JPS61203226A - Fine electrode manufacturing apparatus - Google Patents
Fine electrode manufacturing apparatusInfo
- Publication number
- JPS61203226A JPS61203226A JP3869985A JP3869985A JPS61203226A JP S61203226 A JPS61203226 A JP S61203226A JP 3869985 A JP3869985 A JP 3869985A JP 3869985 A JP3869985 A JP 3869985A JP S61203226 A JPS61203226 A JP S61203226A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- working
- machining
- shaping
- electrode material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/10—Supply or regeneration of working media
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、放電加工法によって微***を加工するために
用いられる工具電極の製作加工に好適な微細電極製作装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a microelectrode manufacturing apparatus suitable for manufacturing a tool electrode used for machining microholes by electrical discharge machining.
放電加工によって穴加工する場合、真円度、円筒度ある
いは垂直度などＫついて余り厳格な精度が要求されない
ときＫは、例えばワイヤ電極を工具電極として用い、ワ
イヤ放電加工を行うことによって容易に達成できる。し
かし、直径へ０１φ程度の微細穴を加工するためには、
高精度の電極を用いる必要がある。When machining holes by electrical discharge machining, when K does not require very strict precision such as roundness, cylindricity, or perpendicularity, K can be easily achieved by performing wire electrical discharge machining using, for example, a wire electrode as a tool electrode. can. However, in order to machine a minute hole with a diameter of about 01φ,
It is necessary to use highly accurate electrodes.
従来、この種の高精度な電極は、次のように製作されて
いた。すなわち第４図に示すように、被加工物である電
極材１を回転装置（図示せず）によシ矢印イに示すよう
に回転させておき、ブロック状の電極成形用電極２をテ
ーブル（図示せず）に設定しておき、これら両者間に、
ノ４ルス発生器３から発生されるパルス電圧を印加する
と共に加工液ノズル４から加工液５を供給し、間欠的に
アーク放電を発生させながら図示されていないテーブル
送シ装置によって、まずＸ軸方向に所定の切込みを与え
、次にＹ軸方向に送りを与えることにより、電極材１を
１ａおよび１ｂに示すように所望の直径の電極に仕上げ
るものである。Conventionally, this type of high-precision electrode has been manufactured as follows. That is, as shown in FIG. 4, the electrode material 1, which is a workpiece, is rotated by a rotating device (not shown) as shown by arrow A, and the block-shaped electrode forming electrode 2 is placed on a table ( (not shown), and between these two,
A pulse voltage generated from the nozzle 4 pulse generator 3 is applied, and the machining fluid 5 is supplied from the machining fluid nozzle 4 to generate an arc discharge intermittently. By making a predetermined cut in the direction and then feeding in the Y-axis direction, the electrode material 1 is finished into an electrode with a desired diameter as shown in 1a and 1b.
第５図は、第４図に示した電極１ａ、 ｌｂの先端径を
さらに細く加工するために、電極成形用電極２の放電面
を電極材１（ｔたは半完成電極１ｃ）の軸方向に対して
傾斜させた状態に設定し、これによシ第５図（ｂ）中の
点線円内に示すように先端が円錐状に針のように細い電
極１ｄを加工するものである。FIG. 5 shows that in order to process the tip diameters of the electrodes 1a and lb shown in FIG. The electrode 1d is set so as to be tilted relative to the cylindrical surface, and the electrode 1d has a conical tip and is thin like a needle, as shown in the dotted circle in FIG. 5(b).
このような従来の電極製作法において、電極１ｅを６．
０２’以下に製作しようとしても、第６図に示すように
、理想的な形状は点線で示す形状であるのに対して、実
線で示すような形状に加工されてしまう。これは、第７
図に示すように、電極材１と電極成形用電極２との間に
加工屑６が蓄積し、この加工屑６を通して矢印口に示す
ように２次放電が生じ、点線のごとく加工だれを生ずる
からである。In such a conventional electrode manufacturing method, the electrode 1e is made of 6.
