JPS61159116A - Weighing equipment for liquid - Google Patents
Weighing equipment for liquidInfo
- Publication number
- JPS61159116A JPS61159116A JP28126784A JP28126784A JPS61159116A JP S61159116 A JPS61159116 A JP S61159116A JP 28126784 A JP28126784 A JP 28126784A JP 28126784 A JP28126784 A JP 28126784A JP S61159116 A JPS61159116 A JP S61159116A
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- Prior art keywords
- liquid
- measuring container
- measuring
- container
- vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Weight Measurement For Supplying Or Discharging Of Specified Amounts Of Material (AREA)
- Accessories For Mixers (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野1
本発明は、例えばシリコン等のウェハーの洗浄液、エツ
チング液を調製する薬液等、種々の液体の計量に供され
る計量装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a measuring device used for measuring various liquids, such as cleaning liquids for wafers such as silicon, chemicals for preparing etching liquids, and the like.
[従来技術]
例えば、シリコンウェハー等の表面処理(洗浄、エツチ
ング等)のための処理液には、アンモニア、硫酸、塩酸
等の洗浄剤と過酸化水素水等の酸化剤とを所定の比率で
混合した混合液が使用されている。このような処理液に
よって良好な処理効果を得るためには混合比を正確に調
整する必要がある。[Prior art] For example, a processing solution for surface treatment (cleaning, etching, etc.) of silicon wafers etc. contains a cleaning agent such as ammonia, sulfuric acid, hydrochloric acid, etc. and an oxidizing agent such as hydrogen peroxide solution in a predetermined ratio. A mixed solution is used. In order to obtain good processing effects with such processing liquids, it is necessary to accurately adjust the mixing ratio.
ところで、洗浄液等の調合に使用される原液には腐食性
の高いものが多いので、このような原液を汎用の流量計
によって計量する場合は、流量計材質から液中に金属イ
オン等が溶出して液が劣化を起こすという問題がある。By the way, many of the undiluted solutions used to prepare cleaning solutions are highly corrosive, so when such undiluted solutions are measured with a general-purpose flowmeter, metal ions etc. may be eluted into the solution from the flowmeter material. There is a problem that the liquid deteriorates.
又、各原液を混合する混合容器に原液を一定の流速で供
給し、供給時間を調節することにより各原液の供給量を
制御する方法もあるが、その場合は、液温(粘度)によ
って流速が変化しやすいので、正確な計量は期し難い。There is also a method of supplying each stock solution at a constant flow rate to a mixing container in which each stock solution is mixed, and controlling the supply amount of each stock solution by adjusting the supply time. Since it is easy to change, accurate measurement is difficult.
そこで、従来から原液の供給量を重量によって計量する
ことが試みられており、その−例として第3図(a)に
示す如く、台秤1と、該台秤1上に載置された計量容器
2と、送液配管3に接続される入口管4とを備え、薬液
の送給前と送給後の計量容器2の重量変化量によって送
給された薬液の重量を計量するようにしたものが知られ
ている。Therefore, attempts have been made to measure the supply amount of the stock solution by weight, and as an example, as shown in FIG. and an inlet pipe 4 connected to the liquid feeding pipe 3, and the weight of the fed chemical solution is measured by the amount of change in the weight of the measuring container 2 before and after the feeding of the chemical solution. Are known.
