JPS61153174A - Coating device - Google Patents

Abstract

PURPOSE:To produce the magnetic disc of a thin film which has a smoothly coated film surface and a faultlessly coated film by providing an air supply port in order to fill the inside of a chamber with a solvent atmosphere. CONSTITUTION:In the vertical coating device of the magnetic disc, an Al substrate 1 for the magnetic disc is fitted to a spindle 2 in a vertical state and clamped by a cap 3. A magnetic paint is ejected through the nozzles 4, 5 to coat the top and under surfaces of the substrate 1. In such a stage, since the rotation of a motor 6 is transferred to the spindle 2 to rotate the substrate 1, the excess magnetic paint on the substrate 1 is flung away by the centrifugal force to form a magnetic film having the same thickness on both surfaces. In such a case, a solvent atmosphere is supplied through the air supply ports 9, 10 provided on the chamber 8 and the degassing is executed through the exhaust ports 11-14. Furthermore the solvent evaporation is performed by the steam bottles 19, 20 to send the vapor atmosphere into the chamber 8. The flying paint is removed from the discharged air and circulated to the air supply ports 9, 10 from the exhaust ports 11-14.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は磁気ディスク製造における磁性膜形成に係り、
特に磁性塗料を磁気ディスク基板の両面に同時に塗布す
ることに好適な磁気ディスクの垂直塗布装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to magnetic film formation in magnetic disk manufacturing,
In particular, the present invention relates to a magnetic disk vertical coating device suitable for simultaneously coating both sides of a magnetic disk substrate with magnetic paint.

〔発明の背景〕[Background of the invention]

垂直塗布における飛散塗料の再付着防止機構は、特開昭
５９−７Ｂ６５６号公報に記載のように環状の開口を有
する吸気口を設けることｋより、塗布表面の空気中に浮
遊する磁性塗料の粒子を吸気、排出していた。しかし、
溶剤・蒸気雰囲気の流れ（戻り）の点については配慮さ
れていなかった。The re-deposition prevention mechanism for scattered paint during vertical coating is achieved by providing an inlet with an annular opening as described in Japanese Patent Application Laid-Open No. 59-7B656. was inhaled and expelled. but,
No consideration was given to the flow (return) of the solvent/steam atmosphere.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、塗膜表面の滑らかさ及び塗膜欠陥のな
い膜の薄い磁気ディスクを製造する塗布装置を提供する
ことｋある。SUMMARY OF THE INVENTION An object of the present invention is to provide a coating apparatus for producing a thin magnetic disk with a smooth coating surface and no coating defects.

〔発明の概要〕[Summary of the invention]

磁気ディスク基板を垂直に保持して磁性塗料を塗布し、
磁性膜を形成する垂直塗布方法で問題となった飛散塗料
の再付着は環状の開口を有する吸気口を設けるととＫよ
り解決した。しかし、この塗布方法では塗膜中の溶剤が
早く蒸発し、塗膜表面が粗くなるという問題が生じた。Hold the magnetic disk substrate vertically and apply magnetic paint.
K solved the problem of redeposition of scattered paint, which was a problem with the vertical coating method for forming a magnetic film, by providing an inlet with an annular opening. However, with this coating method, a problem arose in that the solvent in the coating film evaporated quickly and the coating surface became rough.

また、一方では薄膜化の検討もますます重要となってき
ている。そのため、前記目的を達成するため、本発明は
溶剤・蒸気雰囲気をチャンバー内に供給することを特徴
とするものである。On the other hand, consideration of thinning the film is also becoming increasingly important. Therefore, in order to achieve the above object, the present invention is characterized in that a solvent/steam atmosphere is supplied into the chamber.

溶剤・蒸気雰囲気は溶剤給気口を設け、しかも、蒸発び
んｋより溶剤蒸発を行なうととによりチャンバー内への
供給が図れる。さらに、排気した空気から塗料飛散物の
樹脂、顔料を除去し、塗料飛散物中の溶剤雰囲気をチャ
ンバー内に戻すことによって、塗膜表面の滑らかさを作
リ、かつ塗膜欠陥のない膜の薄い磁気ディスクを作るこ
とができる。ここで、排気量の調整は磁気ディスク自身
の回転による空気流で行なうため、回転が早いため、溶
剤蒸発しやすくなるとそれだけ溶剤雰囲気も促進され良
好な結果になる。The solvent/vapor atmosphere can be supplied into the chamber by providing a solvent supply port and by evaporating the solvent from an evaporation bottle k. Furthermore, by removing resins and pigments from the paint splatter from the exhausted air and returning the solvent atmosphere in the paint splatter to the chamber, it is possible to create a smooth coating surface and a defect-free film. It is possible to make thin magnetic disks. Here, the displacement is adjusted by the airflow caused by the rotation of the magnetic disk itself, and since the rotation is fast, the easier the solvent evaporates, the more the solvent atmosphere is promoted, resulting in better results.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.