Even if an attempt is made to manufacture it to 02' or less, as shown in FIG. 6, the ideal shape is the shape shown by the dotted line, but it will be processed into the shape shown by the solid line. This is the seventh
As shown in the figure, machining debris 6 accumulates between the electrode material 1 and the electrode forming electrode 2, and secondary discharge occurs through the machining debris 6 as shown by the arrowhead, resulting in machining sag as shown by the dotted line. It is from.
そこで上記加工屑６を除去することが考えられる。従来
は、加工液供給ノズル４を電極材１の近くに配設し、加
工液５を高速で噴射することが考えられているが、電極
材１先端を細く加工するために、加工液５の流れによっ
て電極材ｌ先端が振れ、これによって電極材１と電極成
形用電極２との間で周期的に短絡を生じ、電極成形が不
可能か、または、電極先端が変形して精度のよい電極が
製作されなかった。また、他の方法として、前記Ｘ軸方
向の切込みを少なくしておき、Ｙ軸方向の送りを速くし
、これによシ加工屑６を洗い流す方法も実験してみたが
、実際上は、テーブル送シ速度は１ ｍ／ｍｉｎ程度が
限界であり、この程度では加工屑６を除去することは困
難であり、これらの点についての改善が要望されていた
。Therefore, it is possible to remove the processing waste 6. Conventionally, it has been considered to arrange the machining fluid supply nozzle 4 near the electrode material 1 and spray the machining fluid 5 at high speed. The tip of the electrode material 1 swings due to the flow, which causes periodic short circuits between the electrode material 1 and the electrode 2 for electrode forming, making it impossible to form the electrode, or deforming the electrode tip to prevent accurate electrode formation. was not produced. In addition, as another method, we experimented with reducing the depth of cut in the X-axis direction and increasing the feed rate in the Y-axis direction, thereby washing away the machining debris 6. The feeding speed has a limit of about 1 m/min, and it is difficult to remove the processing waste 6 at this speed, and improvements in these points have been desired.
本発明は上記のような要望に鑑みてなされたもので、加
工屑が効果的に除去され、高精度微細径の電極が製作で
きる微細電極製作装置を提供することを目的とする。The present invention has been made in view of the above-mentioned needs, and an object of the present invention is to provide a microelectrode manufacturing apparatus that can effectively remove machining waste and can manufacture electrodes with high precision and a fine diameter.
本発明装置は、電極成形用電極を外周円形状に形成し、
これを回転させながら放電加工により電極を製作し、か
つ電極材から離れた位置に電極成形用電極外周部に付着
した加工屑を除去する手段を設け、上記目的を達成する
ものである。The device of the present invention forms an electrode for electrode forming into a circular outer circumferential shape,
The above object is achieved by manufacturing an electrode by electric discharge machining while rotating the electrode, and by providing a means for removing machining debris attached to the outer peripheral part of the electrode forming electrode at a position away from the electrode material.
以下図面を参照して本発明の詳細な説明する。 The present invention will be described in detail below with reference to the drawings.
第１図は本発明による微細電極製作装置の一実施例の要
部を示す側面図で、図中１及び３は第４図と同様の電極
材及び・々ルス発生器、１０は電極成形用電極である。Fig. 1 is a side view showing the essential parts of an embodiment of the microelectrode production apparatus according to the present invention, in which 1 and 3 are the same electrode materials and lupus generators as in Fig. 4, and 10 is for electrode forming. It is an electrode.
この電極１０は、前記電極材１と対向する外周部の形状
が円形状（外周円形状）となるように、例えば円板状、
環状、円柱状あるいは円筒状に形成され、その中心部に
おいて図示しない回転装置によシ矢印ハに示すように回
転可能に構成されている。また、この電極１０は図示し
ないテーブル上に設けられ、このテーブルは（従動て電
極１０も）図示しないテーブル送υ装置によりＸ軸及び
Ｙ軸方向に送ることができる。This electrode 10 has a circular shape (outer circular shape), for example, a disk shape,
It is formed into an annular, cylindrical, or cylindrical shape, and is configured to be rotatable at its center by a rotating device (not shown) as shown by arrow C. Further, this electrode 10 is provided on a table (not shown), and this table (also the driven electrode 10) can be moved in the X-axis and Y-axis directions by a table feeding device (not shown).