ところが、上記の計量装置において、薬液の送液速度が
一定であれば、第3図(b)中に仮想線で示す如く、送
液開始後、薬液が計量容器2内の貯留液5の液面に達す
る時刻T、夏以降、計量容器2の重量が直線的に増加す
る筈であるが、実際には薬液の動荷重及び落下荷重FM
が台秤1に作用するため、実線で示すように、台秤1に
よって測定される計量容器2の見かけの重量変化量が現
実の重量変化量より大きくなり、しかも重量変化量が目
標値W。に達した時点で開閉バルブ6を閉じても、既に
入口管4を離れた薬液はそのまま計量容器2内に落下す
るので、充分な計量精度が得られないという問題がある
。However, in the above-mentioned measuring device, if the feeding speed of the drug solution is constant, the drug solution will increase to the level of the stored liquid 5 in the measuring container 2 after the start of feeding, as shown by the imaginary line in FIG. 3(b). The weight of the weighing container 2 is supposed to increase linearly after summer, at time T when it reaches the surface, but in reality, the dynamic load and falling load FM of the chemical solution
acts on the platform scale 1, so that the apparent weight change of the weighing container 2 measured by the platform scale 1 becomes larger than the actual weight change, as shown by the solid line, and the weight change is equal to the target value W. Even if the opening/closing valve 6 is closed when this point is reached, the chemical liquid that has already left the inlet pipe 4 will fall directly into the measuring container 2, so there is a problem that sufficient measuring accuracy cannot be obtained.
又、第4図(a)に示す如く、密閉式の計量容器7に固
定した入口管8を、送液配管3に接続してなる計量装置
も考えられ、かかる構成は計量容器7内へのダストの混
入を防止する上で好ましい。Furthermore, as shown in FIG. 4(a), a metering device may be considered in which an inlet pipe 8 fixed to a closed type metering container 7 is connected to the liquid feeding pipe 3. This is preferable in terms of preventing dust from entering.
ところが、第4図(a)の計量装置においては、第4図
(b)に示す如く、送液開始後、薬液が液面に到達する
時刻T1以降には、薬液の噴出に伴って入口管8に加わ
る反力F^と、上記した薬液等の動荷重及び落下荷重F
Mとが平衡して一時的に重量変化量に対する影響はなく
なるが、目標値W0に達した時点で開閉バルブ6を閉じ
ても上述と同様に既に入口管8を離れた薬液が計量容器
7内に落下して薬液の供給量が増し、計量値をくるわせ
るといった問題があり、やはり良好な計量精度は得られ
ない、又、第4図(a)の計量装置においては、送液中
に台秤1の下方への変位に伴って、送液配管3から計量
容器7に大きな引張荷重が加わり、それが台秤1に負荷
重として作用して計量精度が一層低下するという問題が
ある。However, in the metering device of FIG. 4(a), as shown in FIG. 4(b), after the start of liquid feeding, after the time T1 when the chemical liquid reaches the liquid level, the inlet pipe is closed due to the jetting of the chemical liquid. The reaction force F^ applied to 8 and the dynamic load and falling load F of the above-mentioned chemical solution, etc.
M is in equilibrium and the influence on the weight change temporarily disappears, but even if the on-off valve 6 is closed when the target value W0 is reached, the chemical liquid that has already left the inlet pipe 8 will still be in the measuring container 7 as described above. There is a problem that the amount of chemical solution supplied increases when the liquid drops to the surface, causing the measured value to falsify, and good measurement accuracy cannot be obtained. With the downward displacement of the platform scale 1, a large tensile load is applied from the liquid feed pipe 3 to the measuring container 7, which acts as a load on the platform scale 1, resulting in a further decrease in measurement accuracy.
[発明の目的]
本発明は上述の問題に鑑みてなされたものであって、台
秤を使用して液体を重量によって計量するタイプの計量
装置の計量精度を向上させることを目的としている。[Object of the Invention] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to improve the measurement accuracy of a type of measuring device that uses a platform scale to measure liquid by weight.
