を具えることを特徴とする発光素子アレイ。(1) A substrate, a plurality of light emitting regions provided in alignment on the substrate, and individual electrodes each provided electrically connected to the light emitting regions, and a portion of the light emitting region is used as a light emitting section. A light emitting element array comprising: a transparent insulating layer provided on the light emitting region and the individual electrodes; and a window provided on the transparent insulating layer and defining the shape of the light emitting part with a window area smaller than the surface area of the light emitting region. A light-emitting element array comprising: a light-shielding portion in which a light-shielding portion is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60047852A JPS61207086A (en) | 1985-03-11 | 1985-03-11 | Light-emitting element array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60047852A JPS61207086A (en) | 1985-03-11 | 1985-03-11 | Light-emitting element array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61207086A true JPS61207086A (en) | 1986-09-13 |
| JPH0568869B2 JPH0568869B2 (en) | 1993-09-29 |
Family
ID=12786898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60047852A Granted JPS61207086A (en) | 1985-03-11 | 1985-03-11 | Light-emitting element array |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61207086A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257665A (en) * | 1987-04-15 | 1988-10-25 | Fuji Photo Film Co Ltd | Image-recording head |
| US5038186A (en) * | 1988-11-07 | 1991-08-06 | Mitsubishi Denki Kabushiki Kaisha | Light emitting diode array |
| EP0519226A2 (en) * | 1991-05-21 | 1992-12-23 | Mitsubishi Denki Kabushiki Kaisha | LED array head type electrophotographic recording apparatus |
| WO1994018704A1 (en) * | 1993-02-04 | 1994-08-18 | Siemens Nixdorf Informationssysteme Aktiengesellschaft | Optical character generator for an electrographic printer |
| JP2020116833A (en) * | 2019-01-24 | 2020-08-06 | コニカミノルタ株式会社 | Optical writing device |
-
1985
- 1985-03-11 JP JP60047852A patent/JPS61207086A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257665A (en) * | 1987-04-15 | 1988-10-25 | Fuji Photo Film Co Ltd | Image-recording head |
| US5038186A (en) * | 1988-11-07 | 1991-08-06 | Mitsubishi Denki Kabushiki Kaisha | Light emitting diode array |
| EP0519226A2 (en) * | 1991-05-21 | 1992-12-23 | Mitsubishi Denki Kabushiki Kaisha | LED array head type electrophotographic recording apparatus |
| EP0519226A3 (en) * | 1991-05-21 | 1993-02-24 | Mitsubishi Denki Kabushiki Kaisha | Led array head type electrophotographic recording apparatus |
| WO1994018704A1 (en) * | 1993-02-04 | 1994-08-18 | Siemens Nixdorf Informationssysteme Aktiengesellschaft | Optical character generator for an electrographic printer |
| JP2020116833A (en) * | 2019-01-24 | 2020-08-06 | コニカミノルタ株式会社 | Optical writing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0568869B2 (en) | 1993-09-29 |
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