１１は、加工時における電極材１の位置から離れた位置
、ここでは電極成形用電極１０を挾んで電極材ｌの位置
と正反対側に配置された加工屑除去手段で、加工時、回
転する電極成形用電極１０の加工放電面である外周部に
付着した加工屑（図示せず）を除去するものである。こ
の加工屑除去手段１１は、例えば高圧ボン７’ｌｌａに
より加工液１１ｂをノズルｌｉｅから前記電極１０外周
部に噴射するように構成される。Reference numeral 11 denotes a processing waste removal means disposed at a position away from the position of the electrode material 1 during processing, in this case on the opposite side to the position of the electrode material 1 with the electrode 10 for electrode forming sandwiched between the parts, and the rotating electrode during processing. This removes machining debris (not shown) attached to the outer periphery of the forming electrode 10, which is the machining discharge surface. The machining debris removing means 11 is configured to inject the machining fluid 11b from a nozzle lie onto the outer circumference of the electrode 10 using, for example, a high-pressure bomb 7'lla.
次に上述本発明装置の動作について説明する。Next, the operation of the above-mentioned device of the present invention will be explained.
電極材１と電極成形用電極１０との間に・臂ルス発生器
３からの・ぐルス電圧を印加し、間欠的にアーク放電を
発生させながら、前記テーブル上に設けられた電極成形
用電極１０を回転させ、この状態でまずＸ軸方向に所定
の切込みを与え、次にＹ軸方向に加工送りを与えること
により、電極材１を所望の直径の電極に仕上げるもので
ある。A pulse voltage from the arm pulse generator 3 is applied between the electrode material 1 and the electrode forming electrode 10, and while arc discharge is intermittently generated, the electrode forming electrode provided on the table is 10 is rotated, and in this state, first a predetermined cut is made in the X-axis direction, and then a machining feed is given in the Y-axis direction, thereby finishing the electrode material 1 into an electrode of a desired diameter.
この間、ノズルｌｉｅ Ｉｃよシ、高圧ポンプｌｌａか
らの加工液１１ｂが電極成形用電極１０の外周部に噴射
されているので、そこに付着する加工屑が除去され、従
来装置のように加工部に加工屑が蓄積されることが防止
される。またこの場合、ノズルｌｌｃは電極材１から離
れた位置に設けであるため、従来装置のように加工液噴
射圧力によって細く加工されつつある電極材１の先端を
振動させることなく、安定に加工させ得る。まだ、電極
成形用電極１０は回転装置によって回転されるので、そ
の高周速による遠心力によっても付着加工屑が除去され
るととになる。During this time, the machining liquid 11b from the nozzle Ic and the high-pressure pump Ila is injected onto the outer periphery of the electrode forming electrode 10, so machining debris adhering thereto is removed and the machining fluid 11b from the high-pressure pump Ila is removed. Accumulation of processing debris is prevented. In addition, in this case, since the nozzle llc is provided at a position away from the electrode material 1, the tip of the electrode material 1, which is being processed thinly by the machining fluid injection pressure, does not vibrate and can be stably processed unlike conventional equipment. obtain. Since the electrode 10 for electrode forming is still rotated by the rotating device, the adhered machining debris is also removed by the centrifugal force generated by the high circumferential speed.