[発明の構成]
このため、本発明では、液体の計量装置が、上部が蓋部
材によって密閉された計量容器と、固定台上に載置され
、計量容器を載置支持した台秤と、
送液配管に上流端が接続され、計量容器内に液体を上方
から流入させる入口管と、
計量容器内の液体を排出するための出口管と、計量容器
内の液体の増減にともなって空気を計量容器内に流入も
しくは排出させる手段とを備え、上記入口管は、下端が
計量容器の底部近傍に位置するように、計量容器の蓋部
材によってその中間部が固定される一方、蓋部材より上
方の部分が、計量容器の上下動に追随して伸縮可能な螺
旋管部として形成されており、該螺旋管部の上流端が固
定7レームに固定して取付けられて構成されている。な
お、上記台秤としては、例えば電磁力自動平衡形電子天
秤又は、ロードセル形天秤を使用することができる。[Structure of the Invention] Therefore, in the present invention, a liquid measuring device includes: a measuring container whose upper part is sealed by a lid member; a platform scale placed on a fixed table to support the measuring container; and a liquid feeding device. The upstream end is connected to the piping, and there is an inlet pipe that allows liquid to flow into the measuring container from above, an outlet pipe that discharges the liquid in the measuring container, and an air pipe that flows into the measuring container as the liquid in the measuring container increases or decreases. The inlet pipe has a middle portion fixed by a lid member of the measuring container such that its lower end is located near the bottom of the measuring container, and a portion above the lid member. is formed as a spiral tube section that can expand and contract following the vertical movement of the measuring container, and the upstream end of the spiral tube section is fixedly attached to seven fixed frames. Note that as the platform balance, for example, an electromagnetic force self-balancing electronic balance or a load cell type balance can be used.
[発明の効果J
本発明によると、入口管の下端が常時計量容器内の液に
浸漬されるので、薬液等の液体の落下荷重はなくなり、
又入口管の下端から噴出される液体の動荷重は、入口管
に加わる反力と常に平衡するようになる。しかも液体の
送給を停止した後に余分の液体が計量容器に供給される
ことがなくなるので、計量容器への液体の供給量を正確
に計量できるようになる。[Effect of the Invention J According to the present invention, since the lower end of the inlet pipe is constantly immersed in the liquid in the measuring container, the falling load of liquid such as medicinal solution is eliminated.
Further, the dynamic load of the liquid jetted from the lower end of the inlet pipe is always balanced with the reaction force applied to the inlet pipe. Furthermore, since excess liquid is not supplied to the measuring container after the liquid supply is stopped, the amount of liquid supplied to the measuring container can be accurately measured.
又、入口管の蓋部材より上方の部分に、計量容器内の液
体の増減に伴う台秤上での計量容器の上下動に追随して
伸縮する螺旋管部を形成するとともに、該螺旋管部の上
流端を固定フレームによりて支持したので、入口管の重
量を固定フレームで受は合うことができ、台秤の変動に
伴って計量容器が上下動しても螺旋管部の伸縮によって
上下動を吸収することができるので、計量容器に大軽な
引張荷重又は、圧縮荷重が作用するようなことはなく、
従って計量精度を一層向上させることができる。In addition, a spiral tube portion is formed in a portion above the lid member of the inlet pipe, and expands and contracts according to the vertical movement of the weighing container on the platform balance as the liquid in the weighing container increases and decreases. Since the upstream end is supported by a fixed frame, the weight of the inlet pipe can be supported by the fixed frame, and even if the weighing container moves up and down due to fluctuations in the platform scale, the vertical movement is absorbed by the expansion and contraction of the spiral tube. Therefore, there is no possibility that a large tensile load or compressive load will be applied to the measuring container.
Therefore, measurement accuracy can be further improved.
更に又、計量容器を密閉式としたので、計量容器内の液
中へのダスト等の異物の混入が防止されるようになり、
それにより計量に際して液が劣化することがなくなる。Furthermore, since the measuring container is sealed, it is possible to prevent foreign matter such as dust from entering the liquid in the measuring container.
This prevents the liquid from deteriorating during metering.
「実施例」 以下、実施例を説明する。"Example" Examples will be described below.