磁気ディスク用アルミ基板１を垂直な状態で。Aluminum substrate 1 for magnetic disk is held vertically.

スピンドル２に取り付け、キャップ５で固定する。磁性
塗料をノズル４．５から吐出させ磁気ディスク用アルミ
基板１の上面、下面に塗布する。モータ６の回転はベル
ト７の駆動を介してスピンドル２に伝達され、磁気ディ
スク用アルミ基板１を回転させるので、磁気ディスク用
アルミ基板１上の余分な磁性塗料は遠心力で振り飛ばさ
れ、両面に同じ厚みの磁性膜を形成する。Attach it to the spindle 2 and fix it with the cap 5. Magnetic paint is discharged from the nozzle 4.5 and applied to the upper and lower surfaces of the aluminum substrate 1 for magnetic disk. The rotation of the motor 6 is transmitted to the spindle 2 through the drive of the belt 7, and rotates the aluminum substrate 1 for magnetic disks, so that the excess magnetic paint on the aluminum substrate 1 for magnetic disks is shaken off by centrifugal force, and both sides are A magnetic film of the same thickness is formed on both sides.

この場合、チャンバー８に、設けた給気口９．１０から
溶剤雰囲気を供給し、排気口１１．１２＋’５ｓ１４か
らガス抜きを行なう。さらに、蒸気びん１９゜２０によ
り溶剤蒸発を行ない、チャンバー８に蒸気雰囲気を送り
こむ。そして、排気した空気から塗料飛散物の樹脂、顔
料を除去し、塗料飛散物中のガス（溶剤雰囲気）を排気
口１１　、１５　、１４から排気ダレ）１５．１６を経
てチャンバー内に設けた給気口９　、１０　Ｋ循環させ
再度チャンバー８内に戻し供給を行なう。従って、塗膜
表面の滑らかな磁気ディスクを作ることができる。さら
に、飛散塗料も磁気ディスク用アルミ基板１の上面、下
面に付着しない。In this case, a solvent atmosphere is supplied to the chamber 8 through the provided air supply port 9.10, and degassing is performed through the exhaust port 11.12+'5s14. Furthermore, the solvent is evaporated using the steam bottle 19.degree. 20, and a steam atmosphere is sent into the chamber 8. Then, the resin and pigments in the paint scattering are removed from the exhausted air, and the gas (solvent atmosphere) in the paint scattering is passed from the exhaust ports 11, 15, 14 through the exhaust sag) 15, 16 into the air supply provided in the chamber. The air is circulated through the air ports 9 and 10 K and returned to the chamber 8 for supply. Therefore, a magnetic disk with a smooth coating surface can be produced. Furthermore, the scattered paint does not adhere to the upper and lower surfaces of the magnetic disk aluminum substrate 1.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、チャンバー内を溶剤雰囲気で満たすこ
とができ、また、溶剤蒸発を行ないしかる後にチャンバ
ー内に蒸気雰囲気を送り込むことができる。しかも、排
気した空気から塗料飛散物の樹脂、顔料を除去し、塗料
飛散物中の溶剤雰囲気をチャンバー内に戻すことができ
るので、塗膜表面の滑らかさ及び塗膜欠陥のない膜の薄
い磁気ディスクを製造できる。つまり、高い品質、高い
歩留まりで磁気ディスクを生産することができる。According to the present invention, the inside of the chamber can be filled with a solvent atmosphere, and after the solvent is evaporated, a vapor atmosphere can be sent into the chamber. In addition, it is possible to remove resins and pigments from paint splatters from the exhausted air and return the solvent atmosphere in the paint splatters to the chamber, resulting in a smooth coating surface and a thin magnetic film with no defects. We can manufacture discs. In other words, magnetic disks can be produced with high quality and high yield.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例の塗布装置の側面図である。 ２・・・スピンドル、５・・・キャップ、４，５・・・
ノズル、６・・・モータ、７・・・ベルト、８・・・チ
ャンバー、９．１０・・・給気口、１１　、１２・・・
排気口Ｉ、１５．１ａ・・・排気口■、１５　、１６・
・・排気ダクト、１７・・・スピンドル支持体、１８・
・・塗料落下口、１９．２０・・・蒸発びん、。FIG. 1 is a side view of a coating device according to an embodiment of the present invention. 2...Spindle, 5...Cap, 4,5...
Nozzle, 6...Motor, 7...Belt, 8...Chamber, 9.10...Air supply port, 11, 12...
Exhaust port I, 15.1a...Exhaust port ■, 15, 16.
...Exhaust duct, 17...Spindle support, 18.
...Paint drop port, 19.20... Evaporation bottle.

Claims (1)

【特許請求の範囲】[Claims] １、チャンバー内を溶剤雰囲気で満たすために給気口を
設けたことを特徴とする塗布装置。1. A coating device characterized in that an air supply port is provided to fill the chamber with a solvent atmosphere.