なお、上述実施例では、加工屑除去手段１１を高圧ポン
プ１１＆により加工液１１ｂをノズル１１Ｃカラ噴射す
るように構成したが、これのみに限られない。例えば第
２図に示すようにワイ／４’ｌｌｄをばねｌｉｅ Ｋよ
って電極成形用電極１０の外周部に押付けるように構成
してもよく、これによっても上述実施例と同様の効果が
得られる。この場合、ワイ・ぞｌｉｄは、前記電極１０
の材質、すなわち銅などの導電体よりも軟らかい、例え
ばゴム、合成樹脂あるいはス？ンノなどで形成され、ば
ねｌｉｅによる押付けで電極１０の外周部が損傷されな
いように構成される。また、図示しない加工液供給装置
により加工部に加工液が供給される。In the above embodiment, the machining debris removing means 11 is configured to spray the machining fluid 11b through the nozzle 11C using the high-pressure pump 11&, but the present invention is not limited to this. For example, as shown in FIG. 2, the structure may be such that the spring 4'lld is pressed against the outer periphery of the electrode forming electrode 10, and the same effect as in the above-mentioned embodiment can also be obtained. . In this case, the width of the electrode 10 is
material that is softer than a conductor such as copper, such as rubber, synthetic resin, or steel? The outer circumference of the electrode 10 is not damaged by the pressure applied by the spring 10. Further, machining fluid is supplied to the machining section by a machining fluid supply device (not shown).
また、加工屑除去手段１１の配置位置は、その配置によ
る前述電極材１の振動や加工部における加工屑の滞留な
どが生じない程度に電極材１から離れた位置であれば、
上述実施例のような電極材１と正反対側の位置でなくと
もよい。Further, the processing debris removing means 11 may be arranged at a position far enough away from the electrode material 1 that vibration of the electrode material 1 or accumulation of processing waste in the processing section will not occur due to the arrangement.
The position does not have to be exactly opposite to the electrode material 1 as in the above embodiment.
さらに、電極成形用電極１０を、第３図に示すようにそ
の放電面を電極材１の軸方向に対して所定角α０だけ傾
斜させてもよい。これによれば、第５図（ｂ）に示した
と同様に電極材１の先端をより細く加工でき、先鋭な円
錐電極加工が可能となる。Furthermore, the discharge surface of the electrode forming electrode 10 may be inclined by a predetermined angle α0 with respect to the axial direction of the electrode material 1, as shown in FIG. According to this, the tip of the electrode material 1 can be processed to be thinner as shown in FIG. 5(b), and a sharp conical electrode can be processed.
以上述べたように本発明によれば、電極成形用電極を回
転させながら加工すると共に電極材から離れた位置で加
工屑を除去するようにしたので、効果的に、かつ電極材
先端を振動させることなく加工屑を除去でき、従って、
高精度な微***加工に用いられる高精度微細径の電極を
容易に製作できるという効果がある。As described above, according to the present invention, processing is performed while rotating the electrode forming electrode, and processing waste is removed at a position away from the electrode material, so that the tip of the electrode material can be vibrated effectively. Processing waste can be removed without any
This method has the advantage that it is possible to easily manufacture highly accurate, micro-diameter electrodes used in highly accurate micro-hole machining.
具体例による効果を以下に示す。The effects of specific examples are shown below.
電極材１の材質：１φの銀・タングステン棒材電極成形
用電極１０：銀・タングステン合金材による直径２００
φの円板、回転数１００Ｏｒｐｍ加工液１１ｂの供給圧
カニ５ｋｌ？／ｃｄ”ｋス発生器３ カラのパルス電流
：パルス幅０．０２μｓ、ピーク電流ＩＡ、周波数１０
０ ｋＨｚ以上の加工条件下で、第３図に示した例によ
）電極材ｌの先端を円錐状に仕上げた。この際、電極１
０の傾斜をイ。とじたとき、先端の最小径は、従来装置
では０．ｏ１φが限界であったのに対し、本発明では０
．００２’が実現できた。そして製作されたこの電極（
工具電極）を用い、放電加工を行ったところ、厚さ０．
０１ ｍのモリブデン板材に対してｏ、ｏｏａφの穴加
工が達成できた。Material of electrode material 1: 1φ silver/tungsten bar material Electrode 10 for electrode forming: Silver/tungsten alloy material with a diameter of 200 mm
φ disc, rotation speed 100Orpm, machining fluid 11b supply pressure crab 5kl? /cd”ks generator 3 Color pulse current: pulse width 0.02μs, peak current IA, frequency 10
Under processing conditions of 0 kHz or higher, the tip of the electrode material 1 (according to the example shown in FIG. 3) was finished into a conical shape. At this time, electrode 1
A slope of 0. When closed, the minimum diameter of the tip is 0. While o1φ was the limit, in the present invention, 0
．． 002' was realized. And this electrode produced (
When electrical discharge machining was performed using a tool electrode), the thickness was 0.