第1図には、シリコン等のウェハーの洗浄液を゛ 調
製するための調合装置が示されており、該装置はアンモ
ニア11を貯留する密閉式の第1貯留容器12と、該第
1貯留容器12にアンモニア11を補充する密閉式で移
動可能な第1補充容器13と、過酸化水素水を貯留する
第2貯留容器(不図示)と、第2貯留容器に過酸化水素
水を補充する第2補充容器(不図示)と、固定台19上
に載置された台秤14(電磁力自動平衡形電子天秤又は
ロードセル形天秤)上に密閉式の計量・混合容器15を
載置してなり、上記第1貯留容器12、第2貯留容器及
び純水供給口16から供給されるアンモニア11、過酸
化水素水および純水を夫々計量して混合する計量・混合
装置17と、計量・混合容器15内で調製された洗浄液
18を貯留する密閉式の第3貯留容器20とから構成さ
れている。FIG. 1 shows a compounding device for preparing a cleaning solution for wafers such as silicon. A sealed and movable first replenishment container 13 for replenishing ammonia 11, a second storage container (not shown) for storing hydrogen peroxide solution, and a second storage container for replenishing the second storage container with hydrogen peroxide solution. A replenishment container (not shown) and a closed weighing/mixing container 15 are placed on a platform scale 14 (electromagnetic force self-balancing electronic balance or load cell type balance) placed on a fixed table 19, and the above-mentioned A measuring/mixing device 17 that measures and mixes the ammonia 11, hydrogen peroxide solution, and pure water supplied from the first storage container 12, the second storage container, and the pure water supply port 16, respectively, and the inside of the measuring/mixing container 15. and a third closed storage container 20 for storing the cleaning liquid 18 prepared in the above.
なお、計量・混合容器15からウェハーの洗浄槽(不図
示)に直接洗浄液18を供給するよう、にしても良い。Note that the cleaning liquid 18 may be directly supplied from the measuring/mixing container 15 to a wafer cleaning tank (not shown).
上記第1貯留容器12には、予め設定されたアンモニア
11の液面の上限レベルL1と下限レベルL2とを検出
する検知装置21.22が設置され、アンモニア11の
液面が常時上限レベルL、と下限レベルL2との間に位
置するように、第1補充容器13から、アンモニア11
の流通状況を検出する液体検出器23を有する送液配管
24を通して、送液ポンプ25(空気駆動式のベローズ
ポンプ)によってアンモニア11が供給されるようにな
っている。該送液ポンプ25は、駆動用空気供給口26
から圧力調節器27及び圧力計28が介設された空気配
管30を通して供給される圧縮空気により駆動される。Detection devices 21 and 22 are installed in the first storage container 12 to detect the preset upper limit level L1 and lower limit level L2 of the ammonia 11 liquid level, so that the ammonia 11 liquid level is always at the upper limit level L, Ammonia 11 is supplied from the first replenishment container 13 so as to be located between the lower limit level L2 and the lower limit level L2.
Ammonia 11 is supplied by a liquid feeding pump 25 (air-driven bellows pump) through a liquid feeding pipe 24 having a liquid detector 23 for detecting the flow condition of the liquid. The liquid feeding pump 25 has a driving air supply port 26.
The pressure regulator 27 and pressure gauge 28 are driven by compressed air supplied from the air pipe 30 through an interposed air pipe 30.
又、第1貯留容器12内のアンモニア11は、圧送用が
ス供給口31から、圧力調節器32、がスフイルタ33
及び圧力計34が介設されたガス配管35を通して送給
される高圧〃ス(空気、窒素等)により、送液配管36
及び入口管37を通して計量・混合容器15に供給され
るようになっている。Further, the ammonia 11 in the first storage container 12 is fed under pressure from a gas supply port 31, a pressure regulator 32, and a gas filter 33.
A high pressure gas (air, nitrogen, etc.) is supplied through the gas pipe 35 in which the pressure gauge 34 is installed.
and is supplied to the measuring/mixing container 15 through an inlet pipe 37.
上記入口管37は、計量・混合容器15の上部を密閉す
る蓋部材38の上方に設けられた螺旋管40の下端と計
量・混合容器15内に配設された直管41の上端とを蓋
部材38に固定した管継手42で接続してなるもので、
上記螺旋管40は計量・混合容器15内の液の増減によ
る台秤14上での計量・混合容器15の上下動を吸収し
得るように、チアミン等の樹脂で伸縮可能に形成されて
いる。The inlet pipe 37 connects the lower end of a spiral pipe 40 provided above a lid member 38 that seals the upper part of the measuring/mixing container 15 and the upper end of a straight pipe 41 disposed inside the measuring/mixing container 15. It is connected by a pipe joint 42 fixed to a member 38,
The spiral tube 40 is made of a resin such as thiamin and is expandable and retractable so as to absorb vertical movement of the weighing/mixing container 15 on the platform scale 14 due to an increase or decrease in the liquid in the weighing/mixing container 15.
上記螺旋管40の長手方向の中心線は鉛直方向を向けら
れており、該螺旋管40の上端は、前記固定台19の台
秤14の両側方位置に立設した固定7レーム43.43
間に横架されたバー44上の管継手45を介して送液配
管36に接続されるとともに、螺旋管40の上、下端は
上記中心線上に位置しでいる。The longitudinal center line of the spiral tube 40 is oriented in the vertical direction, and the upper end of the spiral tube 40 is connected to seven fixed frames 43.
It is connected to the liquid feeding pipe 36 via a pipe joint 45 on a bar 44 suspended horizontally therebetween, and the upper and lower ends of the spiral pipe 40 are located on the center line.
一方、噴射ノズルを形成する直管41の下端は、常時計
量・混合容器15内の液中に浸漬されるように、計量・
混合容器15の底部ISa近傍に位置している。すなわ
ち計量・混合容器15には、入口管37の直管41の下
端より高い下限レベルL、が設定され、計量・混合容器
15内の液面レベルが下限レベルL、以下にならないよ
うに、台秤14の出力信号、つまり計量・混合容器15
の重量に基づいて、計量・混合容器15からの液の吐出
量が制限される。On the other hand, the lower end of the straight pipe 41 forming the injection nozzle is immersed in the liquid in the metering/mixing container 15 at all times.
It is located near the bottom ISa of the mixing container 15. In other words, the lower limit level L, which is higher than the lower end of the straight pipe 41 of the inlet pipe 37, is set in the weighing/mixing container 15, and the platform scale is set so that the liquid level in the weighing/mixing container 15 does not fall below the lower limit level L. 14 output signals, i.e. measuring and mixing container 15
Based on the weight of the liquid, the amount of liquid discharged from the measuring/mixing container 15 is limited.
第1貯留容器12から計量・混合容器15へのアンモニ
ア11の供給量は、アンモニア11の供給前と供給後の
計量・混合容器15の重量変化量として台秤14により
測定される1本実施例では、入口管37の直管41の下
端が常時計量・混合容器15内の液に浸漬されるので、
アンモニア11の供給時に、アンモニア11の落下荷重
はなくなり、又アンモニア11の動荷重と直管41に加
わる反力とが相殺されるので、例えばアンモニア11の
送液速度が一定であれば、計量・混合容器15の重量は
第2図に示す如く直線的に増加し、計量・混合容器15
の重量変化量が目標値W0に達した時点で送液配管36
に介設した開閉バルブ46を閉じると、計量・混合容器
15へのアンモニア11の供給は直ちに停止されるよう
になり、供給量を正確に測定することができる。In this embodiment, the amount of ammonia 11 supplied from the first storage container 12 to the weighing/mixing container 15 is measured by the platform scale 14 as the amount of change in the weight of the weighing/mixing container 15 before and after the ammonia 11 is supplied. , since the lower end of the straight pipe 41 of the inlet pipe 37 is constantly immersed in the liquid in the metering/mixing container 15,
When ammonia 11 is supplied, the falling load of ammonia 11 disappears, and the dynamic load of ammonia 11 and the reaction force applied to the straight pipe 41 cancel each other out. The weight of the mixing container 15 increases linearly as shown in FIG.