We were able to drill holes of o, ooaφ on a molybdenum plate material of 01 m.
第１図は本発明装置の一実施例の要部を示す側面図、第
２図及び第３図は同じく他の実施例の要部を示す側面図
、第４図は従来装置の概略を示す斜視図、第５図は従来
装置による先端円錐状の電極表作法の説明図、第６図及
び第７図は従来装置の問題点を説明するための図である
。
１・・・電極材、３・・・パルス発生器、１０・・・電
極成形用電極、１１・・・加工屑除去手段、ｌｌａ・・
・高圧ポンプ、１１ｂ・・・加工液、１１ｃ・・・ノズ
ル、１１ｄ・・・ワイノ＃、ｌｉｅ・・・ばね。
特許出願人 日立精工株式会社
代理人 弁理士 秋 本 正 実
第１図
第２図
第３図
第４図
第５図
第６図
第７図FIG. 1 is a side view showing the main parts of one embodiment of the device of the present invention, FIGS. 2 and 3 are side views showing the main parts of other embodiments, and FIG. 4 is a schematic diagram of the conventional device. FIG. 5 is a perspective view, and FIG. 5 is an explanatory diagram of how to prepare a conical tip electrode surface using a conventional device. FIGS. 6 and 7 are diagrams for explaining problems with the conventional device. DESCRIPTION OF SYMBOLS 1... Electrode material, 3... Pulse generator, 10... Electrode for electrode forming, 11... Processing waste removal means, lla...
- High pressure pump, 11b... machining fluid, 11c... nozzle, 11d... Waino#, lie... spring. Patent Applicant Hitachi Seiko Co., Ltd. Agent Patent Attorney Tadashi Akimoto Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7
Claims (1)
を供給しつつ、間欠的にアーク放電を発生させて微細電
極を製作する装置において、前記電極成形用電極は外周
円形状に形成されると共に回転可能に構成され、かつ前
記電極材から離れた所定の位置に、前記電極成形用電極
の外周部に付着した加工屑を除去する加工屑除去手段を
設けたことを特徴とする微細電極製作装置。In an apparatus that manufactures fine electrodes by intermittently generating arc discharge while supplying machining fluid between an electrode material as a workpiece and an electrode forming electrode, the electrode forming electrode has a circular outer circumferential shape. The electrode is configured to be rotatable while being formed, and is characterized in that a processing waste removing means for removing processing waste adhering to the outer periphery of the electrode forming electrode is provided at a predetermined position apart from the electrode material. Microelectrode production equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869985A JPS61203226A (en) | 1985-03-01 | 1985-03-01 | Fine electrode manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3869985A JPS61203226A (en) | 1985-03-01 | 1985-03-01 | Fine electrode manufacturing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61203226A true JPS61203226A (en) | 1986-09-09 |
Family
ID=12532556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3869985A Pending JPS61203226A (en) | 1985-03-01 | 1985-03-01 | Fine electrode manufacturing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203226A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815630A (en) * | 1981-07-20 | 1983-01-29 | Mitsubishi Electric Corp | Electrodes correct device for electric discharge machining |
-
1985
- 1985-03-01 JP JP3869985A patent/JPS61203226A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815630A (en) * | 1981-07-20 | 1983-01-29 | Mitsubishi Electric Corp | Electrodes correct device for electric discharge machining |
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