When the amount of weight change reaches the target value W0, the liquid feeding pipe 36
When the opening/closing valve 46 interposed therein is closed, the supply of ammonia 11 to the measuring/mixing container 15 is immediately stopped, and the supply amount can be accurately measured.
一方、過酸化水素水は、前記第2貯留容器から送液用配
管47及1螺旋IF48と直管49からなる入口管50
を介して、また純水は、純水供給口16から圧力調節器
51を有する純水配管52及び螺旋管53と直管54か
らなる入口管55を介して夫々計量・混合容器15に供
給され、上述と同様の方法で夫々計量されてアンモニア
11と、過酸化水素水と、純水とが所定の混合比で混合
される。上記両直管49.54の下端は、直管41と同
様、下限レベルL、より下方に位置している。On the other hand, the hydrogen peroxide solution is transferred from the second storage container to an inlet pipe 50 consisting of a liquid feeding pipe 47, a first spiral IF 48, and a straight pipe 49.
Further, pure water is supplied from the pure water supply port 16 to the measuring/mixing container 15 via a pure water pipe 52 having a pressure regulator 51 and an inlet pipe 55 consisting of a spiral pipe 53 and a straight pipe 54, respectively. , ammonia 11, hydrogen peroxide solution, and pure water are mixed at a predetermined mixing ratio, each being weighed in the same manner as described above. The lower ends of both the straight pipes 49 and 54 are located below the lower limit level L, similarly to the straight pipe 41.
上述の混合液は、直管56と螺旋管57からなる出口管
58に連続して計量・混合容器15と第3貯留容器20
とを連絡する吐出配管60の一部と、螺旋管61に接続
される復流配管62とにより形成される計量・混合容器
15を含む循環路63内で、循環・吐出ポンプ(ベロー
ズポンプ)64の吸引力と吐出力によって循環されて攪
拌され、均一な組成の洗浄液18が調製される6又、循
環中に流体フィルタ65によって洗浄液18がシ濾過さ
れて不純物が除去されると共に、熱交換器66により洗
浄液−18の液温が調整される。そして充分に攪拌、濾
過された洗浄液18が吐出配管60を通して第3貯留容
器20もしくは前述の洗浄槽に移送される。計量・混合
容器15から第3貯留容器20又は洗浄槽への洗浄i&
1日の供給量は台秤14によって計量される。The above-mentioned mixed liquid is continuously transferred to the measuring/mixing container 15 and the third storage container 20 through an outlet pipe 58 consisting of a straight pipe 56 and a spiral pipe 57.
A circulation/discharge pump (bellows pump) 64 is installed in a circulation path 63 including a metering/mixing container 15 formed by a part of a discharge pipe 60 communicating with the spiral pipe 61 and a return flow pipe 62 connected to a spiral pipe 61. The cleaning liquid 18 is circulated and stirred by the suction force and discharge force of the heat exchanger, and a cleaning liquid 18 having a uniform composition is prepared.During the circulation, the cleaning liquid 18 is filtered by a fluid filter 65 to remove impurities. 66 adjusts the temperature of the cleaning liquid 18. The thoroughly stirred and filtered cleaning liquid 18 is then transferred to the third storage container 20 or the aforementioned cleaning tank through the discharge pipe 60. Cleaning from the measuring/mixing container 15 to the third storage container 20 or cleaning tank
The daily supply amount is measured by a platform scale 14.
上記計量・混合容器15には、通気フィルタ67が介設
された給排気管68が備えられ、計量・混合容器15へ
の液の給徘に伴って計量・混合容器15に空気が供給又
は、排出されるようになっている。The measuring/mixing container 15 is equipped with a supply/exhaust pipe 68 in which a ventilation filter 67 is interposed, and air is supplied to the measuring/mixing container 15 as liquid is supplied to the measuring/mixing container 15. It is designed to be ejected.
なお、計量・混合容器15への液の給徘による台秤14
の上下変位量は、計量・混合容器15の容量にもよるが
、台秤14として電磁力自動平衡形電子天秤、ロードセ
ル形天秤のいずれを使用する場合も通常高々数−と僅か
であり(電磁力自動平衡形電子天秤は基準高さを有し、
常時この高さとなるように制御されるが、大きな荷重変
動があった場合には、平衡に達するまでに若干の変動を
繰返す、)、しかもこの上下変位に際して、各送液配管
36,47、純水配管52、吐出配管6o及び復流配管
62から計量・混合容器15に引張又は、圧縮荷重が作
用することはなく、各螺旋管40.48,53.57.
61から微弱な引張又は圧縮荷重が作用するのみである
ので、台秤14の上下変位の計量精度への影響は極めて
僅かである6なお、上記の実施例では、計量・混合装置
17によりアンモニア11と過酸化水素水と純水とを混
合してシリコンウェハーの表面の洗浄液を調合する場合
を説明したが、計量・混合装置17はシリコンウェハー
の処理液の調合に限らずその他の各種の薬液等の調合に
も使用でき、又、複数の薬液等を混合する場合のみなら
ず、単一の薬液等の計量装置としても使用しうろことは
言うまでもなり1゜In addition, the platform scale 14 by supplying liquid to the weighing/mixing container 15
Although the amount of vertical displacement depends on the capacity of the weighing/mixing container 15, it is usually only a few - at most when an electromagnetic force self-balancing type electronic balance or a load cell type balance is used as the platform scale 14 (electromagnetic force Self-balancing electronic balances have a reference height,
It is controlled to maintain this height at all times, but if there is a large load fluctuation, slight fluctuations will be repeated until equilibrium is reached. No tensile or compressive loads are applied to the measuring/mixing container 15 from the water pipe 52, the discharge pipe 6o, and the return pipe 62, and each spiral pipe 40.48, 53.57.
Since only a weak tensile or compressive load is applied from 61, the vertical displacement of platform scale 14 has very little effect on the measurement accuracy. 6 In the above embodiment, ammonia 11 and Although we have described the case where hydrogen peroxide solution and pure water are mixed to prepare a cleaning liquid for the surface of a silicon wafer, the measuring/mixing device 17 is used not only for preparing a processing liquid for silicon wafers but also for preparing various other chemical liquids. It goes without saying that it can be used for compounding, and can also be used not only when mixing multiple medicinal solutions, but also as a measuring device for a single medicinal solution.
第1図は本発明に係る計量・混合装置を備えたシリコン
ウェハーの洗浄液の調合装置の全体説明図、第2図は第
1図中の計量・混合装置における計量開始後の時間と計
量容器の重量変化量との関係を示すグラフ、#13図(
a)は第1従未例の説明図、第3図(b)は第1従来例
の第2図に対応するグラフ、第4図(a)は第2従来例
の説明図、第4図(b)は第2従未例の第2図に対応す
るグラフである。
11・・・アンモニア(液体)、 14・・・台秤、
15・・・計量容器、 15a・・・底部、 19・・
・固定台、 36,47.52・・・送液配管、
37゜50.54・・・入口管、 40,48,53・
・・螺旋管部、 43・・・固定フレーム、 58
・・・出口管、68・・・給排気管。
特 許 出 願 人 倉敷紡績株式会社代 理 人
弁理士 前出 葆 ほか2名第2図
*mFig. 1 is an overall explanatory diagram of a silicon wafer cleaning liquid preparation device equipped with a measuring/mixing device according to the present invention, and Fig. 2 shows the time after the start of measurement in the measuring/mixing device shown in Fig. 1 and the length of the measuring container. Graph showing the relationship with weight change, Figure #13 (
a) is an explanatory diagram of the first conventional example, FIG. 3(b) is a graph corresponding to FIG. 2 of the first conventional example, FIG. 4(a) is an explanatory diagram of the second conventional example, FIG. (b) is a graph corresponding to FIG. 2 of the second conventional example. 11... Ammonia (liquid), 14... Platform scale,
15...Measuring container, 15a...Bottom, 19...
・Fixing stand, 36, 47.52...Liquid delivery piping,
37°50.54...Inlet pipe, 40,48,53.
...Spiral tube part, 43...Fixed frame, 58
... Outlet pipe, 68... Supply and exhaust pipe. Patent applicant: Kurashiki Boseki Co., Ltd. Agent
Patent attorney Maeda Ao and 2 others Figure 2 *m
Claims (2)
定台上に載置され、計量容器を載置支持した台秤と、 送液配管に上流端が接続され、計量容器内に液体を上方
から流入させる入口管と、 計量容器内の液体を排出するための出口管と、計量容器
内の液体の増減にともなって空気を計量容器内に流入も
しくは排出させる手段とを備え、上記入口管は、下端が
計量容器の底部近傍に位置するように、計量容器の蓋部
材によってその中間部が固定される一方、蓋部材より上
方の部分が、計量容器の上下動に追随して伸縮可能な螺
旋管部として形成されており、該螺旋管部の上流端が固
定フレームに固定して取付けられていることを特徴とす
る液体の計量装置。(1) A measuring container whose upper part is sealed by a lid member, a platform scale placed on a fixed stand and supporting the measuring container, and a scale whose upstream end is connected to a liquid supply pipe, and which supplies liquid upward into the measuring container. An inlet pipe for allowing air to flow in from the measuring container, an outlet pipe for discharging the liquid in the measuring container, and a means for causing air to flow into or discharge from the measuring container as the liquid in the measuring container increases or decreases, and the inlet pipe is , the middle part is fixed by the lid member of the measuring container so that the lower end is located near the bottom of the measuring container, while the part above the lid member is a spiral that can expand and contract following the vertical movement of the measuring container. A liquid metering device, characterized in that it is formed as a tube section, and the upstream end of the spiral tube section is fixedly attached to a fixed frame.
セル形天秤であることを特徴とする特許請求の範囲第(
1)項記載の液体の計量装置。(2) Claim No. 1, characterized in that the platform scale is an electromagnetic force self-balancing electronic balance or a load cell type balance.
1) The liquid measuring device described in item 1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28126784A JPS61159116A (en) | 1984-12-28 | 1984-12-28 | Weighing equipment for liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28126784A JPS61159116A (en) | 1984-12-28 | 1984-12-28 | Weighing equipment for liquid |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61159116A true JPS61159116A (en) | 1986-07-18 |
JPH0423730B2 JPH0423730B2 (en) | 1992-04-23 |
Family
ID=17636688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28126784A Granted JPS61159116A (en) | 1984-12-28 | 1984-12-28 | Weighing equipment for liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61159116A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012206021A (en) * | 2011-03-30 | 2012-10-25 | Dainippon Screen Mfg Co Ltd | Coating applicator and method for coating application liquid |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5979815A (en) * | 1982-10-29 | 1984-05-09 | Toyota Motor Corp | Measuring apparatus for engine oil consumption |
-
1984
- 1984-12-28 JP JP28126784A patent/JPS61159116A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5979815A (en) * | 1982-10-29 | 1984-05-09 | Toyota Motor Corp | Measuring apparatus for engine oil consumption |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012206021A (en) * | 2011-03-30 | 2012-10-25 | Dainippon Screen Mfg Co Ltd | Coating applicator and method for coating application liquid |
Also Published As
Publication number | Publication date |
---|---|
JPH0423730B2 (en) | 1992-04-23 |
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